KR20230155571A - Workpiece holding system and workpiece holding device - Google Patents

Abstract

The workpiece holding system 10 is mounted on a suction stage 12 with one or more suction holes 20 for sucking the workpiece mounted on the upper surface and the suction stage 12 to hold the workpiece 100. It is provided with a workpiece holding device 16, wherein the workpiece holding device 16 includes a base plate 30 mounted on the suction stage 12; A holding stage 32 on which the workpiece 100 is mounted and whose posture can be changed with respect to the base plate 30; a suction passage (38) communicating with the suction hole (20); It has a rotary actuator (34) driven by pneumatic pressure generated when air is sucked or supplied through the suction passage (38), and changes the posture of the holding stage (32).

Description

Workpiece holding system and workpiece holding device

This specification discloses a workpiece holding device that rotatably holds a workpiece, and a workpiece holding system having the same.

Suction stages that suction and hold workpieces have been widely known. This suction stage is formed with one or more suction holes. A suction pump is connected to the suction hole. Then, by driving a suction pump with the workpiece mounted on the suction stage to close the suction hole, the workpiece is suctioned and held.

Patent Document 1: Japanese Patent Laid-Open No. 2021-110558

However, depending on the processing performed on the workpiece, there may be cases where it is desired to change the posture of the workpiece during the processing process. For example, there are cases where it is desired to capture images of a workpiece multiple times while changing the posture of the workpiece and inspect the workpiece based on the plurality of acquired images. When attempting to perform such an inspection using a general suction stage, it was very cumbersome as it was necessary to temporarily release suction and change the posture of the workpiece each time imaging was taken.

Therefore, it is conceivable to add a dedicated power source (for example, a motor or an electromagnetic cylinder) and thereby change the posture of the workpiece. However, adding these power sources increases costs.

Additionally, Patent Document 1 discloses an inspection system having a slide table. According to this inspection system, the position of the workpiece can be changed. However, in Patent Document 1, the slide table is slid manually. Therefore, in order to change the position of the workpiece mounted on the slide table, manual operation by the operator was required, which was also cumbersome.

Accordingly, this specification discloses a workpiece holding system and workpiece holding device that can change the posture of the workpiece without adding a dedicated power source.

The workpiece holding system disclosed in this specification includes a suction stage having one or more suction holes for sucking a workpiece mounted on an upper surface, and a workpiece holding device mounted on the suction stage to hold the workpiece, The workpiece holding device includes a base mounted on the suction stage; a holding stage on which the workpiece is mounted and whose posture can be changed with respect to the base; a suction passage communicating with the suction hole; An actuator driven by pneumatic pressure generated by sucking or supplying air through the suction passage, and characterized by having an actuator that changes the posture of the holding stage.

In this case, the holding stage is installed to be rotatable around a vertical axis, and the actuator can rotate the holding stage by receiving the pneumatic pressure.

Additionally, the actuator may include an air cylinder that expands or contracts by receiving the pneumatic pressure.

Additionally, the actuator includes a ratchet gear that rotates in only one direction as the air cylinder expands and contracts, and the holding stage can rotate together with the ratchet gear.

Additionally, it may have an inclination mechanism that inclines the holding stage with respect to the base.

In this case, the tool head is further installed above the suction stage and can be raised and lowered with respect to the suction stage to perform a predetermined process on the workpiece, and the tilt mechanism is a lever that can swing around a horizontal axis, It may have a force point portion that can be pressed by the tool head, and an action point portion that is located on the opposite side of the force point portion along the horizontal axis and pushes up the holding stage when the force point portion is pressed.

In addition, the bottom of the holding stage has a first bottom portion inclined at a first angle and a second bottom portion inclined at a second angle different from the first angle, and the first bottom portion is pushed up, When the second bottom portion is pushed up, the inclination of the upper surface of the suction stage may change.

In addition, it has a reference surface that rotates together with the holding stage and does not incline even if the inclination of the holding stage changes, and magnetically suctions each other to the bottom surface of the holding stage and the reference surface, thereby forming the holding stage. One or more magnetic elements that maintain the tilt state may be installed.

