KR20120133734A - Apparatus for Detecting a Defect in Edge of Glass Plate and the Method Thereof - Google Patents

Abstract

PURPOSE: A device for detecting the existence of a defect on an edge portion of a glass substrate is provided to accurately detect defects by using lasers regardless of the generation of vertical shake caused by high speed transfer of the glass substrate, thereby minimizing a failure rate and enhancing process efficiency. CONSTITUTION: A device for detecting the existence of a defect on an edge portion of a glass substrate comprises an LCD glass substrate(100), an optical unit(200), a first collimator(201), a cylindrical lens(202), a second collimator(301), a beam splitter(302), a first optical sensor(303), a first amplifier(305), a first A/D converter(307), a second optical sensor(304), a second amplifier(306), a second A/D converter(308), and a controller(313). The light optical unit is made to form an angle with the top surface of the edge portion of the glass substrate and projects lasers on the edge unit. The first collimator is comprised in between the glass substrate and optical unit to widen the lasers. The cylindrical lens is comprised in between the first collimator and the glass substrate to emit the lasers projected from the optical unit. The beam splitter is comprised in the lower part of the second collimator and positioned on a same axis with the lasers projected from the optical unit, and divides the lasers which penetrate through the glass substrate and the second collimator from the first collimator. [Reference numerals] (303) First optical sensor; (304) Second optical sensor; (305) First amplifier; (306) Second amplifier; (307) First A/D converter; (308) Second A/D converter; (310) Third optical sensor; (311) Third amplifier; (312) Third A/D converter; (313) Controller

Description

Apparatus for Detecting a Defect in Edge of Glass Plate and the Method Thereof}

The present invention relates to a device and method for detecting the presence of defects in the edge portion of the glass substrate, and more particularly to eliminate errors in defect detection that occurs in the glass substrate process of the flat panel display, and optically accurately using laser light The present invention relates to an apparatus and a method for detecting the presence or absence of defects on glass substrate edges that can be inspected.

The present invention provides a process for forming, cutting, and cleaning glass substrates of flat panel displays such as thin film transistor (TFT) plates, color filter (CF) plates, plasma display panels (PDPs), and electroluminescent (EL) panels. The present invention relates to an apparatus and a method for detecting the presence or absence of defects in the edge portion of a glass substrate generated during operation.

Conventionally, a method of detecting a glass substrate defect through a flash or a planar light source has been used with a linear camera and a light source mounted perpendicular to the moving direction of the glass substrate. At this time, since the pixel of the sensor (Charge Coupled Device) of the linear camera needs to be 1024 or more in order to improve the detection accuracy, there is a problem that the detection of the glass substrate is not possible due to the delay of the data processing speed.

In addition, if the camera cannot be accurately tracked due to the delay in processing speed due to the large amount of data and the vertical shaking due to the high-speed transfer of the glass substrate, the microscopic defects of several μm width are missed, resulting in a large loss in the process. Will result.

In addition, there is a disadvantage that a large storage space is required for data storage that occurs when the camera is always operated for defect detection.

The present invention is to solve the above-described problems, an apparatus and method for detecting the presence of defects in the edge portion of the glass substrate that can not only detect the minute defects, but also detect defects other than foreign substances generated on the glass substrate during the process. The purpose is to provide.

Furthermore, it is an object of the present invention to provide an apparatus and method for detecting the presence or absence of defects in the edge portion of a glass substrate capable of accurately detecting even minute defects regardless of the vertical shaking caused by the high speed transfer of the glass substrate.

Furthermore, it is an object of the present invention to provide an apparatus and method for detecting the presence or absence of defects in the edge portion of the glass substrate, in which the camera operates only during defect detection, thereby simplifying the amount of detected photographic data.

