SE422631B - Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material - Google Patents

Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material

Info

Publication number: SE422631B
Authority: SE; Sweden
Prior art keywords: overview; photo; substance; elements including; developable
Prior art date: 1973-10-25

Application number

SE7412818A

Other languages

English (en)

Swedish (sv)

Other versions

SE7412818L (xx

Inventor

M Gulla

C W Christensen

M J Oddi

Original Assignee

Shipley Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-10-25

Filing date

1974-10-11

Publication date

1982-03-15

1974-10-11 Application filed by Shipley Co filed Critical Shipley Co

1975-04-28 Publication of SE7412818L publication Critical patent/SE7412818L/xx

1982-03-15 Publication of SE422631B publication Critical patent/SE422631B/xx

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0577—Double layer of resist having the same pattern
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0585—Second resist used as mask for selective stripping of first resist

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Microelectronics & Electronic Packaging (AREA)
Structural Engineering (AREA)
Manufacturing & Machinery (AREA)
Architecture (AREA)
Manufacturing Of Printed Circuit Boards (AREA)
Photosensitive Polymer And Photoresist Processing (AREA)
ing And Chemical Polishing (AREA)
Application Of Or Painting With Fluid Materials (AREA)
Materials For Photolithography (AREA)
Non-Metallic Protective Coatings For Printed Circuits (AREA)

SE7412818A 1973-10-25 1974-10-11 Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material SE422631B (sv)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US40964673A	1973-10-25	1973-10-25

Publications (2)

Publication Number	Publication Date
SE7412818L SE7412818L (xx)	1975-04-28
SE422631B true SE422631B (sv)	1982-03-15

Family

ID=23621393

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE7412818A SE422631B (sv)	1973-10-25	1974-10-11	Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material

Country Status (13)

