KR20180124495A - Structure with various patterns and manufacturing method thereoff - Google Patents

Abstract

A structure with various patterns which is excellent in the wavelength selectivity of light to be absorbed and emitted and a manufacturing method thereof are provided. According to the present invention, the structure with various patterns includes a substrate including a cavity on a surface thereof and a metal dot formed on the surface of the substrate.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite pattern structure,

The present invention relates to a composite pattern structure and a method of manufacturing the same, and more particularly, to a composite pattern structure having excellent wavelength selectivity of light absorbed and emitted and a method of manufacturing the same.

The photothermal conversion device is a device for converting thermal energy into electric energy and is becoming a candidate for a next generation secondary battery in that it can be made light in weight with high energy density. However, it is still necessary to improve efficiency in order to replace lithium batteries, which are currently widely used as secondary batteries.

The photovoltaic conversion device consists of a combustor that burns fossil fuel and generates heat energy, a thermal body that receives thermal energy to emit radiant energy, and a photoelectric cell that converts radiation energy into electric energy.

The phototransformer is driven by raising the temperature of a heat source by burning the fuel through a combustor and supplying electric energy generated by the photovoltaic cell to the device. In this case, the compatibility of each component such as a combustor, a thermal body, a photoelectric cell, and a device circuit determines the overall efficiency of the photodetector. Particularly, a radiant emission distribution by wavelength of a thermal body is a key element of energy conversion efficiency .

However, since the spectrum of light generated by combustion occurs in a wide wavelength range, and only photons having energy above the band gap energy of the photoelectric cell are utilized for power generation, the power generation efficiency is generally very low. In order to improve power generation efficiency, a method of introducing a multidimensional photonic crystal structure or a meta structure into a thermal body is widely studied. The photonic crystal structure controls the photonic bandgap of the material to increase the emission of a desired wavelength band. The meta structure is a method of controlling the emission spectrum by modifying the dispersion characteristic inherent to the material by introducing a nano-sized structure.

Complex processes such as photolithography and E-beam lithography are commonly used to fabricate high-quality metal nanostructures in a thermal body. These processes have a problem in that expensive materials and toxic substances such as photoresist and etching liquid must be used. Due to the nature of the process, the process can be limited to a flat substrate.

Another problem that these metal nanopatterns are applied to the thermoelectric power generation system is the high temperature oxidation characteristics of the metal. Materials such as tungsten and tantalum, which have been conventionally used as a heat radiation material, are oxidized at a temperature of several hundreds of degrees Celsius or more, and it is therefore difficult to expect absorption / radiation characteristics of near infrared wavelengths to be improved. Therefore, the metal nanopatterns conventionally developed for the thermoelectric power generation system have to be utilized only in an atmosphere where no vacuum and oxygen exist.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a composite pattern structure excellent in wavelength selectivity of light absorbed and emitted and a method of manufacturing the same.

According to an aspect of the present invention, there is provided a composite pattern structure including: a substrate including a cavity on a surface thereof; And a metal dot formed on the surface of the substrate.

The cavity may exhibit photonic crystal properties.

The metal dot may be formed on at least one of the interior of the cavity and the upper surface of the substrate.

The metal dot may comprise at least one of platinum, gold, silver and palladium.

The metal dot may have a diameter of 10 nm to 900 nm.

The substrate may comprise any one of SiCN, SiC, and Si.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: forming a cavity on a surface of a substrate; A metal layer forming step of forming a metal layer on the surface of the substrate; And a metal dot forming step of converting the metal layer into a metal dot by heat-treating the substrate having the metal layer formed thereon.

The cavity forming step may include: applying an imprinting pattern for forming a cavity on the polymer resin layer; Ceramicizing the polymer resin; And removing the imprinting pattern for forming the cavity.

The cavity forming step comprises: applying the imprinting resin on the substrate; Applying an imprinting pattern for forming a cavity on the substrate to which the imprinting resin is applied; And etching the substrate according to the imprinting resin to which the pattern is applied.

The metal dot forming step may be a step in which the metal layer is dewetted by heat treatment and converted into metal dots.

