KR20120021180A - Locking mechanism, locking method of a work and cancelation method of the locking of the work - Google Patents

Abstract

PURPOSE: A fixing apparatus, lock and unlock methods of work are provided to lock a flat pattern work in a standing posture using a plurality of clamp sections, and a push unit. CONSTITUTION: A fixing apparatus(60) a pressing portion(71) which presses outer edge portion of a work and a plurality of clamp portions(61) which grasp outer edge portion of the work arranged in between the push unit and the clamp portions. The push unit comprises a pressing frame and an elastic supporting member which locks the outer edge portion of the work in between the push unit and the clamp portions by elastically supporting the push unit.

Description

LOCKING MECHANISM, LOCKING METHOD OF A WORK AND CANCELATION METHOD OF THE LOCKING OF THE WORK}

TECHNICAL FIELD The present invention relates to a fixing mechanism for fixing a flat work in an upright position, and a method for fixing a workpiece and a method for releasing the workpiece by the fixing mechanism.

Conventionally, a substrate brake device for fixing a mother substrate on which a scribing line is formed in a horizontal state and by braking the mother substrate along the scribe line by brake units disposed above and below the mother substrate. Is known (for example, patent document 1).

Japanese Laid-Open Patent Publication No. 2006-289625

As described above, Patent Literature 1 describes only a technique for fixing a flat work in a horizontal state, and does not describe any method for fixing the work in a standing posture. As a result, the problem that the workpiece | work of a standing posture cannot be fixed satisfactorily only by applying the technique of fixing the workpiece | work of patent document 1 arises.

Therefore, an object of the present invention is to provide a fixing mechanism for satisfactorily fixing a flat work in an upright position, and a method of fixing the workpiece and a method of releasing the workpiece by the fixing mechanism.

In order to solve the said subject, invention of Claim 1 is a fixing mechanism which fixes a flat workpiece to an upright posture, Comprising: The press part which presses the outer edge part of the said workpiece, respectively, is arrange | positioned between the said press part. And a plurality of clamp portions for fitting the outer edge portions of the workpiece, wherein the pressing portion is provided with an annular pressing mold and an elastic supporting force on the pressing frame, whereby the outer edge portion of the workpiece is formed between the pressing frame and each clamp portion. It has an elastic support member fixed between them, and each of the said clamp part is provided along the said press frame, It is characterized by the above-mentioned.

Moreover, the invention of Claim 2 WHEREIN: The fixing mechanism of Claim 1 WHEREIN: Some of the said clamp parts are movable clamp parts which advance and retract in the direction approaching or spaced apart with respect to the said press frame, It is characterized by the above-mentioned. It is done.

Moreover, the invention of Claim 3 is a fixing clamp part fixed to the remainder of the said some clamp part, and the said press frame vicinity in the fixing mechanism of Claim 2, It is characterized by the above-mentioned.

In addition, the invention of claim 4 is the fixing mechanism according to any one of claims 1 to 3, wherein the workpiece is a ring body having an opening formed in the center of the flat plate and a sheet attached to cover the opening of the ring body. And a brittle material substrate adhered to the sheet body to be positioned on the opening.

In addition, the invention of claim 5 is a fixing method for fixing a flat workpiece to a fixing mechanism, wherein the fixing mechanism includes a pressing portion that presses an outer edge of the workpiece, and each of which is disposed between the pressing portions. And a plurality of clamps for fitting the outer edges of the workpiece, wherein the pressing portion is provided with an annular presser and an elastic support force to the presser, whereby the outer edge of the workpiece is formed between the presser and each clamp portion. And a plurality of clamp portions including a movable clamp portion for advancing and retreating in a direction approaching or spaced from the press frame, and a fixing clamp portion fixed near the press frame. Each of the clamp portions is provided along the pressing frame, and a) a step of moving the workpiece to the vicinity of the fixing mechanism while making the workpiece stand in an upright position. b) moving each of the movable clamp portions in a direction spaced apart from the press frame, and c) moving the press frame in a direction opposite to an elastic support direction in which the press frame is elastically supported by the elastic support member; and d) moving the fixed clamp portion relative to the work so as to hit the outer edge of the workpiece against the fixed clamp portion, and e) after the step d) has been executed, pressing each movable clamp portion. A step of hitting the outer edge of the work against each movable clamp part by moving in a direction close to the mold, and f) after the step e) has been executed, by moving the press frame in the elastic support direction. And a step of fixing the work of the posture by the fixing mechanism.

In addition, the invention of claim 6 is a fixing release method for releasing the fixation of a flat workpiece fixed to a fixing mechanism, wherein the fixing mechanism includes a pressing portion that presses an outer edge of the workpiece, and each of the pressing portions And a plurality of clamp portions for fitting the outer edge portions of the workpieces disposed therebetween, wherein the pressing portion is provided with an annular pressing mold and an elastic supporting force on the pressing mold, whereby the outer edge portion of the workpiece is formed with the pressing frame. An elastic support member fixed between the clamp portion, wherein the plurality of clamp portions include a movable clamp portion retracting in a direction proximate or spaced from the pressing frame, and a fixed clamp portion fixed near the pressing frame Together with a) the plurality of movable clamp portions and the fixed clamp portion in a state where the outer edge portion of the workpiece is hit by the elastic support member. Moving the presser in a direction opposite to the elastic support direction in which the presser is elastically supported, thereby releasing the fixation of the workpiece by the fixing mechanism; and b) the outer edge of the workpiece hits the fixed clamp portion. In the state, after the step a) is performed, the step of moving each movable clamp part in the direction away from the press frame, and c) moving the fixed clamp part relative to the work so that the outer edge part of the work And a step of separating the work from the fixing mechanism, and d) separating the work from the fixing mechanism.

According to invention of Claim 1 to Claim 4, the outer periphery part of a workpiece | work is favorably fitted by a some clamp part and a press part. Therefore, the workpiece | work of a standing posture can be fixed favorably.

In particular, according to the invention of claim 2, by moving the clamping portion close to and away from the pressing frame, it is easy to make the work in the standing position clampable and to make the work clamped in the standing position clamped. Can be switched.

In particular, according to the invention described in claim 3, the fixed clamp portion is fixed near the pressing frame. Thereby, positioning of the workpiece with respect to the fixing mechanism can be easily performed based on the position of the fixing clamp portion. Therefore, by using the fixed clamp portion and the movable clamp portion, the work can be well fixed and released.

In particular, according to the invention described in claim 4, the brittle material substrate is adhered to the sheet body. Therefore, even if the workpiece is in a standing position, the brittle material substrate can be fixed reliably.

In particular, according to the inventions of claims 5 and 6, the operation of fixing the work in the standing posture to the fixing mechanism and the operation of releasing the fixing of the workpiece fixed to the fixing mechanism can be performed well.

BRIEF DESCRIPTION OF THE DRAWINGS It is a front view which shows an example of a structure of the board | substrate brake apparatus in embodiment of this invention.
FIG. 2 is a rear view showing an example of the configuration of the substrate brake device in the embodiment of the present invention. FIG.
3 is a front view illustrating an example of a configuration of a work.
4 is a side view illustrating an example of a configuration of a posture change unit.
5 is a plan view illustrating an example of a configuration of a posture change unit.
6 is a front view illustrating an example of a configuration of a conveying unit.
7 is a rear view illustrating an example of a configuration of a conveying unit.
8 is a front view illustrating an example of the configuration of the movable clamp portion.
FIG. 9 is a sectional view of the vicinity of the guide claw seen from the VV line in FIG. 8.
FIG. 10 is a cross-sectional view of the vicinity of the guide claw seen from the WW line of FIG. 7.
It is a rear view for demonstrating the order of fixation of a workpiece | work by a fixing mechanism, and the order of fixation release.
It is a rear view for demonstrating the order of fixation of a workpiece | work by a fixing mechanism, and the order of fixation release.
It is a rear view for demonstrating the order of fixation of a workpiece | work by a fixing mechanism, and the order of fixation release.
14 is a front view illustrating an example of the configuration of a non-contact holding unit.
15 is a plan view illustrating an example of a configuration of a brake unit.

(Form to carry out invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail, referring drawings.