The apparatus for detecting the presence of defects in the edge portion of the glass substrate according to an embodiment of the present invention for achieving this object, the liquid crystal display glass substrate, is provided at an angle with the upper surface of the edge (edge) of the glass substrate, the edge (edge) Is provided between the optical unit for irradiating a laser to the glass unit, the glass substrate and the optical unit, and between the first collimator, the first collimator 201 and the glass substrate, which widen the laser beam. It is provided with a cylindrical lens (cylindrical lens) for emitting a laser beam irradiated from the optical unit, located on the same optical axis as the laser irradiated from the optical unit on the lower surface of the edge portion of the glass substrate, and transmitted through the glass substrate The second collimator for collecting the laser beam, is located under the second collimator (collimator) and located on the same optical axis as the laser irradiated from the optical unit, the first collimator (co a beam splitter for dividing the laser beam transmitted through a glass substrate and a second collimator from a llimator, a first collimator to a glass substrate and a second collimator, and then a beam splitter a first optical sensor for measuring the transmission amount of the laser beam split by the beam splitter, a first amplifier amplifying the transmission amount measured by the first optical sensor, and an analog electric signal amplified by the first amplifier as a digital value A first A / D converter converting the first collimator to a second substrate for measuring a transmission amount of the laser beam that is transmitted through the glass substrate and the second collimator, and split and reflected by a beam splitter The optical sensor, the second amplifier amplifies the transmission amount measured by the second optical sensor, converts the analog electrical signal amplified by the second amplifier into a digital value The comprise a 2 A / D converter, the 1 A / D converter 307, and a 2 A / D converter 308, the control unit 313 through the difference value detected for defects.

Furthermore, a third collimator in which a laser beam passing through the glass substrate is provided under the glass substrate to transmit the laser beam, and a third optical sensor for measuring the transmission amount of the laser beam passing through the third collimator. A third A / D converter converting the analog electric signal amplified by the third amplifier 311 and the third amplifier 311 to amplify the transmission amount measured by the third optical sensor 310 ( 312) more.

As described above, the present invention is capable of detecting even a small defect by dividing a laser beam transmitted through a glass substrate using a beam splitter and comparing the reflected transmission amount with the remaining transmission amount excluding the reflected laser beam. In addition, when optimizing the laser wavelength, it is possible to detect defects excluding foreign substances generated on the glass substrate during the process. Therefore, no machine stoppage due to malfunction occurs, thereby improving work efficiency.

Further, since the detection by a plurality of detection sensors can be detected by a sensor of about 1/1000 than the prior art, the speed is improved.

Furthermore, faster detection is possible with only a simple circuit configuration than the prior art.

Furthermore, regardless of the occurrence of vertical shaking due to the high-speed transfer of the glass substrate, accurate defect detection is possible by using a laser beam, thereby minimizing defect rate and increasing process efficiency.

Furthermore, by photographing only at the time of defect detection and generating an image, unnecessary data is not stored and processing without stopping is possible, thereby shortening the process time.

1 is a view for explaining a glass substrate defect detection apparatus according to the prior art.
2 is a cross-sectional view of the apparatus for detecting the presence of defects in the edge portion of the glass substrate according to an embodiment of the present invention.
3 is a conceptual diagram of a device for detecting the presence of defects in the edge portion of the glass substrate according to an embodiment of the present invention.
4 is a side view of a device for detecting the presence of defects in the edge portion of the glass substrate using a lens array according to an embodiment of the present invention.
5 is a conceptual diagram of a method for detecting the presence of defects in an edge portion of a glass substrate using a first collimator and a second collimator according to an embodiment of the present invention.
FIG. 6 is a conceptual diagram of a method for detecting a defect of a glass substrate edge part using a first collimator, a second collimator, and a third collimator according to an embodiment of the present invention.
7 is a conceptual diagram of a method for detecting the presence of defects in the edge portion of the glass substrate using the lens array according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout.

1 is a view for explaining a glass substrate defect detection apparatus according to the prior art. As shown, the conventional glass substrate defect detection apparatus is provided in the lower portion of the plurality of line scanner camera 101 and the glass substrate 100 which is provided perpendicular to both ends of the edge portion of the glass substrate 100. And a flash 102 provided on the vertical axis of the line scanner camera 101.

In one embodiment, the planar light source 102 is to prevent the backlight when the line scanner camera 101 is operated, and is always operated to assist in image capture.

2 is a cross-sectional view of the apparatus for detecting the presence of defects in the edge portion of the glass substrate according to an embodiment of the present invention. As shown, the liquid crystal display glass substrate 100, the optical unit 200, which is provided at an angle with the upper surface of the edge portion of the glass substrate 100, and irradiates a laser to the edge portion, the glass substrate It is provided between the optical unit 200 and the optical unit 200, between the first collimator (201), the first collimator (201) and the glass substrate 100 to expand the laser beam to a wide width It is provided, and comprises a cylindrical lens (cylindrical lens) 202 for emitting a laser beam irradiated from the optical unit 200, and a detection unit 203 for detecting the presence or absence of a defect.

