KR20200038574A - Plasma generating device having double structure of dielectric pipe - Google Patents

Abstract

The present invention provides a plasma generating device having a structure capable of generating a large amount of ozone and active radicals by sufficiently plasma-processing the air passing through a dielectric pipe in a discharge region. A plasma generating device of the present invention includes an outer dielectric pipe in which an air flow path is formed between the outer dielectric pipe and an inner dielectric pipe; an inner discharge electrode wound in a spiral trajectory along a longitudinal direction of the inner dielectric pipe; an outer discharge electrode extended in a spiral trajectory along a longitudinal direction of the outer dielectric pipe; a cooling water supply member for supplying cooling water to flow inside the inner dielectric pipe and outside the outer dielectric pipe; a counter electrode electrically connected to the cooling water; and a power source for generating plasma by creeping discharge around the inner discharge electrode on the outer surface of the inner dielectric pipe and around the outer discharge electrode on the inner surface of the outer dielectric pipe.

Description

Plasma generator with double dielectric tube structure {PLASMA GENERATING DEVICE HAVING DOUBLE STRUCTURE OF DIELECTRIC PIPE}

The present invention relates to a plasma generator having a double dielectric tube structure, which generates plasma between an inner dielectric tube and an outer dielectric tube surrounding the inner dielectric tube, plasma-processing air, plasma-treated air, water purification, etc. It relates to a plasma generator that can be used.

Recently, a water treatment device that induces decomposition and oxidation of pollutants and improves water quality by reacting gases such as ozone and activated radicals generated by plasma with pollutants in water has been actively developed.

A water treatment device using plasma purifies wastewater by oxidizing and decomposing various harmful substances present in water such as ozone, OH, H2O2, UV, and HO2 generated by plasma treatment of air.

1, which is described in Korean Patent Publication No. 10-1236202, shows a structure of a plasma water treatment device.

Referring to FIG. 1, a dielectric tube, a quartz tube 2, is installed in a water tank 8, and a counter electrode 4 is installed in water.

When air is supplied into the quartz tube 2 through the air inlet 6a of the head 6, air is plasma-treated by the plasma generated by the discharge electrode 3 in the quartz tube 2, and ozone and active radicals are generated. A lot of back occurs.

As this air passes through the bubble generator 7, it is dispersed in water in the form of micro-bubbles, and contaminants in the water are reacted with ozone and active radicals in the micro-bubbles to decompose and oxidize, thereby purifying.

The discharge electrode 3 installed to generate plasma in the quartz tube 2 is made of a coil shape 3a and is in close contact with the inner peripheral surface of the quartz tube 2.

The discharge electrode 3 of the coil shape 3a in close contact with the inner circumferential surface of the quartz tube 2 generates plasma discharge along the inner circumferential surface of the quartz tube 2 to plasma the air.

The air flowing inside the quartz tube 2 reacts with the plasma along the creeping discharge area, and the creeping discharge area is continuous along the longitudinal direction of the quartz tube 2, so that the air passes through the quartz tube 2 while being wide. Plasma reactions may occur.

However, in the above-described conventional plasma generating apparatus, since creeping discharge occurs on the inner circumferential surface of the quartz tube 2, the air moving along the center of the quartz tube 2 among the air supplied into the quartz tube 2 There is a problem that plasma treatment is not possible because it does not contact the creeping discharge region.

Moreover, when the supply speed of air is fast, there may be a situation in which the amount of substances such as ozone and active radicals generated due to the passage of the air through the plasma discharge region is not sufficiently performed.

The present invention has been derived from the above viewpoint, and an object of the present invention is to provide a plasma generator having a structure capable of generating a large amount of ozone and active radicals by sufficiently plasma-processing the air passing through the dielectric tube in the discharge region. Is to do.

The plasma generating apparatus of the present invention for achieving the above object is installed to surround the inner dielectric tube in the shape of a hollow tube and the inner dielectric tube from the outside, and an outer side where an air flow path is formed between the inner dielectric tube A dielectric tube, an inner discharge electrode wound in a spiral trajectory along the longitudinal direction of the inner dielectric tube as a conductive wire in close contact with the outer surface of the inner dielectric tube, and the outer dielectric as a conductive wire in close contact with the inner surface of the outer dielectric tube The outer discharge electrode extending in a spiral trajectory along the longitudinal direction of the tube, the coolant contacting the inner surface of the inner dielectric tube and the outer surface of the outer dielectric tube, flows inside the inner dielectric tube and outside the outer dielectric tube A cooling water supply member for supplying cooling water, a counter electrode electrically connected to the cooling water, and the inner discharge electrode And an outer discharge electrode and a power source connected to the counter electrode to generate plasma by creeping discharge around the inner discharge electrode on the outer surface of the inner dielectric tube and around the outer discharge electrode on the inner surface of the outer dielectric tube. It is characterized by.