<One. Overall configuration>

1 and 2 are front and rear views respectively showing an example of the configuration of the substrate brake device 1 in the embodiment of the present invention. 3 is a front view illustrating an example of the configuration of the work 3. The substrate brake device 1 is a device that breaks (cuts) the brittle material substrate 7 (see FIG. 3) in which the scribe line 8 is formed along the scribe line 8.

As shown in FIG. 1 and FIG. 2, the substrate brake device 1 mainly includes a posture change unit 10, a main body unit 40, a transfer unit 50, a non-contact holding unit 80, and a brake. It has the unit 85 and the control unit 90.

In addition, in each figure of following FIG. 1 and the following, in order to make clear the direction relationship, as needed, the XYZ rectangular coordinate system which makes a Z axis direction a perpendicular direction, and makes an XY plane a horizontal plane is added.

The posture change unit 10 changes the posture of the flat-shaped workpiece 3 between the horizontal posture and the standing posture, and takes over the workpiece 3 in the standing posture to the transfer unit 50. In addition, the attitude change unit 10 is fixed to the main body unit 40.

Here, the workpiece | work 3 fixed to the conveyance unit 50 and braked by the brake unit 85 mainly shows the dicing ring 4 and the dicing sheet 5 as shown in FIG. ) And a brittle material substrate 7.

The dicing ring 4 (ring body) is a flat plate formed of metal, such as stainless steel. As shown in FIG. 1 and FIG. 2, the work 3 is fixed to the fixing mechanism 60 by inserting the outer edge portion 4a of the dicing ring 4 into the fixing mechanism 60.

3, the opening 4b is formed near the center of the dicing ring 4. In addition, a cut-away 4c is formed at the outer edge portion 4a of the dicing ring 4. The rotation angle of the workpiece | work 3 is detected by detecting the position of this notch 4c.

The dicing sheet 5 (sheet body) is attached to the dicing ring 4 so as to cover the opening 4b of the dicing ring 4. And the brittle material board | substrate 7 is adhere | attached on the dicing sheet 5 so that it may be located on the opening 4b. Therefore, even when the workpiece | work 3 becomes a standing posture, the brittle material board | substrate 7 can be fixed reliably. Here, in this embodiment, as the dicing sheet 5, for example, a pressure-sensitive adhesive sheet made of resin may be used.

The brittle material substrate 7 is a substrate formed of a brittle material, for example, a glass substrate or a ceramic substrate. As shown in FIG. 3, on the brittle material substrate 7, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed.

The scribe line 8 is a cut line (vertical crack) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by rolling a scribing wheel (not shown) made of sintered diamond to the surface of the brittle material substrate 7, for example. Then, a stress is applied to the brittle material substrate 7 on which the scribe lines 8 are formed, and the brittle material substrate 7 is braked along each scribe line 8, whereby a plurality of electronic components 9 (eg, For example, a plurality of liquid crystal display devices) are obtained.

Moreover, in this embodiment, the scribe line 8 among the main surfaces 3a and 3b of the workpiece | work 3 (and the dicing ring 4, the dicing sheet 5, and the brittle material board | substrate 7) is carried out. The surface which is not formed is called the 1st main surface 3a, and the surface in which the scribe line 8 is formed is called the 2nd main surface 3b, respectively.

As shown in FIG. 1 and FIG. 2, the main body unit 40 includes units such as the posture change unit 10, the non-contact holding unit 80, the brake unit 85, and the plurality of rotary actuators 41; It is used as a fixing part for fixing 41c).

Here, each rotary actuator 41 (41a-41c) rotates a shaft (rotating shaft: not shown) according to the supply state of compressed air. As a result, the levers 42 (42a to 42c) attached to the shaft are rocked and hit against the bumps 63 (see Fig. 8) of the corresponding clamp portions 61 (61a to 61c). In addition, the hardware structure of the clamp part 61 (61a-61c) is mentioned later.

The conveyance unit 50 is provided so that a run is possible along the pair of guides 43 and 44 fixed on the main body unit 40. The conveying unit 50 holds the flat workpiece 3 in an upright position, and moves the workpiece 3 with respect to the posture change unit 10 and the main body unit 40. Here, the holding | maintenance by the conveyance unit 50 is implement | achieved by contact holding and holding the outer edge part 4a of the workpiece | work 3.

Thus, the conveyance unit 50 not only conveys the workpiece | work 3 (conveyance function), but also touch-holds the outer edge part 4a of the workpiece | work 3 containing the brittle material board | substrate 7, and is flat plate shape Work 3 can be fixed in a standing position (holding function). That is, the conveyance unit 50 is used also as a "holding unit."

In addition, in this embodiment, when the workpiece | work 3 is conveyed, the conveyance unit 50 moves, but the attitude change unit 10 and the main body unit 40 are stationary. Therefore, in this embodiment, the attitude change unit 10 and the main body unit 40 are generically also called "fixed side unit."

As shown in FIG. 2, the non-contact holding unit 80 is provided to face the conveying unit 50 located at the brake position P20, and the outer edge portion thereof is fixed by the fixing mechanism 60 of the conveying unit 50. The non-contact holding | maintenance of the workpiece | work 3 with which 4a was touch-held was carried out.

Thus, the conveyance unit 50 (holding unit) which "contact-holds" the outer edge part 4a of the flat-shaped workpiece | work 3 of an upright attitude | position, and the 1st main surface 3a of the workpiece | work 3 " The non-contact holding unit 80 holds the holding device.

The brake unit 85 brakes the brittle material substrate 7 of the workpiece 3 held by the transfer unit 50 along the scribe line 8. Here, the brake unit 85 stresses the brittle material substrate 7 and grows vertical cracks from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side thereof. The brittle material substrate 7 is braked.

The control unit 90 controls the operation of each element included in the posture change unit 10, the main body unit 40, the transfer unit 50, the non-contact holding unit 80, and the brake unit 85, And data operation is realized. As shown in FIG. 1 and FIG. 2, the control unit 90 mainly includes a ROM 91, a RAM 92, and a CPU 93.

The ROM (Read Only Memory) 91 is a so-called nonvolatile storage unit, for example, in which a program 91a is stored. As the ROM 91, a flash memory that is a nonvolatile memory that can be read and written freely may be used. The RAM (Random Access Memory) 92 is a volatile storage unit, for example, which stores data used in the calculation of the CPU 93.

The central processing unit (CPU) 93 controls (for example, a plurality of rotary actuators 41 (41a to 41c) and a plurality of pushing cylinders 37 in accordance with the program 91a of the ROM 91. Drive control of 37a to 37d) at a predetermined timing.

In addition, the detailed hardware structure of the attitude change unit 10, the conveyance unit 50, the non-contact holding unit 80, and the brake unit 85 is mentioned later.

<2. Configuration of the posture change unit

4 and 5 are side views and plan views respectively showing an example of the configuration of the posture change unit 10. As described above, the posture changing unit 10 performs the operation of changing the posture of the work 3 and the operation of taking over the work 3 to the transfer unit 50.

As shown in FIG. 4 and FIG. 5, the posture change unit 10 mainly includes a plurality of support portions 11 (11a-11d), a plurality of positioning hands 13 (13a-13d), and a delivery guide portion ( 20), swinging section 30, and pressing section 35 are provided.

The plurality of support portions 11 (11a to 11d in the present embodiment) support the workpiece 3 taken over by the posture change unit 10. As shown in FIG.4 and FIG.5, each support part 11 (11a-11d) is a position which can support the outer edge part 4a of the dicing ring 4 of the workpiece | work 3, and takes over It is fixed at the position which does not interfere with the lifting platform 21 of the part 20. As shown in FIG.

Moreover, as shown in FIG. 4 and FIG. 5, each support part 11 (11a-11d) has the ball 12 (12a-12d) provided with the rotational movement freely in the front-end | tip. Thereby, each ball 12 (12a-12d) can rotate, supporting the workpiece | work 3 in droplets. Therefore, the position of the workpiece | work 3 supported by each support part 11 (11a-11d) can be changed easily and smoothly.

