KR20180055380A - Air bearing device and temperature compensation method thereof - Google Patents

Abstract

The present invention relates to an air bearing device and a temperature compensating method thereof, in which cold pressurized air supplied from an air bearing is quickly discharged to the outside, and air of controlled temperature is supplied, thereby minimizing thermal deformation of a stage by the cold pressurized air supplied from the air bearing. The air bearing device includes: a center body having a pressurized air supply passage for supplying pressurized air from an upper portion to a lower portion; a middle body having an air discharge passage for discharging air from an outer lower portion of the center body to the upper portion; and a cover body having an air supply passage to supply air of controlled temperature from an outer upper portion of the middle body to the upper portion.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an air bearing device,

Various embodiments of the present invention are directed to air bearing devices and methods of temperature compensation thereof.

Air bearings generally refer to bearings using air as the medium instead of lubricating oil. Since the viscosity of the air is only about 1/1000 of the lubricating oil, bearing friction is very small and a bearing capable of withstanding high-speed rotation can be easily obtained. Such air bearings include dynamic pressure air bearings that utilize hydrodynamic pressures generated by the viscosity of air as the shaft rotates, and static pressure air bearings that utilize static pressure externally.

On the other hand, such an air bearing is known to optimize the bearing performance when the temperature of the compressed air supplied is approximately 20 ° C to 25 ° C. In precision machines, the temperature of the peripheral environment of the bearing and the structure of the peripheral device (for example, guide rails, supporting structure, etc.) must be kept constant to reduce errors due to thermal expansion. It is a reality that the temperature of the environment and equipment is rising above the air temperature supplied to the air bearing.

Therefore, the temperature of the air coming out of the air bearing is different from the surrounding environment temperature, making a local temperature deviation in the precision machine, and thus the mechanical structure and the thermal expansion degree of the mechanical parts are made different, thereby generating a mechanical error.

For example, in a guide rail where an air bearing is coupled, low-temperature compressed air supplied through an air bearing cools a predetermined region of the guide rail as the air bearing moves. At this time, And an error in the moving distance of the air bearing, resulting in a reduction in the reliability of the precision machine. Of course, this also makes it difficult to keep the temperature around the air bearing constant.

The above-described information disclosed in the background of the present invention is only for improving the understanding of the background of the present invention, and thus may include information not constituting the prior art.

SUMMARY OF THE INVENTION An object of the present invention is to provide an air bearing device and a method of controlling the temperature thereof. That is, a problem to be solved by the present invention is to provide a method and apparatus for rapidly reducing the temperature deformation of a stage due to low-temperature compressed air supplied from an air bearing by rapidly discharging the low-temperature compressed air supplied from an air bearing to the outside, And a method of compensating the temperature of the air bearing device.

The air bearing capable of temperature compensation according to various embodiments of the present invention includes a center body having a compressed air supply passage for supplying compressed air from an upper portion to a lower portion; A middle body on an outer side of the center body and having an air exhaust passage for exhausting air from a lower portion to an upper portion; And a cover body having a temperature-controlled air supply passage formed therein for supplying temperature-controlled air from the upper part to the lower part of the middle body.

The upper end of the compressed air supply passage of the center body may further be connected to a compressed air supply unit for supplying compressed air at 20 ° C to 25 ° C.

A vacuum pump for exhausting air may be further connected to the upper end of the air exhaust passage of the middle body.

A blower for supplying temperature-controlled air may further be connected to the upper end of the temperature-controlled air supply passage of the cover body.

An air temperature controller may further be connected to the upper end of the blower and the temperature-controlled air supply passage.

An ambient temperature sensor for sensing an ambient temperature of the air bearing device; A bearing temperature sensor for sensing the temperature of the air bearing device; The air conditioner according to claim 1, further comprising a stage temperature sensor for sensing a temperature of the stage on which the air bearing device is mounted, wherein the stage temperature is set to a predetermined set temperature, Temperature controlled air can be supplied so that the set temperature is not changed.

The air temperature controller may include: a heater for raising the air temperature; Controlled air having a temperature higher than the average temperature by operating the heater when the average temperature of the ambient temperature and the bearing temperature is lower than the set temperature, If the average temperature of the ambient temperature and the bearing temperature is higher than the preset temperature, the cooler may be operated to supply temperature-controlled air having a temperature lower than the average temperature.

A method of compensating temperature of an air bearing according to various embodiments of the present invention includes: an ambient temperature sensing step of sensing an ambient temperature of an air bearing device; A stage temperature sensing step of sensing a temperature of the stage on which the air bearing device is mounted; A bearing temperature sensing step of sensing a temperature of the air bearing device; And a temperature controlled air supply step of supplying temperature-controlled air so that the stage temperature is set to a predetermined set temperature and the set temperature of the stage is not changed by the ambient temperature and the bearing temperature.