Country	Link
JP (1)	JPS5529426B2 (xx)
AU (1)	AU466665B2 (xx)
BE (1)	BE821421A (xx)
BR (1)	BR7408768D0 (xx)
CA (1)	CA1051707A (xx)
DE (1)	DE2450380C2 (xx)
ES (2)	ES431310A1 (xx)
FR (1)	FR2249364B1 (xx)
GB (2)	GB1493834A (xx)
IT (1)	IT1025144B (xx)
NL (1)	NL7413916A (xx)
SE (1)	SE422631B (xx)
ZA (1)	ZA746683B (xx)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4191572A (en)	1975-06-03	1980-03-04	E. I. Du Pont De Nemours And Company	Process for image reproduction using multilayer photosensitive element with solvent-soluble layer
US4316951A (en)	1975-06-03	1982-02-23	E. I. Du Pont De Nemours And Company	Multilayer photosensitive element with solvent-soluble layer
DE2660951C2 (de) *	1975-06-03	1986-08-07	E.I. Du Pont De Nemours And Co., Wilmington, Del.	Lichtempfindliches Mehrschichtmaterial
US4311784A (en)	1978-05-09	1982-01-19	E. I. Du Pont De Nemours And Company	Multilayer photosensitive solvent-processable litho element
WO1980001321A1 (en) *	1978-12-25	1980-06-26	N Smirnova	Dry film photoresist
US4357416A (en)	1980-04-21	1982-11-02	E. I. Du Pont De Nemours And Company	Process for preparation of multilayer photosensitive solvent-processable litho element
DE3036710A1 (de) *	1980-09-29	1982-05-13	Siemens AG, 1000 Berlin und 8000 München	Verfahren zur erzeugung von photolackstrukuren
DE3377597D1 (en) *	1982-04-12	1988-09-08	Nippon Telegraph & Telephone	Method for forming micropattern
US4756988A (en) *	1982-09-29	1988-07-12	Minnesota Mining And Manufacturing Company	Multilayer dry-film negative-acting photoresist
US4672020A (en) *	1982-09-29	1987-06-09	Minnesota Mining And Manufacturing Company	Multilayer dry-film positive-acting o-quinone diazide photoresist with integral laminable layer, photoresist layer, and strippable carrier layer
JPH0612452B2 (ja) *	1982-09-30	1994-02-16	ブリュ−ワ−・サイエンス・インコ−ポレイテッド	集積回路素子の製造方法
JPS5997137A (ja) *	1982-11-01	1984-06-04	イ−・アイ・デユポン・ド・ネモア−ス・アンド・コンパニ−	多層光可溶化性リスエレメント
US4504566A (en) *	1982-11-01	1985-03-12	E. I. Du Pont De Nemours And Company	Single exposure positive contact multilayer photosolubilizable litho element with two quinone diazide layers
GB8418938D0 (en) *	1984-07-25	1984-08-30	Davies Bros Ltd	Image on substrate
US4815800A (en) *	1984-12-21	1989-03-28	Hughes Aircraft Company	Flare reduction in holograms
US4687720A (en) *	1984-12-21	1987-08-18	Hughes Aircraft Company	Side lobe suppression in holograms using pre-exposure
US4571374A (en) *	1984-12-27	1986-02-18	Minnesota Mining And Manufacturing Company	Multilayer dry-film positive-acting laminable photoresist with two photoresist layers wherein one layer includes thermal adhesive
US4854674A (en) *	1985-02-27	1989-08-08	Hughes Aircraft Company	Process for improving holographic efficiency
US4799746A (en) *	1985-02-27	1989-01-24	Hughes Aircraft Company	Efficient holograms and method for making same
JPH07113773B2 (ja) *	1986-07-04	1995-12-06	株式会社日立製作所	パタ−ン形成方法
JP2602511B2 (ja) *	1987-10-30	1997-04-23	株式会社日立製作所	パターン形成方法
KR940008381B1 (ko) *	1988-03-28	1994-09-12	간사이뻬인또 가부시끼가이샤	프린트 배선 포토레지스트의 전착 도장 방법
EP0433720A3 (en) *	1989-12-22	1992-08-26	Siemens Aktiengesellschaft	Method of applying a solder stop coating on printed circuit boards
JP2004140313A (ja) *	2002-08-22	2004-05-13	Jsr Corp	二層積層膜を用いた電極パッド上へのバンプ形成方法
CN112980410B (zh) *	2021-02-25	2022-09-13	山东滨州昱诚化工科技有限公司	一种油田暂堵剂及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE711043C (de) *	1935-08-09	1941-09-25	Bekk & Kaulen Chem Fab G M B H	Verfahren zum Herstellen von Flachdruckformen durch Projektion gerasterter Bilder
GB907718A (en) *	1957-11-01	1962-10-10	Lithoplate Inc	Hydrophilic base plates for diazo presensitized lithographic printing plates
US3549373A (en) *	1966-03-19	1970-12-22	Ricoh Kk	Negative-to-positive reversible copy sheet
US3474719A (en) *	1966-04-15	1969-10-28	Gaf Corp	Offset printing plates
US3469982A (en) *	1968-09-11	1969-09-30	Jack Richard Celeste	Process for making photoresists

1974
- 1974-10-10 CA CA211,185A patent/CA1051707A/en not_active Expired
- 1974-10-11 SE SE7412818A patent/SE422631B/xx unknown
- 1974-10-17 AU AU74460/74A patent/AU466665B2/en not_active Expired
- 1974-10-22 BR BR8768/74A patent/BR7408768D0/pt unknown
- 1974-10-22 ZA ZA00746683A patent/ZA746683B/xx unknown
- 1974-10-23 GB GB30114/77A patent/GB1493834A/en not_active Expired
- 1974-10-23 GB GB45826/74A patent/GB1493833A/en not_active Expired
- 1974-10-23 DE DE2450380A patent/DE2450380C2/de not_active Expired
- 1974-10-23 IT IT28721/74A patent/IT1025144B/it active
- 1974-10-24 FR FR7435708A patent/FR2249364B1/fr not_active Expired
- 1974-10-24 BE BE149831A patent/BE821421A/xx unknown
- 1974-10-24 NL NL7413916A patent/NL7413916A/xx not_active Application Discontinuation
- 1974-10-24 ES ES431310A patent/ES431310A1/es not_active Expired
- 1974-10-25 JP JP12328674A patent/JPS5529426B2/ja not_active Expired
1976
- 1976-05-25 ES ES448212A patent/ES448212A1/es not_active Expired

