JP4877690B2 - Static pressure slider - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention provides a static pressure slide. Da Related.
[0002]
[Prior art]
As shown in FIG. 11, a conventional static pressure slider 61 includes a square columnar guide shaft 62 and a cylindrical slider body 63 formed so as to surround the outer periphery thereof from four directions. Four porous bodies 64 are provided on the inner peripheral surface of the slider main body 63 so as to correspond to the respective outer peripheral surfaces of the guide shaft 62. A port 65 is provided in a part of the outer peripheral surface of the slider main body 63, and the port 65 communicates with the porous body 64 through a passage (not shown) formed in the slider main body 63.
[0003]
When pressurized air is supplied from a pressure supply source (not shown) connected to the port 65, the pressurized air is uniformly ejected from the surface of the porous body 64. As a result, a static pressure based on the pressurized air layer is generated between the outer peripheral surface of the guide shaft 62 and the inner peripheral surface of the slider main body 63, and the slider main body 63 keeps a slight gap from the guide shaft 62 while the guide shaft 62 It can move along 62.
[0004]
[Problems to be solved by the invention]
However, since the conventional hydrostatic slider is configured so that the entire outer periphery of the guide shaft 62 is surrounded by the slider body 63, the number of parts is large, the structure is complicated, and the entire hydrostatic slider is increased in size. There's a problem. Further, there may be a problem that the assembling accuracy deteriorates as the number of assembling parts increases with respect to the slider body 63.
[0005]
Also, when working in a vacuum atmosphere using the conventional static pressure slider described above, the entire chamber must be in a vacuum atmosphere, so a vacuum generator with a large capacity is required and the equipment is greatly reduced. There is also a problem of becoming.
[0006]
Further, there is a non-contact chuck as an apparatus using the same principle as that of the static pressure slider, that is, a static pressure. In this state, the work is lifted by the action of static pressure, and the work is slid and conveyed in that state, for example. In this non-contact type chuck, since the static pressure is simply applied to hold the workpiece in a non-contact manner, the workpiece is floated too much and the workpiece holding rigidity becomes low, or the workpiece vibrates due to the static pressure. There is. There is a similar problem in a chuck device using a plurality of such non-contact chucks.
[0007]
The present invention relates to a static pressure slice using static pressure. Da The purpose of this is to solve the above problems.
[0008]
[Means for Solving the Problems and Effects of the Invention]
In the following, means and the like that can solve the above problems are listed separately. In addition, the action, effect, specific means, etc. will be added as necessary.
[0009]
Means 1. In a static pressure slider that generates a static pressure by providing a static pressure generating portion on the static pressure generating surface side of the slider body and ejecting a pressurized fluid from the static pressure generating portion.
A static pressure slider characterized in that the slider body is provided with a suction portion for evacuation on the static pressure generating surface side so as to suck fluid around the suction portion.
[0010]
According to the means 1, on the static pressure generating surface side of the slider body, static pressure is generated between the slider body and the other party by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the counterpart. The present static pressure slider is configured not only to generate static pressure but also to suck fluid from the suction portion. Due to this suction action, a force attracted to the other side is generated on the static pressure generating surface side of the slider body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the static pressure bearing rigidity of the static pressure slider is increased and the static pressure slider is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase bearing rigidity, adjust the clearance with the other side, and suppress vibration of the static pressure slider. It becomes. This also eliminates the need for a shaft for guiding the slider body as in the prior art, and eliminates the need to surround it at least from four sides, so that the number of parts and the number of assembling steps can be reduced, and the accuracy associated with assembling decreases. Can also be prevented.
[0011]
In general, a gas such as air is assumed as the fluid, but the fluid may be appropriately changed depending on the use atmosphere of the static pressure slider. The same applies to fluids described in the following means.
[0012]
Mean 2. A static pressure generating part is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating part is provided, and pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating part. In a static pressure slider that generates static pressure by
The slider body is provided with a suction portion for evacuation on the surface where the static pressure is generated, a evacuation port communicating with the suction portion is provided, and fluid around the suction portion is sucked through the evacuation port. A static pressure slider characterized by that.
[0013]
According to the means 2, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. And on the static pressure generating surface side of the slider body, a static pressure is generated between the other side by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the counterpart. The present static pressure slider is configured not only to generate static pressure but also to suck fluid from the suction portion. Due to this suction action, a force attracted to the other side is generated on the static pressure generating surface side of the slider body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the static pressure bearing rigidity of the static pressure slider is increased and the static pressure slider is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase bearing rigidity, adjust the clearance with the other side, and suppress vibration of the static pressure slider. It becomes. This also eliminates the need for a shaft for guiding the slider body as in the prior art, and eliminates the need to surround it at least from four sides, so that the number of parts and the number of assembling steps can be reduced, and the accuracy associated with assembling decreases. Can also be prevented.
[0014]
Means 3. In the means 1 or 2, the static pressure generating part is constituted by a porous body.
[0015]
According to the means 3, since the porous body is used for the static pressure generating portion, it is possible to suitably generate the static pressure by restricting the fluid when passing through the porous body, and it is possible to generate a simple throttle passage. It is possible to generate a static pressure between the other side more evenly. As a result, the static pressure slider becomes more stable.
[0016]
Means 4. The static pressure slider according to any one of the means 1 to 3, wherein the suction part is constituted by a concave part opened to a static pressure generating surface side.
[0017]
According to the means 4, since the suction portion is constituted by the concave portion, it becomes clear that the region where the fluid suction force acts on the static pressure generating surface side is a region facing the concave portion, and the configuration is also simple. It will be a thing.
[0018]
Means 5. The static pressure slider according to any one of the means 1 to 4, wherein the static pressure generating portion is provided in a peripheral portion of the static pressure generating surface.