In addition, the plasma generating apparatus of the present invention is characterized in that the outer discharge electrode has a larger outer diameter than the inner discharge electrode, and the inner discharge electrode extends spirally between the outer discharge electrodes extending in a spiral trajectory. .

In addition, in the plasma generating apparatus of the present invention, when the inner diameter of the outer discharge electrode is smaller than the outer diameter of the inner discharge electrode, when viewed in the longitudinal direction of the inner dielectric tube, a portion of the outer discharge electrode and a portion of the inner discharge electrode are mutually Another feature is overlapping.

In addition, the plasma generating apparatus of the present invention, the cooling water supply member includes a cylindrical conductive cover that contacts the cooling water flowing therein and surrounds the outer dielectric tube, wherein the counter electrode is the conductive cover, and the Cooling water supplied to the inside of the inner dielectric tube is supplied from the inside of the conductive cover, and is installed to coincide with the center line of the conductive cover and the center line of the outer dielectric tube, so that the inner peripheral surface of the conductive cover and the outer peripheral surface of the outer dielectric tube Another feature is that the distance of the fruit is constant along the perimeter.

The plasma generating apparatus according to the present invention generates plasma by creeping discharge around the inner discharge electrode on the outer surface of the inner dielectric tube and around the outer discharge electrode on the inner surface of the outer dielectric tube, between the inner dielectric tube and the outer dielectric tube. In the process of the air flowing through the air flow path of the alternately riding the outer and inner electrodes, the air can be plasma-treated evenly.

Compared to the case where air flows straight along the air flow path, the present invention can form a very long flow trajectory by forming a zigzag flow trajectory, where the air is sufficiently treated by plasma, and ozone and OH in the air. Active species such as radicals can be produced abundantly.

In addition, since the outer discharge electrode and the inner discharge electrode of the present invention have a spiral wound shape, when air in the air flow path hits the outer discharge electrode and the inner discharge electrode, the flow is also guided in the direction of the spiral trajectory, so that the air discharges from the outer discharge electrode and the inner discharge electrode. In addition to forming a zigzag flow trajectory while alternating the discharge electrodes, a spiral flow trajectory that rotates around the inner discharge electrode can form an additional complex trajectory. It is a structure that can be formed.

In addition, the present invention has a dual dielectric tube structure in which the outer dielectric tube wraps the inner dielectric tube, and supplies the fluid to flow while the coolant contacts the inner surface of the inner dielectric tube and the outer surface of the outer dielectric tube. By cooling together inside and outside of the space, the cooling performance is improved to prevent damage to the dielectric tube.

1 is a configuration explanatory diagram showing the overall configuration of a conventional plasma water treatment device
2 is an exploded perspective view showing an exploded configuration of a plasma generator according to an embodiment of the present invention
3 is a cross-sectional configuration diagram showing a cross-sectional structure in a state where the plasma generating device according to an embodiment of the present invention is assembled
4 is an operation explanatory diagram for explaining an action in which discharge is generated between an inner dielectric tube and an outer dielectric tube and an air is processed in the plasma generator according to the embodiment of the present invention.
5 is a cross-sectional configuration diagram showing a structure in which a part of the inner discharge electrode and the outer discharge electrode overlap in the longitudinal direction of the inner dielectric tube in the plasma generating apparatus according to the embodiment of the present invention
6 is a diagram illustrating the configuration and operation of a water treatment device in which a plasma generator is installed according to an embodiment of the present invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