According to another aspect of the present invention, there is provided a combustion apparatus comprising: a combustion section generating heat energy; A heat radiation part including a three-dimensional nano pattern formed by a cavity and a metal dot pattern and receiving thermal energy from the combustion part to emit radiant energy; And a photoelectric conversion unit that receives the radiant energy radiated from the thermal radiation unit and converts the radiant energy into electric energy.

According to another aspect of the present invention, there is provided a sensor plate for a biosensor having an excellent absorption wavelength selectivity including a three-dimensional nanostructure pattern and a metal dot pattern on a surface thereof.

According to the embodiments of the present invention, unlike conventional metal nano patterns produced by using a lithography process using complex and toxic materials, a method of depositing a desired metal material on a nano structure formed by nanoimprinting and then heating It is possible to manufacture a high-quality metal nano-pattern without limitation of a substrate by a simple, environmentally friendly, and cost-saving process.

In addition, in manufacturing metal nano patterns according to conventional processes, material loss can be prevented by using dewetting characteristics of metals rather than etching processes in which materials are lost, so that expensive noble metals can be used, .

Accordingly, when a relatively inexpensive metal such as tungsten or tantalum is used, it is utilized only in an atmosphere in which vacuum and oxygen are not present due to the property of being oxidized at high temperature. However, according to the present invention, a noble metal can be used, So that it can be utilized even in an environment where oxygen exists.

FIGS. 1 to 3 are views provided in the description of a method for manufacturing a composite pattern structure according to the present invention.
Fig. 4 is a view for explaining a method of forming cavities in a method of manufacturing a composite pattern structure according to the present invention.
FIG. 5A is a plan view of a SiCN substrate formed with a cavity according to the present invention, FIG. 5B is an enlarged view of FIG. 5A, and FIG.
FIGS. 6 to 9 are views for explaining a method of forming cavities in a method of manufacturing a composite pattern structure according to another embodiment of the present invention.
FIG. 10A is a plan view of a Si substrate formed with a cavity according to the present invention, and FIG. 10B is a perspective view of FIG. 10A.
11A is a plan view of a SiCN substrate on which a composite pattern is formed according to the present invention, and FIG. 11B is a perspective view of FIG. 11A.
12A is a plan view of a Si substrate on which a composite pattern is formed according to the present invention, and FIG. 12B is a perspective view of FIG. 12A.
FIG. 13A is a plan view of a Si substrate on which a composite pattern is formed according to the present invention, FIG. 13B is a cross-sectional view of the metal dot in FIG. 13A, and FIG.
FIG. 14 is a result of element analysis according to EDS (Energy Dispersive Spectrometry) analysis of a composite pattern formed according to the present invention.
15 is a graph showing the absorbance of the Si substrate, the Si substrate on which the metal layer-cavity is formed, and the Si substrate on which the metal dot-cavity is formed according to wavelengths.
16 is a view showing a cylindrical substrate on which a composite pattern according to the present invention is formed.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are provided to enable those skilled in the art to more fully understand the present invention. It should be understood that while the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, The present invention is not limited thereto.

A composite pattern structure according to the present invention includes: a substrate including a cavity on a surface thereof; And a metal dot formed on the surface of the substrate. That is, the composite pattern structure of the present invention is a structure including a pattern in which a three-dimensional nano pattern composed of a cavity formed on a surface and a metal dot pattern on a three-dimensional nano pattern are combined.

The composite pattern structure 100 may include: a cavity forming step of forming a cavity on a surface of a substrate; A metal layer forming step of forming a metal layer on the surface of the substrate; And a metal dot forming step of converting the metal layer into a metal dot by heat treating the substrate having the metal layer formed thereon. FIGS. 1 to 3 are views provided in the description of a method for manufacturing a composite pattern structure according to the present invention. Hereinafter, a description will be given with reference to Figs. 1 to 3. Fig.

In order to manufacture the composite pattern structure 100, first, a cavity 120 is formed on the surface of the substrate 110. In the present invention, the 'cavity' is a three-dimensional structure formed on the substrate 110, and may mean a hole formed by being drawn into the substrate from the substrate. The 'cavity' . The 'cavity' is a pattern capable of setting at least an area where the metal dot 130 can be formed on the surface of the substrate 110.