Here, the workpiece | work 3 supported by the some support part 11 (11a-11d) may be taken over by the attitude change unit 10 from the conveyance robot which is not shown in figure, for example. In addition, the worker (henceforth simply called "worker") of the board | substrate brake apparatus 1 may mount the workpiece | work 3 on the some support part 11.

A plurality of positioning hands 13 (13a to 13d in this embodiment) are provided adjacent to corresponding grip claws 23 (23a to 23d), as shown in FIGS. 4 and 5. It is. Each positioning hand 13 (13a-13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a-26d) by the moving mechanism (not shown) provided on the base 20a. As a result, each positioning hand 13 (13a-13d) has the work 3 (more specifically, so that the position of the work 3 supported by each support part 11 (11a-11d) becomes a desired range. The outer edge 4a of the dicing sheet 5 is pushed in the direction toward the center 21a of the platform 21.

The workpiece | work confirmation sensor 15 detects whether the workpiece | work 3 is supported by the several support part 11 or not. As shown in FIG. 5, the workpiece | work confirmation sensor 15 is fixed to the position which adjoins the support part 11b, and does not interfere with the lifting platform 21 of the delivery guide part 20. As shown in FIG. As the workpiece | work confirmation sensor 15, the proximity sensor which detects the presence or absence of the workpiece | work 3 by non-contact, for example may be used.

The delivery guide 20 is in a horizontal posture and holds the workpiece 3 supported by the plurality of support parts 11. In addition, the take over part 20 takes over the workpiece | work 3 which became the standing posture by the oscillation part 30 with the conveyance unit 50. As shown in FIG. As shown in FIG.4 and FIG.5, the delivery guide part 20 mainly comprises the platform 21, the some holding claws 23; 23a-23d, and the some adsorption | suction part 25; 25a-25d. And a delivery guide cylinder 28.

As shown in FIG. 5, the lifting table 21 has a plurality of arms 26 (26a to 26d) extending radially outward from the center 21a. The lifting platform 21 prevents deformation of the workpiece 3 held by the gripping claw 23 and the suction unit 25.

The plurality of holding claws 23 (23a to 23d) (plural holding portions) in the plurality of (four in the present embodiment) are the workpieces 3 (more specifically, dicing rings) in which the posture is changed between the horizontal posture and the standing posture. The outer edge part 4a of (4) is gripped. As shown in FIG.4 and FIG.5, each grip claw 23; 23a-23d is provided in the vicinity of the front-end | tip 27; 27a-27d of the corresponding arm 26; 26a-26d.

Here, as shown in FIG. 4, the vicinity of the upper end of each positioning hand 13 (13a-13d) (only in the vicinity of the upper end of the positioning hand 13b for the convenience of illustration) is bifurcated. . Therefore, even if each positioning hand 13 (13a-13d) is advanced for positioning of the workpiece 3, each positioning hand 13 (13a-13d) and the corresponding grip claw 23 (23a-23d) And the adsorption part 25 (25a-25d) does not interfere.

In addition, when the positioning hand 13 (13a-13d) is positioned so that the position of the workpiece | work 3 may become a desired range, the workpiece | work 3 will be surrounded by each holding claw 23; 23a-23d. All.

A plurality of adsorption portions 25 (25a to 25d in this embodiment) are provided corresponding to the respective grip claws 23; 23a to 23d, and the work 3 (more specifically, a dicing ring) The outer edge portion 4a of (4) is adsorbed.

Therefore, after the positioning by the plurality of positioning hands 13; 13a to 13d, the workpiece 3 is adsorbed by the plurality of adsorption portions 25; 25a to 25d, whereby the plurality of support portions 11; 11a to 11d are provided. The work 3 supported by) is handed over to the hand over part 20.

In this manner, each of the holding claws 23; 23a to 23d and each of the adsorption portions 25; 25a to 25d grips and adsorbs the dicing ring 4. That is, the brittle material substrate 7 is neither gripped nor adsorbed by the grip claws 23 (23a-23d) and the suction portions 25 (25a-25d). Therefore, the take-in guide part 20 and the fluctuation part 30 hold and hold the workpiece 3 without affecting the scribe line 8 (see FIG. 3) formed on the brittle material substrate 7. You can perform posture changes.

In the case of taking over the workpiece 3 in the standing posture between the take over portion 20 and the transfer unit 50, the take over cylinder 28 takes over the take over portion 20 and the transfer unit 50. The workpiece 3 is moved between. As shown in FIG. 4, the take over cylinder 28 has a main body portion 28a and a rod 29.

The rod 29 is capable of moving forward and backward with respect to the main body portion 28a. As shown in FIG. 4, the tip of the rod 29 is being fixed to the bottom face of the platform 21. As shown in FIG. Therefore, the work 3 of the standing posture fixed to the platform 21 moves between the take-in part 20 and the conveying unit 50 in accordance with the advancing or retracting operation of the rod 29.

The swinging portion 30 swings the take-up guide portion 20 around the swing shaft 31 so that the posture of the workpiece 3 held by the take-up guide portion 20 between the horizontal posture and the standing posture. Change in As shown to FIG. 4 and FIG. 5, the oscillation part 30 mainly has the oscillation shaft 31, the oscillation frame 32, and the oscillation cylinder 33. As shown in FIG.

The swing shaft 31 is used as a central axis for swinging the take-in guide portion 20 relative to the base 20a. As shown in FIG. 5, the bearings 30a and 30b are rotatably supported (stacked). In addition, the bearings 30a and 30b are respectively fixed to the corresponding brackets 30c and 30d.

The swinging frame 32 is a frame formed by a plurality of plate bodies 32a to 32c (in this embodiment, three). As shown in FIG. 5, the swing shaft 31 is fixed between the plate bodies 32a to 32c. On the other hand, the transfer guide cylinder 28 of the transfer guide portion 20 is fixed to the plate body 32b.

The swinging cylinder 33 is a drive unit that swings the printing delivery unit 20. As shown in FIG. 4, the swinging cylinder 33 mainly includes a main body portion 33a and a rod 34.

The rod 34 is capable of moving back and forth with respect to the main body portion 33a. As shown in FIG.4 and FIG.5, the main-body part 33a is the base 20a of the take-in part 20, and the front-end | tip 34a of the rod 34 is attached to the plate body 32a of the swinging frame 32. As shown in FIG. , Are fixed respectively.

Therefore, when the rod 34 advances from the main body portion 33a, the posture of the workpiece 3 held by the grip claw 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the rod 34 retreats to the main body portion 33a, the posture of the workpiece 3 held by the grip claw 23 and the suction portion 25 is changed from the standing posture to the horizontal posture.

The press part 35 adjusts the load applied to the workpiece | work 3 from the fixing mechanism 60 of the conveyance unit 50. FIG. Thereby, the operation | movement which fixes the workpiece | work 3 taken over from the take-in delivery part 20 to the conveyance unit 50, and the operation | release of the fixed state of the workpiece | work 3 are performed by the fixing mechanism 60. As shown in FIG. .

As shown in FIG.4 and FIG.5, the press part 35 mainly comprises the attachment frame 35a, the some bracket 36 (36a-36d), and the some press cylinder 37 (37a-37d). Have

The attachment frame 35a and the plurality of brackets 36 (36a to 36d) are used to fix the plurality of pressing cylinders 37 (37a to 37d) to the posture change unit 10. As shown to FIG. 2 and FIG. 4, the attachment frame 35a becomes a frame shape and is being fixed to the base 20a. In addition, as shown in FIG. 2, the plurality of brackets 36 (36a-36d in this embodiment) are conveyance direction (arrow AR1 direction of the conveyance unit 50 from the vertical plate of the attachment frame 35a). It is an attachment plate extending along).

Each of the plurality of pressing cylinders 37 (37a to 37d) compresses the corresponding elastic support members 73 (73a to 73d (see Fig. 7)). As shown in FIG. 4 and FIG. 5, each press cylinder 37 (37a-37d) mainly has some rod 38 (38a-38d) and the some roller 39 (39a-39d). .

Each of the plurality of rods 38 (38a to 38d in the present embodiment) can move forward and backward along the arrow AR2 direction. In addition, corresponding rollers 39 (39a to 39d) are attached to the ends of the rods 38 (38a to 38d).

