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TW200619399A - Ag-based reflection film and method for preparing the same - Google Patents

Ag-based reflection film and method for preparing the same

Info

Publication number
TW200619399A
TW200619399A TW094132893A TW94132893A TW200619399A TW 200619399 A TW200619399 A TW 200619399A TW 094132893 A TW094132893 A TW 094132893A TW 94132893 A TW94132893 A TW 94132893A TW 200619399 A TW200619399 A TW 200619399A
Authority
TW
Taiwan
Prior art keywords
film
preparing
same
reflection film
based reflection
Prior art date
Application number
TW094132893A
Other languages
English (en)
Inventor
Sadayuki Ukishima
Satoru Ishibashi
Shigeru Saitou
Poong Kim
Original Assignee
Ulvac Inc
Ulvac Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Ulvac Materials Inc filed Critical Ulvac Inc
Publication of TW200619399A publication Critical patent/TW200619399A/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3605—Coatings of the type glass/metal/inorganic compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3647—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer in combination with other metals, silver being more than 50%
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Chemical Vapour Deposition (AREA)
TW094132893A 2004-09-30 2005-09-22 Ag-based reflection film and method for preparing the same TW200619399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004286141A JP2006098856A (ja) 2004-09-30 2004-09-30 Ａｇ系反射膜およびその作製方法

Publications (1)

Publication Number Publication Date
TW200619399A true TW200619399A (en) 2006-06-16

Family

ID=36099553

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132893A TW200619399A (en) 2004-09-30 2005-09-22 Ag-based reflection film and method for preparing the same

Country Status (5)

Country Link
US (1) US20060068227A1 (zh)
JP (1) JP2006098856A (zh)
KR (1) KR20060051658A (zh)
CN (1) CN1818136A (zh)
TW (1) TW200619399A (zh)

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WO2008035617A1 (fr) * 2006-09-21 2008-03-27 Kabushiki Kaisha Kobe Seiko Sho FILM MINCE D'ALLIAGE Ag ET CIBLE DE PULVÉRISATION D'ALLIAGE Ag POUR LA FORMATION DU FILM MINCE D'ALLIAGE Ag
JP4176136B2 (ja) * 2006-09-21 2008-11-05 株式会社神戸製鋼所 Ａｇ合金薄膜
US8367200B2 (en) * 2007-01-11 2013-02-05 Kobe Steel, Ltd. Reflecting film excellent in cohesion resistance and sulfur resistance
EP2161495A4 (en) * 2007-06-28 2014-06-25 Sharp Kk REAR LIGHTING DEVICE, LIQUID CRYSTAL DISPLAY DEVICE AND LIGHTING DEVICE
US8399100B2 (en) 2007-09-25 2013-03-19 Kobe Steel, Ltd. Reflection film, reflection film laminate, LED, organic EL display, and organic EL illuminating instrument
KR101153435B1 (ko) 2008-06-17 2012-06-07 가부시키가이샤 아루박 태양전지 및 그 제조 방법
CN101474902B (zh) * 2009-01-16 2011-10-05 中山市万丰胶粘电子有限公司 一种隔热薄膜
JPWO2011024740A1 (ja) * 2009-08-27 2013-01-31 独立行政法人産業技術総合研究所 耐熱性銀合金光反射材を具備する光反射体
JP5719179B2 (ja) * 2010-01-25 2015-05-13 株式会社神戸製鋼所 反射膜積層体
JP2011164552A (ja) * 2010-02-15 2011-08-25 Osaka Univ 電子部品、電子回路装置、および電子部品の製造方法
JP2012042584A (ja) * 2010-08-17 2012-03-01 Seiko Epson Corp 光フィルター、光フィルターモジュール、分光測定器および光機器
DE102011012044B4 (de) * 2011-02-22 2015-09-17 Von Ardenne Gmbh Verfahren zur Herstellung eines Reflexionsschichtsystems
KR101677827B1 (ko) * 2012-06-06 2016-11-18 샤프 가부시키가이샤 형 기재, 형 기재의 제조 방법, 형의 제조 방법 및 형
JP2014044233A (ja) * 2012-08-24 2014-03-13 Kobe Steel Ltd フラットパネルディスプレイの半透過電極用Ａｌ合金膜、およびフラットパネルディスプレイ用半透過電極
WO2014112481A1 (ja) 2013-01-16 2014-07-24 日東電工株式会社 透明導電フィルムおよびその製造方法
JP6215062B2 (ja) 2013-01-16 2017-10-18 日東電工株式会社 透明導電フィルムの製造方法
JP6261987B2 (ja) 2013-01-16 2018-01-17 日東電工株式会社 透明導電フィルムおよびその製造方法
JP6261988B2 (ja) * 2013-01-16 2018-01-17 日東電工株式会社 透明導電フィルムおよびその製造方法
TWI628516B (zh) * 2013-03-15 2018-07-01 分子壓模公司 採用具有金屬或氧化物塗層之可重複使用聚合物模板的奈米壓印技術
JP6340608B2 (ja) * 2014-06-17 2018-06-13 岡本硝子株式会社 高耐久性銀ミラー
JP6574714B2 (ja) * 2016-01-25 2019-09-11 株式会社コベルコ科研 配線構造およびスパッタリングターゲット
JP6776931B2 (ja) 2016-03-23 2020-10-28 三菱マテリアル株式会社 積層反射電極膜、積層反射電極パターン、積層反射電極パターンの製造方法
WO2017164211A1 (ja) 2016-03-23 2017-09-28 三菱マテリアル株式会社 積層反射電極膜、積層反射電極パターン、積層反射電極パターンの製造方法
US20180059290A1 (en) * 2016-08-23 2018-03-01 Freescale Semiconductor, Inc. Aluminum nitride protection of silver apparatus, system and method
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Also Published As

Publication number Publication date
KR20060051658A (ko) 2006-05-19
JP2006098856A (ja) 2006-04-13
US20060068227A1 (en) 2006-03-30
CN1818136A (zh) 2006-08-16

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