Wherein the temperature controlled air supply step supplies temperature-controlled air having a temperature higher than the average temperature when the average temperature of the ambient temperature and the bearing temperature is lower than the set temperature, and the average temperature of the ambient temperature and the bearing temperature Controlled air having a temperature lower than the average temperature can be supplied.

Various embodiments of the present invention provide an air bearing device and a method of temperature compensation thereof. In other words, various embodiments of the present invention can provide an air bearing device that quickly expels the low-temperature compressed air supplied from the air bearing device and additionally supplies additional temperature-controlled separate air, (For example, thermal deformation of the stage) can be minimized, and a temperature compensation method for the same.

In other words, the various embodiments of the present invention further provide an air bearing device, which further comprises an exhaust passage through which the low-temperature compressed air is exhausted and a vacuum pump connected thereto, so that the low-temperature compressed air is quickly released without remaining in the constant- .

In addition, various embodiments of the present invention further include a blower and an air temperature regulator to further supply the air bearing device with air at a specific temperature (i.e., separate air with controlled temperature) (I.e., maintaining the temperature of the stage at a predetermined temperature) can be maintained.

Furthermore, various embodiments of the present invention provide a method and apparatus for measuring the temperature of a moving stage such as a guide rail by measuring the ambient temperature, the compressed air temperature, and the temperature of the moving stage such as the guide rail, Of the air bearing.

1A and 1B are a plan view and a cross-sectional view showing a mechanical configuration of an air bearing device capable of temperature compensation according to various embodiments of the present invention.
2 is a block diagram showing an electrical configuration of an air bearing device capable of temperature compensation according to various embodiments of the present invention.
3 is a flow chart illustrating a method of temperature compensation of an air bearing according to various embodiments of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following drawings, thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals denote the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. In the present specification, the term " connected "means not only the case where the A member and the B member are directly connected but also the case where the C member is interposed between the A member and the B member and the A member and the B member are indirectly connected do.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise, " and / or "comprising, " when used in this specification, are intended to be interchangeable with the said forms, numbers, steps, operations, elements, elements and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

It is to be understood that the terms related to space such as "beneath," "below," "lower," "above, But may be utilized for an easy understanding of other elements or features. Terms related to such a space are for easy understanding of the present invention depending on various process states or use conditions of the present invention, and are not intended to limit the present invention. For example, if an element or feature of the drawing is inverted, the element or feature described as "lower" or "below" will be "upper" or "above." Thus, "lower" is a concept encompassing "upper" or "lower ".

In addition, the controller (controller) and / or other associated equipment or components in accordance with the present invention may be implemented using any suitable hardware, firmware (e.g., custom semiconductor), software, or any appropriate combination of software, . For example, the various components of a controller (controller) and / or other associated equipment or components in accordance with the present invention may be formed on one integrated circuit chip or on a separate integrated circuit chip. In addition, the various components of the controller (controller) may be implemented on a flexible printed circuit film and formed on the same substrate as the tape carrier package, printed circuit board, or controller (controller). In addition, the various components of the controller (controller) may be a process or thread executing on one or more processors in one or more computing devices, which executes computer program instructions to perform various functions, And interact with other components. The computer program instructions are stored in a memory that can be executed on a computing device using standard memory devices, such as, for example, random access memory. The computer program instructions may also be stored in other non-transitory computer readable media, such as, for example, CD-ROMs, flash drives, and the like. Further, those skilled in the art will appreciate that the functions of the various computing devices may be combined with one another, integrated into one computing device, or the functionality of a particular computing device may be implemented within one or more other computing devices Lt; / RTI > can be dispersed in the < / RTI >

For example, the controller according to the present invention may be implemented as a central processing unit, a mass storage device such as a hard disk or solid state disk, a volatile memory device, an input device such as a keyboard or a mouse, an output device such as a monitor or a printer, Of commercial computers.

1A and 1B are a plan view and a cross-sectional view showing a mechanical configuration of an air bearing device 100 capable of temperature compensation according to various embodiments of the present invention.

1A and 1B, a temperature-compensatable air bearing device 100 according to various embodiments of the present invention is basically mounted on a stage 101, A middle body 120 having a body 110 and an air exhaust passage 121 and a cover body 130 having a temperature controlled air supply passage 131.

