KR20160040317A - Device for transporting sheet substrate, and processing device - Google Patents

Abstract

The conveying apparatus 1 of the substrate S formed in a band shape and having flexibility includes a feeding roller 5b for feeding the substrate S, a collecting roller 6b for winding the substrate S, And a driving unit 8 for driving the feeding roller 5b and the collecting roller 6b in the direction (X, Z) intersecting with the traveling direction of the sheet. The feeding roller 5b is guided to the first rail 3 and the collecting roller 6b is guided to the second rail 4. [ The rail drive mechanism 7 changes the distance between the rollers 5b and 6b. The processing portion PA disposed between the rails 3 and 4 performs film forming, exposure, cleaning, and the like on the substrate S of the resin or stainless steel product. A plurality of processing parts PA are arranged along the rails 3, 4. The substrate S transferred along the rails 3 and 4 together with the rollers 5b and 6b is sequentially processed in the plurality of processing parts PA to form the organic EL element on the substrate S. [

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a sheet substrate carrying apparatus,

The present invention relates to a transport apparatus.

Priority is claimed on U.S. Provisional Patent Application No. 61 / 446,150, filed February 24, 2011, the content of which is incorporated herein by reference.

As a display element constituting a display device such as a display device, for example, a liquid crystal display element and an organic electroluminescence (organic EL) element are known. At present, active devices (active devices) forming thin film transistors (TFTs) on the surface of a substrate corresponding to each pixel are becoming mainstream in these display elements.

In recent years, a technique of forming a display element on a sheet-like substrate (for example, a film member or the like) has been proposed. As such a technique, for example, a technique called a roll-to-roll method (hereinafter simply referred to as "roll method") is known (see, for example, Patent Document 1). In the roll system, a single sheet-like substrate (for example, a strip-shaped film member) wound on a supply roller on a substrate supply side is fed out, And a desired processing is performed on the substrate by a processing device provided between the supply roller and the rotation roller.

The substrate is transported by using, for example, a plurality of transport rollers or the like, and the gate electrode, the gate insulating film, the semiconductor film, the source Drain electrodes and the like are formed, and the constituent elements of the display element for flexible display are sequentially formed on the surface of the substrate to be processed. For example, in the case of forming an organic EL element, a light emitting layer, a cathode, a cathode, an electric circuit and the like are sequentially formed on a substrate.

Patent Document 1: International Publication No. 2006/100868

However, with respect to the above-described configuration, since the dimension of the substrate to be stretched until it is wound after being fed becomes long, it may become difficult to manage the substrate.

It is an object of the present invention to provide a transport apparatus capable of reducing the management burden on the substrate at the time of transportation.

According to an aspect of the present invention, there is provided an image forming apparatus comprising: a supply roller that is formed in a band shape and that discharges a flexible substrate; a recovery roller that winds the substrate fed out from the supply roller; And a driving unit for driving the feeding roller and the collection roller in an intersecting direction.

According to the embodiment of the present invention, it is possible to reduce the management burden on the substrate at the time of transportation.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the entire configuration of a transfer device according to an embodiment of the present invention. Fig.
2 is a perspective view showing a configuration of a part of the transport apparatus according to the embodiment.
3 is a plan view showing the operation of the transport apparatus according to the embodiment.
4 is a diagram showing the operation of the transport apparatus according to the present embodiment.
5 is a diagram showing the operation of the transport apparatus according to the embodiment.
6 is a plan view showing another example of the carrying apparatus according to the present invention.
7 is a front view showing another example of the carrying apparatus according to the present invention.
8 is a diagram showing another example of the transport apparatus according to the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a perspective view showing an overall configuration of a transport apparatus 1 according to the present embodiment. Fig. Fig. 2 is a perspective view showing a state of a part of the transport apparatus 1 when viewed from a different point from Fig. 1. Fig.

As shown in Figs. 1 and 2, the carrying apparatus 1 is a device for conveying a flexible substrate S formed in a band shape, for example, on the bottom surface FL of a manufacturing factory. The conveying apparatus 1 includes a pedestal 2, a first rail 3, a second rail 4, a substrate feeding mechanism 5, a substrate winding mechanism 6, a rail drive mechanism 7, a roller drive section 8, and a control device CONT.