In one embodiment, the edge portion of the glass substrate used for the flat panel display, the edge portion formed by cutting in a rectangular shape by a cutting process is called an edge.

In one embodiment, the optical unit 200 for irradiating a laser is a laser (infrared ray) that uses a laser that can transmit dust, foreign matter, water droplets, and contaminants without refraction without refraction. It consists of a laser using either a laser or an ultraviolet ray laser (ultraviolet ray laser), consists of a PCB (Printed Circuit Board) and the light emitting element, irradiating either infrared or ultraviolet.

The first collimator 201 may be any one of an aspherical lens, a spherical lens, and a refraction lens capable of condensing a laser beam spread in a wide range at a single point, and the first collimator 201. The laser beam diffused from) includes both ends of which substrate defects frequently occur and further includes an empty space to detect defects even when the glass substrate is shaken.

In addition, the optical unit 200, the first collimator 201, the cylindrical lens 202, and the detection unit 203 are provided at both ends of the glass substrate in order to detect defects at both ends of the glass plate 100.

In addition, the cylindrical lens 202 for emitting a laser beam is characterized in that it further comprises (line generator optics) that can emit a laser beam.

3 is a conceptual diagram of a device for detecting the presence of defects in the edge portion of the glass substrate according to an embodiment of the present invention. As shown, the liquid crystal display glass substrate 100, the optical unit 200, which is provided at an angle with the upper surface of the edge portion of the glass substrate 100, and irradiates a laser to the edge portion, the glass substrate It is provided between the optical unit 200 and the optical unit 200, between the first collimator (201), the first collimator (201) and the glass substrate 100 to expand the laser beam to a wide width A cylindrical lens 202 for emitting a laser beam irradiated from the optical unit 200 and a lower surface of the edge portion of the glass substrate 100 on the same optical axis as the laser irradiated from the optical unit 200. Located in the lower collimator 301, the second collimator (301) to collect the laser beam transmitted from the glass substrate and located on the same optical axis as the laser irradiated from the optical unit 200, 1 collimator (201) to glass substrate 100 and the second collimator (colli) a beam splitter 302 for dividing the laser beam transmitted through the mator 301 and a first collimator 201 to a glass substrate 100 and a second collimator 301. A first optical sensor 303 for measuring the transmission amount of the laser beam split by the beam splitter 302 and a first amplifier for amplifying the transmission amount measured by the first optical sensor 303 ( 305, the first A / D converter 307 and the first collimator 201 for converting the analog electric signal amplified by the first amplifier 305 into a digital value, the glass substrate 100 and the second. Measured by the second optical sensor 304 and the second optical sensor 304 for measuring the transmission amount of the laser beam passing through the collimator 301 and split and reflected by the beam splitter 302 A second amplifier 306 for amplifying the transmitted amount, an analog electric signal amplified by the second amplifier 306 A second A / D converter 308 that converts the digital value, a third collimator 309 through which the laser beam transmitted through the glass substrate 100 is provided under the glass substrate 100 to transmit the laser beam; A third optical sensor 310 for measuring a transmission amount of the laser beam passing through a third collimator 309, a third amplifier for amplifying the transmission amount measured by a third optical sensor 310, 311 ), A third A / D converter 312, a first A / D converter 307 and a second A / D converter 308 for converting an analog electric signal amplified by the third amplifier 311 into a digital value. It includes a control unit 313 for detecting a defect through the difference between the value and the presence or absence of the value of the third A / D converter 312.

In one embodiment, the first collimator (201), the second collimator (301), the third collimator (309), the collimator (309), it can focus the laser beam spread in a wide width to one point It consists of any one of aspherical lens, spherical lens or refractive lens.

In one embodiment, when the glass substrate having the defect 300 is moved in the direction of the arrow shown in the glass substrate of FIG. 2, the laser beam collimated with a wide width after the first collimator 201 is transmitted may cause a defect in the glass substrate ( While passing through 300, a laser beam reflected at an arbitrary angle due to the defect 300 passes through the second collimator 301, and the transmitted laser beam is directed to a beam splatter provided below the second collimator 301. The laser beam, which is split in half and reflected by the laser beam, is calculated by the calculation unit through the second optical sensor 304, the second amplifier 306, and the second A / D converter 308.