Thus, when the rods 38 (38a to 38d) advance, the rollers 39 (39a to 39d) corresponding to each of the elastic support members 73 (73a to 73d (see Fig. 7)) collide. Thereby, each elastic support member 73 (73a-73d) is compressed.

On the other hand, when each rod 38 (38a-38d) retreats, the corresponding roller 39 (39a-39d) is spaced apart from each elastic support member 73 (73a-73d (see Fig. 7)). As a result, the compressed state of each elastic support member 73 (73a to 73d) is released.

Each of the plurality of rollers 39 (39a to 39d in the present embodiment) is a rotating body provided at the tip of the corresponding rods 38 (38a to 38d). As shown in FIG. 5, each roller 39 (39a-39d) is rotatable about the rotating shaft extended in a perpendicular direction (direction substantially parallel to Z axis | direction: direction substantially perpendicular to arrow AR1 direction). .

Therefore, when the conveying unit 50 moves in the conveyance direction (arrow AR1 direction) in the state where each roller 39 (39a-39d) hit the corresponding elastic support member 73 (73a-73d), each roller ( 39; 39a to 39d) operate as follows. That is, each roller 39 rotates on the corresponding elastic support member 73 (73a-73d) along a conveyance direction, compressing the corresponding elastic support member 73 (73a-73d). Therefore, the conveyance unit 50 can move to a conveyance direction, maintaining the compressed state by each roller 39 (39a-39d). As a result, even when the conveyance unit 50 moves with respect to the posture change unit 10 and the main body unit 40 (fixed side unit), the fixation | release state of the workpiece | work 3 can be maintained.

<3. Constitution of the conveying unit

6 and 7 are front and rear views illustrating an example of the configuration of the transfer unit 50. 8 is a front view showing an example of the configuration of the movable clamp portions 61 (61a to 61c). FIG. 9 is a cross-sectional view of the vicinity of the guide claws 69 and 69a seen from the V-V line in FIG. 8. FIG. 10 is a sectional view of the vicinity of the guide claws 69 and 69d seen from the W-W line in FIG.

Here, the conveyance unit 50 takes over and holds the outer edge part 4a of the workpiece | work 3, and takes over the delivery-in position P10 and the brake unit 85 by which the workpiece | work 3 is carried out. The workpiece 3 in the standing posture is conveyed between the brake position P20 where the brake of the brittle material substrate 7 is executed.

Thereby, the installation area (namely, the moving area size of the conveyance unit 50) of the conveyance unit 50 including the conveyance path | route can be suppressed. Therefore, the size of the substrate brake device 1 can be reduced.

As shown in FIG. 6 and FIG. 7, the conveying unit 50 mainly includes a fixing table 51 and a rotating table 52. Here, the conveyance unit 50 of this embodiment can be moved with respect to the attitude | position change unit 10, the main body unit 40, the non-contact holding unit 80, etc. by the linear motor which is not shown in figure, for example. It is installed.

The rotating table 52 is a disk-shaped rotating part that rotates with respect to the fixing table 51. As shown to FIG. 6 and FIG. 7, the rotating table 52 is rotatably inserted in the circular through-hole 51a formed in the fixing stand 51. As shown in FIG. Moreover, the rotating table 52 has the fixing mechanism 60 which fixes the workpiece | work 3. As shown in FIG. In addition, the structure of the fixing mechanism 60 is mentioned later.

The fixing stand 51 is, for example, an attachment part for attaching a rotating element for rotating the rotating table 52 and a traveling element for driving the fixing table 51 and the rotating table 52 with respect to the main body unit 40. Is used. As shown in FIG. 6 and FIG. 7, the fixing table 51 mainly includes a guide block 55, a motor 56, and a belt 57.

The plurality of guide blocks 55 (six in this embodiment) are provided in the front surface 51b of the fixing table 51, as shown in FIG. Moreover, inside each guide block 55, the some ball (not shown) is rotatably provided. And when each guide block 55 is attached to the corresponding guide 43 and 44, the ball (not shown) in each guide block 55 contacts the corresponding guide 43 and 44 in a rotatable state. do.

Accordingly, when each guide block 55 moves along the corresponding guides 43 and 44 (i.e., along the conveying direction (arrow AR1 direction)), the balls (not shown) in each guide block 55 are moved. Rotate the corresponding guides 43 and 44. Therefore, the fixing stand 51 can run smoothly along the guides 43 and 44.

The motor 56 is a drive unit for applying rotational force to the rotating table 52. The belt 57 transmits the rotational force applied from the motor 56 to the swivel table 52. As shown in FIG. 6, the belt 57 is wound around the swivel table 52 and the motor pulley 58 attached to the tip of the rotation shaft 56a of the motor 56. As a result, when the motor 56 rotates, the work 3 fixed to the fixing mechanism 60 rotates.

The pulley 59 for tension adjustment adjusts the tension applied to the belt 57. In this embodiment, the position (for example, position in Z-axis direction) of the tension adjustment pulley 59 is adjusted by the positioning mechanism not shown. As a result, the looseness of the belt 57 is easily removed, and the tension of the belt 57 is easily adjusted. Therefore, the rotation state of the rotating table 52 can be kept favorable.

<3. 1. Configuration of Fixing Mechanism>

The fixing mechanism 60 fixes the flat workpiece 3 in an upright position. As shown in FIG. 6 and FIG. 7, the fixing mechanism 60 mainly includes a plurality of clamp portions 61 (61a to 61c and 62) and a plurality of pressing portions 71.

The plurality of clamp portions 61 (61a to 61c, 62) engage the outer edge portions 4a of the workpiece 3 disposed between the pressing portions 71. As shown in FIG. 7, each of the plurality of clamp portions 61 (61a to 61c and 62) is provided along the pressing frame 72.

In addition, in the following description, the clamp part with code | symbol 61 (61a-61c) is called the "moving clamp part", and the clamp part with the code | symbol 62 is called a "fixed clamp part", respectively.

That is, the plurality of clamp portions include a plurality of movable clamp portions 61 (61a to 61c) and a fixed clamp portion 62. In other words, some of the plurality of clamp portions are the plurality of movable clamp portions 61 (61a to 61c), and the remaining portion of the plurality of clamp portions is the fixed clamp portion 62.

Each of the plurality of movable clamp portions 61 (61a to 61c in this embodiment) advances and retreats in a direction close to or spaced from the presser 72. As shown in FIG. 7 and FIG. 8, each of the movable clamp portions 61 (61a to 61c) mainly includes the impingement portion 63, the rotary motion plate 64, the elastic support member 66, and the movable guide. (67; 67a-67c) and guide claws (69; 69a-69c).

Here, the movable clamp portions 61a to 61c have the same hardware configuration. Therefore, below, only the hardware structure of the movable clamp part 61a is demonstrated.

The impingement part 63 is a spherical body formed by metal, for example, and is affixed on the rotary motion board 64. The rotary motion plate 64 is a plate body which rotates around the rotary motion axis 64a. For example, the levers 42 and 42a (see FIGS. 1 and 2) of the rotary actuators 41 and 41a are rocked so that the levers 42 and 42a are hit by the corresponding clamp portions 61 and 61a. When it hits 63, the rotary motion plate 64 rotates about the rotational motion axis 64a in the direction of an arrow R1.

The link 65 is a narrow plate body which connects the rotary motion board 64 and the movable guides 67 and 67a. One end of the link 65 is rotated by the rotary shaft 65a, and the other end of the link 65 is moved by the rotary shaft 65b by the movable guide 67; 67a), each of which is interlocked.

The elastic support member 66 is formed of an elastic member such as a spring. As shown in FIG. 8, one end 66a of the elastic support member 66 is connected to the rotary motion plate 64 on the movable side, and the other end 66b of the elastic support member 66 is located at the fixed side. It is fixed to the reinforcement board 64b, respectively. Accordingly, when the rotary motion plate 64 rotates in the direction of the arrow R1, the elastic support member 66 elastically supports the rotary motion plate 64 in the direction opposite to the arrow R1 direction.

The movable guides 67 and 67a are flat member members. The movable guide 67 adjusts the fixed state of the workpiece | work 3 by advancing and retracting in the direction approaching or spaced apart with respect to the press frame 72.

