KR20100124700A - Substrate processing apparatus - Google Patents

Abstract

PURPOSE: A substrate processing device is provided to improve productivity and reduce time of dealing with trouble. CONSTITUTION: An authority setting screen(400) includes a group selector(402), a file alarm display unit(404), and an authority input unit(406). The group selector selects a target group name. The file alarm display unit displays a plurality of recipes. The authority input unit inputs the operation authority of a corresponding group about the plurality of recipes.

Description

[0001] SUBSTRATE PROCESSING APPARATUS [0002]

TECHNICAL FIELD This invention relates to the substrate processing apparatus for processing a semiconductor wafer, a glass substrate, etc.

In this type of substrate processing apparatus, a plurality of files are handled. For example, a process recipe is a file which describes the detailed procedure etc. for processing a board | substrate. While operating, the substrate processing apparatus processes the substrate based on the procedure described in the predetermined recipe.

In general, in a substrate processing apparatus, the operation authority of a user is managed by the user name input at the time of operation execution, and the password corresponding to the user. On the other hand, a user (worker) who operates the substrate processing apparatus includes a person in charge of the line, a maintenance engineer, and the like, and the contents of work differ depending on the operation state of the substrate processing apparatus. For example, the person in charge of the line operates the substrate processing apparatus online, and the maintenance engineer operates the substrate processing apparatus offline. Thus, generally, in a semiconductor manufacturing plant, the engineer (line manager) which operates a substrate processing apparatus online is distinguished from the engineer (maintenance engineer, process engineer) which operates a substrate processing apparatus offline.

However, in the above conventional technology, the operation authority cannot be set in correspondence with the operation state of the substrate processing apparatus.

 An object of the present invention is to provide a substrate processing apparatus and a substrate processing system which can solve the above-mentioned problems and can perform appropriate processing in response to the operating state of the substrate processing apparatus, and furthermore, the device operation rate can be improved. do.

 A feature of the present invention is a substrate processing apparatus including an authority setting screen for setting an operation authority corresponding to the plurality of recipes with respect to various files including a plurality of recipes in which a procedure for processing a substrate is described. The setting screen is in the substrate processing apparatus configured to be able to set the operation authority in each case when the operation state of the substrate processing apparatus is online or offline.

According to the present invention, by setting the operator's operation authority for each recipe in the case where the operating state of the substrate processing apparatus is on-line or off-line, appropriate processing can be performed corresponding to the operating state of the substrate processing apparatus. have. For example, when a trouble occurs, a process corresponding to the contents of the trouble can be performed by giving the maintenance engineer an operation authority without giving the operation authority to the line person, so that the trouble is consumed. The time can be shortened, whereby the productivity can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the structure of the substrate processing system containing the substrate processing apparatus which concerns on embodiment of this invention.
2 is a diagram showing a perspective view of a substrate processing apparatus according to an embodiment of the present invention.
3 is a side perspective view of a substrate processing apparatus according to an embodiment of the present invention.
4 is a diagram showing a hardware configuration centering on the control means of the substrate processing apparatus according to the embodiment of the present invention.
5 is a diagram illustrating a user setting screen displayed as an operation display screen on an input / output device of a substrate processing apparatus.
6 is a diagram illustrating an authority setting screen displayed as an operation display screen on an input / output device of a substrate processing apparatus.
FIG. 7 is a diagram for explaining permission setting of a predetermined recipe on a permission setting screen via a selection screen; FIG.
FIG. 8 is a diagram for explaining permission setting of a predetermined command on a permission setting screen via a selection screen; FIG.
9 is a diagram illustrating a login screen displayed as an operation display screen on an input / output device of a substrate processing apparatus.
10 is a diagram illustrating an editing menu screen displayed as an operation display screen on an input / output device of a substrate processing apparatus.
11 is a diagram illustrating a recipe editing screen displayed as an operation display screen on an input / output device of a substrate processing apparatus.
12 is a block diagram showing a configuration of a control program that operates on a process system controller of a substrate processing apparatus.
13 is a flowchart showing display control processing based on the operation authority by the substrate processing apparatus according to the embodiment of the present invention.

Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

FIG. 1: is a figure which shows the structure of the substrate processing system 1 containing the substrate processing apparatus 10 which concerns on embodiment of this invention.