The workpiece holding device disclosed in this specification is a workpiece holding device that is mounted on a suction stage and holds a workpiece, comprising: a base mounted on the suction stage; a holding stage on which the workpiece is mounted and whose posture can be changed with respect to the base; a suction passage communicating with a suction hole formed in the suction stage; An actuator driven by pneumatic pressure generated by sucking or supplying air through the suction passage, and an actuator that changes the posture of the holding stage, may be provided.

According to the technology disclosed in this specification, it is possible to hold a workpiece so that its posture can be changed without adding a dedicated power source.

Figure 1 is a diagram showing the schematic configuration of the workpiece holding system 10.
Also, Figure 2 is a top view of the workpiece holding device 16.
Figure 3 is a cross-sectional view taken along line AA of Figure 2.
Figure 4 is a cross-sectional view taken along line BB of Figure 2.
Figure 5 is a cross-sectional view taken along line BB of Figure 2.
Figure 6 is a schematic diagram of an air cylinder.
Figure 7 is a diagram showing an excerpt of the rocking block and ratchet gear.
Figure 8 is a diagram explaining the movement of the rocking block and ratchet gear.
Figure 9 is a view of the tilt lever viewed from direction C in Figure 2.

Hereinafter, the workpiece holding system 10 will be described with reference to the drawings. Figure 1 is a diagram showing the schematic configuration of the workpiece holding system 10. Figure 2 is also a plan view of the workpiece holding device 16.

The workpiece holding system 10 is a system that can change the posture of the workpiece 100 while holding it. The workpiece holding system 10 of this example is built into an inspection device that inspects the quality of the workpiece 100 based on a captured image of the workpiece 100. Accordingly, some components of the workpiece holding system 10 are directly used as components of an inspection device, as will be described later.

The workpiece holding system 10 includes a suction stage 12, an inspection head 14, a workpiece holding device 16, and a controller 18. The suction stage 12 is a stage that suctions and holds an object mounted on its upper surface. One or more suction holes 20 are formed in the suction stage 12. The suction hole 20 is connected to the suction pump 22. By driving the suction pump 22, a vacuum suction force acts on the suction hole 20, thereby allowing the object mounted on the upper surface of the suction stage 12 to be suctioned and held. Additionally, an atmospheric pressure release valve 23 is provided between the suction hole 20 and the suction pump 22. After stopping the operation of the suction pump 22, suction of the object can be released by opening the atmospheric pressure opening valve 23. This suction stage 12 was originally installed in the inspection device. In the inspection device, the workpiece 100 to be inspected is usually mounted on the suction stage 12, but in this example, the workpiece holding device 16 is mounted on the suction stage 12, and the workpiece holding device 16 is mounted on the suction stage 12. Hold the workpiece 100. The reason for configuring it this way will be explained later.

The inspection head 14 is installed above the suction stage 12. The inspection head 14 functions as a tool head having a tool for processing the workpiece 100. In this example, the inspection head 14 has an inspection camera 24 for imaging the workpiece 100 as a tool. The inspection camera 24 has a downward optical axis and captures images of the workpiece 100 held by the workpiece holding device 16.

The inspection head 14 can be moved in the horizontal and vertical directions by a moving mechanism (not shown). This inspection head 14 was also originally installed in the inspection device. However, in this example, a pressurizing body 26 is additionally installed on the inspection head 14. This pressing body 26 is a rod-shaped member that protrudes largely downward, and the lower end of the pressing body 26 is located lower than the lower end of the inspection camera 24. The pressing body 26 is installed to press the force point portion 94 of the inclined lever 90 (see FIG. 2), which will be described later.

The workpiece holding device 16 is a device that changes the posture of the workpiece 100 while holding it. The workpiece holding device 16 has a holding stage 32 capable of rotating and rocking with respect to the suction stage 12. The workpiece 100 to be inspected is mounted on this holding stage 32. The mechanism for rotating and rocking the holding stage 32 will be described later.

