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TW200622186A - Method and device for inspecting defect of transparent plate body - Google Patents

Method and device for inspecting defect of transparent plate body

Info

Publication number
TW200622186A
TW200622186A TW094137913A TW94137913A TW200622186A TW 200622186 A TW200622186 A TW 200622186A TW 094137913 A TW094137913 A TW 094137913A TW 94137913 A TW94137913 A TW 94137913A TW 200622186 A TW200622186 A TW 200622186A
Authority
TW
Taiwan
Prior art keywords
defect
plate body
transparent plate
image
candidate
Prior art date
Application number
TW094137913A
Other languages
English (en)
Other versions
TWI357490B (zh
Inventor
Yoshiyuki Sonda
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW200622186A publication Critical patent/TW200622186A/zh
Application granted granted Critical
Publication of TWI357490B publication Critical patent/TWI357490B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW094137913A 2004-11-24 2005-10-28 Method and device for inspecting defect of transparent plate body TW200622186A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004339215 2004-11-24

Publications (2)

Publication Number Publication Date
TW200622186A true TW200622186A (en) 2006-07-01
TWI357490B TWI357490B (zh) 2012-02-01

Family

ID=36497868

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094137913A TW200622186A (en) 2004-11-24 2005-10-28 Method and device for inspecting defect of transparent plate body

Country Status (6)

Country Link
US (2) US7420671B2 (zh)
EP (3) EP2166344A1 (zh)
JP (1) JP4793266B2 (zh)
KR (1) KR100897223B1 (zh)
TW (1) TW200622186A (zh)
WO (1) WO2006057125A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102081047A (zh) * 2009-11-27 2011-06-01 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
CN101819165B (zh) * 2009-02-27 2013-08-07 圣戈本玻璃法国公司 用于检测图案化基板的缺陷的方法及系统