That is, when the levers 42 and 42a are swung by the rotary actuators 41 and 41a, and the rotary motion plate 64 rotates in the direction of the arrow R1, the movable guides 67 and 67a are pushed by the pusher 72. Move in the direction away from. As a result, the movable guides 67 and 67a are brought into the clamp released state.

On the other hand, the levers 42; 42a are returned to the position before swinging by the rotary actuators 41; 41a, and the rotary motion plate 64 is moved in the opposite direction to the arrow R1 direction by the elastic support force of the elastic support member 66. When the rotary motion is performed, the movable guides 67 and 67a move in the direction close to the pressing frame 72. Thereby, the movable guides 67 and 67a are in the state which can clamp the workpiece | work 3 between the press frames 72. FIG.

In this way, the plurality of rotary actuators 41 (41a to 41c) provided in the main body unit 40 are a part of the plurality of clamp portions (61; 61a to 61c and 62) (plural movable clamp portions 61a to 61c). ) Is used as a drive unit (first drive unit) for advancing and retracting in a direction approaching or spaced apart from the presser 72.

The notch 60a is a depression formed in the presser 72 side of the movable guide 67, as shown in FIG. Here, when the workpiece | work 3 is handed over between the argument delivery part 20 and the conveyance unit 50 of the attitude-change unit 10, the grip claws 23 and 23a cut out the notch 60a. It can be placed in the space (for example, clearance 75; 75a) formed by (see Figs. 8 and 11 to 13). For this reason, it is possible to effectively prevent the holding claws 23 and 23a and the movable guides 67 and 67a from interfering with the work 3.

The plurality of guide claws 69 and 69a cooperate with the movable guides 67 and 67a and the presser 72 to fit the workpiece | work 3 in this embodiment. As shown in FIG. 8, the guide claws 69 and 69a are spaced apart and attached in the direction along the outline of the opposing press 72 on the movable guides 67 and 67a. In addition, as shown in FIG. 9, the guide claw 69 so that the stepped surface 60b of the guide claws 69 and 69a may be located below the lower surface 60c of the movable guides 67 and 67a. 69a is attached to the movable guides 67 and 67a.

Therefore, as shown in FIG. 9, the clamping noise of the workpiece | work 3 by the movable clamp parts 61 and 61a and the pressing part 71 is the lower end surface 60c of the movable guide 67; 67a, and the guide claw. The step surface 60b of 69 (69a) and the opposing surface 60d of the press frame 72 are realized by contacting the workpiece 3.

As shown in FIG. 7, the fixed clamp portion 62 is fixed near the pressing frame 72. As shown in FIG. 7, the fixed clamp portion 62 mainly includes a fixed guide 68 and guide claws 69 and 69d.

The fixing guide 68 is a flat member. That is, the fixed guide 68 is fixed to the swivel table 52, unlike the movable guides 67 (67a to 67c), without retreating in the direction close to or spaced from the press frame 72.

Thereby, positioning of the workpiece | work 3 with respect to the fixing mechanism 60 can be performed easily with respect to the position of the fixing clamp part 62. FIG. Therefore, by using the plurality of movable clamp portions 61 (61a to 61c) and the fixed clamp portion 62, the clamp and release of the workpiece 3 can be performed well.

The notch part 68a is a recessed part formed in the press frame 72 side of the fixing guide 68, as shown in FIG. Here, when the workpiece | work 3 is handed over between the argument delivery part 20 and the conveyance unit 50 of the posture change unit 10, the grip claws 23 and 23d are cut out part 68a. Can be disposed in a space (for example, the gaps 75; 75d) formed by the gaps (see FIGS. 7 and 11 to 13). Therefore, in the drawing of the workpiece | work 3, it can prevent effectively that the holding claws 23; 23d and the fixing guide 68 interfere.

The plurality of guide claws 69 and 69d (two in this embodiment) cooperate with the fixing guide 68 and the pressing frame 72 to fit the workpiece 3. As shown in FIG. 7, the guide claws 69 and 69d are spaced apart from each other in the direction along the outline of the opposing press 72 on the fixed guide 68. In addition, as shown in FIG. 10, the guide claw 69 so that the step surface 60d of the guide claws 69 and 69d may be located in the presser 72 side rather than the side end surface 68b of the fixing guide 68. As shown in FIG. 69d is attached to the fixing guide 68.

Therefore, as shown in FIG. 9, the clamping of the workpiece | work 3 by the clamping | fixed clamp part 62 and the pressing frame 71 is sufficient as the side end surface 68b of the fixing guide 68, and guide claws 69 and 69d. The stepped surface 60b of) and the opposing surface 60d of the presser 72 are realized by contacting the workpiece 3.

The pressing part 71 presses the outer edge part 4a of the workpiece | work 3 by clamping the workpiece | work 3 between the movable clamp parts 61 (61a-61c) and the fixed clamp part 62. As shown in FIG. 7, the press part 71 mainly has the press frame 72 and the some elastic support member 73 (73a-73d).

As shown in FIG. 6 and FIG. 7, the presser 72 is annular (more specifically, rectangular annular), and is attached to the vicinity of the center of the swivel table 52. As shown to FIG. 9 and FIG. 10, the press frame 72 presses the outer edge part 4a of the workpiece | work 3 from the 2nd main surface 3b side of the workpiece | work 3. As shown in FIG.

The plurality (four in this embodiment) of the elastic support members 73 (73a to 73d) is formed of an elastic member such as a spring. As shown in FIG. 7, each elastic support member 73 (73a-73d) is connected with the corresponding corner among the four corners of the press frame 72. As shown in FIG.

Here, each of the elastic support members 73 (73a to 73d) receives a force in a direction from the surface of the ground of FIG. 7 to the back surface (that is, the direction opposite to the arrow AR2 direction) corresponding to the pressing cylinder ( 37; 37a to 37d (see FIGS. 4 and 5), each elastic support member 73 (73a to 73d) is compressed. In other words, the pressing cylinders 37 (37a to 37d) of the pressing section 35 are used as a driving section (second drive section) for applying a compressive force to the corresponding elastic support members 73 (73a to 73d).

On the other hand, when the rods 38; 38a to 38d are retracted and the rollers 39; 39a to 39d are spaced apart from the corresponding elastic support members 73; 73a to 73d, the respective elastic support members 73; 73a to 73d Elastically supports the elastic support force in the arrow AR2 direction (elastic support direction) to the press frame 72.

Thereby, the workpiece | work 3 is movable clamp part 61 (61a-61c), the fixed clamp part 62, and the pressing frame 72 by the elastic support force from each elastic support member 73; 73a-73d. ) Is inserted. As a result, the work 3 is fixed to the fixing mechanism 60.

Thus, the fixed state of the workpiece | work 3 in the fixing mechanism 60 is the pressurization cylinder 37 (37a-37d) (2nd drive part) of the posture change unit 10, and the main body unit 40. As shown in FIG. It is adjusted by the rotary actuator 41 (41a-41c) (1st drive part).

That is, the fixation of the workpiece | work 3 used as a conveyance object is the fixing mechanism 60 of the conveying unit 50, the pressurization cylinders 37 (37a-37d) of the posture change unit 10, and the main body unit 40. By the rotary actuators 41 (41a to 41c).

Therefore, in this embodiment, the attitude change unit 10, the main body unit 40, and the conveyance unit 50 are named generically also "the conveyance system."

<3. 2. How to fix the workpiece>

11-13 is a back view for demonstrating the order of fixation of the workpiece | work 3 by the fixing mechanism 60, and the order of fixation release. Here, the procedure of fixing the workpiece | work 3 in a standing posture to the fixing mechanism 60 is demonstrated.

In addition, this fixing procedure is realized by the control unit 90 controlling the operation of each element included in the posture change unit 10, the main body unit 40, and the transfer unit 50.

In addition, prior to the start of this fixing procedure, the conveying unit 50 is moved to the release position P11 (see FIG. 2) of the takeover position P10, and the work 3 is each suction part 25. 25a-25d).