In addition, the transmission value of the laser beam transmitted through the second collimator 301 is calculated as a value in the calculation unit via the first optical sensor 303, the first amplifier 305, the first A / D converter 307, When comparing the reflection value and the transmission value, if the two values are not the same, it is determined that there is a defect 300, and the flash unit or the planar light source (not shown) provided in the control unit to prevent the backlight from the camera (not shown) and the glass plate underneath. To image the defect 300 location of the glass substrate.

In addition, further comprising a third optical sensor 310 for transmitting the light of the light reflected by the defect to any value for more accurate defect detection, the laser beam transmitted to the third optical sensor (310) 3 If the value is calculated by the calculation unit through the optical sensor 310, the third amplifier 311, the third A / D converter 312, it is determined that there is a defect 300, the control unit is a camera (not shown) and the glass plate By operating a flash or a planar light source (not shown) provided in the lower portion to prevent backlighting to image the defect position of the glass substrate.

In addition, when comparing the reflection value and the transmission value in the calculation unit, in consideration of the error range of the value split in half by the beam splitter 302, if it is calculated to be 5% or less within the error range of the measured value of the controller, It is determined that there is no 300). As used herein, the same meaning includes a case where there is a difference within an error range.

In addition, the control unit is capable of variable setting of the beam splitter 302 to divide the transmission amount of the laser beam transmitted through the glass substrate in half, so as to reduce the error, the control unit moves the beam splitter 302 up, down, left, and right It is possible to precisely divide the light.

In one embodiment, the camera uses a Charge Coupled Device (CCD) camera or a Complementary Metal Oxide Semiconductor (CMOS) camera that is commonly used in daily life, such as a security camera or a computer cam.

In addition, the flash provided to prevent the back light to image the defect 300 in order to image the defect 300 of the glass substrate with the camera, when detecting a substrate damaged internally by the light of the flash Keep in mind that on / off is possible.

In one embodiment, the beam splitter 302 further includes a control member that is movable up, down, left, and right so as to divide the laser beam irradiated from the optical unit 200 in exactly half.

In one embodiment, the control unit, the operation unit for calculating the presence or absence of the defect according to the value of the A / D converter, the instruction unit for giving the next instruction to the device in accordance with the presence or absence of the defect, the storage unit for storing the defect image when the defect detection, the operator The apparatus for detecting the presence of a defect of the glass substrate edge portion further comprises a communication unit for transmitting a defect image and informs the detection result.

In addition, the calculation unit for calculating a defect, compares the value converted by the first A / D converter 307 and the value converted by the second A / D converter 308 to calculate the presence of a defect, or the third A / D The presence or absence of a defect is calculated according to whether or not the value of the converter 312 is calculated.

In addition, the instruction unit for giving an instruction instructs to detect a defect image of the glass substrate when a defect is detected in the calculator, and instructs to irradiate a laser of the optical unit when a defect is not detected in the calculator.

The storage unit for storing the defect image also stores a defect image of the detected glass substrate.

In addition, the communication unit for notifying the detection result, transmits the defect image stored in the storage unit to the operator to inform the result of the defect.

4 is a side view of the apparatus for detecting the presence of defects in the edge portion of the glass substrate using the lens array 400 according to an embodiment of the present invention. As shown, the liquid crystal display glass substrate 100, the optical unit 200, which is provided at an angle to the upper surface of the edge (edge) of the glass substrate 100, and irradiates a laser to the edge (edge), glass It is provided between the substrate 100 and the optical unit 200, and between the first collimator (201), the first collimator (201) and the glass substrate 100 to expand the laser beam to a wide width A cylindrical lens 202 which emits a laser beam irradiated from the optical unit 200 and located on the same optical axis as the laser irradiated from the optical unit 200 on the lower surface of the edge portion of the glass substrate 100. The lens array 400 is disposed below the lens array 400 and the lens array 400 that transmits the laser beam transmitted from the glass substrate 100. The lens array 400 is provided in the lens array 400. It consists of an array sensor (401) for measuring the transmission amount of the laser beam transmitted through.

In one embodiment, the optical unit 200 is composed of a printed circuit board (PCB) and a light emitting device, the first collimator (201), the laser beam diffused to a wide range to focus on one point It can be made of any one of an aspherical lens, a spherical lens or a refractive lens.

