SG11201505900XA - Polishing pad - Google Patents
Polishing padInfo
- Publication number
- SG11201505900XA SG11201505900XA SG11201505900XA SG11201505900XA SG11201505900XA SG 11201505900X A SG11201505900X A SG 11201505900XA SG 11201505900X A SG11201505900X A SG 11201505900XA SG 11201505900X A SG11201505900X A SG 11201505900XA SG 11201505900X A SG11201505900X A SG 11201505900XA
- Authority
- SG
- Singapore
- Prior art keywords
- polishing pad
- polishing
- pad
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
- B24D11/003—Manufacture of flexible abrasive materials without embedded abrasive particles
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/10—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step
- C08G18/12—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step using two or more compounds having active hydrogen in the first polymerisation step
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/30—Low-molecular-weight compounds
- C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
- C08G18/3203—Polyhydroxy compounds
- C08G18/3206—Polyhydroxy compounds aliphatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
- C08G18/4804—Two or more polyethers of different physical or chemical nature
- C08G18/4808—Mixtures of two or more polyetherdiols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
- C08G18/4854—Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/721—Two or more polyisocyanates not provided for in one single group C08G18/73 - C08G18/80
- C08G18/724—Combination of aromatic polyisocyanates with (cyclo)aliphatic polyisocyanates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/04—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof using blowing gases generated by a previously added blowing agent
- C08J9/12—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof using blowing gases generated by a previously added blowing agent by a physical blowing agent
- C08J9/122—Hydrogen, oxygen, CO2, nitrogen or noble gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2101/00—Manufacture of cellular products
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2201/00—Foams characterised by the foaming process
- C08J2201/02—Foams characterised by the foaming process characterised by mechanical pre- or post-treatments
- C08J2201/026—Crosslinking before of after foaming
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2205/00—Foams characterised by their properties
- C08J2205/04—Foams characterised by their properties characterised by the foam pores
- C08J2205/044—Micropores, i.e. average diameter being between 0,1 micrometer and 0,1 millimeter
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2375/00—Characterised by the use of polyureas or polyurethanes; Derivatives of such polymers
- C08J2375/04—Polyurethanes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Polyurethanes Or Polyureas (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013014623A JP5661129B2 (en) | 2013-01-29 | 2013-01-29 | Polishing pad |
PCT/JP2014/050577 WO2014119367A1 (en) | 2013-01-29 | 2014-01-15 | Polishing pad |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201505900XA true SG11201505900XA (en) | 2015-08-28 |
Family
ID=51262081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201505900XA SG11201505900XA (en) | 2013-01-29 | 2014-01-15 | Polishing pad |
Country Status (7)
Country | Link |
---|---|
US (1) | US9539693B2 (en) |
JP (1) | JP5661129B2 (en) |
KR (1) | KR20150081350A (en) |
CN (1) | CN104955614A (en) |
SG (1) | SG11201505900XA (en) |
TW (1) | TWI492817B (en) |
WO (1) | WO2014119367A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2019143747A (en) * | 2017-06-08 | 2021-07-09 | Априкот Гмбх | SILICONE TAMPON WITH ACTIVE SUBSTANCES FOR SKIN CARE AND AGING |
JP6968651B2 (en) * | 2017-10-12 | 2021-11-17 | 富士紡ホールディングス株式会社 | Polishing pad and its manufacturing method |
JP7259311B2 (en) * | 2017-12-26 | 2023-04-18 | Dic株式会社 | Polishing pad and urethane resin composition for polishing pad |