In particular, the cavity 120 can exhibit photonic crystal characteristics as a three-dimensional nanostructure. A photonic crystal means a structure capable of adjusting the reflection and selective light transmission characteristics by changing the arrangement between particles. When the composite pattern structure 100 has a photonic crystal structure, light can be absorbed in a desired wavelength region and emitted, so that the cavity can be controlled to enhance light absorption wavelength control and selectivity. In FIG. 1, any shape can be implemented as long as the cross section of the cavity 120 is a square or a semi-spherical shape or a triangular shape, and the cavity 120 forms a pattern to exhibit photonic crystal characteristics. In particular, the photonic crystal structure of the three-dimensional shape can easily confine light to facilitate resonance of light, so that light absorption and light emission efficiency are excellent. Therefore, the shape, size, diameter, or depth of the cavity 120 The wavelength band of the light, the emission efficiency, and the like.

When the cavity 120 is formed on the substrate 110, a metal layer 131 is formed on the surface of the substrate 110 (FIG. 2). The metal layer may be formed as a metal thin film layer on the surface of the substrate 110 or in the cavity 120 in consideration of a position where the metal dot 130 is desired to be formed. The metal layer 131 may be formed by depositing a metal on the substrate 110.

As the metal that can be used as the metal dot 130, a metal excellent in light absorption and light emission efficiency can be used, and metals such as tungsten, tantalum and nickel, and precious metals such as platinum, gold, silver and palladium can be used . Metals such as tungsten, tantalum, and nickel may be in a state of low cost or oxidized at high temperatures, and noble metals such as platinum, gold, silver and palladium may not be oxidized at high temperatures, . The method for fabricating a composite pattern structure according to the present invention can minimize metal loss, and thus it is possible to use a noble metal.

After the metal layer 131 is formed, the substrate on which the metal layer 131 is formed is heat-treated. The metal layer 131 is converted into metal dots 130 due to the heat treatment process. The metal dots 130 may be formed in both the cavity 120 and the upper surface of the substrate 110 when the metal layer 131 is formed in both the cavity 120 and the upper surface of the substrate as shown in FIG. The heat treatment may be performed at a temperature at which the metal layer 131 can be converted into the metal dots 130, depending on the metal.

The reason why the metal layer 131 can be converted into the metal dot 130 is because the metal layer 131 can be dewetted due to the heat treatment. Dewetting is a phenomenon occurring in a metal, which is a phenomenon that when the metal layer is exposed to high temperatures, it becomes entangled with each other. The dewetting phenomenon starts with respect to the cavity 120 when the cavity 120 is formed in the substrate 110 as in the present invention, 130 are formed. Therefore, the size of the metal dot 130 may vary depending on the thickness of the metal layer 131 and the pitch of the three-dimensional nanopattern formed by the cavity 120. For example, metal dots may be 10 nm to 900 nm in diameter.

The substrate 110 may be a durable substrate such as a heat treatment or a deposition process when the metal layer 131 is formed. Also, it is preferable that the substrate 110 is easily formed in the cavity 120. For example, the substrate may comprise any one of SiCN, SiC, and Si.

Referring to FIG. 3, the composite pattern structure 100 includes a primary pattern formed by the cavity 120 and a secondary pattern formed by the metal dot 130 on the substrate 110, The wavelength selectivity is increased according to the 'antenna effect' caused by the metal dot 130, which is a secondary pattern, together with the increase of the light absorption / emission efficiency by the pattern, so that a light absorber or a photodiode with excellent characteristics can be realized.

Fig. 4 is a view for explaining a method of forming cavities in a method of manufacturing a composite pattern structure according to the present invention. As a method of forming the cavity 120 on the substrate 110, the substrate 110 may be a polymeric resin and a material which can be a ceramic substrate by heat treatment.