The controller 18 controls the operation of the suction pump 22, the inspection head 14, and the inspection camera 24, and interprets the image obtained by the inspection camera 24 to determine the quality of the workpiece 100. do. This controller 18 is physically a computer having a processor 18a and memory 18b. The controller 18 is also originally installed in the inspection device.

Next, the configuration of the workpiece holding device 16 will be described in detail. When using the workpiece holding device 16, the workpiece holding device 16 is mounted on the suction stage 12. The workpiece holding device 16 has a base plate 30, a holding stage 32, a rotation actuator 34 that rotates the holding stage 32, and a tilt mechanism that swings the holding stage 32.

The base plate 30 is a plate mounted on the upper surface of the suction stage 12. As shown in FIG. 2, the outer shape of the base plate 30 is larger than that of the suction stage 12, and the base plate 30 completely covers the suction stage 12 from the upper side. The base plate 30 is fixed to the suction stage 12 by a fixing bolt 40. In addition, in this example, the base plate 30 is made larger than the suction stage 12, but the shape and size of the base plate 30 can be changed appropriately as long as it can cover at least one suction hole 20. . For example, when two suction holes 20 are formed in the suction stage 12, the base plate 30 covers only one suction hole 20 and does not cover the other suction hole 20. It can also be done in a shape that does not exist. In this case, some kind of closing member (for example, adhesive tape that blocks the suction hole 20, etc.) can be placed in the uncovered suction hole 20 to prevent air leakage.

Additionally, as shown in FIG. 1, a communication hole 38a penetrating in the thickness direction is formed in the base plate 30. This communication hole 38a is formed at a position that communicates with the suction hole 20 when the base plate 30 is fixed to the suction stage 12. A relay port 38b is inserted into the upper opening of the communication hole 38a, and a connection pipe 38c is further connected to the relay port 38b. Inside the relay port 38b, a passage is formed that communicates the communication hole 38a and the connection pipe 38c. Hereinafter, the passage composed of the communication hole 38a, the relay port 38b, and the connection pipe 38c is called the suction passage 38.

The holding stage 32 is a stage on which the workpiece 100 is mounted. In this example, the workpiece 100 is adhered to the upper surface of the holding stage 32 (hereinafter referred to as “mounting surface 46”). As shown in FIG. 2, the holding stage 32 has the same shape as the center portion when the disk is divided into three parts in the radial direction. In other words, the holding stage 32 has an approximately rectangular shape with the upper and lower edges having an arc shape when viewed from above.

This holding stage 32 can rotate around a vertical axis and can also swing around a horizontal axis. This will be explained with reference to FIGS. 2 and 3. Figure 3 is a cross-sectional view taken along line A-A of Figure 2. As shown in FIGS. 2 and 3, a ratchet gear 84 is disposed on the lower side of the holding stage 32. Two support members 88 stand from the upper surface of the ratchet gear 84 (hereinafter referred to as “reference surface 84a”). Two support members 88 are arranged on both sides of the holding stage 32 in the horizontal direction. In other words, the holding stage 32 is inserted into a pair of support members 88 when viewed from above. Each support member 88 has a stage rocking axis 48 that protrudes in the horizontal direction. The holding stage 32 is supported rotatably with respect to the support member 88 by the stage swing shaft 48.

Additionally, as described above, the support member 88 is fixed to the reference surface 84a of the ratchet gear 84. Accordingly, when the ratchet gear 84 rotates around the vertically extending rotation axis 42, the support member 88 and the holding stage 32 supported by the support member 88 also rotate around the rotation axis 42. do.

Next, the rotary actuator 34 will be described. The rotation actuator 34 is an actuator for rotating the holding stage 32 around the rotation axis 42. This rotary actuator 34 has an air cylinder 60, an advance/retract bar 78, a rocking block 80 (not shown in FIG. 1), and a ratchet gear 84. The ratchet gear 84 is disposed on the lower side of the holding stage 32, as described above and as shown in FIG. 3 and the like. The ratchet gear 84 is mounted on the rotating shaft 42 through a one-way clutch 43. The one-way clutch 43 allows the ratchet gear 84 to rotate clockwise and prevents it from rotating counterclockwise when viewed from above. Hereinafter, the rotation direction allowed by the one-way clutch 43 is referred to as the “forward rotation direction.”