[0019]
According to the means 5, by providing the static pressure generating portion in the peripheral portion of the static pressure generating surface, the static pressure slider can be held in a more stable state with respect to the counterpart side. This is because even if the static pressure slider is inclined with respect to the other side, since the pressurized fluid is ejected from the peripheral portion of the static pressure generation surface of the static pressure slider, the inclination can be suppressed.
[0020]
Means 6. The static pressure slider according to claim 5, wherein the suction part is provided in a portion of the static pressure generating surface inside the static pressure generating part.
[0021]
According to the means 6, since the suction part is provided on the inner side of the static pressure generating surface from the static pressure generating part, the negative pressure area is formed in a form cut off by the static pressure area outside the suction part. Can do.
[0022]
Mean 7 A static pressure generating part is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating part is provided, and pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating part. In a static pressure slider that generates static pressure by
The static pressure generating portion is provided annularly in the periphery of the static pressure generating surface, and a suction portion for evacuation is provided on the inner side of the static pressure generating portion on the static pressure generating surface side of the slider body, A vacuuming port communicating with the suction part is provided so that fluid around the suction part is sucked through the vacuuming port, and further, on the static pressure generating surface side of the slider body, the inside of the suction part is provided. A hydrostatic slider characterized in that a working recess is provided in the base and a working port communicating with the working recess is provided.
[0023]
According to the means 7, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. And on the static pressure generating surface side of the slider body, a static pressure is generated between the other side by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the counterpart. The present static pressure slider is configured not only to generate static pressure but also to suck fluid from the suction portion. Due to this suction action, a force attracted to the other side is generated on the static pressure generating surface side of the slider body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the static pressure bearing rigidity of the static pressure slider is increased and the static pressure slider is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase bearing rigidity, adjust the clearance with the other side, and suppress vibration of the static pressure slider. It becomes. This also eliminates the need for a shaft for guiding the slider body as in the prior art, and eliminates the need to surround it at least from four sides, so that the number of parts and the number of assembling steps can be reduced, and the accuracy associated with assembling decreases. Can also be prevented.
[0024]
Further, by providing the static pressure generating portion in the peripheral portion of the static pressure generating surface, the static pressure slider can be held in a more stable state with respect to the counterpart side. This is because even if the static pressure slider is inclined with respect to the other side, since the pressurized fluid is ejected from the peripheral portion of the static pressure generation surface of the static pressure slider, the inclination can be suppressed.
[0025]
Further, since the suction part is provided on the inner side of the static pressure generating surface with respect to the static pressure generating part, the negative pressure area can be formed in a form blocked by the static pressure area on the outer side. Further, since a working recess is further provided in the inner portion, and a working port communicating with the working recess is provided, the region between the working recess and the counterpart side is the negative pressure region. When the surrounding environment is an air environment, the negative pressure region functions like an air curtain, and the working recess region becomes an independent chamber. As a result, by supplying pressurized fluid from the working port or evacuating, only the region corresponding to the working recess can be made into a necessary pressurized atmosphere or vacuum atmosphere. Therefore, for example, when an operation requiring a vacuum atmosphere is performed, the entire room in which the static pressure slider is installed does not need to be in a vacuum atmosphere, and only a vacuum is required from the work port. This eliminates the need to prepare a large facility for creating a work environment. Furthermore, since the periphery of the working recess is made into a negative pressure region by the suction part, when the working recess is evacuated through the working port, the gap between the working recess and the counterpart side is reduced. Can be made into a high vacuum.
[0026]
Means 8. The static pressure slider according to claim 7, wherein the static pressure generating portion and the suction portion are each formed in a continuous annular shape.
[0027]
According to the means 8, since the static pressure generating portion and the suction portion are respectively formed in a continuous ring shape, the working recess is surrounded by the suction portion, and the suction portion is surrounded by the static pressure generation portion. The independence of each of the pressure area, the negative pressure area, and the work area (positive pressure or negative pressure area) is enhanced. Thereby, for example, when it is desired to make the work area in a vacuum atmosphere, the degree of vacuum is further increased.
[0028]
Means 9. In the means 7 or 8, the static pressure generating part is constituted by a porous body.
[0029]
According to the means 9, since the porous body is used for the static pressure generating portion, it is possible to suitably generate the static pressure by restricting the fluid when passing through the porous body, and it is possible to generate a simple throttle passage. It is possible to generate a static pressure between the other side more evenly. As a result, the static pressure slider becomes more stable.
[0030]
Means 10. The static pressure slider according to any one of the means 7 to 9, wherein the suction part is constituted by a concave part opened to a static pressure generating surface side.
[0031]
According to the means 10, since the suction portion is configured by the concave portion, it becomes clear that the region where the fluid suction force acts on the static pressure generating surface side is a region facing the concave portion, and the configuration is also simple. It will be a thing.
[0032]
Means 11. In a static pressure slider comprising a guide rail and a slider body that slides in a non-contact state along the guide rail,
The guide rail is configured to have two surfaces extending in the longitudinal direction and intersecting each other, and two surfaces of the slider body facing the two surfaces are used as static pressure generating surfaces,
A static pressure generating portion is provided on the static pressure generating surface side of the slider main body, a pressurizing port communicating with each static pressure generating portion is provided, and a pressurized fluid supplied via the pressurizing port is supplied to each static pressure generating portion. Configured to generate static pressure by ejecting from the
A suction part for evacuation is provided on the inner side of the static pressure generation part on each static pressure generating surface side of the slider body, a vacuuming port communicating with the suction part is provided, and a fluid around the suction part is provided. A static pressure slider characterized by being sucked through a vacuuming port.