In an exemplary embodiment, an analog amplified by the plurality of amplifiers is provided under the lens array 400, and the transmission amount detected by the array sensor 401 measuring the transmission amount of the laser beam passing through the lens array 400. Convert electrical signals to digital values. Thereafter, the controller detects a defect through the presence or absence of a value variation calculated by the plurality of A / D converters.

In one embodiment, the control unit, the operation unit for calculating the presence of a defect in accordance with the change of the value of the plurality of A / D converter, the instruction unit for giving the next instruction to the device in accordance with the presence of defect detection, storing the defect image at the time of defect detection It includes a storage unit and a communication unit which sends a defect image to an operator and informs the detection result.

The calculation unit that calculates the defect calculates the position of the defect and the degree of the magnitude of the defect, depending on whether or not the value converted by the plurality of A / D converters is changed.

In addition, the instructing unit to give an instruction instructs to detect a defect image of the glass substrate when a defect is detected in the calculating unit, and irradiates a laser of the optical unit when a defect is not detected in the calculating unit.

The storage unit for storing the defect image stores numerically the defect image, the defect position, and the degree of the defect size of the detected glass substrate.

In addition, the communication unit for notifying the detection result, and transmits the numerical value of the degree of the defect image and the location of the defect, the size of the defect 300 stored in the storage unit to inform the result of the defect.

5 is a conceptual diagram of a method for detecting the presence of defects in the edge portion of the glass substrate using the first collimator 201 and the second collimator 301 according to an embodiment of the present invention. As shown, preparing a glass substrate, irradiating a laser beam in the optical unit, detecting the irradiated laser beam with the first optical sensor 303, the second optical sensor 304, the detected Amplifying the laser beam through the first amplifier 305, the second amplifier 306, and digitally converting the amplified analog electrical signal through the first A / D converter 307 and the second A / D converter 308. Converting the value into a digital value through the first A / D converter 307 and the second A / D converter 308 and comparing the value converted in the computer to detect a defect, and then again in the optical unit It is a method for detecting the presence of defects in the edge portion of the glass substrate starting from the step of irradiating the laser beam.

In one embodiment, the step of comparing the value converted in the computer to the digital value through the first A / D converter 307, the second A / D converter 308 and detecting the presence of a defect, the two converted values If this is the same, it is determined that there is no defect and the repeated defect detection step is performed. In addition, in comparing the two values in the calculation unit, it is determined that there is no defect when the calculation is calculated to be 5% or less within the error range of the measured value of the controller in consideration of the error range of the value split in half by the beam splitter 302. do.

6 is a conceptual diagram of a method for detecting defects in the edge portion of a glass substrate using the first collimator 201, the second collimator 301, and the third collimator 309 according to an embodiment of the present invention. As shown, preparing a glass substrate, irradiating a laser beam from the optical unit, the irradiated laser beam to the first optical sensor 303, the second optical sensor 304, the third optical sensor 310 Detecting the laser beam, amplifying the detected laser beam through the first amplifier 305, the second amplifier 306, and the third amplifier 311, and converting the amplified analog electrical signal into the first A / D converter 307. ), Converting to a digital value via a second A / D converter 308, a third A / D converter, digital through a first A / D converter 307, and a second A / D converter 308. When the value converted into a value is different or when a digital value of more than a measurement error occurs in the third A / D converter, a defect is detected, and the step of irradiating a laser beam from the optical unit again starts from the edge of the glass substrate. It is a method for detecting the presence of a defect.

In one embodiment, the step of comparing the value converted into a digital value through the first A / D converter 307, the second A / D converter 308 to detect the presence of a defect, the two converted values are the same If it is determined that there is no defect, it repeats the defect detection step. In addition, in comparing the two values in the calculation unit, it is determined that there is no defect when the calculation is calculated to be 5% or less within the error range of the measured value of the controller in consideration of the error range of the value split in half by the beam splitter 302. do.

In an exemplary embodiment, the method may further include vertically moving the beam splitter 302 in the method for detecting a defect in the edge portion of the glass substrate, thereby reducing an error in dividing the light beam in half. .

In an embodiment, the method may further include receiving the light reflected at a different angle due to the defect to the third collimator 309 to detect the defect. It has an effect to reduce.

In addition, the third collimator 309 is not limited to the lower portion of the glass substrate, and further includes the upper portion of the glass substrate, so that the defect is generated even when the laser beam having an arbitrary reflection angle is reflected upward. Detection is possible.