The air cylinder 60 advances and retracts the piston rod 66 to rotate the ratchet gear 84 in the forward rotation direction. In this example, the power source for advancing and retracting the air cylinder 60 is negative pneumatic pressure generated by sucking air through the suction passage 38, and is the suction force supplied to the suction stage 12. This will be explained with reference to FIG. 6 . Figure 6 is a schematic diagram of the air cylinder 60. The air cylinder 60 has a cylinder tube 62, a piston 64, and a piston rod 66. The piston 64 divides the inner space of the cylinder tube 62 into two. Hereinafter, the space on the right side of the ground compared to the piston 64 is referred to as the first pressure chamber 68f, and the space on the left side of the ground compared to the piston 64 is referred to as the second pressure chamber 68s. The piston 64 can advance and retreat within the cylinder tube 62. As the piston 64 advances and retreats, the volumes of the first pressure chamber 68f and the second pressure chamber 68s change. A piston rod 66 protrudes from the piston 64. The piston rod 66 protrudes to the outside of the cylinder tube 62. The tip of the piston rod 66 is fixed to the connecting plate 76, and an advancing/retracting bar 78 is additionally fixed to the connecting plate 76. An auxiliary spring 74 is installed between the connection plate 76 and the cylinder tube 62 to bias the two in a direction away from each other.

Ports 70 and 72 connected to the outside are formed in the first pressure chamber 68f and the second pressure chamber 68s, respectively. No pipe is connected to the opening port 72 formed in the second pressure chamber 68s, and the second pressure chamber 68s is opened to atmospheric pressure. Meanwhile, a connection pipe 38c is connected to the suction port 70 formed in the first pressure chamber 68f. In other words, the first pressure chamber 68f communicates with the suction hole 20 through the suction passage 38 (connection pipe 38c, relay port 38b, communication hole 38a). Therefore, by driving the suction pump 22, negative air pressure, that is, suction force, can be applied to the first pressure chamber 68f.

The movement of the air cylinder 60 in this configuration will be described. When the suction pump 22 is driven, the pressure in the first pressure chamber 68f decreases, and the piston 64 moves to the right of the ground (hereinafter referred to as the “retraction direction (S-)”). Accordingly, the piston rod 66 and the advancing/retracting bar 78 connected to the piston rod 66 also move in the retracting direction (S-). After that, it is assumed that the operation of the suction pump 22 is stopped and the atmospheric pressure release valve 23 is opened. In this case, since the suction force acting on the piston 64 is lost, the advancing/retracting bar 78 and the piston rod 66 and piston 64 connected to it are moved to the left side of the ground due to the biasing force of the auxiliary spring 74. Move in (hereinafter referred to as “entry direction (S+)”). That is, according to this example, the air cylinder 60 and, by extension, the advance/retract bar 78 can be advanced and retracted by alternately switching the driving of the suction pump 22 and the release to atmospheric pressure. In addition, in this example, the atmospheric pressure opening valve 23 was opened to advance the piston rod 66, but instead of this process, the suction pump 22 was reversely driven to open the first pressure chamber 68f through the suction passage 38. You may supply air to . Additionally, in this example, the air cylinder 60 is moved by suction force, that is, negative pneumatic pressure, but the air cylinder 60 can also be moved by positive pneumatic pressure. That is, by reverse driving the suction pump 22 and supplying air to the first pressure chamber 68f through the suction passage 38, the air cylinder 60 is expanded by the biasing force of the auxiliary spring 74. The air cylinder 60 may be contracted. In another form, the air cylinder 60 may be advanced and retracted only by pneumatic pressure without using the auxiliary spring 74. For example, the air cylinder 60 can be contracted using negative pneumatic pressure, and the air cylinder 60 can be expanded using positive pneumatic pressure.