[0033]
According to the means 11, in use, a pressure pump or the like is connected to the pressurizing port, and a suction pump or the like is connected to the vacuuming port. A static pressure is generated between the slider body and the guide rail by the pressurized fluid ejected from the static pressure generating portion on the static pressure generating surface side. As a result, the static pressure slider can be held in a non-contact state with the guide rail. The present static pressure slider is configured not only to generate static pressure but also to suck fluid from the suction portion. Due to such a suction action, a force attracted toward the guide rail is generated on the static pressure generating surface side of the slider body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the static pressure bearing rigidity of the static pressure slider is increased and the static pressure slider is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase bearing rigidity, adjust the clearance with the guide rail, and suppress vibration of the static pressure slider. It becomes.
[0034]
As described above, the slider main body may jump out of the guide rail even if the other of the slider main body and the guide rail is not surrounded by the cooperation of the static pressure and the suction (negative pressure). Therefore, only the two surfaces of the slider main body and the two surfaces of the guide rail need to form a static pressure generating surface, so that the number of parts and the number of assembling steps can be reduced, and a decrease in accuracy associated with assembling can be prevented. .
[0035]
Further, by providing the suction portion at the inner site than the static pressure generating portion, the negative pressure region can be formed in a form blocked by the static pressure region on the outer side.
[0036]
Means 12. In the means 11, the static pressure generating part is provided at least on both sides of the static pressure generating surface, and the suction part is provided at a position sandwiched between them.
[0037]
According to the means 12, the slider body can be held in a more stable state with respect to the guide rail by providing the static pressure generating portions on both sides of the static pressure generating surface. This is because even if the slider main body is inclined with respect to the guide rail, the pressurized fluid is ejected from both sides of the static pressure generating surface of the slider main body, so that the inclination can be suppressed.
[0038]
Means 13. In the means 11, the static pressure generating portion is provided on both sides of the static pressure generating surface along the slide direction of the slider body so as to extend in the slide direction, and the suction portion is sandwiched between them. The hydrostatic slider is provided so as to extend in the sliding direction.
[0039]
According to the means 13, the slider main body can be held in a more stable state with respect to the guide rail by providing the static pressure generating portions on both sides of the static pressure generating surface. This is because even if the slider main body is inclined with respect to the guide rail, the pressurized fluid is ejected from both sides of the static pressure generating surface of the slider main body, so that the inclination can be suppressed. Further, by providing the suction portion at a position sandwiched between them, the negative pressure region can be formed in a form blocked by the static pressure regions on both sides thereof. In addition, since the static pressure generating part and the suction part are formed along the slide direction of the slider body, there is little fluctuation in static pressure and negative pressure even when the slider body slides, and the slider body remains stable. can do.
[0040]
Means 14. The static pressure slider according to any one of means 11 to 13, wherein the static pressure generating portion is formed of a porous body.
[0041]
According to the means 14, since the porous body is used for the static pressure generating portion, it is possible to suitably generate the static pressure by restricting the fluid when passing through the porous body, and it is also possible to generate a simple throttle passage. It is possible to generate a static pressure between the other side more evenly. As a result, the slider body becomes more stable.
[0042]
Means 15. In any one of the means 11 to 14, the suction part is constituted by a suction groove opened to the static pressure generating surface side, and both ends of the suction groove are closed by a slider body. Pressure slider.
[0043]
According to the means 15, since the suction portion is configured by the groove, it becomes clear that the region where the fluid suction force acts on the static pressure generating surface side is a region facing the groove, and the configuration is also simple. It will be a thing. In addition, since both ends of the suction groove are not opened, the degree of negative pressure can be improved without waste.
[0044]
Means 16. A static pressure generating part is provided on the static pressure generating surface side of the chuck body, and a static pressure is generated between the chuck and the workpiece by ejecting a pressurized fluid from the static pressure generating part. In the non-contact type chuck that holds the
A non-contact type chuck characterized in that the chuck body is provided with a suction part for evacuation on the static pressure generating surface side so as to suck the fluid around the suction part.
[0045]
According to the means 16, static pressure is generated between the chuck body and the workpiece by the pressurized fluid ejected from the static pressure generating portion on the static pressure generating surface side of the chuck body. As a result, the workpiece can be held in a non-contact state. The non-contact chuck is configured not only to generate static pressure but also to suck fluid from the suction part. Due to the suction action, a force for attracting the workpiece is generated on the static pressure generating surface side of the chuck body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the workpiece holding rigidity by the non-contact type chuck is increased and the workpiece is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase the work holding rigidity, adjust the gap with the work, and suppress vibration of the work. .
[0046]
Means 17. A static pressure generating part is provided on the static pressure generating surface side of the chuck body, a pressurizing port communicating with the static pressure generating part is provided, and pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating part. In a non-contact chuck that generates a static pressure between the workpiece and the workpiece and keeps the workpiece at a predetermined distance from the static pressure generation surface,
The chuck body is provided with a suction part for evacuation on the static pressure generating surface side, a evacuation port communicating with the suction part is provided, and fluid around the suction part is sucked through the evacuation port. A non-contact type chuck characterized by being made as described above.
[0047]
According to the means 17, in use, a pressure pump or the like is connected to the pressurizing port, and a suction pump or the like is connected to the vacuuming port. A static pressure is generated between the chuck body and the workpiece by the pressurized fluid ejected from the static pressure generating portion on the static pressure generating surface side of the chuck body. As a result, the workpiece can be held in a non-contact state. The non-contact chuck is configured not only to generate static pressure but also to suck fluid from the suction part. Due to the suction action, a force for attracting the workpiece is generated on the static pressure generating surface side of the chuck body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the workpiece holding rigidity by the non-contact type chuck is increased and the workpiece is stabilized. In addition, since the suction part is provided independently of the static pressure generating part, the pressure degree for generating the static pressure and the suction degree in the suction part are different from the negative pressure generation using the Bernoulli principle. Can be adjusted individually, and the balance between static pressure and negative pressure can be easily adjusted to further increase the work holding rigidity, adjust the gap with the work, and suppress vibration of the work. .