In this fixed procedure, first, the take over part 20 is moved (swinged) by the swinging part 30. Thereby, the workpiece | work 3 hold | maintained by the delivery guide part 20 moves to the fixing mechanism 60 vicinity of the conveying unit 50, making it to stand up attitude.

Next, a plurality of rotary actuators 41 (41a to 41c (see Fig. 2)) provided in the main body unit 40 are operated to swing the levers 42 (42a to 42c). Thereby, the movable guide 67 (67a-67c) of each movable clamp part 61 (61a-61c) is moved in the direction spaced apart from the press frame 72. As shown in FIG.

Subsequently, a plurality of pressing cylinders 37 (37a to 37d) are operated to advance each rod 38 (38a to 38d) from the cylinder body. Thereby, each elastic support member 73 (73a-73d) is compressed by the corresponding roller 39 (39a-39d), and the press frame 72 is elasticity of each elastic support member 73 (73a-73d). It is moved in the direction opposite to the supporting direction (arrow AR2 direction).

Subsequently, the conveying unit 50 is moved from the release position P11 of the takeover position P10 to the fixed position P12 (see FIGS. 1 and 2). Accordingly, the rollers 39 (39a-39d) at the tip of each pressing cylinder (37; 37a-37d) compress the corresponding elastic support members (73; 73a-73d) while the elastic support members (73; 73a) are compressed. 73d) Rotate the phase. Therefore, the conveyance unit 50 moves along a conveyance direction in the state which separated the press frame 72 from the workpiece | work 3. As shown in FIG. And the outer edge part 4a of the workpiece | work 3 hits the side end surface 68b (FIG. 10) of the fixing guide 68 in the state in which the press frame 72 was separated from the workpiece | work 3. As shown in FIG.

Subsequently, in the state where the outer edge portion 4a of the work 3 hits the side end surface 68b (Fig. 10) of the fixed guide 68, the rotary actuators 41 (41a to 41c) are operated to respond. The levers 42 (42a to 42c) are returned to the position before swinging.

As a result, the movable guides 67 (67a to 67c) of the movable clamp portions 61 (61a to 61c) move in the direction close to the pressing frame 72. As shown in FIG. Therefore, the outer edge part 4a of the workpiece | work 3 hits each movable guide 67 (67a-67c).

Subsequently, each press cylinder 37 (37a-37d) operates in the state which the outer edge part 4a of the workpiece | work 3 hit the movable clamp parts 61 (61a-61c) and the fixed clamp part 62, respectively. The rods 38 (38a to 38d) are then retracted.

Thereby, the compressive force applied to the corresponding elastic support members 73; 73a- 73d from each press cylinder 37 (37a-37d) is not provided, and the press frame 72 is each elastic support member 73 ) Is moved in the elastic support direction. 9 and 10, the distance between the step surface 60b of the movable guides 67 (67a to 67c) and the fixed guide 68 and the opposing surface 60d of the presser 72 is narrowed. Lose.

Therefore, the workpiece 3 is sandwiched between the movable clamp portions 61 (61a to 61c), the fixed clamp portion 62, and the pressing portion 71, and the workpiece 3 in the standing posture is fixed. It is fixed by 60. That is, according to this fixing procedure, the workpiece | work 3 of a standing posture can be fixed to the fixing mechanism 60 favorably.

Subsequently, in a state where the work 3 is fixed by the fixing mechanism 60, the adsorption state of each adsorption portion 25 (25a to 25d) is released. Thereby, the holding | maintenance state of the workpiece | work 3 by the delivery guide part 20 is canceled | released, and the fixing procedure of the workpiece | work 3 is completed.

<3. 3. How to Unfreeze Workpiece>

Here, with reference to FIGS. 11-13, the procedure to release the fixed state of this workpiece | work 3 is demonstrated about the workpiece | work 3 fixed by the fixing mechanism 60 in the standing position.

In addition, this release procedure is similar to the fixed procedure of the workpiece | work 3, and the control unit 90 operates the each element contained in the attitude change unit 10, the main body unit 40, and the conveyance unit 50. As shown in FIG. It is realized by controlling it.

In addition, prior to the start of the present release procedure, the conveying unit 50 is moved to the fixed position P12 (see FIG. 2) at the takeover position P10, and the work 3 is moved to the fixing mechanism 60. It is fixed by.

In this release procedure, first, the workpiece 3 fixed by the fixing mechanism 60 is adsorbed by the respective adsorption portions 25 (25a to 25d). Thereby, the workpiece | work 3 is hold | maintained by the take-up part 20 in the state fixed to the fixing mechanism 60. As shown in FIG.

Next, in the state where the outer edge part 4a of the workpiece | work 3 hit the several movable clamp parts 61 (61a-61c) and the fixed clamp part 62, the several press cylinder 37 (37a-37d) (2nd drive part) is operated, and each rod 38 (38a-38d) advances from a cylinder main body.

Thereby, each elastic support member 73 (73a-73d) is compressed by the corresponding roller 39 (39a-39d), and the press frame 72 is the elasticity of each elastic support member 73 (73a-73d). It is moved in the direction opposite to the supporting direction (arrow AR2 direction). 9 and 10, the distance between the step surface 60b of the movable guides 67 (67a to 67c) and the fixed guide 68 and the opposing surface 60d of the presser 72 is widened. All. Therefore, the fixation of the workpiece | work 3 of a standing posture by the fixing mechanism 60 is released | released, and the workpiece | work 3 is adsorbed-held by each adsorption | suction part 25 (25a-25d) of the take-in part 20. .

In this manner, the pressing cylinders 37 (37a to 37d) of the pressing section 35 can release the fixed state of the work 3 by compressing the corresponding elastic support members 73 (73a to 73d). .

Subsequently, the plurality of rotary actuators 41; 41a to 41c (in the state where the outer edge portion 4a of the work 3 hits the plurality of movable clamp portions 61; 61a to 61c and the fixed clamp portion 62) ( The first drive unit) is operated so that the levers 42 (42a to 42c) are rocked. As a result, the movable guides 67 (67a to 67c) of the movable clamp portions 61 (61a to 61c) are moved in the direction away from the press frame 72.

Subsequently, the conveying unit 50 is moved from the fixed position P12 of the take over position P10 to the release position P11 (refer FIG. 1 and FIG. 2). Accordingly, the rollers 39 (39a-39d) at the tip of each pressing cylinder (37; 37a-37d) compress the corresponding elastic support members (73; 73a-73d) while the elastic support members (73; 73a) are compressed. 73d) Rotate the phase. Therefore, the conveyance unit 50 moves along a conveyance direction in the state which separated the press frame 72 from the workpiece | work 3. As shown in FIG. And the outer edge part 4a of the workpiece | work 3 is spaced apart from the side end surface 68b (FIG. 10) of the fixed guide 68 in the state in which the press frame 72 was separated from the workpiece | work 3. As shown in FIG. Thus, according to this release procedure, the fixed state of the workpiece | work 3 fixed to the fixing mechanism 60 can be released favorably.

Subsequently, the take-up guide part 20 is moved (swayed) by the swinging part 30, so that the work 3 held by the take-up guide part 20 is fixed to the fixing mechanism 60 of the transfer unit 50. Spaced apart from After the workpiece 3 is spaced apart from the fixing mechanism 60, the rods 38; 38a to 38d of the plurality of pressing cylinders 37; 37a to 37d are retracted, whereby the press frame 72 is elastically supported. It moves in the direction (arrow AR2 direction), and the unlocking procedure of the workpiece | work 3 is completed.

<4. Configuration of Non-Contact Holding Unit>

14 is a front view illustrating an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 assists non-contact holding the first main surface 3a of the workpiece 3 held in contact with the transfer unit 50 as described above. As shown in FIG. 14, the non-contact holding unit 80 mainly includes a mounting table 81, a plurality of first suction portions 83, and a plurality of second suction portions 84.

Here, in this embodiment, the "first suction part" of 83 and the "second suction part 84" of 84 are named generically also "suction part." That is, the plurality of suction portions have a plurality of first suction portions 83 and a plurality of second suction portions 84.