As shown in Fig. 2, a rocking block 80 is mounted on the advance/retract bar 78. The rocking block 80 is a member that can rock in a horizontal plane around the block rocking axis 81, which is a vertical axis. A ratchet pin 82 (symbol omitted in FIG. 2) extending in the vertical direction is provided near the tip of the rocking block 80. The ratchet pin 82 is located near the periphery of the ratchet gear 84 and meshes with the teeth of the ratchet gear 84.

The configuration of the rocking block 80 and the ratchet gear 84 will be described with reference to FIG. 7. Figure 7 is a schematic diagram illustrating the ratchet gear 84 and the rocking block 80. As described above, the ratchet gear 84 is mounted on the rotation shaft 42 through the one-way clutch 43, and rotation is allowed only in the ground clockwise direction, that is, in the forward rotation direction (R+). As shown in FIG. 7, saw-shaped teeth 85 are formed on the periphery of the ratchet gear 84. Each tooth 85 has a substantially triangular shape surrounded by a first side 86a that is substantially parallel to the radial direction and a second side 86b that is greatly inclined with respect to the radial direction. In addition, the second side 86b is located downstream of the first side 86a belonging to the same value 85 in the forward rotation direction (R+).

The ratchet pin 82 is generally inserted between teeth 85 of the ratchet gear 84, that is, in the groove. The advance/retract bar 78 advances/retracts in a direction substantially parallel to the tangential direction of the ratchet gear 84 in this trough. The rocking block 80 is biased by a spring 83 in a direction in which the ratchet pin 82 is in close contact with the ratchet gear 84.

Next, the movements of the ratchet gear 84 and the rocking block 80 will be described with reference to FIG. 8. In the first step of Figure 8, the ratchet pin 82 is located in the groove between the first tooth 85f and the second tooth 85s. At this time, the air cylinder 60 is in a contracted state. In this state, assume that the air cylinder 60 extends and the advance/retract bar 78 moves in the advance direction (S+). In this case, as shown in the second row of FIG. 8, the ratchet pin 82 also moves in the exit direction. At this time, due to the shape of the teeth 85, the ratchet pin 82 can easily pass over the second teeth 85s as it moves in the advancing direction (S+). The ratchet pin 82 is biased by a spring 83 in a direction to closely contact the ratchet gear 84. Therefore, when the ratchet pin 82 exceeds the second tooth 85s, as shown in the third column of FIG. 8, the ratchet pin 82 is a valley between the second tooth 85s and the third tooth 85t. Enter.

Next, the air cylinder 60 is contracted. When the air cylinder 60 contracts, the rocking block 80 and the ratchet pin 82 also move in the retraction direction (S-). At this time, due to the shape of the teeth 85, the ratchet pin 82 cannot exceed the second tooth 85s. As a result, as the ratchet pin 82 moves in the retraction direction (S-), the ratchet gear 84 is pressed against the ratchet pin 82 and rotates by one inch in the forward rotation direction (R+).

As is clear from the above description, each time the air cylinder 60 advances and retreats once, the ratchet gear 84 rotates by one inch. And as the ratchet gear 84 rotates, the holding stage 32 installed on the upper side of the ratchet gear 84 also rotates.

Next, the configuration of the tilt mechanism will be explained. As described above and as shown in FIG. 3 , the holding stage 32 is supported by the stage rocking axis 48 and is capable of swinging around the stage rocking axis 48. In order to tilt the holding stage 32 by swinging the holding stage 32, an inclining lever 90 is installed on the workpiece holding device 16. As shown in FIG. 2, the tilt lever 90 is disposed at a location where its tip (that is, a portion near the action point portion 96 described later) is located immediately below the holding stage 32. FIG. 9 is a view of the tilt lever 90 viewed from the direction of arrow C in FIG. 2.