2 and 3, the plasma generating apparatus according to the embodiment of the present invention is installed to surround the inner dielectric tube 20 of the hollow tube shape and the inner dielectric tube 20 from the outside, and the inner dielectric tube The outer dielectric tube 30 in which the air flow path 71 is formed between the (20) and the conductive dielectric wires in close contact with the outer surface of the inner dielectric tube 20, the longitudinal direction of the inner dielectric tube 20 The inner discharge electrode 41 wound in a spiral trajectory along with the outer discharge electrode 43 extending in a spiral trajectory along the longitudinal direction of the outer dielectric tube 30 as a conductive wire in close contact with the inner surface of the outer dielectric tube 30, , Cooling water is supplied to flow inside the inner dielectric tube 20 and outside the outer dielectric tube 30 while the coolant contacts the inner surface of the inner dielectric tube 20 and the outer surface of the outer dielectric tube 30. A cooling water supply member (50) and an opposite electrically connected to the cooling water A pole, the inner discharge electrode 41 and the outer discharge electrode 43, and the surrounding of the inner discharge electrode 41 on the outer surface of the inner dielectric tube 20 connected to the counter electrode, and the outer dielectric tube 30 It includes a power supply 60 for generating plasma by creepage discharge around the outer discharge electrode 43 on the inner surface.

The inner dielectric tube 20 is a hollow tube-shaped quartz tube is adopted and is installed to be concentric with the outer dielectric tube 30 inside the outer dielectric tube 30.

The inner dielectric tube 20 and the outer dielectric tube 30 are most preferably a quartz tube, but a glass tube or a ceramic tube may be employed.

The outer dielectric tube 30 is positioned outside the inner dielectric tube 20 so as to surround the inner dielectric tube 20 from the outside, and air is allowed to flow by forming a gap between the inner dielectric tube 20. The air flow path 71 is formed.

Since the inner dielectric tube 20 and the outer dielectric tube 30 are installed in a concentric form, it is most preferable that the air flow path 71 is an annular space having a constant thickness (height) around the inner dielectric tube 20. Do. This allows air flowing through the air flow path 71 to be uniformly plasma-treated along the outer circumference of the inner dielectric tube 20.

The inner dielectric tube 20 and the outer dielectric tube 30 are installed to have a structure of a double dielectric tube, and cooling water flows inside the inner dielectric tube 20 and outside the outer dielectric tube 30 to cool. This occurs, and plasma is generated in the air flow path 71 between the inner dielectric tube 20 and the outer dielectric tube 30 to plasma the air.

The inner discharge electrode 41 is a conductive wire that is in close contact with the outer surface of the inner dielectric tube 20 and is installed to be wound spirally along the longitudinal direction of the inner dielectric tube 20.

Accordingly, the inner discharge electrode 41 forms a coil shape, adheres to the outer surface of the inner dielectric tube 20, and generates plasma by creeping discharge from the outer surface of the inner dielectric tube 20 when the power supply 60 is supplied. Occurs.

In addition, the outer discharge electrode 43 also has a coil shape, and is a conductive wire that adheres to the inner surface of the outer dielectric tube 30 and extends in a spiral trajectory along the longitudinal direction of the outer dielectric tube 30.

The outer discharge electrode 43 is also in close contact with the inner circumferential surface of the outer dielectric tube 30 to generate plasma by creeping discharge on the inner surface of the outer dielectric tube 30 when the power supply 60 is supplied.

The creeping discharge refers to a discharge phenomenon that occurs along a boundary surface when heterogeneous dielectrics are in contact with each other. Flowing air and a discharge electrode are in contact with one surface of the dielectric tube, and water on the other surface of the dielectric tube. ) May occur in the composite dielectric region as in the present embodiment.

The inner discharge electrode 41 and the outer discharge electrode 43 are arranged to extend along each spiral trajectory in a spaced state from each other, but the outer discharge electrode 43 has an outer diameter greater than the inner discharge electrode 41, and the outer discharge electrode 43 Between the inner discharge electrode 41 extends in a spiral trajectory.

That is, the spiral trajectory of the outer electrode 43 having a large diameter has an interval to form a pitch, and the interval is such that the part wound once and the part wound next are spaced apart.

The small diameter inner discharge electrode 41 also has the same pitch as the outer discharge electrode 43 and extends in a spiral trajectory along the portion where the gap is located. Accordingly, the inner discharge electrode 41 is not positioned to directly face the outer discharge electrode 43, but is positioned to cross the outer discharge electrode 43 and face the space between the outer discharge electrodes 43.

This structure facilitates the flow of air flowing through the air flow path 71, but regularly flows the inner discharge electrode 41 and the outer discharge electrode 43 alternately so that a long extended trajectory of the zigzag is made.