The center body 110 has a compressed air supply passage 111 for supplying compressed air from the upper portion to the lower portion. The compressed air supply passage 111 may be formed in a substantially vertical direction with respect to the longitudinal direction of the stage 101, for example, but not limited to, approximately at the center of the center body 110. The compressed air supply passage 111 is formed with a recessed portion 112 extending in a substantially horizontal direction in the longitudinal direction of the stage 101 so that the compressed air is uniformly supplied in the downward direction and the horizontal direction have. Further, a compressed air supply unit 113 may be further connected to the upper end of the compressed air supply passage 111 of the center body 110.

Here, the low-temperature compressed air supplied through the compressed air supply passage 111 of the center body 110 may have a temperature of, for example, but not limited to, approximately 20 ° C to 25 ° C.

The middle body 120 has an air exhaust passage 121 for exhausting compressed air from the lower side to the upper side on the outer side of the center body 110. That is, the air exhaust passage 121 may be provided between the outer side of the center body 110 and the inner side of the middle body 120. In other words, the air exhaust passages 121 may be formed on both sides opposite to each other with respect to the compressed air supply passage 111 from the lower part toward the upper part. Therefore, the low-temperature compressed air supplied through the compressed air supply passage 111 and the recessed portion 112 of the center body 110 is discharged to the outside through the air exhaust passage 121 of the middle body 120 provided on the outside of the center body 110 (Discharged) quickly. Of course, a vacuum pump 122 may be connected to the upper end of the air exhaust passage 121 of the middle body 120.

The cover body 130 has a temperature-controlled air supply passage 131 for supplying temperature-controlled air from the upper side to the lower side on the outer side of the middle body 120. That is, the temperature-controlled air supply passage 131 may be provided between the outer side of the middle body 120 and the inner side of the center body 110. In other words, the temperature-controlled air supply passage 131 may be formed to be generally directed from the upper side to the lower side on both sides opposed to each other with respect to the air exhaust passage 121. Thus, temperature-controlled air that does not affect the degree of thermal expansion of the stage 101 is quickly supplied to the stage 101 through the air supply passage 131. [ The blower 132 and the air temperature control unit 133 may be connected to the upper end of the temperature controlled air supply passage 131 of the cover body 130. [

Here, the air temperature regulator 133 may further include a heater (not shown) for increasing the temperature of the air and / or a cooler (not shown) for lowering the temperature of the air. Such heaters and / or coolers may be implemented by, for example, but not limited to, thermoelectric elements or Peltier elements.

The air bearing device 100 according to the embodiment of the present invention includes an ambient temperature sensor 140 (see FIG. 2) for sensing the ambient temperature of the air bearing device 100, And a stage temperature sensor 102 for sensing the temperature of the stage 101 on which the air bearing device 100 is mounted. Here, the temperature sensor described above can be implemented by, for example, a thermocouple or the like, although it is not limited thereto.

In addition, the temperature of the stage 101 can be set to a predetermined set temperature, and the above-described air temperature adjusting section 133 is temperature-controlled so that the set temperature of the stage 101 is not changed by the ambient temperature and the bearing temperature Thereby supplying air.

The air temperature regulator 133 operates, for example, if the average temperature of the ambient temperature and the bearing temperature is lower than the set temperature, by supplying the temperature controlled air having a temperature higher than the average temperature , So that thermal deformation of the stage 101 is prevented.

The air temperature controller 133 may be configured to operate the cooler to supply temperature-controlled air having a temperature lower than the average temperature, for example, if the average temperature of the ambient temperature and the bearing temperature is higher than the set temperature, Thereby preventing thermal deformation of the stage 101 from occurring.

Thus, the air bearing apparatus 100 according to various embodiments of the present invention and its temperature compensation method can quickly discharge the compressed air supplied from the air bearing apparatus 100 to the outside, (For example, thermal deformation, thermal expansion, and thermal contraction of the stage 101) caused by the low-temperature compressed air supplied from the air bearing device 100 can be minimized.

In other words, the air bearing apparatus 100 according to various embodiments of the present invention and its temperature compensation method further include an exhaust passage through which the low-temperature compressed air is exhausted and a vacuum pump 122 connected thereto, Thereby allowing the bearing device 100 and the stage 101 to quickly exit without being left in the thermo-hygrostat.

In addition, the air bearing device 100 and its temperature compensation method according to various embodiments of the present invention may also include a blower (not shown) to further supply the air bearing device 100 with a certain temperature of air (i.e., The temperature of the stage 101 such as the guide rail or the mechanical structure contacting with the air bearing device 100 can be kept constant (i.e., maintained at the set temperature) .