The transfer apparatus 1 is used in a system of a roll-to-roll system (hereinafter simply referred to as "roll system") in which various processing is performed on the surface of a flexible substrate S . Such a roll-type system is used when a display element (electronic device) such as an organic EL element or a liquid crystal display element is formed on a substrate S, for example. Of course, the transport apparatus 1 may be used in a system for forming elements other than these elements (for example, a solar cell, a color filter, a touch panel, etc.).

Hereinafter, when describing the configuration of the transport apparatus 1 according to the present embodiment, the XYZ orthogonal coordinate system is set, and the positional relationship of the respective members is described with reference to this XYZ orthogonal coordinate system. In the following drawings, a plane parallel to the bottom surface FL of the XYZ orthogonal coordinate system is defined as an XY plane. The direction (longitudinal direction) in which the substrate S moves in the roll system in the XY plane is the Y direction, and the direction orthogonal to the Y direction is the X direction. The direction perpendicular to the bottom surface FL (XY plane) is the Z axis direction.

As the substrate S to be processed in the substrate processing apparatus PA, for example, a foil (foil) such as a resin film or stainless steel can be used. For example, the resin film may be formed of a resin such as polyethylene resin, polypropylene resin, polyester resin, ethylene vinyl copolymer resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, polycarbonate resin, polystyrene resin, , Polyethylene terephthalate, polyethylene naphthalate, and stainless steel foil.

The dimension of the substrate S in the short-length direction is, for example, about 50 cm to 2 m, and the dimension in the longitudinal direction (dimension of one roll) is, for example, 10 m or more. Of course, this dimension is merely an example, and is not limited to this. For example, the size of the substrate S in the short-length direction may be 1 m or less, or 50 cm or less, and may be 2 m or more. In the present embodiment, the substrate S having a dimension in the short-length direction exceeding 2 m may be used. The length of the substrate S in the longitudinal direction may be 10 m or less.

The substrate S has a thickness of, for example, 1 mm or less and is formed to have flexibility. Here, the flexibility refers to a property capable of bending the substrate without shearing or fracturing, for example, even when a predetermined force of at least its own weight is applied to the substrate. Also, for example, the property of bending by the predetermined force is included in the flexibility. In addition, the flexibility varies depending on the material, size, thickness of the substrate, environment such as temperature, humidity, and the like. Although a single strip-shaped substrate may be used as the substrate S, it may be a structure in which a plurality of unit substrates are connected to form a strip.

It is preferable that the substrate S has a relatively small coefficient of thermal expansion so that the dimension does not substantially change even if the substrate S receives relatively high temperature (for example, about 200 캜). For example, an inorganic (inorganic) filler can be mixed with a resin film to reduce the thermal expansion coefficient. Examples of the inorganic filler include titanium oxide, zinc oxide, alumina, silicon oxide and the like.

The base 2 has a base portion 2a, a leg portion 2b, and a support base 2c. The base portion 2a lies on the bottom surface FL. A plurality of leg portions 2b are provided on the base portion 2a and support the support base 2c. The support base 2c is formed, for example, of a rectangular shape, and has an opening portion in which the processing device PA is mounted in the X direction and three openings 2d provided so that the opening portion is interposed therebetween. That is, the support base 2c is provided with three openings 2d along the X direction. In the three openings 2d, guide rails 7r extending in parallel in the Y-axis direction are provided. The guide rails 7r are provided parallel to each other in the X direction with respect to the respective openings 2d.

The first rail 3 is disposed along the side of the support base 2c on the + Y side. The first rail 3 is divided into three unit rails 3A to 3C. Each of the unit rails 3A to 3C is disposed at a position corresponding to each of the three openings 2d of the support table 2c. The dimension in the X direction of the unit rails 3A to 3C is a value corresponding to the dimension in the X direction of each opening portion 2d.

The second rails 4 are arranged along the side of the -Y side of the support base 2c. The second rail 4 is divided into three unit rails 4A to 4C. Each of the unit rails 4A to 4C is disposed at a position corresponding to each of the three openings 2d of the support base 2c as in the unit rails 3A to 3C. The dimensions of the unit rails 4A to 4C in the X direction correspond to the dimensions of the opening portions 2d in the X direction and are the same as the dimensions of the unit rails 3A to 3C in the X direction have.