7 is a conceptual diagram of a method for detecting defects in the edge portion of the glass substrate using the lens array 400 according to an embodiment of the present invention. As shown, preparing a glass substrate, irradiating a laser beam from the optical unit, the irradiated laser beam passes through the lens array 400, a lens array sensor (401) Detecting the laser beam by the array sensor 401, amplifying the detected laser beam through an amplifier, and converting the amplified analog electric signal into a digital value through an A / D converter. A method for detecting the presence of defects in the edge portion of the glass substrate starting from the step of determining whether there is a defect according to whether or not the value calculated by the A / D converter changes over time, and again irradiating a laser beam from the optical unit to be.

The terms used throughout the present specification are terms defined in consideration of functions in the embodiments of the present invention, and may be sufficiently modified according to the intention, custom, etc. of the user or the operator, and thus, the definitions of the terms are used throughout the present specification. It should be made based on the contents.

While the invention has been described with reference to the preferred embodiments, which are referred to by the accompanying drawings, it will be apparent that various modifications are possible without departing from the scope of the invention within the scope covered by the claims set forth below from this description. .

100: glass substrate
101: camera
102: plane light source
200: optical unit
201: first collimator
202: cylindrical lens
203: detection unit
300: Defect
301: second collimator
302: beam splitter
303: first optical sensor
304: second optical sensor
305: first amplifier
306: second amplifier
307: First A / D Converter
308: second A / D converter
309: third collimator
310: third optical sensor
311: third amplifier
312: third A / D converter
400: lens array
401: array sensor
S500: preparing the glass substrate
S501: irradiating a laser beam from the optical unit
S502: detecting the irradiated laser beam with a first optical sensor, a second optical sensor
S503: Amplifying the detected laser beam through the first amplifier and the second amplifier
S504: converting the amplified analog electric signal into a digital value through a first A / D converter and a second A / D converter
S505: detecting the presence of a defect by comparing the value converted by the computer to a digital value through the first A / D converter and the second A / D converter
S600: preparing the glass substrate
S601: irradiating a laser beam from the optical unit
S602: detecting the irradiated laser beam by the first optical sensor, the second optical sensor, or the third optical sensor
S603: Amplifying the sensed laser beam through the first amplifier, the second amplifier, the third amplifier
S604: converting the amplified analog electric signal into a digital value through a first A / D converter, a second A / D converter, and a third A / D converter
S605: Detecting a defect when a value converted into a digital value through the first A / D converter, the second A / D converter is different or when a digital value of more than a measurement error is output from the third A / D converter
S700: step of preparing a glass substrate
S701: irradiating a laser beam from the optical unit
S702: Step of Irradiated Laser Beam Transmitting the Lens Array
S703: detecting the laser beam detected by the lens array sensor with the array sensor
S704: amplifying the detected laser beam through an amplifier
S705: Converting the amplified analog electric signal to digital value through A / D converter
S706: determining whether there is a defect depending on whether the A / D converter value changes

Claims (25)