In order to allow air passing through the air flow path 71 to more reliably draw a zigzag flow trajectory and form a long flow distance, the inner diameter of the outer discharge electrode 43 is installed smaller than the outer diameter of the inner discharge electrode 41, When viewed from the longitudinal direction of the inner dielectric tube 20, as shown in FIG. 5, it is preferable that a portion of the outer discharge electrode 43 and a portion of the inner discharge electrode 41 overlap each other.

The degree of overlap is preferably in the range of 1 to 10% of the wire diameter constituting the outer discharge electrode 43 or the inner discharge electrode 41.

When overlapping in too many areas, the flow of air may be prevented to reduce air treatment efficiency, and when the outer discharge electrode 43 and the inner discharge electrode 41 do not overlap, the inner peripheral surface and the inner dielectric of the outer dielectric tube 30 The amount of air passing through the plasma region generated on the outer circumferential surface of the tube 20 may not be sufficiently contacted and may increase.

On the other hand, the cooling water supply member 50 is the inner surface of the inner dielectric tube 20 and the outer surface of the outer dielectric tube 30 while the coolant is in contact with the inner and outer dielectric tube 30 of the inner dielectric tube 20 Cooling water is supplied to flow from the outside.

The cooling water supply member 50 includes a cylindrical conductive cover 51 that contacts the cooling water flowing therein and surrounds the outer dielectric tube 30, and cooling water is supplied into the conductive cover 51.

Accordingly, the cooling water supply member 50 includes a cooling water inlet 52 installed on one side of the conductive cover 51 and a cooling water outlet 53 installed on the other side, thereby cooling water inlet 52 inside the conductive cover 51. Cooling water supplied as may flow through the outer surface of the outer dielectric tube 30 and then discharged through the cooling water discharge port 53.

In addition, the cooling water supply member 50 includes a connecting pipe 55 that connects the cooling water from a portion of one side of the conductive cover 51 to be branched and introduced into the inner dielectric tube 20.

The connecting tube 55 partially cools the cooling water flowing inside the conductive cover 51 to supply cooling water to the inside of the inner dielectric tube 20.

Accordingly, the cooling water introduced through the cooling water inlet 52 is simultaneously discharged through the cooling water discharge port 53 and the connecting tube 55.

As the cooling water flowing through the cooling water inlet 52 flows along the outer circumferential surface of the outer dielectric tube 30, heat may be cooled as plasma is generated on the inner circumferential surface of the outer dielectric tube 30, and the connecting tube 55 The cooling water flows through the inside of the inner dielectric tube 20 through which heat can be cooled as plasma is generated on the outer circumferential surface of the inner dielectric tube 20.

When the plasma is continuously generated on the inner or outer surface of the inner dielectric tube 20 and the outer dielectric tube 30 without cooling, fatigue is accumulated and damaged by heat.

On the other hand, since the counter electrode is electrically connected to the cooling water, the cooling water contacts the opposite surfaces of the inner discharge electrode 41 and the outer discharge electrode 43 in the inner dielectric tube 20 and the outer dielectric tube 30. The counter electrode is electrically connected to. That is, it is a structure in which the discharge electrode and the counter electrode are respectively contacted on both surfaces of the dielectric tube with the dielectric interposed therebetween.

Accordingly, the inner dielectric tube 20 and the outer dielectric tube 30 form a structure in which the discharge electrode and the counter electrode are in electrical contact with each other from inside and outside.

In this embodiment, the counter electrode is preferably the conductive cover 51 of the cooling water supply member 50.

The power supply 60 is connected between the inner discharge electrode 41 and the counter electrode, and is connected between the outer discharge electrode 43 and the counter electrode, so that the inner discharge electrode 41 is formed on the outer surface 21 of the inner dielectric tube 20. Plasma due to creeping discharge is generated around the outside and around the outer discharge electrode 43 on the inner surface 31 of the outer dielectric tube 30.

To this end, the inner discharge electrode 41 and the outer discharge electrode 43 have a structure commonly connected to one terminal of the power source 60, and the counter electrode is connected to the cooling water to the other terminal of the power source 60. The cooling water is mediated so that the counter electrode is electrically and simultaneously connected to the inner circumferential surface of the inner dielectric tube 20 and the outer circumferential surface of the outer dielectric tube 30.

The power supply 60 may use a commercial electronic neon transformer having a high voltage pulsed AC power.