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4626982B2 (ja) * 2005-02-10 2011-02-09 セントラル硝子株式会社 ガラス板の端面の欠陥検出装置および検出方法
KR100642500B1 (ko) * 2005-03-02 2006-11-06 (주)쎄미시스코 유리기판의 에지 결함 및 디스컬러 검사장치
DE102005050882B4 (de) * 2005-10-21 2008-04-30 Isra Vision Systems Ag System und Verfahren zur optischen Inspektion von Glasscheiben
KR101166828B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 평판표시장치용 검사장비 및 검사 방법
JP4994053B2 (ja) * 2007-02-06 2012-08-08 株式会社日立ハイテクノロジーズ 基板検査装置及び基板検査方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
DE102009009272B4 (de) * 2009-02-17 2013-02-28 Siemens Aktiengesellschaft Qualitätsprüfung für Rotorblätter einer Windenergieanlage
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
CN101988908A (zh) * 2009-07-31 2011-03-23 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
EP2459989A4 (en) * 2009-07-31 2017-03-29 Saint-Gobain Glass France Method and system for detecting and classifying defects of substrate
KR101177299B1 (ko) * 2010-01-29 2012-08-30 삼성코닝정밀소재 주식회사 평판 유리 표면 이물질 검사 장치
FR2963144B1 (fr) * 2010-07-26 2012-12-07 Vit Installation d'inspection optique de circuits electroniques
FR2963093B1 (fr) * 2010-07-26 2012-08-03 Vit Installation d'inspection optique 3d de circuits electroniques
IT1402103B1 (it) 2010-10-08 2013-08-28 Università Di Pisa Metodo e dispositivo per rilevare la posizione geometrica di un difetto in un oggetto
US8351051B2 (en) * 2010-11-25 2013-01-08 Semisysco Co., Ltd. System and method of measuring irregularity of a glass substrate
CN103250046B (zh) * 2010-12-09 2016-02-24 旭硝子株式会社 玻璃基板
KR20130140058A (ko) * 2010-12-09 2013-12-23 아사히 가라스 가부시키가이샤 유리 리본 내 결함 측정 방법 및 유리 리본 내 결함 측정 시스템
JP5796430B2 (ja) * 2011-09-15 2015-10-21 日本電気硝子株式会社 板ガラス検査装置、板ガラス検査方法、板ガラス製造装置、及び板ガラス製造方法
WO2013186686A1 (en) * 2012-06-14 2013-12-19 Koninklijke Philips N.V. Liob based skin treatment system
KR101435621B1 (ko) * 2012-11-09 2014-08-29 와이즈플래닛(주) 복수의 촬상 장치를 이용한 검사대상 위치 판단장치
TWI470210B (zh) * 2012-12-17 2015-01-21 Taiwan Power Testing Technology Co Ltd 顯示裝置之光學層件之缺陷檢測方法
US9790465B2 (en) 2013-04-30 2017-10-17 Corning Incorporated Spheroid cell culture well article and methods thereof
KR102200303B1 (ko) * 2014-08-19 2021-01-07 동우 화인켐 주식회사 광학 필름 검사 장치
SG11201703493SA (en) 2014-10-29 2017-05-30 Corning Inc Cell culture insert
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
CN105783709B (zh) * 2014-12-22 2018-09-07 昆山国显光电有限公司 二维影像检测方法及其装置
JP6499476B2 (ja) * 2015-02-27 2019-04-10 東レエンジニアリング株式会社 検査装置
CN108369194A (zh) * 2015-12-16 2018-08-03 株式会社理光 检查系统及检查方法
TWI623740B (zh) * 2016-03-31 2018-05-11 松下知識產權經營股份有限公司 檢查方法、檢查系統及製造方法
CN107884318B (zh) * 2016-09-30 2020-04-10 上海微电子装备（集团）股份有限公司 一种平板颗粒度检测方法
US10887500B2 (en) * 2017-01-24 2021-01-05 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Optical inspection system
US10144356B2 (en) 2017-03-24 2018-12-04 Ford Global Technologies, Llc Condensation detection for vehicle surfaces via light transmitters and receivers
TW201842327A (zh) * 2017-04-14 2018-12-01 韓商康寧精密素材股份有限公司 蓋玻璃檢查裝置
US20190096057A1 (en) 2017-05-11 2019-03-28 Jacob Nathaniel Allen Object inspection system and method for inspecting an object
CN107255641B (zh) * 2017-06-06 2019-11-22 西安理工大学 一种针对自聚焦透镜表面缺陷进行机器视觉检测的方法
KR102452065B1 (ko) * 2017-07-07 2022-10-11 삼성전자 주식회사 카메라의 외부 이물질 흡착 정보를 제공하기 위한 전자 장치 및 방법
JP2019015706A (ja) * 2017-07-11 2019-01-31 ソニーセミコンダクタソリューションズ株式会社 撮像装置及びモニタリング装置
US11584906B2 (en) 2017-07-14 2023-02-21 Corning Incorporated Cell culture vessel for 3D culture and methods of culturing 3D cells
JP7245222B2 (ja) 2017-07-14 2023-03-23 コーニング インコーポレイテッド 手動又は自動で培地を交換するための３ｄ細胞培養容器
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
CN107462585B (zh) * 2017-08-10 2021-01-29 武汉华星光电技术有限公司 自动光学检查机及玻璃基板的缺陷检查方法
US10053059B1 (en) 2017-10-04 2018-08-21 Ford Global Technologies, Llc Detection and identification of opaqueness of vehicle windows
CN107764834B (zh) * 2017-12-07 2024-06-11 南京波长光电科技股份有限公司 一种自动检测透明零件表面缺陷的装置及其检测方法
JP6981352B2 (ja) * 2018-04-20 2021-12-15 オムロン株式会社 検査管理システム、検査管理装置及び検査管理方法
CN108362713A (zh) * 2018-05-11 2018-08-03 中科慧远视觉技术（洛阳）有限公司 一种光学检测成像系统
KR102181637B1 (ko) * 2018-05-24 2020-11-23 (주)쎄미시스코 검사 대상물 에지 결함 검사 시스템 및 그 방법
KR102251936B1 (ko) * 2018-05-24 2021-05-14 (주)쎄미시스코 챔버에서의 결함 검사 시스템 및 그 방법
WO2020013851A1 (en) 2018-07-13 2020-01-16 Corning Incorporated Fluidic devices including microplates with interconnected wells
CN111051493B (zh) 2018-07-13 2023-11-03 康宁股份有限公司 具有稳定器装置的细胞培养容器
US11912968B2 (en) 2018-07-13 2024-02-27 Corning Incorporated Microcavity dishes with sidewall including liquid medium delivery surface
KR102632169B1 (ko) * 2018-11-12 2024-02-02 삼성디스플레이 주식회사 유리기판 검사 장치 및 방법
CN113614047B (zh) 2019-02-06 2023-09-19 康宁公司 处理粘性带的方法
US10767977B1 (en) * 2019-02-28 2020-09-08 Lumina Instruments Inc. Scattered radiation defect depth detection
IT201900005568A1 (it) * 2019-04-10 2020-10-10 Deltamax Automazione S R L Metodo per l’identificazione di difetti di lastre trasparenti e relativo sistema
JP7358937B2 (ja) * 2019-11-25 2023-10-11 株式会社Ihi 異物検出装置および異物検出方法
CN111307824B (zh) * 2020-04-08 2023-03-21 山东交通学院 木质板材表面凹坑缺陷检测装置
MX2022016172A (es) 2020-06-17 2023-04-24 Inovision Software Solutions Inc Sistema y metodo para la reparacion de defectos.
JP2023537498A (ja) * 2020-08-04 2023-09-01 コーニング インコーポレイテッド 材料を検査する方法及び装置
CN112986258B (zh) * 2021-02-09 2023-12-22 厦门威芯泰科技有限公司 一种表面缺陷检测装置和判断表面缺陷所在表面的方法
CN113484333B (zh) * 2021-09-08 2021-12-14 苏州高视半导体技术有限公司 多层结构屏幕的异物缺陷区分方法、电子设备及存储介质
CN114113135A (zh) * 2021-10-29 2022-03-01 北京兆维科技开发有限公司 一种区分玻璃盖板上下表面异物缺陷的方法
TWI785912B (zh) * 2021-12-01 2022-12-01 開必拓數據股份有限公司 箔狀物之表面檢驗系統
CN114088740B (zh) * 2022-01-24 2022-04-29 武汉精立电子技术有限公司 一种确定透明体表面缺陷所在层面的方法及系统