The unit rails 3A to 3C of the first rail 3 and the unit rails 4A to 4C of the second rail 4 are provided in the respective opening portions 2d and the guide rails 7r, Respectively. 1, the unit rails 3A to 3C are supported on the + Y side end portion of the guide rail 7r and the unit rails 4A to 4C are supported on the -Y side end portion of the guide rail 7r .

The unit rails 3A to 3C of the first rail 3 and the unit rails 4A to 4C of the second rail 4 are arranged in parallel in the X axis direction. Since the guide rails 7r extend in parallel in the Y axis direction, the unit rails 3A to 3C and the unit rails 4A to 4C are held on the guide rails 7r in the Y As shown in FIG. Thus, the first rail 3 and the second rail 4 are configured to be linearly movable on a plane parallel to the XY plane by the guide rails 7r.

The substrate feeding mechanism 5 is disposed on the first rail 3. The substrate feeding mechanism 5 has a roller supporting portion 5a and a feeding roller 5b. The roller support portion 5a is connected on the first rail 3 and is provided so as to be movable (guided) along the first rail 3 in the X direction. The roller supporting portion 5a is movable across the unit rails 3A to 3C constituting the first rail 3. [

The feeding roller 5b is rotatably supported by the roller supporting portion 5a. The feeding roller 5b is supported so that the direction of the rotating shaft coincides with the direction parallel to the X direction. On the feeding roller 5b, a substrate S is wound in a roll shape. As the feed roller 5b rotates, the substrate S wound around the feed roller 5b is fed in the -Y direction. The feed roller 5a is rotatable by a motor or the like.

The substrate winding mechanism 6 is disposed on the second rail 4. The substrate winding mechanism 6 has a roller support portion 6a and a collection roller 6b. The roller supporting portion 6a is connected on the second rail 4 and is provided so as to be movable in the X direction along the second rail 4. [ The roller supporting portion 6a is movable across the unit rails 4A to 4C constituting the second rail 4. [

The collection roller 6b is rotatably supported by the roller support portion 6a. The collection roller 6b is supported so that the direction of the rotation axis coincides with the direction parallel to the X direction. On the collection roller 6b, the substrate S is rolled up. As the collection roller 6b rotates, the substrate S is wound on the collection roller 6b. The collection roller 6b is rotatable by a motor or the like.

The rail drive mechanism 7 moves the first rail 3 and the second rail 4 along the guide rail 7r in the Y direction. The rail drive mechanism 7 can drive the first rails 3 for each of the unit rails 3A to 3C and can drive the second rails 4 for each of the unit rails 4A to 4C. The control device CONT is capable of controlling the amount of driving, the driving speed and the timing of driving by the rail driving mechanism 7. [ The rail drive mechanism 7 can move the unit rail 3A and the unit rail 4A toward or away from each other along the guide rail 7r. The rail drive mechanism 7 can move the unit rail 3B and the unit rail 4B toward or away from each other along the guide rail 7r. The rail drive mechanism 7 can move the unit rail 3C and the unit rail 4C toward or away from each other along the guide rail 7r.

The roller driving unit 8 has a first driving unit 83 and a second driving unit 84. The first driving part 83 moves the roller supporting part 5a along the first rail 3 in the X direction and rotates the feeding roller 5b. The second driving portion 84 moves the roller supporting portion 6a in the X direction along the second rail 4 and rotates the collecting roller 6b. The control device CONT can control the first driving section 83 and the second driving section 84 individually or in synchronization. Further, the control device CONT can control the amount of driving, the driving speed, the timing of driving, and the like in the first driving portion 83 and the second driving portion 84.

Next, with reference to Fig. 3 and others, the operation of the transport apparatus 1 configured as described above will be described. Fig. 3 is a plan view showing the operation of the transport apparatus 1. Fig.

First, a description will be given of a case where the operation is carried out with the substrate S between the supply roller 5b and the collection roller 6b.

In this case, the control device CONT controls the substrate feeding mechanism 5 on the unit rails 3A of the first rails 3 and the substrate winding mechanism 6 on the unit of the second rails 4 And placed on the rail 4A. By this operation, the feeding roller 5b and the collecting roller 6b are arranged so as to be opposed to each other in the Y direction and in parallel to each other.

Next, the substrate S wound in a roll shape is mounted on the feed roller 5b. In the configuration shown in Fig. 3, for example, the reader Lf is attached to the front end Sf of the substrate S, but the reader Lf may be omitted. After the roll-shaped substrate S is mounted on the feed roller 5b, the control unit CONT moves the unit rail 4A of the second rail 4 in the + Y direction. By this operation, the supply roller 5b and the collection roller 6b are brought close to each other.

The controller CONT rotates the feed roller 5b by the first drive unit 83 when the distance between the feed roller 5b and the take-up roller 6b reaches the first distance D1. This operation causes the leading end Sf of the substrate S to be fed to the collecting roller 6b side so that the leading end Sf of the substrate S reaches the collecting roller 6b and is wound on the collecting roller 6b Loses. The operation of winding the leading end Sf of the substrate S around the collecting roller 6b may be automated, but the tip Sf may be attached to the collecting roller 6b by a human hand using a fixing tape or the like .

The control unit CONT controls the rotation of the feed roller 5b after the leading end Sf of the substrate S is caught by the collecting roller 6b and the distance between the feed roller 5b and the collecting roller 6b The unit rail 4A is moved in the -Y direction to the second distance (the distance at which the substrate winding mechanism 6 reaches the original position). With this operation, the leading end Sf of the substrate S is pulled out in the -Y direction in a state where it is caught by the collection roller 6b.

After the substrate winding mechanism 6 reaches the original position, the control device CONT stops the movement of the substrate winding mechanism 6. Thereafter, as shown in Fig. 4, the control device CONT synchronizes the substrate feeding mechanism 5 and the substrate winding mechanism 6 by the first driving part 83 and the second driving part 84, The unit rail 3B and the unit rail 4B. Prior to this operation, the processing apparatus PA is arranged between the unit rail 3B and the unit rail 4B. At this time, the substrate feeding mechanism 5 and the substrate winding mechanism 6 are controlled so that the substrate S is given a proper tension in the Y direction and spreads flatly between the feeding roller 5b and the collecting roller 6b .

This processing apparatus PA has various processing sections for forming, for example, an organic EL element with respect to the target surface Sa of the substrate S. [ Examples of such a processing section include a partition forming apparatus for forming a partition on the surface to be processed Sa, an electrode forming apparatus for forming an electrode for driving the organic EL element, a light emitting layer forming apparatus for forming a light emitting layer, .

More specifically, a droplet applying device (for example, an ink jet type applying device, a spray coat type applying device, a gravure type printing device, etc.), a deposition device, a sputtering device , An exposure apparatus, a developing apparatus, a surface modifying apparatus, a cleaning apparatus, and the like. The processing apparatus PA is not limited to the processing section for forming the organic EL element, and a processing apparatus having a processing section for forming other elements may be disposed.

The control device CONT controls the feed roller 5b in accordance with the timing of the processing of the processing device PA after the substrate feeding mechanism 5 and the substrate winding mechanism 6 are disposed on the unit rails 3B and 4B, And the collection roller 6b. By this operation, the substrate S is fed from the feeding roller 5b as shown by the arrow K2 and the substrate S is wound by the collecting roller 6b. In this state, Is performed on the surface S of the substrate S to be processed.

The control device CONT adjusts the moving speed of the substrate S moving from the feeding roller 5b to the collecting roller 6b in accordance with the processing speed of the processing device PA. For example, in accordance with the winding diameter R1 of the substrate S wound around the supply roller 5b and the winding diameter R2 of the substrate S wound around the collection roller 6b, the first drive unit 83 ) And the second driving unit 84 are adjusted. By this operation, the substrate S having a constant transporting speed is transported.

The control apparatus CONT may adjust the distance between the feed roller 5b and the collection roller 6b in accordance with the processing position of the processing apparatus PA and the dimension in the Y direction. In this case, the control device CONT causes the rail drive mechanism 7 to move, for example, the unit rail 3B or the unit rail 4B in the Y direction. Part or all of the constituent elements of the display element are sequentially formed on the substrate S by the processing device PA.

After the processing on the substrate S is completed, the control device CONT synchronizes the substrate feeding mechanism 5 and the substrate winding mechanism 6 by the first driving section 83 and the second driving section 84 Respectively, onto the unit rails 3C and onto the unit rails 4C. 5, after the substrate feeding mechanism 5 and the substrate winding mechanism 6 are disposed on the unit rails 3C and the unit rails 4C, the substrate feeding mechanism 5 and the substrate winding mechanism 6). At this time, it is preferable that the substrate S extending between the feeding roller 5b and the collecting roller 6b is not warped but spreads horizontally.

The control device CONT stops the movement of the substrate feeding mechanism 5 and the substrate winding mechanism 6 and then moves the unit rail 4C in the + Y direction while rotating the collecting roller 6b. With this operation, the supply roller 5b and the collection roller 6b are brought close again while the collection roller 6b winds the substrate S.

The controller CONT controls the feed roller 5b by the first driving portion 83 as shown in Fig. 5 after the distance between the feeding roller 5b and the collecting roller 6b reaches the third distance D2, . In this case, the third distance D2 may be, for example, the same distance as the first distance D1. By this operation, the rear end Se of the substrate S is fed toward the collecting roller 6b, the rear end Se of the substrate S reaches the collecting roller 6b and is wound on the collecting roller 6b Loses. Although the reader Le is attached to the rear end Se of the substrate S in the configuration shown in Fig. 5, for example, the reader Le may be omitted.

The control device CONT is configured such that the rear end Se of the substrate S is caught by the collection roller 6b so that the distance between the supply roller 5b and the collection roller 6b becomes the second distance And moves the unit rail 4C in the -Y direction until the distance reaches the original position. After the substrate winding mechanism 6 returns to its original position, the roll substrate S wound around the collection roller 6b is moved to the next processing apparatus. Alternatively, if all the processing is performed on the substrate S, it is removed from the collection roller 6b and recovered.

As described above, according to the present embodiment, the first rail 3 and the second rail 4 are provided on the base 2, and the first rail 3 can be moved on the first rail 3, And the second rail 4 is provided with a collection roller 6b capable of moving on the second rail 4 and the first and second rails 3 and 4 are provided with a supply roller 5b, The substrate S can be compactly conveyed between the feeding roller 5b and the collecting roller 6b since it can be driven by the rail driving mechanism 7. [ As a result, it is possible to suppress the increase in the dimension of the substrate S that is stretched until it is wound after being fed, so that it is possible to reduce the management burden on the substrate S at the time of transportation.

The technical scope of the present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the gist of the present invention.

In the above embodiment, the first rail 3 and the second rail 4 are moved in a direction parallel to the XY plane. However, the present invention is not limited to this. For example, the first rail 3 and the second rail 4 may be movable in the Z direction.

Fig. 6 is a plan view showing another example of the transport apparatus 1, and Fig. 7 is a side view showing an example of the transport apparatus 1 in Fig.

As shown in Figs. 6 and 7, the structure corresponding to the base 2 of the transfer apparatus 1 has four support rods 20A to 20D in this example. The unit rails 3A and 4A are disposed on the support table 20A. The first processing apparatus PA1 is connected between the unit rail 3A and the unit rail 4A.

The unit rail 3B and the unit rail 4B are disposed on the support base 20B. The support base 20B is separated from the support base 20A, the support base 20C and the support base 20D. The support base 20B is provided so as to be movable independently in the Z direction by the elevating mechanism 9. [ The elevating mechanism 9 has a supporting column 9a, a guide column 9b and an actuator 9c. The support base 20B is moved in the Z direction along the guide pillar 9b while being supported by the support pillar 9a by driving of the actuator 9c. The driving amount of the actuator 9c, the driving speed, and the timing of the driving can be controlled by, for example, the second control device CONT2. Alternatively, they may be collected by the control device CONT.

The support table 20C and the support table 20D are arranged side by side in the Z direction. The support table 20C is provided on the + Z side, and the support table 20D is provided on the -Z side. The support rods 20C are provided with unit rails 3C and 4C. A second processing unit PA2 can be connected between the unit rail 3C and the unit rail 4C. In the second processing apparatus PA2, for example, subsequent processing of the first processing apparatus PA1 is performed.

The support rods 20D are provided with unit rails 3D and 4D. A third processing apparatus PA3 is connectable between the unit rail 3D and the unit rail 4D. In the third processing apparatus PA3, the same processing as that of the second processing apparatus PA2 (here, the subsequent processing process of the first processing apparatus PA1) is performed.