[0048]
Means 18. In the means 16 or 17, the non-contact type chuck characterized in that the static pressure generating part is constituted by a porous body.
[0049]
According to the means 18, since the porous body is used for the static pressure generating portion, it is possible to suitably generate the static pressure by restricting the fluid when passing through the porous body, and it is possible to generate a simple throttle passage. Static pressure can be generated between the workpieces more evenly. As a result, the workpiece becomes more stable.
[0050]
Means 19. The non-contact type chuck according to any one of the means 16 to 18, wherein the suction part is constituted by a concave part opened to a static pressure generating surface side.
[0051]
According to the means 19, since the suction portion is constituted by the concave portion, it becomes clear that the region where the fluid suction force acts on the static pressure generating surface side is a region facing the concave portion, and the configuration is also simple. It will be a thing.
[0052]
Means 20. The non-contact chuck according to any one of means 16 to 19, wherein the static pressure generating portion is provided in a peripheral portion of the static pressure generating surface.
[0053]
According to the means 20, the workpiece can be held in a more stable state by providing the static pressure generating portion in the peripheral portion of the static pressure generating surface. This is because even if the workpiece is inclined with respect to the static pressure generating surface of the non-contact type chuck, since the pressurized fluid is ejected from the peripheral portion of the static pressure generating surface, the inclination can be suppressed.
[0054]
Means 21. In the means 20, the non-contact type chuck characterized in that the suction part is provided in an inner part of the static pressure generating surface than the static pressure generating part.
[0055]
According to the means 21, the negative pressure region can be formed in a form blocked by the static pressure region on the outer side by providing the suction portion on the inner side of the static pressure generating unit.
[0056]
Means 22. A chuck apparatus comprising a plurality of non-contact type chucks according to any one of means 16 to 21, wherein each non-contact type chuck is fixed in a state in which each static pressure generating surface is arranged on one plane. .
[0057]
According to the means 22, since each static pressure generating surface of each non-contact type chuck is arranged on one plane, the plane can be regarded as one static pressure generating surface and the workpiece can be held in non-contact. it can. As a result, it is possible to hold a relatively large workpiece without making each non-contact chuck large.
[0058]
The means 22 is not limited until the chuck body is shared, but the requirement may be limited. In this case, the number of parts can be reduced by making the chuck body common, and the flatness of the static pressure generating surface can be increased. Also, the pressurized fluid ports for the static pressure generating part of each non-contact chuck may be combined into one or more, or the vacuuming ports of each suction part may be combined into one or more. Is possible.
[0059]
DETAILED DESCRIPTION OF THE INVENTION
[First Embodiment]
Hereinafter, a first embodiment will be described with reference to FIGS. 1 to 3.
[0060]
1 is a cross-sectional view of the static pressure slider, specifically, a cross-sectional view taken along line AA of FIG. 2, FIG. 2 is a bottom view of the static pressure slider, and FIG. 3 shows characteristics of the static pressure slider. FIG.
[0061]
As shown in FIGS. 1 and 2, the slider body 2 of the static pressure slider 1 has a disk shape, for example. The shape of the slider body 2 is not limited to a disk shape, and an arbitrary shape such as a square plate shape can be selected. However, it is preferable that at least the bottom surface 3 which is a static pressure generating surface is a flat surface.
[0062]
A port 4 is formed on the outer peripheral surface of the slider body 2. The port 4 can be formed in various forms, for example, as a female screw hole in which a female screw for connecting a pipe is formed, or by providing a one-touch joint. The same applies to each port described later in this specification. When the static pressure slider 1 is used, a pipe from a pressure supply source (not shown) is connected to the port 4. An annular storage groove 5 is formed on the outer periphery of the bottom surface 3 of the slider body 2. The storage groove 5 is fixed in a state where a ring-shaped porous body 6 serving as a static pressure generating portion is stored. The porous body 6 is fixed by, for example, being bonded to the inner and outer walls of the storage groove 5 with an adhesive.
[0063]
The porous body 6 can be composed of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. In addition to this, the sintered trifluoride resin, sintered tetrafluoride resin, It can also be composed of synthetic resin materials such as sintered nylon resin and sintered polyacetal resin, sintered carbon, sintered ceramics and the like.
[0064]
An annular flow groove 7 that communicates with the storage groove 4 is formed in the upper part of the storage groove 5. The port 4 and the upper part of the flow groove 7 are communicated with each other by a passage 8 formed in the slider body 2. When pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown), the pressurized air passes from the surface of the porous body 6 through the port 4, the passage 8, and the flow groove 7, that is, from the entire bottom surface. Erupted.
[0065]
On the outer peripheral surface of the slider body 2, a vacuuming port 9 is formed at a position different from the port 4. When the static pressure slider 1 is used, a pipe from a suction pump (not shown) is connected to the port 9. On the bottom surface 3 of the slider body 2, an annular suction groove 10 as a suction portion is formed on the inner peripheral side of the storage groove 5 at a position spaced apart from the storage groove 5.
[0066]
The port 9 and the upper part of the suction groove 10 are communicated with each other by a passage 11 formed in the slider body 2. Air is sucked through the port 9 and the passage 11 by air suction of a suction pump (not shown), and air suction force acts on the bottom surface side of the slider body 2 along the suction groove 10.