As shown in FIG. 9 , the tilt lever 90 is supported by a lever swing shaft 92 extending in the horizontal direction, and is capable of swinging around the lever swing shaft 92. Among the inclined levers 90, a force point portion 94 is provided near the end in the direction away from the holding stage 32. The force point portion 94 is a portion pressed from above by the pressurizing body 26 of the inspection head 14. Additionally, an action point portion 96 is provided on the opposite side of the force point portion 94 across the lever swing shaft 92. The action point portion 96 is located directly below the holding stage 32. A spring 98 is installed on the lower side of the force point portion 94. The spring 98 biases the force point portion 94 upward. Therefore, when the force point portion 94 is not pressed by the pressurizing body 26, the force point portion 94 rises upward, and the action point portion 96 reaches a position where its bottom contacts the base plate 30. Descend. On the other hand, when the force point portion 94 is pressed by the pressing body 26 against the biasing force of the spring 98, the action point portion 96 rises upward and pushes the holding stage 32 upward. As a result, the holding stage 32 oscillates.

Here, in this example, the first bottom part 50f and the second bottom part have different slopes on the bottom surface of the holding stage 32 so that the slope of the mounting surface 46 changes according to the shaking of the holding stage 32. (50s) is being installed. This will be explained with reference to FIGS. 4 and 5. Figures 4 and 5 are cross-sectional views taken along line B-B of Figure 2.

The first bottom portion 50f and the second bottom portion 50s are installed at positions symmetrical by 180 degrees with the stage swing axis 48 interposed therebetween. As shown in FIG. 4, the first bottom portion 50f has an inclination such that the mounting surface 46 is almost horizontal when it comes into contact with the upper surface of the ratchet gear 84 (i.e., the reference surface 84a). . Additionally, as shown in FIG. 5 , the second bottom portion 50s has an inclination such that when it comes into contact with the reference surface 84a, the mounting surface 46 is inclined with respect to the reference surface 84a.

Additionally, a first magnet 52f is fixed to the first bottom portion 50f, and a second magnet 52s is fixed to the second bottom portion 50s. At least a part of the reference surface 84a is provided with a magnetic element that generates a magnetic suction force between the first magnet 52f and the second magnet 52s. For example, the entire ratchet gear 84 may be formed of a ferromagnetic material (eg, steel, etc.). Additionally, a ferromagnetic material or magnet may be attached to a portion of the reference surface 84a. Alternatively, a ferromagnetic material may be placed on the bottom portions 50f and 50s, and a magnet may be placed on the reference surface 84a. In either case, when the first magnet 52f or the second magnet 52s comes into contact with the reference surface 84a, a magnetic suction force is generated between the magnets 52f and 52s and the reference surface 84a, thereby causing the holding stage 32. The tilt state is maintained.

Here, in the state of FIG. 4, assume that the force point portion 94 of the tilt lever 90 is pressed to lift the action point portion 96. In this case, the action point portion 96 pushes up the first bottom portion 50f of the holding stage 32. Accordingly, the holding stage 32 swings around the stage swing axis 48, as shown in FIG. 5, and the second bottom portion 50s comes into contact with the reference surface 84a. And as a result, the mounting surface 46 is changed to an inclined state with respect to the reference surface 84a.

If you want to return from the inclined state to the horizontal state, rotate the ratchet gear 84 by 180° and move the second bottom portion 50s to the vicinity of the action point portion 96. Then, in that state, the tilt lever 90 is swung to lift the second bottom portion 50s upward.

As is clear from the above description, according to this example, the holding stage 32 can be rocked using the inspection head 14 originally installed in the inspection device. Also, as described above, in this example, the holding stage 32 is rotated using the suction pump 22 originally installed in the inspection device. As a result, according to this example, there is no need to separately prepare a dedicated power source or a dedicated driver for driving the power source in order to change the position and posture of the workpiece 100. As a result, the position and posture of the workpiece 100 can be changed with a simple configuration while keeping costs down.