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944578B2 (ja) * 1975-07-24 1984-10-30 コニカ株式会社 透明な被検査物の欠陥検出方法
JPS58154220A (ja) 1982-03-10 1983-09-13 日立コンデンサ株式会社 固体電解コンデンサの製造方法
JPS58154229A (ja) * 1982-03-10 1983-09-13 Toshiba Corp マスク基板両面検査装置
DE3418283A1 (de) 1984-05-17 1985-12-12 Schott Glaswerke, 6500 Mainz Verfahren zum nachweis von fehlstellen in transparenten materialien
DE3800053A1 (de) 1988-01-04 1989-07-13 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
DE3926349A1 (de) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
JPH08193955A (ja) * 1995-01-18 1996-07-30 Nippon Electric Glass Co Ltd 板ガラスの欠点検査方法
JP3436326B2 (ja) 1995-01-31 2003-08-11 旭硝子株式会社 透明板状体の欠点検査方法及び装置
JP3480176B2 (ja) * 1996-03-18 2003-12-15 日立電子エンジニアリング株式会社 ガラス基板の表裏欠陥識別方法
JPH10267858A (ja) * 1997-03-25 1998-10-09 Hitachi Electron Eng Co Ltd ガラス基板の欠陥の良否判定方法
JP3329233B2 (ja) 1997-06-09 2002-09-30 旭硝子株式会社 板状透明体の欠陥検査方法及びその装置
JP3859859B2 (ja) 1998-03-18 2006-12-20 セントラル硝子株式会社 透明板状体の欠陥検出方法および装置
US6618136B1 (en) * 1998-09-07 2003-09-09 Minolta Co., Ltd. Method and apparatus for visually inspecting transparent body and translucent body
JP2002139454A (ja) 2000-11-01 2002-05-17 Zenic Inc 欠点検査装置および欠点検査方法
JP2003042967A (ja) * 2001-07-27 2003-02-13 Hitachi Ltd パターン欠陥検査装置
JP2003075367A (ja) * 2001-09-07 2003-03-12 Central Glass Co Ltd 透明板状体の欠点検出装置
KR20030060243A (ko) * 2002-01-07 2003-07-16 엘지전자 주식회사 평판 디스플레이 자동 검사장치
KR20030096780A (ko) * 2002-06-17 2003-12-31 한국전기초자 주식회사 유리의 결함 검사장치 및 그 방법
JP2004233338A (ja) * 2003-01-08 2004-08-19 Tdk Corp 円盤状基板の欠陥検出方法、その装置及び光ディスク用基板の製造方法
JP2005156516A (ja) * 2003-11-05 2005-06-16 Hitachi Ltd パターン欠陥検査方法及びその装置
US7199386B2 (en) * 2004-07-29 2007-04-03 General Electric Company System and method for detecting defects in a light-management film
JP2006071284A (ja) * 2004-08-31 2006-03-16 Central Glass Co Ltd ガラス基板欠陥の表裏識別方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101819165B (zh) * 2009-02-27 2013-08-07 圣戈本玻璃法国公司 用于检测图案化基板的缺陷的方法及系统
CN102081047A (zh) * 2009-11-27 2011-06-01 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
CN102081047B (zh) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统

Also Published As

Publication number Publication date
US7796248B2 (en) 2010-09-14
EP2161567A1 (en) 2010-03-10
KR100897223B1 (ko) 2009-05-14
KR20070084169A (ko) 2007-08-24
US7420671B2 (en) 2008-09-02
EP1816466A4 (en) 2009-11-11
US20070216897A1 (en) 2007-09-20
JP4793266B2 (ja) 2011-10-12
EP1816466A1 (en) 2007-08-08
EP1816466B1 (en) 2010-06-23
EP2166344A1 (en) 2010-03-24
JPWO2006057125A1 (ja) 2008-06-05
WO2006057125A1 (ja) 2006-06-01
TWI357490B (zh) 2012-02-01
US20080278718A1 (en) 2008-11-13

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