The mounting table 81 is provided to face the conveying unit 50 which has traveled to the brake position P20. As shown in FIG. 2, the mounting table 81 is fixed to the main body unit 40. In addition, as shown to FIG. 1 and FIG. 14, the perpendicular surface 81a of the mounting base 81 is an attachment surface which attaches the some 1st suction part 83 and the some 2nd suction part 84. As shown in FIG. Is used.

The insertion hole 81b is a perforated long hole extending in the vertical direction (direction parallel to the Z axis) and is formed near the center of the mounting table 81. The 1st brake bar 86 reaches | attains the 1st main surface 3a of the workpiece | work 3 via the insertion hole 81b.

A plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the vertical surface 81a of the mounting table 81 as shown in FIGS. 1 and 14. It is. The some suction part pulls the 1st main surface 3a of the workpiece | work 3 of an opposing standing posture, and the workpiece | work 3 is hold | maintained in a non-contact state. Here, in the present embodiment, Bernoulli Chuck may be used as the plurality of first suction portions 83 and the plurality of second suction portions 84.

As shown in FIG. 14, the some 1st suction part 83 of the plurality (12 in this embodiment) is attached to the mounting stand (a state along the both sides in the longitudinal direction of the insertion hole 81b formed in the mounting stand 81). 81 is provided on the vertical surface 81a. Each 1st suction part 83 is comprised by Bernoulli chuck, for example. Thereby, each 1st suction part 83 can hold | maintain the workpiece | work 3 in a non-contact state by attracting the workpiece | work 3 which opposes.

As shown in FIG. 14, the plurality of second suction units 84 (12 in the present embodiment) are vertical surfaces of the mounting table 81 in a state where the plurality of first suction units 83 are fitted from both sides. It is provided on 81a. Each second suction unit 84 is configured by, for example, a Bernoulli chuck, similarly to the first suction unit 83. Thereby, each 2nd suction part 84 can hold | maintain the workpiece | work 3 in a non-contact state similarly to the 1st suction part 83 by pulling the workpiece | work 3 which opposes.

Here, as shown in FIG. 14, the diameter of each 1st suction part 83 is smaller than the diameter of each 2nd suction part 84. As shown in FIG. In addition, as shown in FIG. 14, the space | interval D1 (1st space | interval) between adjoining ones of the some 1st suction parts 83 adjoins among the 2nd suction parts 84 of some. It is smaller than the space | interval D2 (2nd space | interval) between them.

Thus, the some 1st suction part 83 is arrange | positioned densely than the some 2nd suction part 84. As shown in FIG. Thereby, the workpiece | work 3 (in other words, the workpiece | work 3 of the vicinity of the 1st brake bar 86) of the insertion hole 81b vicinity can be reliably contactlessly held. Therefore, the braking of the brittle material substrate 7 can be performed satisfactorily.

<5. Configuration of the brake unit

15 is a plan view illustrating an example of a configuration of the brake unit 85. Here, the brake unit 85 brakes the brittle material substrate 7 held by the conveying unit 50 and the non-contact holding unit 80 along the scribe line 8. As shown in FIG. 15, the brake unit 85 mainly includes a first brake bar 86 and a plurality of second brake bars 87.

 The first brake bar 86 retreats so as to reach the conveying unit 50 side via the insertion hole 81b. As shown to FIG. 14 and FIG. 15, the 1st brake bar 86 has one direction (the longitudinal direction of the insertion hole 81b: Z-axis direction) along the insertion hole 81b of the mounting base 81 (following) , Simply referred to as "extending direction".

The plurality of second brake bars 87 (two in the present embodiment) are provided on the opposite side of the first brake bar 86 with the work 3 held by the transfer unit 50 interposed therebetween. Each second brake bar 87 is stretched in a direction parallel to the first brake bar 86 (Z-axis direction).

Here, as shown in FIG. 15, the some 2nd brake bar 87 in the conveyance direction (arrow AR1 direction) is arrange | positioned by the desired distance D3 at a distance. In addition, as shown in FIG. 15, the 2nd brake bar 87, the 1st brake bar 86, and the 2nd brake bar 87 are the directions from the argument delivery position P10 toward the brake position P20. It is arrange | positioned in this order along (Y-axis minus direction).

Further, the first brake bar 86 is formed from the first main surface 3a side opposite to the second main surface 3b on which the scribe line 8 is formed (in this case, the first brake bar 86 is Impinge on the dicing sheet 5) and load along the scribe line 8.

That is, a load is applied to the scribe line 8 from the 1st main surface 3a on the opposite side to the 2nd main surface 3b in which the scribe line 8 was formed. Therefore, the braking of the brittle material substrate 7 along the scribe line 8 can be performed satisfactorily and reliably.

The first retraction drive unit 86a advances the first brake bar 86 in the retraction direction (arrow AR6 direction: see FIG. 15) by applying a driving force to the first brake bar 86. For example, the 1st advancing drive part 86a moves the 1st brake bar 86 to the X-axis negative direction in the state in which the extending direction of the 1st brake bar 86 and the scribe line 8 are substantially parallel. The first brake bar 86 is brought close to the first main surface 3a of the brittle material substrate 7 by moving to.

The second retraction drive unit 87a advances the plurality of second brake bars 87 in the retraction direction (arrow AR6 direction: see FIG. 15) by applying a driving force to the plurality of second brake bars 87. For example, the 2nd advancing and driving part 87a moves the some 2nd brake bar 87 in the state which the extending direction of the some 2nd brake bar 87 and the scribe line 8 are substantially parallel. By moving in the X-axis plus direction, the plurality of second brake bars 87 are brought close to the second main surface 3b of the brittle material substrate 7.

In this manner, when the first and second brake bars 86 and 87 are advanced and retracted by the first and second retraction drive units 86a and 87a, the brittle material substrate 7 may have these first and second brake bars ( 86, 87). As a result, the brittle material substrate 7 in the standing posture is braked along the scribe line 8.

That is, in the brake process performed by the substrate brake device 1, the direction (retraction direction (arrow AR6 direction)) in which the first and second brake bars 86 and 87 approach the brittle material substrate 7 , Are substantially perpendicular to the gravity direction (Z-axis minus direction).

As a result, the influence of gravity on the first and second brake bars 86 and 87 becomes the same. Therefore, the brittle material substrate 7 can be braked satisfactorily without taking measures for reducing the influence of gravity on each of the first and second brake bars 86 and 87.

<6. Advantages of Substrate Brake Device of This Embodiment>

As mentioned above, in the board | substrate brake apparatus 1 of this embodiment, when the brittle material board | substrate 7 is hold | maintained by the conveyance unit 50 (holding unit), the 1st and 2nd brake bars 86 and 87 are carried out. Is disposed on both main surfaces 3a and 3b side of the brittle material substrate 7 held in the standing posture.

Here, unlike the present embodiment, the case where the first and second brake bars are disposed above and below the brittle material substrate, and the first and second brake bars approach from above and below the brittle material substrate, respectively, will be discussed. . In this case, the angle between the direction in which the first and second brake bars approach the brittle material substrate and the direction of gravity is about 0 ° (deg) and 180 ° (deg), respectively. In other words, the influence of gravity on the first and second brake bars is different. As a result, when no adjustment is made regarding the influence of gravity, there arises a problem that the loads applied to the brittle material substrate from the first and second brake bars are different.

Next, as in the present embodiment, when the first and second brake bars 86 and 87 respectively approach from both main surfaces 3a and 3b side of the brittle material substrate 7 held in the standing posture. Review. In this case, the angle which the direction which the 1st and 2nd brake bars 86 and 87 approach the brittle material board | substrate 7, and the gravity direction make is about 90 degrees (deg).

As a result, the influence of gravity on the first and second brake bars 86 and 87 becomes the same. Therefore, the brittle material substrate 7 can be braked satisfactorily without taking measures for reducing the influence of gravity on each of the first and second brake bars 86 and 87.

Moreover, according to the board | substrate brake apparatus 1 of this embodiment, and its fixing mechanism 60, the outer edge part 4a of the workpiece | work 3 is movable clamp part 61 (61a-61c) and the fixed clamp part 62. ) And the pressing portion 71 are fitted satisfactorily. Therefore, the workpiece | work 3 of a standing posture can be fixed favorably.