Liquid crystal display glass substrates;
An optical unit provided at an angle with an upper surface of an edge portion of the glass substrate and irradiating a laser to the edge portion;
A first collimator provided between the glass substrate and the optical unit to expand the laser beam in a wide width;
A cylindrical lens provided between the first collimator and the glass substrate to emit a laser beam emitted from the optical unit;
A second collimator positioned on a lower surface of the edge of the glass substrate on the same optical axis as the laser irradiated from the optical unit, and collecting the laser beam transmitted through the glass substrate;
The laser is provided below the second collimator and positioned on the same optical axis as the laser irradiated from the optical unit, and the laser passes through the glass substrate and the second collimator from the first collimator. A beam splitter for splitting the light beam;
A first optical sensor for transmitting the glass substrate and the second collimator from the first collimator and measuring a transmission amount of the laser beam split by the beam splitter;
A first amplifier for amplifying the transmission amount measured by the first optical sensor;
A first A / D converter converting the analog electric signal amplified by the first amplifier into a digital value;
A second optical sensor for transmitting the glass substrate and the second collimator from the first collimator and measuring the transmission amount of the laser beam split and reflected by the beam splitter;
A second amplifier amplifying the transmission amount measured by the second optical sensor;
A second A / D converter converting the analog electric signal amplified by the second amplifier into a digital value;
Control unit for detecting the presence of a defect through the difference between the value of the first A / D converter and the second A / D converter
Apparatus for detecting the presence of defects in the edge portion of the glass substrate comprising a. Liquid crystal display glass substrates;
An optical unit provided at an angle with an upper surface of an edge portion of the glass substrate and irradiating a laser to the edge portion;
A first collimator provided between the glass substrate and the optical unit to expand the laser beam in a wide width;
A cylindrical lens provided between the first collimator and the glass substrate to emit a laser beam emitted from the optical unit;
A second collimator positioned on a lower surface of the edge of the glass substrate on the same optical axis as the laser irradiated from the optical unit, and collecting the laser beam transmitted through the glass substrate;
The laser is provided below the second collimator and positioned on the same optical axis as the laser irradiated from the optical unit, and the laser passes through the glass substrate and the second collimator from the first collimator. A beam splitter for splitting the light beam;
A first optical sensor for transmitting the glass substrate and the second collimator from the first collimator and measuring a transmission amount of the laser beam split by the beam splitter;
A first amplifier for amplifying the transmission amount measured by the first optical sensor;
A first A / D converter converting the analog electric signal amplified by the first amplifier into a digital value;
A second optical sensor for transmitting the glass substrate and the second collimator from the first collimator and measuring the transmission amount of the laser beam split and reflected by the beam splitter;
A second amplifier amplifying the transmission amount measured by the second optical sensor;
A second A / D converter converting the analog electric signal amplified by the second amplifier into a digital value;
A third collimator in which the laser beam transmitted through the glass substrate is provided under the glass substrate so that the laser beam is transmitted;
A third optical sensor for measuring a transmission amount of the laser beam that has passed through the third collimator;
A third amplifier for amplifying the transmission amount measured by the third optical sensor;
A third A / D converter converting the analog electric signal amplified by the third amplifier into a digital value;
A control unit for detecting the presence of a defect through the difference between the value of the first A / D converter and the second A / D converter and the value of the third A / D converter
Apparatus for detecting the presence of defects in the edge portion of the glass substrate comprising a. The optical unit of claim 1, wherein the optical unit comprises:
Device for detecting the presence of defects in the edge portion of the glass substrate, characterized in that consisting of a PCB (Printed Circuit Board) and the light emitting device. The method according to any one of claims 1 to 2, wherein the first collimator (collimator),
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that any one of an aspherical lens, a spherical lens or a refractive lens capable of condensing the laser beam spread in a wide range to one point. The method according to any one of claims 1 to 2, wherein the second collimator (collimator),
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that any one of an aspherical lens, a spherical lens or a refractive lens capable of condensing the laser beam spread in a wide range to one point. The method of claim 2, wherein the third collimator (collimator),
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that any one of an aspherical lens, a spherical lens or a refractive lens capable of condensing the laser beam spread in a wide range to one point. The cylindrical lens according to any one of claims 1 to 2, wherein the cylindrical lens for emitting the laser beam,
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that it further comprises (line generator optics) that can emit a laser beam. The apparatus of claim 1, wherein the beam splitter further comprises an adjustment member capable of moving up, down, left, and right. The method according to any one of claims 1 to 2, wherein the control unit,
Computation unit that calculates the presence of defects according to the value of A / D converter, Instruction unit that gives the next instruction to the device according to the defect detection, Storage unit that stores the defect image when defect detection, Sends the defect image to the operator and informs the detection result The apparatus for detecting the presence of a defect of the glass substrate edge portion further comprises a communication unit. The method of claim 9, wherein the operation unit,
