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TW200506316A - Displacement gauge and displacement measuring method - Google Patents

Displacement gauge and displacement measuring method

Info

Publication number
TW200506316A
TW200506316A TW093107503A TW93107503A TW200506316A TW 200506316 A TW200506316 A TW 200506316A TW 093107503 A TW093107503 A TW 093107503A TW 93107503 A TW93107503 A TW 93107503A TW 200506316 A TW200506316 A TW 200506316A
Authority
TW
Taiwan
Prior art keywords
objective lens
displacement
detecting
optical axis
axis direction
Prior art date
Application number
TW093107503A
Other languages
English (en)
Other versions
TWI292814B (zh
Inventor
Yuji Akishiba
Original Assignee
Keyence Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence Co Ltd filed Critical Keyence Co Ltd
Publication of TW200506316A publication Critical patent/TW200506316A/zh
Application granted granted Critical
Publication of TWI292814B publication Critical patent/TWI292814B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
TW093107503A 2003-03-20 2004-03-19 Displacement gauge and displacement measuring method TW200506316A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003079122A JP4209709B2 (ja) 2003-03-20 2003-03-20 変位計

Publications (2)

Publication Number Publication Date
TW200506316A true TW200506316A (en) 2005-02-16
TWI292814B TWI292814B (zh) 2008-01-21

Family

ID=33293332

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093107503A TW200506316A (en) 2003-03-20 2004-03-19 Displacement gauge and displacement measuring method

Country Status (5)

Country Link
US (1) US7242485B2 (zh)
JP (1) JP4209709B2 (zh)
KR (1) KR100890986B1 (zh)
CN (1) CN100401013C (zh)
TW (1) TW200506316A (zh)

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CN103592454B (zh) * 2013-11-20 2016-07-06 沈阳工业大学 光栅速度测量方法及装置
JP6335495B2 (ja) * 2013-12-09 2018-05-30 パナソニック デバイスＳｕｎｘ株式会社 変位センサ
JP2015125177A (ja) 2013-12-25 2015-07-06 ソニー株式会社 顕微鏡システムおよびその画像データ転送方法
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TWI563240B (en) * 2015-08-06 2016-12-21 Optical inspection apparatus
JP6588278B2 (ja) * 2015-09-01 2019-10-09 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法
KR20180099673A (ko) 2015-12-25 2018-09-05 가부시키가이샤 키엔스 공초점 변위계
JP6600292B2 (ja) * 2016-11-28 2019-10-30 アンリツ株式会社 端面検査装置とその合焦画像データ取得方法
US10341550B2 (en) 2016-11-28 2019-07-02 Anritsu Corporation End face inspection apparatus and focused image data acquisition method
JP7143057B2 (ja) 2016-12-28 2022-09-28 株式会社キーエンス 三次元測定装置
JP6829992B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP6859098B2 (ja) 2016-12-28 2021-04-14 株式会社キーエンス 光走査高さ測定装置
JP6829993B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
CN108663353B (zh) 2017-03-31 2020-10-30 苏州星帆华镭光电科技有限公司 振动光路组件及具有该组件的激光诱导击穿光谱仪
JP6380622B2 (ja) * 2017-07-05 2018-08-29 ソニー株式会社 制御装置および制御方法
CN109211130B (zh) * 2018-09-18 2020-03-31 昆明北方红外技术股份有限公司 透镜中心厚度及透镜间隔的测量装置及方法
JP7219058B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
JP7219057B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
JP7219059B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
CN109974832B (zh) * 2019-04-03 2021-04-02 浙江华章科技有限公司 一种高速摇振系统振幅的算法

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Also Published As

Publication number Publication date
US20050030553A1 (en) 2005-02-10
KR20040083012A (ko) 2004-09-30
JP4209709B2 (ja) 2009-01-14
CN1550754A (zh) 2004-12-01
CN100401013C (zh) 2008-07-09
JP2004286598A (ja) 2004-10-14
US7242485B2 (en) 2007-07-10
TWI292814B (zh) 2008-01-21
KR100890986B1 (ko) 2009-03-27

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees