KR20160019365A - Device and method for inspecting appearance of transparent substrate - Google Patents
Device and method for inspecting appearance of transparent substrate Download PDFInfo
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- KR20160019365A KR20160019365A KR1020150106617A KR20150106617A KR20160019365A KR 20160019365 A KR20160019365 A KR 20160019365A KR 1020150106617 A KR1020150106617 A KR 1020150106617A KR 20150106617 A KR20150106617 A KR 20150106617A KR 20160019365 A KR20160019365 A KR 20160019365A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Quality & Reliability (AREA)
- Theoretical Computer Science (AREA)
- Signal Processing (AREA)
Abstract
An object of the present invention is to accurately detect a scratch on a quartz blank.
As a means for solving such a problem, a quartz blank (1) is placed on a glass plate (2) to irradiate the glass plate (2) and the quartz blank (1) with red light deviating from positive light from below the glass plate And irradiates green light as the positive transmitted light. And irradiates blue light as reflected light from the upper side of the glass plate 2. [ The image pickup device 20 generates the diffusion transmitted image 30a by red light, the positive image 30b by green light, and the diffuse reflection image 30c by blue light in the image processing device 30, The diffusion transmission image 30a, the positive transmission image 30b and the diffusion reflection image 30c are synthesized to obtain a composite image 30d. The composite image 30d detects the scratch portion 1a of the quartz blank 1.
Description
BACKGROUND OF THE
Conventionally, a quartz-type quartz crystal blank has been used as a quartz crystal. Further, an appearance inspection method for detecting such scratches of the quartz blank has been developed.
As such a conventional appearance inspection method, there is a method in which light is transmitted through a quartz blank placed on a transparent support, and the appearance inspection is carried out by detecting light that is irregularly reflected at a portion such as a scratch (see Patent Document 1) .
Alternatively, light is transmitted through a quartz blank placed on a transparent support, and a light whose polarization state changes in a portion such as a scratch is detected by using a polarizing plate to perform the appearance inspection (see Patent Document 2).
However, according to the method described in
According to the method described in
In both of
It is an object of the present invention to provide an apparatus for inspecting the appearance of a transparent substrate and a method for inspecting the appearance of the transparent substrate, which can accurately and surely detect the appearance of the crystal blank.
The present invention provides an apparatus for inspecting the appearance of a transparent substrate, comprising: a transparent support on which a transparent substrate is placed; imaging means disposed above the transparent support for generating an image by imaging the transparent substrate and the transparent support; A first illuminating means disposed below the transparent support for illuminating the transparent support and the transparent substrate with the first color light deviating from the positive transmitted light (positive transmitted light) with respect to the imaging means, and a second illuminating means disposed below the transparent support, A third illuminating means disposed above the transparent support and for illuminating the transparent substrate with the third color light which is to be reflected light, and a second illuminating means for illuminating the transparent substrate with the second color light, Based on the obtained diffuse transmission image by the first color light, the positive transmission image by the second color light, and the diffuse reflection image by the third color light, And an image processing device for generating a sex image to detect a scratch on the transparent substrate.
The present invention is characterized in that the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light Which is an apparatus for inspecting the appearance of a substrate.
In the present invention, when the output of the diffusion transmitted image is P1, the output of the positive-going image is P2, and the output of the diffuse reflection image is P3, the image processing apparatus calculates -k1xP1 + k2xP2 + k3xP3 , and k2 and k3 are positive numbers), the scratch of the transparent substrate is detected.
The present invention is an apparatus for inspecting the appearance of a transparent substrate, characterized in that a scratch on a transparent substrate is detected based on a calculation formula of -P1 + P2 + P3.
The present invention is characterized in that the imaging means receives one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or the first color light, the second color light and the third color light to generate an image And a CCD camera or a CMOS camera having two or more imaging plates for performing a visual inspection of the transparent substrate.
The present invention relates to a method of inspecting the appearance of a transparent substrate, comprising: a step of placing a transparent substrate on a transparent support; a step of irradiating the light from the first illumination means disposed below the transparent support to the imaging means disposed above the transparent support, A step of generating an image by imaging means by irradiating the one-color light onto the transparent support and the transparent substrate; and a step of irradiating a second color light, which is positive light transmission from the second illumination means disposed below the transparent support, A step of generating an image by the image pickup means by irradiating the transparent substrate with the third color light which is the reflection light from the third illumination means disposed above the transparent support, A diffusion transmitted image by the first color light obtained by the imaging means, Information transmission image, based on the diffuse reflection image by the third color, a visual inspection method for a transparent substrate, characterized in that it includes a step of generating a composite image by image processing by the apparatus detecting the scratches on the transparent substrate.
The present invention is characterized in that the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light A method for inspecting the appearance of a substrate.
In the present invention, when the output of the diffusion transmitted image is P1, the output of the positive-going image is P2, and the output of the diffuse reflection image is P3, the image processing apparatus calculates -k1xP1 + k2xP2 + k3xP3 , and k2 and k3 are positive numbers), the scratch of the transparent substrate is detected.
According to the present invention, the image processing apparatus is a method for inspecting the appearance of a transparent substrate, characterized in that a scratch on a transparent substrate is detected based on a calculation formula of -P1 + P2 + P3.
The present invention is characterized in that the imaging means receives one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or the first color light, the second color light and the third color light to generate an image A CCD camera or a CMOS camera having two or more image pickup plates for performing a visual inspection of a transparent substrate.
INDUSTRIAL APPLICABILITY According to the present invention, a transparent substrate can be inspected accurately and reliably.
1 is a schematic view showing an apparatus for inspecting the appearance of a transparent substrate according to the present invention.
2 is a view showing a state in which red light is incident on a transparent substrate;
3 is a view showing a state in which green light is incident on a transparent substrate;
4 is a view showing a state in which blue light is incident on a transparent substrate;
5 is a diagram showing image processing in the visual inspection apparatus.
Figures 6 (a), 6 (b) and 6 (c) show image processing in the visual inspection apparatus.
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 4 are views showing an embodiment of an apparatus for inspecting the appearance of a transparent substrate according to the present invention.
First, a transparent substrate to be inspected by a visual inspection apparatus for a transparent substrate will be described.
As a transparent substrate to be inspected by a visual inspection apparatus for a transparent substrate, a quartz crystal blank for a quartz crystal is used.
As shown in Fig. 1, a quartz crystal blank (transparent substrate) 1 to be inspected is a double-convex convex-shaped quartz crystal blank placed on a glass plate (transparent support) 2 and having a thick central portion, And a modified blank of a beveling process in which the entire surface is a smooth surface except for the peripheral portion.
Next, the outline of the transparent
1, the apparatus for inspecting the appearance of a
The image pickup means 20 is made up of a CCD camera. The CCD camera includes one image pickup plate for receiving the first color light, the second color light and the third color light to generate an image, And two or more imaging plates for receiving the color light and the third color light to generate an image. The image obtained by the imaging means 20 is also sent to the
Based on the diffusion transmitted
Next, the operation of this embodiment having such a configuration will be described.
First, the crystal blank 1 is placed on the
Here, the positive transmitted light to the imaging means 20 refers to the light that is irradiated to the image pickup means 20 through the
In this case, for example, four types of red light 1-1, 1-2, 1-3, 1-4 are emitted from the first illuminating
As shown in Fig. 2, the red light 1-1 from the first illumination means 11 passes through the
Further, the red light 1-2 passes through the
Further, the red light 1-3 passes through the
Further, the red light 1-4 passes through the
Since the
Next, as shown in Fig. 3, the
Here, the positive transmitted light to the imaging means 20 refers to light that is irradiated directly to the image pickup means 20 through the
In this case, for example, four types of green light (2-1, 2-2, 2-3, 2-4) which become positive light for the imaging means (20) are irradiated from the second illuminating means (12).
As shown in Fig. 3, the green light 2-1 from the second illumination means 12 passes through the
Further, the green light 2-2 passes through the
Further, the green light 2-3 passes through the
Further, the green light (2-4) passes through the glass plate (2) and enters the quartz blank (1). In this case, the green light 2-4 diffuses strongly in the
In addition, since the
Next, as shown in Fig. 4, the
Here, the regularly reflected light to the imaging means 20 refers to the light that is irradiated by the irradiated light reflected by the
In this case, for example, three types of blue light beams 3-1, 3-2 and 3-3 are regularly reflected from the third illumination means 13 to the imaging means 20. [
As shown in Fig. 4, the blue light 3-1 from the third illuminating means 13 emits the
Further, the blue light 3-2 is uniformly diffused and reflected by the surface of the
Further, the blue light 3-3 is diffused and reflected at the surface of the
Next, the operation of the
When the output of the diffusion transmitted
That is, in the calculation formula (1), the
On the other hand, not only the
Therefore, by further adding the output of the diffuse reflection image P3 to (-P1 + P2), the
Next, in the
Next, the binarization processed
Here, the operation and effect of the present embodiment will be described with reference to Figs. 6 (a), 6 (b) and 6 (c).