The conductive cover 51 is installed so that the center line of the conductive cover 51 and the center line of the outer dielectric tube 30 coincide, and the distance between the inner peripheral surface of the conductive cover 51 and the outer peripheral surface of the outer dielectric tube 30 is circumferential. It is configured to be constant.

This can induce that the plasma generated inside the outer dielectric tube 30 is relatively uniform in the entire radial direction.

One end of the outer dielectric tube 30 is gripped by being inserted into one end support member 72, and the other end of the outer dielectric tube 30 is gripped by being inserted into the other end support member 73.

Once the support member 72 is assembled with the inner dielectric tube 20 in a state surrounding one end of the inner dielectric tube 20, one end of the inner dielectric tube 20 is connected to the connecting tube body 55 to receive cooling water. .

The other end support member 73 is also assembled with the inner dielectric tube 20 in a state surrounding the other end of the inner dielectric tube 20, and discharges cooling water from the other end of the inner dielectric tube 20 to the outside.

One end support member 72 is provided with an air suction path 72a through which air is sucked and supplied to the air flow path 71, and the other end support member 73 is plasma treated and discharged from the air flow path 71. The air discharge path 73a for air to be said is provided.

Hereinafter, a process in which plasma is generated between the inner dielectric tube 20 and the outer dielectric tube 30 and air is plasma treated according to an embodiment of the present invention will be described.

Referring to FIG. 4, voltages are applied to the inner and outer discharge electrodes 41 and 43 from the power supply 60, and the outer surface 21 and the outer dielectric tube 30 of the inner dielectric tube 20 by applying voltages Plasma is generated on the inner surface (31).

On the outer surface 21 of the inner dielectric tube 20, creeping discharges spread on the surface by riding on the outer surface 21 of the inner dielectric tube 20 around the portion where the inner discharge electrode 41 meets.

Accordingly, the plasma region P1 is formed on the outer circumferential surface of the inner dielectric tube 20 by creeping discharge to plasma the air flowing near the outer circumferential surface of the inner dielectric tube 20.

In addition, in the inner surface 31 of the outer dielectric tube 30, the plasma region by creeping discharge spreading on the surface by riding on the inner surface 31 of the outer dielectric tube 30 around the portion where the outer discharge electrode 43 meets ( P2) occurs.

Accordingly, a plasma region is formed by creeping discharge on the inner circumferential surface of the outer dielectric tube 30 to plasma the air flowing near the inner circumferential surface of the outer dielectric tube 30.

In this embodiment, the outer discharge electrode 43 has a larger outer diameter than the inner discharge electrode 41, and is configured to extend the inner discharge electrode 41 between the outer discharge electrodes 43 extending in a spiral trajectory. .

As shown in FIG. 4, air flowing through the air flow path 71 alternately rides over the outer discharge electrode 43 and the inner discharge electrode 41 to form a zigzag flow trajectory, and the inner dielectric tube ( The plasma region formed on the outer surface 21 of 20) and the plasma region formed on the inner surface 31 of the outer dielectric tube 30 alternately pass.

This allows the flowing air to be alternately plasma-processed from the inside and outside, and the air can be stirred by the flow change in the process of riding over the outer discharge electrode 43 or the inner discharge electrode 41, so that the air as a whole is evenly plasmad. Can be processed.

In addition, compared to the case where air flows straight along the air flow path 71, by forming a very long flow trajectory by forming a zigzag flow trajectory, the air can be sufficiently processed by plasma, and thus ozone, OH in the air Active species such as radicals can be produced abundantly.

Moreover, since the outer discharge electrode 43 and the inner discharge electrode 41 of this embodiment have a spiral wound shape, when the air of the air flow path 71 hits the outer discharge electrode 43 and the inner discharge electrode 41, the spiral trajectory As the flow is also guided in the direction of, the flow trajectory through which the air flows is further increased.

That is, the air in the air flow path 71 forms a zigzag flow trajectory while alternately meeting the outer discharge electrode 43 and the inner discharge electrode 41, and also the spiral flow trajectory rotating around the inner discharge electrode 41 This composite trajectory can be achieved.

Accordingly, the configuration of the present embodiment can form a very long path of the plasma-treated air even in a narrow space, and the plasma-treated water treatment device equipped with the plasma generating device of the present embodiment is plasma-treated so that the air having abundant active species is underwater. By dispersing in, water treatment efficiency can be further improved.