[0067]
A working port 12 is formed on the upper surface of the slider body 2. In the present embodiment, the port 12 is formed at the center of the slider body 2. When the static pressure slider 1 is used, the port 12 is connected to a pipe from a pressure supply source or a suction pump (not shown) in order to perform a predetermined operation. At the center of the bottom surface 3 of the slider body 2, a recess 13 is formed as a working recess. The port 12 and the recess 13 are communicated with each other through a passage 14. For example, when a pressurized supply source is connected to the port 12, the inside of the recess 13 and the lower region thereof become a pressurized atmosphere via the port 12 and the passage 14. On the other hand, when a suction pump is connected to the port 12, the inside of the recess 13 and its lower region are in a vacuum atmosphere via the port 12 and the passage 14.
[0068]
In the static pressure slider 1 configured as described above, pressurized air is ejected from the surface of the porous body 6, that is, the entire bottom surface 3 through the port 4, the passage 8, and the flow groove 7 by the operation of the pressure supply source. Is done. Then, an annular pressure air layer is formed between the annular region which is the bottom surface of the porous body 6 and the reference surface R, and static pressure is brought about. As a result, the static pressure slider 1 floats with respect to the reference plane R.
[0069]
At the same time, air is sucked from the port 9 through the passage 11. Then, the suction groove 10 has a negative pressure. As a result, a suction force acts between the annular region on the bottom opening side of the suction groove 10 and the reference surface R, and the static pressure slider 1 is pulled toward the reference surface R side.
[0070]
Accordingly, the static pressure slider 1 is attracted to the reference surface R by the force that the static pressure slider 1 is moved away from the reference surface R by the static pressure generated through the porous body 6 and the negative pressure generated through the suction groove 10. The static pressure bearing rigidity is increased by the harmony with the force to be attempted, and the static pressure slider 1 secures a gap in micron units with the reference surface R in a stable state. Various mechanisms for moving the static pressure slider 1 in the horizontal direction with respect to the reference surface R can be considered, but will not be described because they are not directly related to the present invention.
[0071]
Here, by generating a negative pressure through the suction groove 10 in the static pressure slider 1, the bearing rigidity of the static pressure slider 1 is improved. The reason will be described. As shown in FIG. 1, the pressure of pressurized air from the port 4 is Pa, and the pressure of vacuuming from the port 9 is Pb. As shown in FIG. Let Sa be the area of the region, and Sb be the area of the annular region that is the lower surface opening portion of the suction groove 10.
[0072]
The relationship between the flying height (μm) of the static pressure slider 1 relative to the reference surface R and the flying force (N) that causes the static pressure slider 1 to float from the reference surface R is as shown in the graph of FIG. . In the figure, if air is not sucked through the suction groove 10, that is, if the suction force (N) is zero and no negative pressure is generated, the flying height is Ha (μm). In this state, the force of dFa (N) is sufficient to move the static pressure slider 1 by dH (μm). Then, the bearing rigidity Ka (N / μm) when suction is not performed from the suction groove 10 is dFa / dH. In this case, the flying height of the static pressure slider 1 changes greatly with a relatively small force, and the bearing rigidity Ka is low.
[0073]
On the other hand, when air is sucked through the suction groove 10, Sb · Pb is generated as the suction force (N). Then, the flying height is reduced to Hb (μm) as shown in FIG. In this state, a relatively large force of dFb (N) is required to move the static pressure slider 1 by dH (μm) as in the above case. That is, dFb> dFa. Then, the bearing rigidity Kb (N / μm) when suction is performed is dFb / dH. In this case, unless a relatively large force is applied to the static pressure slider 1, the flying height of the static pressure slider 1 does not change so much, and the bearing rigidity Kb is high.
[0074]
For the above reasons, Ka <Kb, and when the vacuum is evacuated through the suction groove 10, the bearing rigidity of the hydrostatic slider 1 is higher than that when the vacuum is not performed.
[0075]
In the static pressure slider 1, a static pressure generating mechanism including a port 4, a storage groove 5, a porous body 6, a flow groove 7 and a passage 8, and a vacuum suction mechanism including a port 9, a suction groove 10 and a passage 11. Since these are configured independently of each other, the adjustment of the static pressure and the adjustment of the evacuation can be performed independently of each other. This makes it possible to increase the degree of evacuation and increase the bearing rigidity while generating a static pressure with a sufficient flow rate. Moreover, although the static pressure slider 1 may vibrate depending on the degree of evacuation, the vibration can be easily suppressed by adjusting the degree of evacuation.
[0076]
Further, since the static pressure region is arranged on the outer peripheral portion of the bottom surface 3 of the static pressure slider 1, the static pressure slider 1 can be held in a more stable state with respect to the reference plane R. That is, even if the static pressure slider 1 is inclined with respect to the reference surface R, the pressurized air is ejected from the outer peripheral portion of the bottom surface 3 of the static pressure slider 1, so that the inclination can be suppressed. Further, since the pressurized air for generating static pressure is configured to be ejected from the porous body 6, the pressurized air is uniformly ejected to the reference surface R, and the static pressure is uniform. Go around. The porous body 6 has a function of restricting pressurized air.
[0077]
Further, the static pressure region is formed in an annular shape, and the portion becomes a pressurized air layer, and the vacuum region is formed in an annular shape on the inner peripheral side thereof to become a vacuum air layer. As a result, on the bottom surface 3 of the static pressure slider 1, a pressurized air layer is formed on the outermost periphery, a vacuum air layer is formed on the inner periphery thereof, and a working air layer is formed on the inner periphery thereof. Therefore, the working air layer becomes an independent chamber separated from the pressurized air layer by the presence of the vacuum air layer. That is, the vacuum air layer functions as an air curtain.