Also Published As

Publication number	Publication date
FR2249364B1 (xx)	1982-04-23
NL7413916A (nl)	1975-04-29
GB1493833A (en)	1977-11-30
BE821421A (fr)	1975-04-24
ES448212A1 (es)	1977-12-01
DE2450380A1 (de)	1975-05-07
IT1025144B (it)	1978-08-10
AU466665B2 (en)	1975-11-06
GB1493834A (en)	1977-11-30
FR2249364A1 (xx)	1975-05-23
CA1051707A (en)	1979-04-03
AU7446074A (en)	1975-11-06
JPS5072704A (xx)	1975-06-16
DE2450380C2 (de)	1984-10-11
ES431310A1 (es)	1977-04-16
SE7412818L (xx)	1975-04-28
BR7408768D0 (pt)	1975-08-05
JPS5529426B2 (xx)	1980-08-04
ZA746683B (en)	1975-11-26

Publication	Publication Date	Title
SE422631B (sv)	1982-03-15	Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material
SE406354B (sv)	1979-02-05	Anordnigng for sjelvprovning av ett hydrauliksystem
SE393017B (sv)	1977-04-25	Elektronisk apparatur for fotografering och visning av stillbilder
SE383622B (sv)	1976-03-22	Anordning for montering och demontering av ett propelleraggregat
NO141795C (no)	1980-05-14	Innretning til egalisering av en skjellstroem av trykksaker
SE412995B (sv)	1980-03-31	Forfarande och anordning for separation av isotoper av ett kemiskt element
SE404091B (sv)	1978-09-18	Forfarande och anordning for uppmetning av ett fartygs hastighet
BE845585A (nl)	1977-02-28	Lichtgevoelig fotografisch kleurenmateriaal
SE413706B (sv)	1980-06-16	Anordning for fasthallning och forskjutning av forlagor vid kopieringsapparat
SE388292B (sv)	1976-09-27	Automatisk anordning for fastspenning och lostagning av fotografiskt filmmaterial
SE383623B (sv)	1976-03-22	Anordning for montering och demontering av ett propelleraggregat
BE812610A (nl)	1974-09-23	Lichtgevoelig fotografisch materiaal
BE837537A (nl)	1976-07-14	Lichtgevoelig fotografisch kleurenmateriaal
SE388754B (sv)	1976-10-18	Herbicid innehallande en blandning av vissa bensotiadiazinoner och vissa fenyletrar
FI50373C (fi)	1976-02-10	Tapa ja laite valoladonnassa valottaa valoherkkää ainetta
SE392704B (sv)	1977-04-18	Forfarande och anordning for stegvis forflyttning av ett flertal stora platar av olika storlek
SE7509825L (sv)	1976-03-08	Avkenningsorgan for faststellning och/eller metning av alkohol och ett sett derfor
BE806037A (fr)	1974-04-12	Matiere photographique photosensible
SE391638B (sv)	1977-02-28	Anordning for utstellning och hantering av skor
SE405059B (sv)	1978-11-13	Forfarande for framstellning av fotografiska bilder och anordning for framstellning av fotografiska bilder enligt detta forfarande
SE392573B (sv)	1977-04-04	Anordning for blandning och granulering av massgods
SE419907B (sv)	1981-08-31	Forfarande for upplinjering av ett monster innefattande exponering av ett negativt resistmaterial
SE7506094L (sv)	1975-12-01	Sett och anordning for framstellning av ett av flera olika material sammansatt foremal
SE7600425L (sv)	1976-10-09	Anordning for reglering och forsterkning av ett fotomultiplikatorror
SE409686B (sv)	1979-09-03	Anordning for horisontell och vertikal transport av langstreckta cylindriska arbetsstycken