6 and 7 show an example in which the same processing (subsequent processing of the first processing device PA1) is performed in the second processing device PA2 and the third processing device PA3 It is explained, but it is not limited to this. For example, the second processing device PA2 and the third processing device PA3 may be configured to perform different processes.

The second processing apparatus PA2 and the third processing apparatus PA3 may be configured to be completely identical to each other in terms of their constitution and the processing conditions (temperature, humidity, processing time, substrate transfer speed, tension amount, etc.) It is also possible to adopt a configuration in which the setting is performed.

The support base 20B is provided by the elevating mechanism 9 so as to be movable in the same Z position as the support base 20C and the support base 20D, respectively. The unit rails 3B and 4B and the unit rails 3C and 4C can be connected when the support base 20B and the support base 20C are disposed at the same Z position. In this case, the control device CONT adjusts the distance between the unit rail 3B and the unit rail 4B to be equal to the distance between the unit rail 3C and the unit rail 4C.

Similarly, when the support base 20B and the support base 20D are disposed at the same Z position, the unit rails 3B and 4B can be connected to the unit rails 3D and 4D. In this case, the control device CONT adjusts the distance between the unit rail 3B and the unit rail 4B to be equal to the distance between the unit rail 3D and the unit rail 4D.

In the case of operating the conveying apparatus 1 having such a configuration, the substrate feeding mechanism 5 is disposed on the first rail 3 and the substrate winding mechanism 6 And the substrate S is conveyed between the two rollers across the substrate S between the feeding roller 5b and the collecting roller 6b.

In this case, since the support table 20B is selectively accessible to both the support table 20C and the support table 20D, the substrate S having passed through the first processing apparatus PA1 can be selectively accessed by the second processing apparatus PA2 It is possible to set the moving position of the substrate S so as to alternately move to the third processing apparatus PA3. As a result, for example, the conveying speed of the substrate S in the second processing apparatus PA2 and the third processing apparatus PA3 is smaller than the conveying speed of the substrate S in the first processing apparatus PA1 In the latter case, it is possible to prevent the substrate S from becoming in the process waiting state before the second processing apparatus PA2 and the third processing apparatus PA3.

An elevator for adjusting the height of the feeding roller 5b and the collecting roller 6b is provided in each of the substrate feeding mechanism 5 and the substrate winding mechanism 6 so that the substrate feeding mechanism 5 6 can be adjusted by adjusting the height or inclination of the substrate S. The state in which the substrate S is held between the supply roller 5b and the collection roller 6b is referred to as a substrate set (roll set).

As described above, after the processing for the substrate S of the first substrate set in the first processing apparatus PA1 is finished and the collecting roller and the supplying roller of the first substrate set are moved onto the support table 20B, The supply roller and the collection roller of the second substrate set to be processed can be carried into the first processing apparatus PA1.

That is, the timing at which the first substrate set is brought into one of the second processing apparatus PA2 or the third processing apparatus PA3 and the timing at which the second substrate set is brought into the first processing apparatus PA1 can be adjusted It is possible to sequentially process a plurality of substrate sets.

Even after the second processing apparatus PA2 and the third processing apparatus PA3, it is possible to bring the substrate set into the apparatus PA4 of the next processing step by providing the same configuration as that of the support table 20B.

In the configuration of the present embodiment, the substrate S is held between the processing apparatuses PA1, PA2, and PA3 with the substrate S interposed between the feeding mechanism 5 and the take- Can be moved in the X direction. In this case, as an example of each processing apparatus PA, it is configured to be separable into an upper unit 100A and a lower unit 100B as shown in Fig. 8, and in a state in which tension in the Y direction is applied, And the substrate take-up mechanism 6 can pass through the space between the upper unit 100A and the lower unit 100B in the X direction.

Rollers 101a, 101b, 102a and 102b for guiding the substrate S are provided on the side of the inlet and outlet of the substrate S of the upper unit 100A and the lower unit 100B. Either or both of the upper unit 100A and the lower unit 100B can be moved in the Z direction by a required amount by an elevating mechanism (not shown). As such a processing apparatus PA, a printing apparatus (including an ink jet printer), a plasma apparatus, a vapor deposition apparatus, an exposure apparatus, and the like can be used.