In addition, in the board | substrate brake apparatus 1 and this attitude change unit 10 of this embodiment, the fixing mechanism 60 of the conveyance unit 50 is provided from the press part 35 of the attitude change unit 10. FIG. By the load which becomes, the fixation of the workpiece | work 3 and the fixation | release of the workpiece | work 3 are performed. That is, the conveying unit 50 does not need an element for performing the fixation of the workpiece | work 3 and the releasing | release of the workpiece | work 3, and the piping and wiring which are related to this element are moved to the moving side (the conveying unit 50 )) And the fixed side (for example, the posture change unit 10, etc.) need not be provided. Therefore, by using the attitude change unit 10, the stability of the conveyance unit 50 at the time of running, and the worker's work efficiency at the time of maintenance can be improved.

Moreover, in the conveyance system implemented by the board | substrate brake apparatus 1 of this embodiment, the some rotary actuator 41 provided in the main body unit 40 and the attitude | position change unit 10 (fixed side unit) is 41a-41c. ), The work 3 is fixed and the work 3 is released by the driving force from the (first drive part) and the plurality of pressing cylinders 37 (37a to 37d) (second drive part).

That is, the conveyance unit 50 does not need the drive part (1st and 2nd drive part) for fixing the workpiece | work 3 and releasing | release of the workpiece | work 3, and carries out piping and wiring related to this element. It is not necessary to install between the moving side (the conveying unit 50) and the fixed side (the posture changing unit 10 and the main body unit 40). Therefore, the stability of the conveyance unit 50 at the time of running, and the worker's work efficiency at the time of maintenance can be improved.

In addition, the board | substrate brake apparatus 1 of this embodiment and the holding | maintenance apparatus implemented by this board | substrate brake apparatus 1 are the outer edge part of the workpiece | work 3 by the fixing mechanism 60 of the conveyance unit 50 ( In addition to contact holding 4a, the non-contact holding unit 80 can also non-contact hold the main surface (more specifically, the first main surface 3a) of the work 3. Therefore, even if it cannot hold | maintain contacting other than the outer edge part 4a of the workpiece 3 (for example, main surface 3a, 3b of the workpiece | work) by the characteristic of the workpiece | work 3, the conveyance unit 50 By using the (holding unit) and the non-contact holding unit 80, the workpiece 3 can be held well.

<7. Variant>

As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, A various deformation | transformation is possible.

(1) In the present embodiment, the movable guides 67; 67a to 67c and the guide claws 69; 69a to 69c have been described as being constituted separately from each other, as shown in Figs. It is not limited. For example, the movable guides 67 and 67a and the guide claws 69 and 69a may be integrally molded.

(2) In addition, in this embodiment, although the conveying unit 50 was demonstrated as moving with respect to the attitude | position change unit 10 and the main body unit 40, it is not limited to this. For example, the attitude change unit 10 and the main body unit 40 may move with respect to the conveyance unit 50.

In this way, the movement mode of each unit 10, 40, and 50 is sufficient if the conveyance unit 50 moves relatively with respect to the attitude change unit 10 and the main body unit 40 (fixed side unit).

(3) In addition, in this embodiment, although only one workpiece | work confirmation sensor 15 (refer FIG. 4 and FIG. 5) of the posture change unit 10 is provided in the vicinity of the platform 21, the workpiece | work confirmation sensor ( The number of 15) is not limited to this. Multiple (2 or more) workpiece confirmation sensors 15 may be provided near the platform 21.

1: substrate brake device
3: walk
4: dicing ring
4b: opening
5: dicing sheet
7: brittle material substrate
8: scribe line
9: electronic components
10: posture change unit
20: take over
21: platform
23 (23a? 23d): Phage Claw
25 (25a ~ 25d): adsorption part
27: cylinder for delivery
30: swinging part
33: swinging cylinder
35: pressing unit
37 (37a? 37d): Pressing cylinder
39 (39a? 39d): roller
40: main unit
42 (42a? 42c): Lever
43, 44: Guide
50: conveying unit
51: holder
51a: through hole
52: swivel
60: fixing mechanism
60a, 68a: a cut-away
60b: step surface
60d: facing surface
61: clamp part
61a-61c: movable clamp part
66, 73 (73a? 73d): elastic support member
67 (67a? 67c): Operation guide
68: fixed guide
69 (69a? 69d): Guide Claw
71: pressing part
72: pressing frame
75 (75a? 75d): gap
80: non-contact holding unit
81: mounting table
81a: insertion hole
83: first suction unit
84: second suction unit
85: brake unit
86: first brake bar
86a: first retraction drive
87: second brake bar
87a: second retraction drive
90 control unit
D1, D2: gap (first and second gaps)
P10: Argument Delivery Location
P11: release position
P12: fixed position
P 20: Brake Position

Claims (6)

As a fixing mechanism for fixing a flat-shaped work in an upright position,
(a) a pressing part for pressing the outer edge of the work piece,
(b) each of which has a plurality of clamp portions for holding the outer edge portion of the workpiece disposed between the pressing portions,
The pressing portion,
(a-1) the annular presser,
(a-2) having an elastic supporting member for fixing the outer edge of the workpiece between the pressing frame and each clamp part by applying an elastic supporting force to the pressing frame,
Each of the plurality of clamp portions is provided along the pressing frame. The method of claim 1,
Some of the said clamp part is a movable clamp part which advances and retreats in the direction approaching or spaced with respect to the said press frame. The method of claim 2,
A remaining mechanism of the plurality of clamp portions is a fixed clamp portion fixed near the pressing frame. The method of claim 1,
The work,
A ring body having an opening formed in the center of the flat plate,
A sheet body attached to cover the opening of the ring body,
And a brittle material substrate adhered to the sheet body so as to be positioned on the opening. As a fixing method of fixing a flat workpiece to a fixing mechanism,
The fixing mechanism,
Pressing part which presses the outer edge part of the said workpiece | work,
Each of which has a plurality of clamps for fitting the outer edges of the workpiece disposed between the pressing portions,
The pressing portion,
With a fantasy press,
It has an elastic support member which fixes the said outer edge part of the said workpiece | work between the said press frame and each clamp part by giving elastic support force to the said press frame,
The plurality of clamps,
A movable clamp part which retreats in a direction close to or spaced from the press frame;
In addition to including a fixed clamp fixed to the pressing frame,
Each of the plurality of clamp portions is provided along the pressing frame,
a) moving the workpiece to the vicinity of the fixing mechanism in an upright position;
b) moving each movable clamp part in a direction spaced from said press frame,
c) moving the press frame in a direction opposite to an elastic support direction in which the press frame is elastically supported by the elastic support member;
d) causing the outer edge of the workpiece to hit the fixed clamp portion by moving the fixed clamp portion relative to the workpiece,
e) after the said process d) is performed, making each outer clamp part collide with each movable clamp part by moving each movable clamp part to the direction close | similar to the said press frame,
and f) after the step e) has been executed, moving the pressing frame in the elastic support direction to fix the work in the standing posture by the fixing mechanism. As a fixing release method for releasing the fixation of a flat workpiece fixed to a fixing mechanism,
The fixing mechanism,
Pressing part which presses the outer edge part of the said workpiece | work,
Each of which has a plurality of clamp portions for fitting the outer edge portion of the workpiece disposed between the pressing portions,
The pressing portion,
With a fantasy press,
It has an elastic support member which fixes the said outer edge part of the said workpiece | work between the said press frame and each clamp part by giving elastic support force to the said press frame,
The plurality of clamps,
A movable clamp part which retreats in a direction close to or spaced from the press frame;
In addition to including a fixed clamp fixed to the pressing frame,
a) in a state where the outer edge portion of the workpiece is hit by the plurality of movable clamp portions and the fixed clamp portion, the press frame is moved in a direction opposite to the elastic support direction in which the press frame is elastically supported by the elastic support member; , The step of releasing the fixation of the work by the fixing mechanism;
b) moving said movable clamp part in a direction spaced from said press frame after said step a) is executed in a state where said outer edge part of said workpiece hits said fixed clamp part;
c) separating the outer edge of the workpiece from the fixed clamp portion by moving the fixed clamp portion relative to the workpiece;
d) a step of separating the work from the fixing mechanism.

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