[0078]
If, for example, a suction pump pipe is connected to the port 12, the inside of the recess 13 becomes a vacuum atmosphere via the passage 14, and a vacuum atmosphere surrounded by the vacuum air layer is formed on the reference surface R facing the recess 13. It is formed. Therefore, an operation requiring a vacuum atmosphere can be performed in the region where the vacuum atmosphere has been formed. Further, when performing a work requiring a pressurized atmosphere, for example, a pipe of a pressure supply source may be connected to the port 12. In this case, the reference plane R facing the recess 13 is surrounded by the vacuum air layer. A pressurized atmosphere is formed. In this way, only the area of the recess 13 that is the work area can be freely set to a pressurized atmosphere or a vacuum atmosphere. Conventionally, when a vacuum atmosphere is required in the work space, considering that the entire chamber in which the static pressure slider is provided is performed in a vacuum atmosphere, the local portion is provided like the static pressure slider 1 of the present embodiment. Therefore, the cost of the entire facility can be greatly reduced.
[0079]
Further, when the suction pump is connected as described above to create a negative pressure in the recess 13, the degree of vacuum in the recess 13 is reduced by the negative pressure formed in the suction groove 10 formed around the recess 13. Can be further enhanced.
[0080]
[Second Embodiment]
Hereinafter, a second embodiment will be described with reference to FIGS.
[0081]
4 is a perspective view of the static pressure slider, FIG. 5 is a bottom view of the static pressure slider, FIG. 6 is a sectional view taken along line BB in FIG. 5, and FIG. 7 is a sectional view taken along line CC in FIG.
[0082]
As shown in FIG. 4, the guide rail 22 of the static pressure slider 21 includes a bottom surface guide portion 23 and a side surface guide portion 24. The bottom surface guide part 23 and the side surface guide part 24 are each formed in a long plate shape, and are formed by integrally forming them in an L shape.
[0083]
The slider body 25 of the static pressure slider 21 is formed in a quadrangular prism shape in the present embodiment. The bottom surface 26 of the slider body 25 faces the bottom surface guide portion 23, and one side surface 27 of the slider body 25 faces the side surface guide portion 24.
[0084]
A port 28 is formed on the other side surface of the slider body 25. When the static pressure slider 21 is used, the port 28 is connected to a pipe from a pressure supply source (not shown). Storage grooves 29 extending in the longitudinal direction of the slider body 25 are formed on the left and right sides of the bottom surface 26 and the one side surface 27 of the slider body 25. Each of the storage grooves 29 is fixed in a state where a plate-like porous body 30 as a static pressure generating portion is stored. The porous body 30 is fixed by, for example, being bonded to the wall surface of the storage groove 29 with an adhesive.
[0085]
The porous body 30 can be made of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. In addition, a sintered trifluoride resin, a sintered tetrafluoride resin, a sintered material is used. It can also be composed of synthetic resin materials such as sintered nylon resin and sintered polyacetal resin, sintered carbon, sintered ceramics and the like.
[0086]
A circulation groove 31 communicating with the storage groove 29 is formed along the storage groove 29 at the upper portion of the storage groove 29. The flow groove 31 does not penetrate in the longitudinal direction of the slider main body 25 like the storage groove 29, but is formed only to the front of the end in the longitudinal direction of the slider main body 25. This prevents air from leaking directly from the flow groove 31 to the outside.
[0087]
The port 28 and the four flow grooves 31 in total are communicated with each other by a passage 32 formed in the slider body 25 as shown in FIG. Then, pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown), and the pressurized air is ejected from the entire surface of each porous body 30 through the port 28, the passage 32, and each flow groove 31. . In addition, the corner | angular part comprised from the bottom face 26 and the one side surface 27 of the slider main body 25 is chamfered.
[0088]
On the other side surface of the slider body 25, a vacuum port 33 is formed at a position different from the port 28. When the static pressure slider 21 is used, the port 33 is connected to a pipe from a suction pump (not shown). A suction groove 34 as a suction portion extending in the longitudinal direction of the slider body 25 is formed at the central portion of the bottom surface 26 and one side surface 27 of the slider body 25, that is, the portion sandwiched between the porous bodies 30. Yes. The suction groove 34 is not penetrated in the longitudinal direction of the slider body 25, but is formed to a position before the end in the longitudinal direction of the slider body 25, similar to the flow groove 31.
[0089]
The port 33 and the upper part of each suction groove 34 are communicated with each other by a passage 35 formed in the slider body 25. Then, air is sucked through the port 33 and the passage 35 by air suction of a suction pump (not shown), and air suction force acts on the bottom surface 26 side and one side surface 27 side of the slider body 25 along the suction groove 34. .
[0090]
In the static pressure slider 21 configured as described above, pressurized air is ejected from the entire surface of each porous body 30 through the port 28, the passage 32, and the flow groove 31 by the operation of the pressure supply source.
[0091]
Then, a pair of pressure air layers is formed between the region of the surface of the porous body 30 on the side of the bottom surface 26 and the bottom surface guide portion 23, thereby bringing about a static pressure. At the same time, a pair of pressure air layers is formed between the region on the surface of the porous body 30 on the side of the one side surface 27 and the side surface guide portion 24, thereby bringing about a static pressure. As a result, the static pressure slider 21 floats with respect to the guide rail 22.
[0092]
At the same time, air is sucked from the port 33 through the passage 35. Then, the inside of the pair of suction grooves 34 becomes negative pressure. Accordingly, a suction force acts between the bottom opening side region of the suction groove 34 on the bottom surface 26 side and the bottom surface guide portion 23, and the side opening side region of the suction groove 34 on the one side surface 27 side A suction force acts between the side guide portion 24 and the static pressure slider 1 is drawn toward the bottom guide portion 23 and the side guide portion 24 side.
[0093]
Accordingly, the static pressure slider 21 is caused by the force that the static pressure slider 21 is separated from the bottom surface guide portion 23 and the side surface guide portion 24 by the static pressure generated through the porous body 30 and the negative pressure generated through the suction groove 34. The rigidity of the hydrostatic bearing is enhanced by the harmony with the force to attract the bottom surface guide portion 23 and the side surface guide portion 24, and the static pressure slider 21 has a stable clearance between the guide rail 22 and the micron unit. Will be secured.