As shown in FIG. 4, the imprinting pattern 140 for forming cavities is applied on the polymer resin layer, and the polymer resin is made ceramic. When the imprinting pattern 140 is removed, a substrate 110 having a pattern formed thereon can be simply obtained. The polymer resin that can be used in this embodiment may be one which is converted into a ceramic substrate by heat treatment such as allylhydridopolycarbosilane (AHPCS). 5A is a plan view of a SiCN substrate having a cavity according to the present embodiment, FIG. 5B is an enlarged view of FIG. 5A, and FIG. 5C is a cross-sectional perspective view.

FIGS. 6 to 9 are views for explaining a method of forming cavities in a method of manufacturing a composite pattern structure according to another embodiment of the present invention. In order to form the cavity 120 on the substrate 110, the imprinting resin 151 is first applied to the substrate 110 in this embodiment (FIG. 6). Since the imprinting resin 151 must be removed before the imprinting resin 151 is applied, the releasing layer 152 for removing the imprinting resin 151 is first applied.

The imprinting pattern 140 is then applied to the imprinting layer 151 and the release layer 152 (Figure 7) and the imprinting pattern 140 is removed, (Fig. 8). When the substrate 110 is etched using the imprinting resin 151 having the pattern as a mask, the cavity 120 can be formed on the substrate 110 by a simple and environmentally friendly process (FIG. 9). Then, the imprinting layer 151 is removed together with the release layer 152.

According to this embodiment, when a substrate having characteristics that an etching method should be used in forming a pattern is used, a mask having a pattern formed by the imprinting method can be manufactured, so that the process can be performed simply and environmentally friendly. FIG. 10A is a plan view of a Si substrate formed with a cavity according to the present invention, and FIG. 10B is a perspective view of FIG. 10A. It can be confirmed that the cavity 120 is formed on the substrate to form a three-dimensional nano pattern.

A 20 nm thick platinum thin film was deposited on the SiCN substrate and the Si substrate, and heat treated at 1,000 ° C to obtain a composite pattern structure. FIG. 11A is a plan view of a SiCN substrate formed with a composite pattern according to the present invention by an electron microscope, and FIG. 11B is a perspective view of FIG. 11A. 11A, it is confirmed that the metal dot 130 is formed between the cavity 120 and the cavity 120. FIG.

12A is a plan view of a composite pattern structure obtained by depositing a platinum thin film on a Si substrate and heat-treating the same at the same temperature, and FIG. 12B is a perspective view. Similar to FIG. 11, it can be seen that a metal dot 130 is formed between the cavities 120, and each metal dot 130 is uniformly formed to form a metal dot pattern. Also, it was confirmed that the composite pattern structure 100 can be prevented from being oxidized at high temperature by using platinum which is a noble metal. According to the present invention, the metal dot is formed by dewetting the metal layer to form a metal dot pattern without loss of the metal layer. Therefore, even when using high-temperature reliable and durable noble metals such as platinum, it is possible to suppress the price increase, which can be commercialized, improve the reliability of the product, and can be used in places where oxygen exists, Do.

In order to identify metal dots formed on the composite pattern structure made of Si substrate, component analysis was performed. FIG. 13A is a plan view of a Si substrate on which a composite pattern is formed according to the present invention, FIG. 13B is a cross-sectional view of the metal dot in FIG. 13A, and FIG.

In FIG. 13B, SiO ₂ was generated on the surface of the Si substrate due to the high-temperature heat treatment. However, according to the diffraction pattern analysis of FIG. 13C, platinum was confirmed as pure unplashed platinum.

FIG. 14 is a result of element analysis according to EDS (Energy Dispersive Spectrometry) analysis of a composite pattern formed according to the present invention. According to the result of the elemental analysis, the platinum dot pattern formed only represents a pure metal component, and it was confirmed that according to the present invention, a dot-shaped pattern containing only pure metal can be formed.

15 is a graph showing the absorbance of the Si substrate, the Si substrate on which the metal layer-cavity is formed, and the Si substrate on which the metal dot-cavity is formed according to wavelengths. The Si substrate on which the metal layer-cavity was formed had a slightly increased absorbance over the propagation region compared to the absorbance of the Si substrate, but the absorbance at 500 nm to 1300 nm was lowered.

