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KR930006811A - Semiconductor Chip Separator - Google Patents

Semiconductor Chip Separator Download PDF

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Publication number
KR930006811A
KR930006811A KR1019910015841A KR910015841A KR930006811A KR 930006811 A KR930006811 A KR 930006811A KR 1019910015841 A KR1019910015841 A KR 1019910015841A KR 910015841 A KR910015841 A KR 910015841A KR 930006811 A KR930006811 A KR 930006811A
Authority
KR
South Korea
Prior art keywords
separating
bar
chips
semiconductor chip
chip
Prior art date
Application number
KR1019910015841A
Other languages
Korean (ko)
Inventor
김기환
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019910015841A priority Critical patent/KR930006811A/en
Publication of KR930006811A publication Critical patent/KR930006811A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

이 발명은 칩을 웨이퍼 상태에서 바(Rar)형태로 분리한 후 다시 바형태에서 하나의 칩으로 각각 분리시키기 위한 반도체 칩 분리장치에 관한 것으로서, 몸체상에 형성한 이송홈에 다수의 바형태 칩을 정열시키고 푸쉬바로서 소정거리 이송시켜 한번에 커팅지그의 상, 하 동작에 의해 다수의 칩을 분리할 수 있게 함으로써 생산성을 향상시키고, 칩분리시 바형태의 칩 고정 수단으로 진공흡입방식을 사용함으로써 종래의 집착비닐 사용으로 인한 칩불량을 방지할 수 있는 반도체 칩 분리장치이다.The present invention relates to a semiconductor chip separation device for separating chips into wafer-shaped wafers in the form of bars, and then separating them into bars in the form of chips. To improve productivity by separating a plurality of chips by the up and down operation of cutting jig at a time by aligning and transferring a predetermined distance as a push bar, and by using vacuum suction method as a bar-type chip fixing means when separating chips. It is a semiconductor chip separation device that can prevent chip defects due to the use of conventional cling vinyl.

Description

반도체 칩 분리장치Semiconductor Chip Separator

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도의 (가), (나)는 이 발명에 따른 분리장치의 정면도 및 평면도,(A) and (b) of FIG. 1 are a front view and a plan view of a separator according to the present invention,

제2도의 (가)~(다)는 이 발명에 따른 분리장치의 작동 상태도이다.(A) to (c) of FIG. 2 is an operation state diagram of the separator according to the present invention.

Claims (1)

웨이어 상태에서 분리된 바형태의 칩을 날개로 분리하기 위한 반도체 칩 분리장치에 있어서, 다수의 바형태 칩이 장착되는 이송흠이 상부에 형성되고 상기 다수의 바형태 칩 아래지점의 이송흠 표면으로 관통하는 진공홀이 형성된 몸체와, 스텝 모터의 구동으로 소정 스텝 이송하여 분리하기 위한 칩이 이송흠으로부터 노출되어 분리위치로 위치되도록 다수의 바형태 칩들을 미는 푸쉬바와, 가이더를 따라 상, 하 직동하여 상기 분리위치의 노출 칩을 분리하도록 된 커팅지그와, 상기 커팅지그 하부의 몸체에 설치되어 커팅지그의 상, 하 동작을 컨트롤하는 뉴메틱밸브로 이루어짐을 특징으로 하는 반도체 칩 분리장치.In the semiconductor chip separating apparatus for separating the bar-shaped chip separated in the waer state by a wing, a transfer flaw in which a plurality of bar-shaped chips are mounted is formed on the upper side and penetrates to the surface of the transfer flaw below the plurality of bar-shaped chips. A body formed with a vacuum hole, a push bar for pushing a plurality of bar-shaped chips so that a chip for separating and transferring a predetermined step by driving of a step motor is positioned at a separation position exposed from a transfer flaw; And a cutting jig configured to separate the exposed chip at a separation position, and a pneumatic valve installed on a lower body of the cutting jig to control an up and down operation of the cutting jig. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910015841A 1991-09-11 1991-09-11 Semiconductor Chip Separator KR930006811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910015841A KR930006811A (en) 1991-09-11 1991-09-11 Semiconductor Chip Separator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910015841A KR930006811A (en) 1991-09-11 1991-09-11 Semiconductor Chip Separator

Publications (1)

Publication Number Publication Date
KR930006811A true KR930006811A (en) 1993-04-21

Family

ID=67433534

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910015841A KR930006811A (en) 1991-09-11 1991-09-11 Semiconductor Chip Separator

Country Status (1)

Country Link
KR (1) KR930006811A (en)

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