[0094]
When an external force is applied to the slider body 25 in this state, the slider body 25 slides along the guide rail 22 in a non-contact state.
[0095]
If the vacuum is not performed via the port 33, the slider body 25 may be detached from the guide rail 22 to the right side in FIG. 4, for example, by a slight external force. Due to the cooperation between the static pressure and the evacuation, the guide rail 22 does not come off with a slight external force. As a result, even if the slider body 25 is not surrounded from the four sides by the guide rail 22, the static pressure slider 21 having high bearing rigidity can be obtained, and the number of parts can be reduced and the entire apparatus can be reduced in size and cost.
[0096]
In the static pressure slider 21, the static pressure generating mechanism extending from the port 28 to the porous body 30 and the evacuating mechanism extending from the port 33 to the suction groove 34 are configured independently of each other. The pressure adjustment and the evacuation adjustment can be performed independently. This makes it possible to increase the degree of evacuation and increase the bearing rigidity while generating a static pressure with a sufficient flow rate. Although the static pressure slider 21 may vibrate depending on the degree of vacuuming, the vibration can be easily suppressed by adjusting the degree of vacuuming.
[0097]
Further, since the static pressure region is disposed on the outer extending side of the bottom surface 26 and the side surface 27 of the static pressure slider 21, the static pressure slider 21 can be held in a more stable state with respect to the guide rail 22. That is, even if the static pressure slider 21 is inclined with respect to the guide rail 22, since the pressurized air is ejected from the extended portions of the bottom surface 26 and the side surface 27 of the static pressure slider 21, the inclination can be suppressed.
[0098]
[Third Embodiment]
A third embodiment will be described below with reference to FIGS. 8 to 10.
[0099]
8 is a plan view showing a state in which the workpiece above is held in a non-contact manner by the chuck device, and FIG. 9 is a sectional view of the non-contact chuck constituting the chuck device (DD in FIG. 10). FIG. 10 is a plan view of a non-contact chuck.
[0100]
In the present embodiment, non-contact means that the workpiece W and the non-contact chuck 41 can be held in a non-contact state, and the chuck means that the non-contact chuck 41 fixes the position of the workpiece W. It does not mean that the workpiece W acts on the non-contact chuck 41 so as to be maintained at a constant interval.
[0101]
As shown in FIG. 8, a large number of non-contact chucks 41 are arranged on the front, rear, left and right. In the present embodiment, a total of 20 non-contact chucks 41 are used. Each of these non-contact chucks 41 constitutes one chuck device. The chuck main body 42 of each non-contact type chuck 41 is set so that the upper surface 43 of each non-contact chuck 41 is arranged on one plane. Then, as will be described later, each non-contact chuck 41 holds a flat plate-like workpiece W at a minute interval from each upper surface 43. The plurality of non-contact chucks 41 are integrally held by a holding device (not shown) constituting a part of the chuck device.
[0102]
Each non-contact chuck 41 will be described with reference to FIGS. 9 and 10. The chuck main body 42 of the non-contact chuck 41 has, for example, a disk shape. However, the shape of the chuck body 42 is not limited to the disk shape, and an arbitrary shape can be selected. Even in this case, it is preferable that at least the upper surface 43 serving as a static pressure generating surface has a planar shape.
[0103]
A port 44 is formed on the lower surface of the chuck body 42. When the non-contact chuck 41 is used, a pipe from a pressure supply source (not shown) is connected to the port 44. An annular storage groove 45 is formed on the outer peripheral portion of the upper surface 43 of the chuck body 42. The storage groove 45 is fixed in a state where a ring-shaped porous body 46 as a static pressure generating portion is stored. The porous body 46 is fixed by, for example, being bonded to the inner and outer walls of the storage groove 45 with an adhesive.
[0104]
The porous body 46 can be made of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. In addition, the porous body 46 can be made of sintered trifluoride resin, sintered tetrafluoride resin, It can also be composed of synthetic resin materials such as sintered nylon resin and sintered polyacetal resin, sintered carbon, sintered ceramics and the like.
[0105]
An annular flow groove 47 that communicates with the storage groove 45 is formed in the lower portion of the storage groove 45. The port 44 and the lower part of the flow groove 47 are communicated with each other by a passage 48 formed in the chuck body 42. When pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown), the pressurized air passes from the surface of the porous body 46, that is, from the entire upper surface via the port 44, the passage 48, and the flow groove 47. Erupted.
[0106]
A vacuum evacuation port 49 is formed at the center of the lower surface of the chuck body 2. When the non-contact chuck 41 is used, a pipe from a suction pump (not shown) is connected to the port 49. On the upper surface 43 of the chuck body 2, a circular suction recess 50 as a suction portion is formed at a central portion on the inner peripheral side of the storage groove 45 with a predetermined distance from the storage groove 45. ing.
[0107]
The port 49 and the lower portion of the suction recess 50 are communicated with each other by a passage 51 formed in the chuck body 42. When air is sucked through the port 49 and the passage 51 by air suction of a suction pump (not shown), an air suction force acts on the region where the suction recess 50 is formed.
[0108]
In each of the non-contact chucks 41 configured as described above, the pressure air is supplied from the surface of the porous body 46, that is, the entire upper surface through the port 44, the passage 48, and the flow groove 47 by the operation of the pressure supply source. Erupted. Then, an annular pressure air layer is formed between the annular region which is the upper surface of the porous body 46 and the workpiece W, and static pressure is brought about. As a result, the workpiece W is lifted with the upper surface 43 of the non-contact chuck 41 as a reference.