On the other hand, the Si substrate having the metal dot-cavity formed according to the present invention showed an increase in absorbance over the entire wavelength range and an increase in the absorbance in the range of 500 nm to 1300 nm. It is interpreted that the resonance effect of surface plasmon resonance increases the absorbance because the frequency of incident light is similar to the frequency of surface free electrons of metal dot.

16 is a view showing a cylindrical substrate on which a composite pattern according to the present invention is formed. In the method of fabricating a composite pattern structure according to the present invention, since the nanoimprinting method is used, there are few restrictions on the shape and material of the substrate, and it is understood that metal nano patterns can be formed even on a cylindrical substrate as shown in FIG.

 According to another aspect of the present invention, there is provided a combustion apparatus comprising: a combustion section generating heat energy; A heat radiation part including a three-dimensional nano pattern formed by a cavity and a metal dot pattern and receiving thermal energy from the combustion part to emit radiant energy; And a photoelectric conversion unit that receives the radiant energy radiated from the thermal radiation unit and converts the radiant energy into electric energy. The composite pattern structure of the present invention has high light absorption / emission efficiency and excellent wavelength selectivity, and can be used for a thermal body of a photodetector.

The phototransformer is driven by raising the temperature of a heat source by burning the fuel through a combustor and supplying electric energy generated by the photovoltaic cell to the device. In the overall efficiency of the photodetector, the radiant emission distribution by wavelength of the heat radiation is a key element of the energy conversion efficiency. The composite pattern structure according to the present invention has a composite nano pattern of a metal dot formed on a surface and a three-dimensional nano pattern composed of a cavity, and thus has high light absorption / emission efficiency and excellent wavelength selectivity. Can be maximized. The wavelength selectivity of the photodetector can be adjusted as desired by adjusting the metal dot size of the metal dot pattern, the pitch of the cavity, the diameter of the cavity, and the thickness of the metal thin film.

According to this characteristic, the composite pattern structure according to the present invention can be applied to a biosensor capable of sensing a biomaterial by selectively absorbing a catalyst or a specific wavelength of a battery.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, many modifications and changes may be made by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims. The present invention can be variously modified and changed by those skilled in the art, and it is also within the scope of the present invention.

100 complex pattern structure
110 substrate
120 cavity
130 metal dot
131 metal layer
140 imprinting pattern
151 Imprinting Resin
152 release layer

Claims (12)

A substrate including a cavity on its surface; And
And a metal dot formed on the surface of the substrate. The method according to claim 1,
Wherein the cavity exhibits photonic crystal characteristics. The method according to claim 1,
Wherein the metal dot is formed on at least one of the inside of the cavity and the top surface of the substrate. The method according to claim 1,
Wherein the metal dot comprises at least one of platinum, gold, silver, and palladium. The method according to claim 1,
Wherein the metal dot has a diameter of 10 nm to 900 nm. The method according to claim 1,
remind Wherein the substrate comprises any one of SiCN, SiC, and Si. A cavity forming step of forming a cavity on the surface of the substrate;
A metal layer forming step of forming a metal layer on a surface of the substrate; And
And a metal dot forming step of heat treating the substrate on which the metal layer is formed to convert the metal layer into a metal dot. The method of claim 7,
Wherein the cavity forming step comprises: applying an imprinting pattern for forming a cavity on the polymer resin layer;
Ceramicizing the polymer resin; And
And removing the imprinting pattern for forming the cavity. The method of claim 7,
Wherein the cavity forming step comprises: applying an imprinting resin on the substrate;
Applying an imprinting pattern for forming a cavity on the substrate to which the imprinting resin is applied; And
And etching the substrate according to the imprinting resin to which the pattern is applied. The method of claim 7,
Wherein the metal dot forming step is a step of dewetting the metal layer by heat treatment and converting into metal dots. A combustion section for generating heat energy;
A heat radiation part including a three-dimensional nano pattern formed by a cavity and a metal dot pattern and receiving thermal energy from the combustion part to emit radiant energy; And
And a photoelectric conversion unit that receives the radiation energy emitted from the thermal radiation unit and converts the received radiation energy into electric energy. A sensing substrate for a biosensor having excellent absorption wavelength selectivity including a three-dimensional nanostructure pattern and a metal dot pattern on a surface.

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