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TWI563240B - Optical inspection apparatus - Google Patents

Optical inspection apparatus

Info

Publication number
TWI563240B
TWI563240B TW104125636A TW104125636A TWI563240B TW I563240 B TWI563240 B TW I563240B TW 104125636 A TW104125636 A TW 104125636A TW 104125636 A TW104125636 A TW 104125636A TW I563240 B TWI563240 B TW I563240B
Authority
TW
Taiwan
Prior art keywords
inspection apparatus
optical inspection
optical
inspection
Prior art date
Application number
TW104125636A
Other languages
Chinese (zh)
Other versions
TW201706558A (en
Inventor
Shu Hao Lioa
Yasunori Koyama
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW104125636A priority Critical patent/TWI563240B/en
Application granted granted Critical
Publication of TWI563240B publication Critical patent/TWI563240B/en
Publication of TW201706558A publication Critical patent/TW201706558A/en

Links

TW104125636A 2015-08-06 2015-08-06 Optical inspection apparatus TWI563240B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104125636A TWI563240B (en) 2015-08-06 2015-08-06 Optical inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104125636A TWI563240B (en) 2015-08-06 2015-08-06 Optical inspection apparatus

Publications (2)

Publication Number Publication Date
TWI563240B true TWI563240B (en) 2016-12-21
TW201706558A TW201706558A (en) 2017-02-16

Family

ID=58227440

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104125636A TWI563240B (en) 2015-08-06 2015-08-06 Optical inspection apparatus

Country Status (1)

Country Link
TW (1) TWI563240B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634309B (en) * 2017-05-12 2018-09-01 翊鼎光電股份有限公司 Optical inspection apparatus

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010006419A1 (en) * 1999-12-27 2001-07-05 Klaus Hallmeyer Optical measurement arrangement and method for inclination measurement
CN1550754A (en) * 2003-03-20 2004-12-01 株式会社其恩斯 Displacement meter and displacement measuring method
TWI274139B (en) * 2006-03-14 2007-02-21 Univ Nat Formosa Optical measurement unit for real-time measuring angular error of platform and the method thereof
TWM387986U (en) * 2010-04-30 2010-09-01 Univ Nat Taiwan Optical angular measuring apparatus
CN102575926A (en) * 2009-09-10 2012-07-11 卡尔蔡司股份公司 Devices and methods for determining positions and measuring surfaces
TWI438393B (en) * 2011-12-14 2014-05-21 Zygo Corp Non-contact surface characterization using modulated illumination
TWM490574U (en) * 2012-06-19 2014-11-21 Ardic Instr Co Vibrometer
WO2015087575A1 (en) * 2013-12-09 2015-06-18 パナソニック デバイスＳｕｎｘ株式会社 Displacement sensor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010006419A1 (en) * 1999-12-27 2001-07-05 Klaus Hallmeyer Optical measurement arrangement and method for inclination measurement
CN1550754A (en) * 2003-03-20 2004-12-01 株式会社其恩斯 Displacement meter and displacement measuring method
TWI274139B (en) * 2006-03-14 2007-02-21 Univ Nat Formosa Optical measurement unit for real-time measuring angular error of platform and the method thereof
CN102575926A (en) * 2009-09-10 2012-07-11 卡尔蔡司股份公司 Devices and methods for determining positions and measuring surfaces
TWM387986U (en) * 2010-04-30 2010-09-01 Univ Nat Taiwan Optical angular measuring apparatus
TWI438393B (en) * 2011-12-14 2014-05-21 Zygo Corp Non-contact surface characterization using modulated illumination
TWM490574U (en) * 2012-06-19 2014-11-21 Ardic Instr Co Vibrometer
WO2015087575A1 (en) * 2013-12-09 2015-06-18 パナソニック デバイスＳｕｎｘ株式会社 Displacement sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634309B (en) * 2017-05-12 2018-09-01 翊鼎光電股份有限公司 Optical inspection apparatus

Also Published As

Publication number Publication date
TW201706558A (en) 2017-02-16

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