Comparing the value converted by the first A / D converter with the value converted by the second A / D converter to calculate whether there is a defect, or calculating whether there is a defect according to the value of the third A / D converter. Apparatus for detecting the presence of defects in the edge portion of the glass substrate. The method of claim 9, wherein the indicating unit,
When a defect is detected in the calculator, an instruction is provided to detect a defect image of the glass substrate, and when a defect is not detected in the calculator, the glass substrate is instructed to irradiate a laser of the optical unit. Apparatus for detecting the presence of defects in the edge portion. The method of claim 9, wherein the storage unit,
The apparatus for detecting the presence of defects of the edge portion of the glass substrate, characterized in that for storing the detected defect image of the glass substrate. The method of claim 9, wherein the communication unit,
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that for transmitting the defect image stored in the storage to the operator to inform the result of the defect. Liquid crystal display glass substrates;
An optical unit provided at an angle with an upper surface of an edge portion of the glass substrate and irradiating a laser to the edge portion;
A first collimator provided between the glass substrate and the optical unit to expand the laser beam in a wide width;
A cylindrical lens provided between the first collimator and the glass substrate to emit a laser beam emitted from the optical unit;
A lens array positioned on a lower surface of the edge of the glass substrate on the same optical axis as the laser irradiated from the optical unit and transmitting the laser beam transmitted through the glass substrate;
An array sensor provided under the lens array, the array sensor measuring an amount of transmission of the laser beam passing through the lens array;
A plurality of amplifiers for amplifying the transmission amount measured by the array sensor;
A plurality of A / D converters for converting analog electric signals amplified by the plurality of amplifiers into digital values;
Control unit for detecting a defect according to whether the value calculated by the plurality of A / D converter changes over time
Apparatus for detecting the presence of defects in the edge portion of the glass substrate comprising a. The method of claim 14, wherein the optical unit,
Device for detecting the presence of defects in the edge portion of the glass substrate, characterized in that consisting of a PCB (Pinted Circuit Board) and the light emitting device. The method of claim 14, wherein the first collimator (collimator),
Apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that any one of an aspherical lens, a spherical lens or a refractive lens capable of condensing the laser beam spread in a wide range to one point. The method of claim 14, wherein the control unit,
The operation unit for calculating the presence of a defect in accordance with the change of the value of the plurality of A / D converters, the instruction unit for giving the next instruction to the device in accordance with the presence or absence of the defect detection, the storage unit for storing the defect image when detecting the defect, the defect image to the operator Apparatus for detecting the presence of a defect of the glass substrate edge portion further comprising a communication unit for sending and notifying the detection result. The method of claim 17, wherein the operation unit,
And detecting the position of the defect and the degree of the magnitude of the defect in accordance with the variation of the values converted by the plurality of A / D converters. The method of claim 17, wherein the indicating unit,
And instructing to detect a defect image of the glass substrate when a defect is detected in the calculation unit, and instructing the laser of the optical unit to be irradiated when a defect is not detected in the calculation unit. Apparatus for detecting the presence of defects in the substrate edge. The method of claim 17, wherein the storage unit,
The apparatus for detecting the presence of defects in the edge portion of the glass substrate, characterized in that for storing the detected defect image of the glass substrate, the position of the defect, the degree of the defect size in numerical value. The method of claim 17, wherein the communication unit,
Apparatus for detecting the presence of defects in the glass substrate edge portion characterized in that the transmission of the defect image stored in the storage unit and the numerical value of the degree of the defect size to inform the result of the occurrence of the defect. Preparing a glass substrate;
Irradiating a laser beam on the optical unit;
Detecting the irradiated laser beam with a first optical sensor and a second optical sensor;
Amplifying the sensed laser beam through a first amplifier and a second amplifier;
Converting the amplified analog electrical signal into a digital value through a first A / D converter and a second A / D converter;
Comprising the first A / D converter, the second A / D converter for detecting the presence or absence of a defect by comparing the value converted in the computer to a digital value for detecting the presence or absence of a defect Way. Preparing a glass substrate;
Irradiating a laser beam on the optical unit;
Detecting the irradiated laser beam with a first optical sensor, a second optical sensor, or a third optical sensor;
Amplifying the sensed laser beam through a first amplifier, a second amplifier, a third amplifier;
Converting the amplified analog electrical signal into a digital value through a first A / D converter, a second A / D converter, and a third A / D converter;
Detecting a defect when a value converted into a digital value through the first A / D converter and the second A / D converter is different or when a digital value of more than a measurement error is output from the third A / D converter. Method for detecting the presence of defects in the edge portion of the glass substrate comprising a. Preparing a glass substrate;
Irradiating a laser beam on the optical unit;
The irradiated laser beam passes through a lens array;
Detecting a laser beam detected by the lens array with an array sensor;
Amplifying the sensed laser beam through an amplifier;
Converting the amplified analog electric signal into a digital value through an A / D converter; and
Determining whether there is a defect according to whether the value calculated by the A / D converter changes over time
Method for detecting the presence of defects in the edge portion of the glass substrate comprising a. The laser beam according to any one of claims 22 to 24, wherein
Method for detecting the presence of defects in the edge portion of the glass substrate, characterized in that either infrared or ultraviolet.

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