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KR970002295A - 가스센서 - Google Patents

가스센서 Download PDF

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Publication number
KR970002295A
KR970002295A KR1019960003714A KR19960003714A KR970002295A KR 970002295 A KR970002295 A KR 970002295A KR 1019960003714 A KR1019960003714 A KR 1019960003714A KR 19960003714 A KR19960003714 A KR 19960003714A KR 970002295 A KR970002295 A KR 970002295A
Authority
KR
South Korea
Prior art keywords
gas sensor
thick film
film electrode
sensor according
thick
Prior art date
Application number
KR1019960003714A
Other languages
English (en)
Other versions
KR100426939B1 (ko
Inventor
타케시 나카하라
토모히로 이노우에
히로노부 마치다
Original Assignee
요코치 아키라
피가로키켄 카부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 요코치 아키라, 피가로키켄 카부시키가이샤 filed Critical 요코치 아키라
Publication of KR970002295A publication Critical patent/KR970002295A/ko
Application granted granted Critical
Publication of KR100426939B1 publication Critical patent/KR100426939B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

내연절연기판의 한쪽의 주된면에 히이터막과 후막의 전극패드를 설치하고, 뒷면의 금속산화물 반도체막에 관통구멍으로 접속한다. 패드는 Au-Pt 등의 금합금으로 하고, Pt-W 등의 리이드에 접속한다.

Description

가스센서
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 실시예의 가스센서의 중요부 평면도, 제2도는 실시예의 가스센서의 중요부 저면도.

Claims (7)

  1. 내연절연기판에, 가스에 의하여 저항치가 변화하는 금속산화물 반도체막과 히이터막 및 복수의 후막전극 패드 등을 설치하여, 그 복수의 후막전극패드에 상기한 금속산화물 반도체막과 상기한 히이터막, 및 리이드를 접속한 가스센서에 있어서, 상기한 복수의 후막전극패드가 금을 함유하는 합금으로 이룩하는 것을 특징으로 하는 가스센서.
  2. 제1항에 있어서, 상기한 복수의 후막전극패드가 금과 백금과의 합금으로 이룩하는 것을 특징으로 하는 가스센서.
  3. 제1항에 있어서, 상기한 리이드가 귀금속 합금선으로 이룩하는 것을 특징으로 하는 가스센서.
  4. 제1항에 있어서, 상기한 가스센서가 상기한 히이터막의 소비전력을 주기적으로 변화시켜서, 상기한 금속 산화물 반도체막의 온도를 주기적으로 변화시키도록 한 일산화탄소 검출용의 가스센서인 것을 특징으로 하는 가스센서.
  5. 제1항에 있어서, 상기한 리이드와 상기한 후막전극패드와의 접속부를 후막으로 피복한 것을 특징으로 하는 가스센서.
  6. 제1항에 있어서, 상기한 리이드의 상기한 후막전극패드 위에서의 단부가 용단되어 있는 것을 특징으로 하는 가스센서.
  7. 제6항에 있어서, 상기한 후막전극패드를 4개 설치하여 4각형의 4정점에 배치하고, 또한 각 후막전극패드마다 상기한 리이드를 각 1개 접속하며, 더우기 각 리이드가 그 리이드를 접속한 후막전극패드를 통과하는 상기한 4각형의 대각선에 실질적으로 평행인 것을 특징으로 하는 가스센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960003714A 1995-06-19 1996-02-15 가스센서 KR100426939B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-176620 1995-06-19
JP17662095 1995-06-19

Publications (2)

Publication Number Publication Date
KR970002295A true KR970002295A (ko) 1997-01-24
KR100426939B1 KR100426939B1 (ko) 2004-07-19

Family

ID=16016767

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960003714A KR100426939B1 (ko) 1995-06-19 1996-02-15 가스센서

Country Status (5)

Country Link
US (1) US5837886A (ko)
KR (1) KR100426939B1 (ko)
CN (1) CN1080883C (ko)
DE (1) DE19611964B4 (ko)
GB (1) GB2302407B (ko)

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CN101031795B (zh) * 2004-01-27 2014-11-05 H2Scan公司 用于气体传感器的热隔离的方法和装置
WO2006088477A2 (en) * 2004-05-17 2006-08-24 Massachusetts Institute Of Technology Photo-induced sensitivity and selectivity of semiconductor gas sensors
JP2006208358A (ja) * 2004-12-28 2006-08-10 Tdk Corp センサ
US7185545B2 (en) * 2004-12-29 2007-03-06 General Electric Company Instrumentation and method for monitoring change in electric potential to detect crack growth
CN101158661B (zh) * 2007-11-16 2011-05-11 华中科技大学 一种半导体氧化物气敏元件制备方法
EP2565635B1 (en) 2011-09-02 2017-11-15 Sensirion AG Sensor chip and method for manufacturing a sensor chip
TWI660172B (zh) * 2013-06-18 2019-05-21 日商新宇宙電機股份有限公司 定電位電解式氣體感測器
ES2566032B1 (es) * 2015-10-13 2017-01-25 Francisco Albero S.A.U. Sensor de gas
CN109761187A (zh) * 2019-01-21 2019-05-17 中国科学院电子学研究所 用于降低mems传感器应力的组装结构及制备方法
CN109946350B (zh) * 2019-04-24 2023-11-03 郑州炜盛电子科技有限公司 一种无引线单个陶瓷片式气体传感器

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Also Published As

Publication number Publication date
GB9606548D0 (en) 1996-06-05
US5837886A (en) 1998-11-17
GB2302407B (en) 1999-06-16
CN1146554A (zh) 1997-04-02
CN1080883C (zh) 2002-03-13
KR100426939B1 (ko) 2004-07-19
GB2302407A (en) 1997-01-15
DE19611964B4 (de) 2009-01-22
DE19611964A1 (de) 1997-01-02

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