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KR930001535A - Laser diode chip separator - Google Patents

Laser diode chip separator Download PDF

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Publication number
KR930001535A
KR930001535A KR1019910010684A KR910010684A KR930001535A KR 930001535 A KR930001535 A KR 930001535A KR 1019910010684 A KR1019910010684 A KR 1019910010684A KR 910010684 A KR910010684 A KR 910010684A KR 930001535 A KR930001535 A KR 930001535A
Authority
KR
South Korea
Prior art keywords
chip
bar
stage
laser diode
holes
Prior art date
Application number
KR1019910010684A
Other languages
Korean (ko)
Other versions
KR940006092B1 (en
Inventor
이상호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019910010684A priority Critical patent/KR940006092B1/en
Publication of KR930001535A publication Critical patent/KR930001535A/en
Application granted granted Critical
Publication of KR940006092B1 publication Critical patent/KR940006092B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Semiconductor Lasers (AREA)

Abstract

내용 없음No content

Description

레이저 다이오드 칩 분리장치Laser diode chip separator

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1(a)도, 제1(b)도는 종래의 칩 분리 상태도.1 (a) and 1 (b) are conventional chip separation states.

제2(a)도, 제2(b)도는 이 발명에 따른 칩 분리장치의 구조도 및 작동 상태도.2 (a), 2 (b) is a structural diagram and operating state of the chip separating apparatus according to the present invention.

제3도는 이 발명에 따른 스테이지의 평면도.3 is a plan view of a stage according to the invention.

제4도는 이 발명에 따른 칩 분리장치의 요부 상세도.4 is a detailed view of the main portion of the chip separating apparatus according to the present invention.

Claims (5)

웨이퍼 상태의 칩을 바형태로 분리한 후, 이 바형태 칩을 낱개로 분리하는 장치에 있어서, 상기 바형태 칩이 로딩되어 놓여지는 로딩부가 형성되고 상기 바형태 칩의 분리선 간격과 동일한 간격으로 다수의 관통구멍이 형성되며 베이스와 탄성부재로서 탄력설치되어 상. 하 동작이 가능하도록 된 스테이지와, 상기 스테이지의 관통구멍과 일치하도록 베이스상에 배열설치되어 칩 분리부가 일끝단이 상기 관통구멍을 통해 바형태 칩을 분리하도록 된 다수의 커터와, 상기 스테이지의 로딩부에 놓여진 바형태 칩으로 소정 압력을 가하면서 스테이지를 하강시키는 누름부재로 이루어짐을 특징으로 하는 레이저 다이오드 칩 분리장치.In the device for separating the chip in the wafer state into a bar shape, the bar chip is separated into pieces. Through holes are formed and the base and elastic members are elastically installed. A stage which is capable of a lower operation, a plurality of cutters arranged on the base so as to coincide with the through holes of the stage, and one end of which separates the bar-shaped chip through the through holes, and the loading of the stage A laser diode chip separating apparatus comprising a pressing member for lowering a stage while applying a predetermined pressure to a bar-shaped chip placed on a portion. 제 1 항에 있어서, 상기 스테이지의 로딩부에 바형태 칩이 항상 일정한 위치로 놓이도록 형성된 정렬라인과, 상기 바형태 칩의 분리선에 일치하여 칩 분리위치를 결정하도록 형성된 표시부가 더 포함되는 레이저 다이오드 칩 분리장치.The laser diode of claim 1, further comprising an alignment line formed so that the bar-shaped chip is always placed at a constant position in the loading portion of the stage, and a display unit formed to determine the chip separation position in accordance with the separation line of the bar-shaped chip. Chip separator. 제 1 항에 있어서, 상기 커터는 교체 가능하도록 베이스에 분리 및 결합되는 레이저 다이오드 칩 분리장치.The device of claim 1, wherein the cutter is separated and coupled to the base to be replaceable. 제 1 항에 있어서, 상기 스테이지의 로딩부상에 놓여진 바형태 칩과 누름부재의 저면사이에 소정의 틈새가 형성된 레이저 다이오드 칩 분리장치.The laser diode chip separating apparatus according to claim 1, wherein a predetermined gap is formed between a bar chip placed on the loading part of the stage and a bottom surface of the pressing member. 제 1 항에 있어서, 상기 누름부재의 저면에 바형태 칩의 분리선과 일치하고 동일한 간격으로 형성된 다수의 완충홈을 더 포함하여 되는 레이저 다이오드 칩 분리장치.The laser diode chip separating apparatus according to claim 1, further comprising a plurality of buffer grooves formed on the bottom surface of the pressing member at equal intervals to coincide with the dividing line of the bar chip. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910010684A 1991-06-26 1991-06-26 Laser diode chip segregation apparatus KR940006092B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910010684A KR940006092B1 (en) 1991-06-26 1991-06-26 Laser diode chip segregation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910010684A KR940006092B1 (en) 1991-06-26 1991-06-26 Laser diode chip segregation apparatus

Publications (2)

Publication Number Publication Date
KR930001535A true KR930001535A (en) 1993-01-16
KR940006092B1 KR940006092B1 (en) 1994-07-06

Family

ID=19316336

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910010684A KR940006092B1 (en) 1991-06-26 1991-06-26 Laser diode chip segregation apparatus

Country Status (1)

Country Link
KR (1) KR940006092B1 (en)

Also Published As

Publication number Publication date
KR940006092B1 (en) 1994-07-06

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