6A, when the output of the diffusion transmitted
On the other hand, as shown in Fig. 6B, when the
6 (c), when the
According to the present embodiment as described above, by obtaining the
Further, as shown in Fig. 1, the red light can be surely transmitted through the
In the above-described embodiment, the example in which the
For example, in the equation (2), k1 = 1.0, k2 = 0.5, and k3 = 0.8.
Further, when k1, k2, and k3 are set to 1 in the calculation formula (2), the calculation formula (2) becomes the same as the calculation formula (1).
In the above embodiment, the image pickup means 20 is a CCD camera. However, if it is possible to pick up a diffusion transmission image, a positive transmission image, and a diffusion reflection image using light of three different colors, (2) that receives an image of the first color light, the second color light, and the third color light to generate an image by receiving the first color light, the second color light, and the third color light, Or a CMOS camera having more than two image pickup plates.
1: quartz blank
2: Glass plate
10: Appearance inspection apparatus of transparent substrate
11: first lighting means
12: second lighting means
13: Third lighting means
20:
30: Image processing device
30a: diffusion transmission image
30b: positive transmission image
30c: diffuse reflection image
30d: composite image
Claims (10)
A transparent support on which a transparent substrate is placed,
An imaging means disposed above the transparent support and configured to generate an image by imaging the transparent substrate and the transparent support,
A first illuminating means disposed below the transparent support and configured to emit first color light deviating from positive transmittance light (positive transmittance light) to the image sensing means with respect to the transparent support and the transparent substrate;
Second illuminating means disposed below the transparent support for illuminating the transparent support and the transparent substrate with the second color light as the positive transmitted light with respect to the imaging means,
A third illuminating means disposed above the transparent support for illuminating the transparent substrate with the third color light to be reflected light,
An image processing apparatus for generating a composite image based on a diffusion transmission image by the first color light, a positive transmission image by the second color light, and a diffuse reflection image by the third color light obtained by the imaging means and detecting a scratch on the transparent substrate Wherein the transparent substrate is a transparent substrate.
Wherein the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light. Device.
When the output of the diffusion transmission image is P1, the output of the positive transmission image is P2, and the output of the diffusion reflection image is P3,
-k1 x P1 + k2 x P2 + k3 x P3 (k1, k2, k3 are positive numbers)
Wherein a scratch on the transparent substrate is detected on the basis of a calculation formula of the transparent substrate.
The image processing apparatus includes:
And a scratch on the transparent substrate is detected on the basis of a formula of -P1 + P2 + P3.
The image pickup means includes one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or two or more image pickups for receiving the first color light, the second color light and the third color light to generate an image An apparatus for inspecting the appearance of a transparent substrate, comprising a CCD camera or a CMOS camera having an image pickup plate.
Placing a transparent substrate on a transparent support,
A step of irradiating the first support member and the transparent substrate with the first color light deviating from the positive transmission light with respect to the imaging means disposed above the transparent support from the first illuminating means disposed below the transparent support,
A step of irradiating the transparent support and the transparent substrate with the second color light as positive light transmission from the second illuminating means disposed under the transparent support to the imaging means to generate an image by the imaging means,
A step of irradiating the transparent substrate with a third color light, which is a reflection light from the third illuminating means disposed above the transparent support, to generate an image by the imaging means;
A composite image is generated by the image processing apparatus on the basis of the diffuse transmission image by the first color light obtained by the imaging means, the positive transmission image by the second color light, and the diffuse reflection image by the third color light, And a step of detecting the appearance of the transparent substrate.
Wherein the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light. Way.
When the output of the diffusion transmission image is P1, the output of the positive transmission image is P2, and the output of the diffusion reflection image is P3,
-k1 x P1 + k2 x P2 + k3 x P3 (k1, k2, k3 are positive numbers)
Wherein a scratch on the transparent substrate is detected on the basis of a calculation formula of the transparent substrate.
The image processing apparatus includes:
And a scratch on the transparent substrate is detected on the basis of the equation of -P1 + P2 + P3.
The image pickup means includes one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or two or more image pickups for receiving the first color light, the second color light and the third color light to generate an image A method for inspecting the appearance of a transparent substrate, the method comprising: a CCD camera or a CMOS camera having an image pickup plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014163857A JP6296499B2 (en) | 2014-08-11 | 2014-08-11 | Appearance inspection apparatus and appearance inspection method for transparent substrate |
| JPJP-P-2014-163857 | 2014-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160019365A true KR20160019365A (en) | 2016-02-19 |
| KR101721965B1 KR101721965B1 (en) | 2017-03-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR1020150106617A KR101721965B1 (en) | 2014-08-11 | 2015-07-28 | Device and method for inspecting appearance of transparent substrate |
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| Country | Link |
|---|---|
| JP (1) | JP6296499B2 (en) |
| KR (1) | KR101721965B1 (en) |
| CN (1) | CN105372267B (en) |
| TW (1) | TWI553307B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6625475B2 (en) * | 2016-04-22 | 2019-12-25 | 株式会社 東京ウエルズ | Defect inspection method and defect inspection system |
| DE102016107900B4 (en) * | 2016-04-28 | 2020-10-08 | Carl Zeiss Industrielle Messtechnik Gmbh | Method and device for determining the edge of a measurement object in optical measurement technology |
| KR20170133113A (en) * | 2016-05-25 | 2017-12-05 | 코닝정밀소재 주식회사 | Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light |
| CN106053484A (en) * | 2016-08-03 | 2016-10-26 | 常州驰网智能检测技术有限公司 | Testing apparatus and method for foreign matters on surface of liquid crystal glass |
| KR101867589B1 (en) * | 2017-12-27 | 2018-06-15 | 주식회사 세코닉스 | Transparent Inspection Device |
| US11244436B2 (en) | 2018-02-26 | 2022-02-08 | Koh Young Technology Inc. | Method for inspecting mounting state of component, printed circuit board inspection apparatus, and computer readable recording medium |
| CN108508053B (en) * | 2018-04-26 | 2021-01-12 | 武汉新芯集成电路制造有限公司 | Method for detecting systematic infinitesimal physical defects |
| CN108982362A (en) * | 2018-06-27 | 2018-12-11 | 南京中电熊猫液晶显示科技有限公司 | A kind of substrate detection support device and its detection method |
| JP2020085587A (en) * | 2018-11-21 | 2020-06-04 | 日本電気硝子株式会社 | Glass plate manufacturing method and glass plate manufacturing device |
| CN109900705B (en) * | 2019-03-18 | 2022-06-10 | 合肥京东方光电科技有限公司 | Substrate detection device and detection method |
| KR102602029B1 (en) * | 2021-11-11 | 2023-11-14 | 주식회사 에타맥스 | Micro LED Inspection Device for Performing Photoluminescence Inspection and Automatic Optical Inspection Simultaneously |
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2015
- 2015-07-15 TW TW104122934A patent/TWI553307B/en active
- 2015-07-28 KR KR1020150106617A patent/KR101721965B1/en active IP Right Grant
- 2015-08-06 CN CN201510477777.1A patent/CN105372267B/en active Active
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|---|---|---|---|---|
| JPH09288063A (en) | 1996-04-24 | 1997-11-04 | G Fuoosu Kk | Apparatus for inspecting damage of transparent board |
| JP2000081312A (en) | 1998-07-07 | 2000-03-21 | Nippon Makushisu:Kk | Inspecting method and apparatus for transparent substrate |
| JP4227272B2 (en) * | 1999-08-11 | 2009-02-18 | 株式会社エヌテック | Inspection device for articles using light of different wavelengths |
| KR20060053847A (en) * | 2004-07-20 | 2006-05-22 | 아사히 가라스 가부시키가이샤 | Method for inspecting defects of glass plate and apparatus thereof |
| JP5585301B2 (en) * | 2010-08-24 | 2014-09-10 | オムロン株式会社 | Visual inspection system for sheets |
| JP2016166813A (en) * | 2015-03-10 | 2016-09-15 | オムロン株式会社 | Sheet inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101721965B1 (en) | 2017-03-31 |
| TW201606290A (en) | 2016-02-16 |
| JP6296499B2 (en) | 2018-03-20 |
| TWI553307B (en) | 2016-10-11 |
| CN105372267A (en) | 2016-03-02 |
| JP2016038362A (en) | 2016-03-22 |
| CN105372267B (en) | 2018-03-23 |
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