KR102423956B1 (en) * | 2020-09-07 | 2022-07-21 | 에스케이씨솔믹스 주식회사 | Polishing pad, manufacturing method thereof and preparing method of semiconductor device using the same |
KR102420673B1 (en) * | 2020-09-29 | 2022-07-13 | 에스케이씨솔믹스 주식회사 | Polishing pad, manufacturing method thereof and preparing method of semiconductor device using the same |
CN118530429B (en) * | 2024-07-25 | 2024-12-13 | 山东一诺威新材料有限公司 | High-temperature-resistant hydrolysis-resistant polyurethane polishing wheel and preparation method thereof |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000072844A (en) | 1998-06-17 | 2000-03-07 | Mitsubishi Chemicals Corp | Polyurethane elastomer composition for casting and its molded article |
JP2000017252A (en) | 1998-06-29 | 2000-01-18 | Dainippon Ink & Chem Inc | Abrasive composition and its abrasive |
JP3359629B1 (en) | 2001-04-09 | 2002-12-24 | 東洋紡績株式会社 | Polishing pad made of polyurethane composition |
KR100877388B1 (en) | 2001-11-13 | 2009-01-07 | 도요 고무 고교 가부시키가이샤 | Polishing pads and manufacturing method thereof |
US7097549B2 (en) * | 2001-12-20 | 2006-08-29 | Ppg Industries Ohio, Inc. | Polishing pad |
US20060089093A1 (en) * | 2004-10-27 | 2006-04-27 | Swisher Robert G | Polyurethane urea polishing pad |
JP4884725B2 (en) | 2005-08-30 | 2012-02-29 | 東洋ゴム工業株式会社 | Polishing pad |
JP5008927B2 (en) * | 2006-08-31 | 2012-08-22 | 東洋ゴム工業株式会社 | Polishing pad |
JP2008221367A (en) * | 2007-03-09 | 2008-09-25 | Toyo Tire & Rubber Co Ltd | Polishing pad |
JP5078000B2 (en) * | 2007-03-28 | 2012-11-21 | 東洋ゴム工業株式会社 | Polishing pad |
TWI461451B (en) * | 2008-09-30 | 2014-11-21 | Dainippon Ink & Chemicals | Polyurethane resin composition for polishing pads, polyurethane polishing pads and method for making polyurethane polishing pads |
JP5356098B2 (en) | 2009-04-03 | 2013-12-04 | 東洋ゴム工業株式会社 | Polishing pad and manufacturing method thereof |
JP4636347B1 (en) * | 2009-06-29 | 2011-02-23 | Dic株式会社 | Two-component urethane resin composition for polishing pad, polyurethane polishing pad, and method for producing polyurethane polishing pad |
-
2013
- 2013-01-29 JP JP2013014623A patent/JP5661129B2/en not_active Expired - Fee Related
-
2014
- 2014-01-15 KR KR1020157014799A patent/KR20150081350A/en not_active Application Discontinuation
- 2014-01-15 WO PCT/JP2014/050577 patent/WO2014119367A1/en active Application Filing
- 2014-01-15 SG SG11201505900XA patent/SG11201505900XA/en unknown
- 2014-01-15 CN CN201480005111.XA patent/CN104955614A/en active Pending
- 2014-01-15 US US14/761,292 patent/US9539693B2/en not_active Expired - Fee Related
- 2014-01-22 TW TW103102291A patent/TWI492817B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201440955A (en) | 2014-11-01 |
KR20150081350A (en) | 2015-07-13 |
US20150360341A1 (en) | 2015-12-17 |
JP2014144507A (en) | 2014-08-14 |
JP5661129B2 (en) | 2015-01-28 |
TWI492817B (en) | 2015-07-21 |
CN104955614A (en) | 2015-09-30 |
WO2014119367A1 (en) | 2014-08-07 |
US9539693B2 (en) | 2017-01-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG11201600242PA (en) | Low density polishing pad | |
SG11201602207QA (en) | Multi-layered polishing pads | |
EP2945521A4 (en) | Cleaning pad | |
HK1198889A1 (en) | Grinder | |
TWI561618B (en) | Polishing component | |
SG11201508452VA (en) | Low surface roughness polishing pad | |
SG10201406355RA (en) | Polishing method | |
PT2983866T (en) | Grinding body | |
SG10201407984XA (en) | Polishing apparatus | |
SG11201601941SA (en) | Polishing composition | |
SG11201601847WA (en) | Polishing composition | |
SG11201707842PA (en) | Polishing pad | |
SG10201407798XA (en) | Polishing apparatus | |
AU351637S (en) | Pad arrangement | |
SG11201503597PA (en) | Multilayer polishing pad | |
SG11201505900XA (en) | Polishing pad | |
AU354694S (en) | Surface treatment pad | |
SG11201505490RA (en) | Surface selective polishing compositions | |
SG10201403993VA (en) | Polishing apparatus | |
AU351636S (en) | Pad arrangement | |
AU351634S (en) | Pad arrangement | |
SG11201505923QA (en) | Polishing pad | |
AU351664S (en) | Pad arrangement | |
GB2516844B (en) | Kneeling pad | |
GB201319214D0 (en) | +Pad |