One … Conveying device 2 ... Expectation
3 ... First rail 3A to 3D ... Unit rail
4 … The second rails 4A to 4D ... Unit rail
5b ... Feed roller 6b ... Recovery roller
7 ... The rail drive mechanism 7r ... Guide rail
8 … Roller drive part 9 ... Elevator
9c ... The actuators 20A to 20D ... support fixture
83 ... The first driving unit 84 ... The second driver
100A ... The upper unit 100B ... The lower unit
CONT ... Control device CONT2 ... The second control device
D1 ... The first distance D2 ... Third street
PA (PA1, PA2, PA3) ... Processing device S ... Board
Sf ... The tip Se of the substrate S The rear end of the substrate S

Claims (10)

A sheet substrate transfer apparatus for transferring a flexible sheet substrate to a processing apparatus in a roll manner,
A substrate feeding mechanism for feeding the sheet substrate along the long direction to the processing apparatus, and a feeding roller for winding the sheet substrate,
A substrate collecting mechanism for collecting the sheet substrate taken out from the processing apparatus and having a collection roller on which the sheet substrate is wound,
A first moving mechanism for moving the substrate feeding mechanism and the substrate collecting mechanism in a direction intersecting with the longitudinal direction while the sheet substrate is laid between the feeding roller and the collecting roller,
And a second moving mechanism for moving at least one of the substrate feeding mechanism and the substrate collecting mechanism in the longitudinal direction with the sheet substrate laid between the feeding roller and the collecting roller, . The method according to claim 1,
Wherein each of the substrate supply mechanism and the substrate recovery mechanism includes a rotation drive portion for rotating each of the supply roller and the collection roller,
And the rotation driving section is operated while the substrate feeding mechanism or the substrate collecting mechanism is moved by the second moving mechanism in the longitudinal direction. The method of claim 2,
While the substrate feeding mechanism and the substrate collecting mechanism are moved by the second moving mechanism so as to be closer to each other in the longitudinal direction, A sheet conveying apparatus for a sheet substrate for operating a rotary drive unit. The method according to any one of claims 1 to 3,
Wherein the substrate supply mechanism and the substrate recovery mechanism are disposed such that the rotation axis of the supply roller and the rotation axis of the rotation roller fall in the longitudinal direction and are parallel to each other. The method of claim 4,
Wherein the first moving mechanism includes: the first driving unit that allows the substrate feeding mechanism to move independently in a direction crossing the longitudinal direction; and a second driving unit that is capable of independently moving the substrate collecting mechanism in a direction crossing the longitudinal direction And a second driving unit for driving the sheet substrate. The method of claim 5,
When the substrate feeding mechanism and the substrate collecting mechanism are moved in the direction crossing the longitudinal direction while the sheet substrate is laid between the feeding roller and the collecting roller, And a control unit for synchronously controlling the sheet conveying unit. The method of claim 4,
Wherein the second moving mechanism is controlled so that the substrate feeding mechanism and the substrate collecting mechanism are moved closer to the longitudinal direction when the leading end of the sheet substrate wound on the feeding roller is wound around the collecting roller. 1. A processing apparatus for a sheet substrate for carrying and processing a sheet substrate having flexibility in a longitudinal direction,
The sheet substrate is placed between the supply roller that winds the sheet substrate supplied to the processing apparatus and the collection roller that winds the sheet substrate processed by the processing apparatus, An upper unit and a lower unit which can be separated into an upper side and a lower side of the sheet substrate so as to be able to move into the processing apparatus or to be taken out from the processing apparatus while being moved in a crossed short direction,
And an elevating mechanism for raising and lowering either or both of the upper unit and the lower unit. The method of claim 8,
A substrate supply mechanism for supporting the supply roller,
A substrate collection mechanism for supporting the collection roller,
Further comprising a first moving mechanism for moving the substrate feeding mechanism and the substrate collecting mechanism together in the short direction so that the sheet substrate passes the separated space between the upper unit and the lower unit in the short direction, Processing device. The method according to claim 8 or 9,
Wherein the processing apparatus is any one of a printing machine, a plasma apparatus, a deposition apparatus, and an exposure apparatus.

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