[0109]
At the same time, air is sucked from the port 49 through the passage 51. Then, the inside of the suction recess 50 becomes negative pressure. As a result, a suction force acts between the circular region on the upper surface opening side of the suction recess 50 and the workpiece W, and the workpiece W is drawn toward the upper surface 43 side of the non-contact chuck 41.
[0110]
Accordingly, the work W is caused to move away from the non-contact type chuck 41 by the static pressure generated through the porous body 46 and the upper surface of the non-contact type chuck 41 by the negative pressure generated through the suction recess 50. The work holding rigidity is enhanced by the harmony with the force to be attracted to 43, and the work W can secure a gap in micron units with the upper surface 43 of each non-contact chuck 41 in a stable state. The principle of increasing the workpiece holding rigidity is the same as that explained in the first embodiment with reference to FIG.
[0111]
In the non-contact chuck 41, a static pressure generating mechanism including a port 44, a storage groove 45, a porous body 46, a flow groove 47, and a passage 48, and a vacuum suction including a port 49, a suction groove 50, and a passage 51 are provided. Since the mechanisms are configured independently of each other, the adjustment of static pressure and the adjustment of evacuation can be performed independently. As a result, the degree of evacuation can be increased while the static pressure at a sufficient flow rate is being generated, and the workpiece holding rigidity can be increased. Although the workpiece W may vibrate depending on the degree of vacuuming, the vibration can be easily suppressed by adjusting the degree of vacuuming.
[0112]
Further, since the static pressure region is arranged on the outer peripheral portion of the upper surface 43 of the non-contact chuck 41, the workpiece W can be held in a more stable state. That is, even if the workpiece W is inclined with respect to the non-contact type chuck 41, since the pressurized air is ejected from the outer peripheral portion of the upper surface 43 of the non-contact type chuck 41, the inclination is suppressed in each non-contact type chuck 41. it can.
[0113]
In the present embodiment, the positional relationship between the non-contact chuck 41 and the work W can be reversed upside down. Further, similarly to the first embodiment, a work area may be formed in the non-contact chuck 41 to generate a vacuum atmosphere.
[0114]
Further, the chuck body 42 of each non-contact type chuck 41 may not be provided individually, but the porous body 46 and the suction recess 50 may be exposed to the upper surface 43 side from one place as one chuck body. . In this way, the number of parts can be reduced by sharing the chuck body, and the flatness of the static pressure generating surface can be increased.
[0115]
Further, one or a plurality of ports 44 for generating each static pressure of each non-contact type chuck 41 are collectively configured, or one or a plurality of ports 49 for each vacuuming of each non-contact type chuck 41 are provided. It is also possible to configure all together.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a hydrostatic slider according to a first embodiment (a cross-sectional view taken along line AA in FIG. 2).
FIG. 2 is a bottom view of a static pressure slider.
FIG. 3 is a graph (a) and a table (b) for illustrating the characteristics of a static pressure slider.
FIG. 4 is a perspective view of a static pressure slider according to a second embodiment.
FIG. 5 is a bottom view of a static pressure slider.
6 is a cross-sectional view taken along line BB in FIG.
7 is a cross-sectional view taken along line CC in FIG.
FIG. 8 is a plan view showing a state in which a workpiece is held by a plurality of non-contact chucks (chuck devices) according to a third embodiment.
9 is a cross-sectional view of the non-contact chuck (a cross-sectional view taken along the line DD in FIG. 10).
FIG. 10 is a plan view of a non-contact chuck.
FIG. 11 is a perspective view showing a conventional static pressure slider.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Static pressure slider, 2 ... Slider main body, 3 ... Bottom as static pressure generating surface, 4 ... Port, 5 ... Storage groove, 6 ... Porous body as static pressure generating part, 7 ... Distribution groove, 8 ... Passage , 9 ... port, 10 ... suction groove as suction part, 11 ... passage, 12 ... port, 13 ... concave as work recess, 14 ... passage, R ... reference plane, 21 ... static pressure slider, 22 ... Guide rail, 23 ... Bottom guide portion, 24 ... Side guide portion, 25 ... Slider body, 26 ... Bottom surface as a static pressure generating surface, 27 ... One side surface as a static pressure generating surface, 28 ... Port, 29 ... Storage groove , 30 ... Porous body as a static pressure generating part, 31 ... Distribution groove, 32 ... Passage, 33 ... Port, 34 ... Suction groove as suction part, 35 ... Passage, W ... Workpiece, 41 ... Non-contact chuck 42 ... Chuck body, 43 ... Upper surface as a static pressure generating surface, 44 ... Over DOO, 45 ... receiving groove, 46 ... porous body as a static pressure generator, 47 ... circulation groove, 48 ... passage, 49 ... port, 50 ... suction recess as a suction unit, 51 ... passage.

Claims (4)

A static pressure generating part is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating part is provided, and pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating part. In a static pressure slider that generates static pressure by
The static pressure generating portion is provided annularly in the periphery of the static pressure generating surface, and a suction portion for evacuation is provided on the inner side of the static pressure generating portion on the static pressure generating surface side of the slider body, A vacuuming port communicating with the suction part is provided so that fluid around the suction part is sucked through the vacuuming port, and further, on the static pressure generating surface side of the slider body, the inside of the suction part is provided. A hydrostatic slider characterized in that a working recess is provided in the base and a working port communicating with the working recess is provided. Static pressure slider according to claim 1, characterized in that it is a said static pressure generator and the suction unit is respectively continuous annular. The static pressure slider according to claim 1 or 2, wherein the static pressure generating portion is formed of a porous body. Static pressure slider according to any one of claims 1 to 3 wherein the suction unit is characterized by being composed by a recess that opens to the static pressure generating surface.

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