In addition, the above-described configuration is an example, and other configurations may be changed as long as the posture of the workpiece 100 can be changed using the suction force supplied through the suction hole 20 of the suction stage 12. For example, in the above description, the holding stage 32 is rotated using the air cylinder 60 and the ratchet gear 84. However, the holding stage 32 may be rotated using other mechanisms (e.g., piston or crank mechanisms, etc.). Additionally, in this example, pneumatic pressure is used to rotate the holding stage 32, but pneumatic pressure may be used to rock the holding stage 32. For example, the force point portion 94 of the tilt lever 90 may be pressed by the air cylinder 60 as it expands or contracts. Additionally, in this example, the holding stage 32 is rotated and rocked, but either movement may be omitted. In addition, the above-described workpiece holding system 10 is not limited to an inspection device as long as it is a device having the suction stage 12, and may be introduced into other devices.

10: Workpiece holding system 12: Suction stage
14: Inspection head 16: Workpiece holding device
18: Controller 18a: Processor
18b: memory 20: suction hole
22: Suction pump 23: Atmospheric pressure opening valve
24: inspection camera 26: pressurized body
30: base plate 32: holding stage
34: rotation actuator 38: suction passage
40: fixing bolt 42: rotation axis
43: One-way clutch 46: Mounting surface
48: Stage swing axis 50f: First bottom portion
50s: second bottom portion 60: air cylinder
62: cylinder tube 64: piston
66: piston rod 70: suction port
72: open port 74: auxiliary spring
76: Connection plate 78: Advance/retract bar
80: oscillation block 81: block oscillation axis
82: ratchet pin 83, 98: spring
83a: reference surface 84: ratchet gear
88: support member 90: inclined lever
92: lever swing axis 94: force point portion
96: Action point 100: Workpiece

Claims (9)

A suction stage with one or more suction holes for suctioning a payload mounted on the upper surface, and
Equipped with a workpiece holding device mounted on the suction stage to hold the workpiece,
The workpiece holding device is
a base mounted on the suction stage;
A holding stage on which the workpiece is mounted, a holding stage capable of changing its posture with respect to the base;
a suction passage communicating with the suction hole;
An actuator driven by pneumatic pressure generated when air is sucked or supplied through the suction passage, and an actuator that changes the posture of the holding stage. According to paragraph 1,
The holding stage is rotatably installed around a vertical axis,
The actuator is a workpiece holding system characterized in that it receives the pneumatic pressure and rotates the holding stage. According to paragraph 2,
The actuator is a workpiece holding system characterized in that it includes an air cylinder that expands or contracts by receiving the pneumatic pressure. According to paragraph 3,
The actuator includes a ratchet gear that rotates in only one direction as the air cylinder expands and contracts,
The holding stage is a workpiece holding system characterized in that it rotates together with the ratchet gear. According to any one of claims 1 to 4,
A workpiece holding system characterized by having an inclination mechanism that inclines the holding stage with respect to the base. According to clause 5,
A tool head is installed above the suction stage and can be raised and lowered relative to the suction stage to perform a predetermined process on the workpiece,
The tilt mechanism is a lever capable of swinging around a horizontal axis, and has a force point portion that can be pressed by the tool head, and an action point portion that is located on the opposite side of the force point portion along the horizontal axis and pushes up the holding stage when the force point portion is pressed. A workpiece holding system that uses According to clause 6,
The bottom of the holding stage has a first bottom portion inclined at a first angle, and a second bottom portion inclined at a second angle different from the first angle,
A work holding system, characterized in that the inclination of the upper surface of the suction stage changes when the first bottom part is pushed up and the second bottom part is pushed up. According to any one of claims 5 to 7,
A reference surface that rotates with the holding stage and does not incline even when the inclination of the holding stage changes,
A workpiece holding system, characterized in that one or more magnetic elements are installed on each of the bottom surface of the holding stage and the reference surface to maintain an inclined state of the holding stage by magnetically attracting each other. A workpiece holding device mounted on a suction stage and holding a workpiece, comprising:
a base mounted on the suction stage;
A holding stage on which the workpiece is mounted, a holding stage capable of changing its posture with respect to the base;
a suction passage communicating with a suction hole formed in the suction stage;
An actuator driven by pneumatic pressure generated when air is sucked or supplied through the suction passage, and an actuator that changes the posture of the holding stage.