The plasma-treated air is rich in ozone and active radicals, and is supplied in the form of bubbles inside the water to be treated.

That is, as shown in FIG. 6, in the process of passing through the neck portion 82, where the flow cross-section of the target water flowing through the flow pipe 81 is narrowed, the speed of the target water is increased and the pressure is lowered to connect the plasma generating device ( By naturally absorbing the air of 10), the plasma-treated air is dispersed in a bubble form in the water to be treated.

The flow pipe 81 is to be introduced into the cooling water inlet 52 of the cooling water supply member 50, and cooling water is discharged from the other ends of the cooling water outlet 53 and the inner dielectric tube 20 to be supplied to the water tank 83. It is composed.

The air contains a large amount of ozone and active radicals generated while passing through the plasma region.

Accordingly, air is sucked in the form of air bubbles to the water to be treated, and the water to be treated including air bubbles flows through the flow pipe 81, and flows through the inside of the cooling water supply member 50, and the water tank ( 83) In the state of entering, ozone and active radicals decompose and oxidize pollutants while continuously contacting and flowing with bubbles.

The purified water to be treated is discharged through the discharge port 84.

Although the preferred embodiments of the present invention have been described above, the above embodiments are only one embodiment within the scope of the technical spirit of the present invention, and those skilled in the art within the technical spirit of the present invention. Of course, other modified implementations are possible.

10; Plasma generator 20; Inside dielectric tube
21; Inner dielectric tube outer surface 30; External dielectric tube
31; Outer dielectric tube inner surface 41; Inner discharge electrode
43; Outer discharge electrode 50; Cooling water supply member
51; Conductive cover 52; Cooling water inlet
53; Cooling water outlet 55; Connector
60; Power 71; Air flow path
72; First support member 72a; Air intake furnace
73; The other end supporting member 73a; Air exhaust furnace
81; Flow tube 82; Neck
83; Water tank 84; outlet
P1, P2; Plasma area

Claims (4)

Hollow tube-shaped inner dielectric tube 20,
The outer dielectric tube 30 is installed to wrap the inner dielectric tube 20 from the outside, and an air flow path 71 is formed between the inner dielectric tube 20,
An inner discharge electrode (41) wound in a spiral trajectory along the longitudinal direction of the inner dielectric tube (20) as a conductive wire in close contact with the outer surface (21) of the inner dielectric tube (20),
An outer discharge electrode (43) extending in a spiral trajectory along the longitudinal direction of the outer dielectric tube (30) as a conductive wire in close contact with the inner surface (31) of the outer dielectric tube (30),
Cooling water is allowed to flow inside the inner dielectric tube 20 and outside the outer dielectric tube 30 while cooling water contacts the inner surface of the inner dielectric tube 20 and the outer surface of the outer dielectric tube 30. Cooling water supply member 50 to supply,
A counter electrode electrically connected to the cooling water,
The inner discharge electrode 41 and the outer discharge electrode 43 are connected to the counter electrode, the outer surface 21 of the inner dielectric tube 20 around the inner discharge electrode 41, and the outer dielectric tube 30 Plasma generator characterized in that it comprises a power supply 60 for generating plasma by creeping discharge around the outer discharge electrode 43 on the inner surface 31 of) According to claim 1,
The outer discharge electrode 43 has a larger outer diameter than the inner discharge electrode 41, and the inner discharge electrode 41 extends between the outer discharge electrodes 43 extending in a spiral trajectory. Plasma generator According to claim 2,
When the inner diameter of the outer discharge electrode 43 is smaller than the outer diameter of the inner discharge electrode 41, and viewed from the longitudinal direction of the inner dielectric tube 20, a part of the outer discharge electrode 43 and the inner discharge electrode 41 Plasma generator, characterized in that part of the overlap with each other According to claim 1,
The cooling water supply member 50,
It includes a cylindrical conductive cover 51 in contact with the cooling water flowing in the interior and surrounding the outer dielectric tube 30,
The counter electrode is the conductive cover 51,
The cooling water supplied to the inside of the inner dielectric tube 20 is supplied from the inside of the conductive cover 51,
The center line of the conductive cover 51 and the center line of the outer dielectric tube 30 are installed so that the distance between the inner circumferential surface of the conductive cover 51 and the outer circumferential surface of the outer dielectric tube 30 is constant along the circumference. Plasma generator characterized in that

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