Furthermore, the air bearing device 100 and its temperature compensating method according to various embodiments of the present invention can be used to control the ambient temperature of the air bearing device 100 and the stage 101, the temperature of the air bearing device 100 or the compressed air, Then, the temperature of the moving stage 101 such as the guide rail is measured, and the temperature of the temperature-controlled air is resiliently determined and supplied so that the temperature of the moving stage 101 such as the guide rail is kept constant.

2 is a block diagram showing an electrical configuration of an air bearing device 100 capable of temperature compensation according to various embodiments of the present invention.

2, an air bearing device 100 capable of temperature compensation according to various embodiments of the present invention includes an ambient temperature sensor 140, a stage temperature sensor 102, a bearing temperature sensor 114, a compressed air A vacuum pump 122, a blower 132, an air temperature control unit 133, and a control unit 150, as shown in FIG.

The ambient temperature sensor 140 senses the ambient temperature of the air bearing device 100 and the stage 101, converts the ambient temperature to a digital value, and provides the digital value to the controller 150. That is, the ambient temperature sensor 140 senses the internal temperature of the constant temperature and humidity bath in which the air bearing device 100 and the stage 101 are located, for example, but not limited thereto.

The stage temperature sensor 102 senses the temperature of the stage 101, converts the temperature into a digital value, and provides the digital value to the control unit 150.

The bearing temperature sensor 114 senses the temperature of the bearing device 100, converts the sensed temperature to a digital value, and provides the digital value to the control unit 150. Here, the temperature of the bearing device 100 may be substantially equal to the temperature of the compressed air.

The compressed air supply unit 113 supplies the low temperature compressed air to the stage 101 side through the compressed air supply passage 111 provided in the center body 110 under the control of the control unit 150. [

The vacuum pump 122 is controlled by the control unit 150 such that the low temperature compressed air supplied to the stage 101 side through the air exhaust passage 121 provided in the middle body 120 and the temperature- Exhaust.

The blower 132 and the air temperature regulator 133 are controlled to the temperature of the stage 101 through the temperature controlled air supply passage 131 provided in the cover body 130 under the control of the controller 150 Air is supplied.

The control unit 150 controls the air temperature control unit 133 so that the set temperature of the stage 101 is not changed by the ambient temperature and the bearing temperature to control the temperature controlled air through the air bearing device 100, (101). Here, the temperature of the stage 101 may be set to a preset optimal temperature.

That is, the controller 150 calculates an average temperature for the ambient temperature and the bearing temperature acquired from the ambient temperature sensor 140 and the bearing temperature sensor 114 acquired from the ambient temperature sensor 140, Controlled air having a temperature higher than the average temperature is supplied by controlling the air temperature control unit 133 (for example, operating the heater). The control unit 150 calculates an average temperature for the ambient temperature acquired from the ambient temperature sensor 140 and the bearing temperature acquired from the bearing temperature sensor 114. If the calculated average temperature is higher than the set temperature, Controls the regulator 133 (for example, operates the cooler) to supply temperature-controlled air having a temperature lower than the average temperature.

3 is a flow chart illustrating a method of temperature compensation of an air bearing according to various embodiments of the present invention. Here, the subject of control is the control unit 150. [

As shown in FIG. 3, the method of compensating the temperature of the air bearing according to various embodiments of the present invention includes sensing the ambient temperature S1, sensing the temperature of the stage S2, sensing the air bearing temperature S3, A deviation calculation step S4, a temperature control air temperature calculation step S5, a temperature control air temperature setting step S6, and a temperature control air supply step S7.

In the ambient temperature sensing step S1, the controller 150 senses the ambient temperature of the air bearing device 100 and the stage 101 using the ambient temperature sensor 140, converts the ambient temperature into a digital value, and stores the digital value.

In the stage temperature sensing step S2, the control unit 150 senses the temperature of the stage 101 using the stage temperature sensor 102, converts the temperature into a digital value, and stores the digital value.

In the air bearing temperature sensing step S3, the controller 150 senses the temperature of the air bearing device 100 (i.e., the temperature of the compressed air) using the bearing temperature sensor 114 and converts the sensed temperature to a digital value .

In the stage temperature deviation calculation step S4, the controller 150 compares the temperature of the sensed stage 101 with the sensed ambient temperature (i.e., the internal temperature of the constant temperature and humidity chamber in which the air bearing device and the stage are located) The degree of temperature deviation between the temperatures of the bearing device 100 is calculated.

In the temperature control air temperature calculation step S5, the controller 150 calculates the temperature control air temperature to be supplied to the air bearing device 100 and the stage 101 through the air temperature controller 133. [ That is, the control unit 150 calculates the temperature control air temperature to be supplied through the air temperature control unit 133 for achieving the optimal temperature or preset temperature of the stage 101, based on the temperature deviation described above.

