KR940027615U - 오토 핸들러의 디바이스 방향 전환장치 - Google Patents
오토 핸들러의 디바이스 방향 전환장치Info
- Publication number
- KR940027615U KR940027615U KR2019930008478U KR930008478U KR940027615U KR 940027615 U KR940027615 U KR 940027615U KR 2019930008478 U KR2019930008478 U KR 2019930008478U KR 930008478 U KR930008478 U KR 930008478U KR 940027615 U KR940027615 U KR 940027615U
- Authority
- KR
- South Korea
- Prior art keywords
- direction switching
- auto handler
- switching device
- handler
- auto
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930008478U KR0118635Y1 (ko) | 1993-05-19 | 1993-05-19 | 오토 핸들러의 디바이스 방향 전환장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930008478U KR0118635Y1 (ko) | 1993-05-19 | 1993-05-19 | 오토 핸들러의 디바이스 방향 전환장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940027615U true KR940027615U (ko) | 1994-12-10 |
| KR0118635Y1 KR0118635Y1 (ko) | 1998-08-01 |
Family
ID=19355520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019930008478U KR0118635Y1 (ko) | 1993-05-19 | 1993-05-19 | 오토 핸들러의 디바이스 방향 전환장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0118635Y1 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020000262A (ko) * | 2000-06-22 | 2002-01-05 | 김정곤 | 모듈아이씨 핸들러의 캐리어 이송장치 |
| KR100368574B1 (ko) * | 2000-06-22 | 2003-01-24 | 메카텍스 (주) | 피씨 베이스 모듈아이씨 테스트 핸들러의 위치변환장치 |
-
1993
- 1993-05-19 KR KR2019930008478U patent/KR0118635Y1/ko not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020000262A (ko) * | 2000-06-22 | 2002-01-05 | 김정곤 | 모듈아이씨 핸들러의 캐리어 이송장치 |
| KR100368574B1 (ko) * | 2000-06-22 | 2003-01-24 | 메카텍스 (주) | 피씨 베이스 모듈아이씨 테스트 핸들러의 위치변환장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR0118635Y1 (ko) | 1998-08-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20080222 Year of fee payment: 11 |
|
| EXPY | Expiration of term |