In the temperature control air temperature setting step S6, the controller 150 sets or adjusts the temperature control air temperature by using the heater and / or the cooler of the air temperature control unit 133. [

The control unit 150 controls the temperature controlled air set through the blower 132 and the air temperature control unit 133 to the air bearing apparatus 100 and the stage 101 such as the guide rail in the air supply step S7 for temperature control, . That is, the controller 150 supplies temperature-controlled air to the stage 101 through the temperature-controlled air supply passage 131 provided in the cover body 130 of the air bearing device 100.

In this way, the controller 150 supplies the temperature-controlled air through the blower 132 and the air temperature controller 133 so that the set temperature of the stage 101 is not changed by the ambient temperature and the bearing temperature. For example, although not limiting, the controller 150 may control the temperature of the air to be controlled via the heater of the air temperature regulator 133, which is higher than the average temperature, if the average temperature of the ambient temperature and the bearing temperature is lower than a predetermined set temperature To the air bearing device (100) and the stage (101). For example, although not limiting, the control unit 150 controls the temperature of the air-fuel mixture supplied from the air-temperature regulator 133 through the cooler of the air temperature regulator 133 to a temperature lower than the average temperature if the average temperature of the ambient temperature and the bearing temperature is higher than the set temperature And supplies the air to the air bearing device 100 and the stage 101.

It is to be understood that the present invention is not limited to the above-described embodiment, and various modifications and changes may be made without departing from the scope of the present invention as defined in the appended claims. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

100; The air bearing device according to the embodiment of the present invention
101; Stage 102; Stage temperature sensor
110; A center body 111; Compressed air supply passage
112; Groove 113; Compressed air supply portion
114; A bearing temperature sensor 120; Middle body
121; Air exhaust passage 122; Vacuum pump
130; A cover body 131; Temperature controlled air supply passage
132; Blower 133; Air temperature regulator
140; Ambient temperature sensor 150; The control unit

Claims (9)

A center body having a compressed air supply passage for supplying compressed air from an upper portion to a lower portion;
A middle body on an outer side of the center body and having an air exhaust passage for exhausting air from a lower portion to an upper portion; And
And a cover body formed on the outer side of the middle body and having a temperature-controlled air supply passage for supplying temperature-controlled air from an upper portion to a lower portion. The method according to claim 1,
Wherein a compressed air supply unit for supplying compressed air at 20 ° C to 25 ° C is connected to the upper end of the compressed air supply passage of the center body. The method according to claim 1,
And a vacuum pump for exhausting air is connected to an upper end of the air exhaust passage of the middle body. The method according to claim 1,
And an air blower for supplying temperature-controlled air is connected to the upper end of the temperature-controlled air supply passage of the cover body. 5. The method of claim 4,
And an air temperature controller is further connected to the upper end of the blower and the temperature-controlled air supply passage. 6. The method of claim 5,
An ambient temperature sensor for sensing an ambient temperature of the air bearing device;
A bearing temperature sensor for sensing the temperature of the air bearing device;
Further comprising a stage temperature sensor for sensing the temperature of the stage on which the air bearing device is mounted,
Wherein the stage temperature is set to a predetermined set temperature, and the air temperature adjusting unit supplies temperature-controlled air so that the set temperature of the stage is not changed by the ambient temperature and the bearing temperature. The method according to claim 6,
The air temperature controller
A heater for raising the air temperature; And
Further comprising a cooler for lowering the air temperature,
Controlled air having a temperature higher than the average temperature by operating the heater when the average temperature of the ambient temperature and the bearing temperature is lower than the set temperature,
Controlled air having a temperature lower than the average temperature by operating the cooler if the average temperature of the ambient temperature and the bearing temperature is higher than the set temperature. An ambient temperature sensing step of sensing an ambient temperature of the air bearing device;
A stage temperature sensing step of sensing a temperature of the stage on which the air bearing device is mounted;
A bearing temperature sensing step of sensing a temperature of the air bearing device; And
Wherein the stage temperature is set to a predetermined set temperature and the temperature controlled air supply step supplies temperature-controlled air so that the set temperature of the stage is not changed by the ambient temperature and the bearing temperature A method for temperature compensation of an air bearing device. 9. The method of claim 8,
The temperature controlled air supply step
Controlled air having a temperature higher than the average temperature when the average temperature of the ambient temperature and the bearing temperature is lower than the set temperature,
Controlled air having a temperature lower than the average temperature when the average temperature of the ambient temperature and the bearing temperature is higher than the set temperature.

Images