As shown in FIG. 1, the substrate processing system 1 includes a substrate processing apparatus 10 and a host apparatus 20. The substrate processing apparatus 10 and the host apparatus 20 are connected via the network 12, such as LAN, for example. Therefore, the instruction from the host apparatus 20 is transmitted to the substrate processing apparatus 10 via the network 12. The substrate processing system 1 may include a plurality of substrate processing apparatuses 10.

In the substrate processing apparatus 10, the input / output device 16 is provided integrally with the substrate processing apparatus 10 or via the network 12, and has an operation display screen 18. On the operation display screen 18, an input screen on which predetermined data is input by a user (worker), a display screen indicating the situation of the apparatus, and the like are displayed. In the substrate processing apparatus 10, a process system controller 14 is provided, and each device in the substrate processing apparatus 10 is controlled by the process system controller 14.

 The substrate processing apparatus 10 is configured as a semiconductor manufacturing apparatus which performs the manufacturing method of a semiconductor device (IC) as an example. In the following description, the case where it applies to the vertical type | mold apparatus (henceforth simply a processing apparatus) which performs an oxidation, a diffusion process, CVD process, etc. to a board | substrate as a substrate processing apparatus is demonstrated. 2 is a perspective view of a substrate processing apparatus applied to the present invention. 3 is a side perspective view of the substrate processing apparatus shown in FIG. 2.

2 and 3, a FOUP (front opening unified pod) and a substrate container as a wafer carrier containing a wafer (substrate) 200 made of silicon or the like. The substrate processing apparatus 10 of the present invention, in which pod 110 is used, is provided with an enclosure 111. In the front front part of the front face 111a of the hull 111, the front maintenance tool 103 as an opening part provided so that maintenance is possible is opened, and the front maintenance tool 103 is opened. The front maintenance doors 104 and 104 which open and close are provided, respectively. In addition, the operation apparatus 304 is mentioned later and abbreviate | omitted here.

On the front wall 111a of the housing 111, a pod carrying in / out port (substrate container carrying in / out port) 112 is opened so as to communicate the inside and outside of the housing 111, and the pod carrying in / out port 112 is The front shutter (substrate container carrying in / out opening / closing mechanism) 113 is opened and closed.

A load port 114 is provided on the front front side of the pod carrying in and out port 112, and the load port 114 is placed on the pod 110. It is configured to fit. The pod 110 is carried on the load port 114 by an in-process conveying apparatus (not shown), and is carried out from the load port 114.

In the upper part in the center part of the front-back direction in the housing 111, the rotary pod shelf (substrate container mounting shelf) 105 is provided, and the rotary pod shelf 105 is comprised so that a plurality of pods 110 may be stored. have. That is, the rotary pod shelf 105 is vertically erected vertically and rotates intermittently in the horizontal plane, and a plurality of shelves supported radially at each position of the upper and lower ends of the support 116. The board | substrate (board | substrate container mounting stand) 117 is provided, and the several shelf board | plate 117 is comprised so that it may hold | maintain in the state which mounted several pieces of pods 110, respectively.

A pod carrying device (substrate container carrying device) 118 is provided between the load port 114 in the housing 111 and the rotary pod shelf 105, and the pod carrying device 118 is a pod. A pod elevator (substrate container lift mechanism) 118a which can lift up and down while holding 110 is comprised, and the pod conveyance mechanism (substrate container conveyance mechanism) 118b as a conveyance mechanism, The pod conveyance apparatus 118 The pod (between the load port 114, the rotary pod shelf 105, the pod opener (substrate container opening and closing mechanism) 121 by the continuous operation of the pod elevator 118a and the pod conveyance mechanism 118b. And 110).

The sub-body 119 is constructed in the lower part in the center part of the front-back direction in the housing 111 over the rear end. On the front wall 119a of the sub-mirror 119, a pair of wafer loading / unloading ports (substrate carrying-out / outlet) 120 for carrying in / out of the wafer 200 with respect to the inside of the sub-body 119 is provided. A pair of pod openers 121 and 121 are provided at the top and bottom wafer loading and unloading ports 120 and 120, respectively, arranged in stages. The pod opener 121 is a cap detachment mechanism (object detachment mechanism) for attaching and detaching the mounting base 122, 122 on which the pod 110 is mounted, and the cap of the pod 110. 123 and 123 are provided. The pod opener 121 is configured to open and close the wafer entrance and exit of the pod 110 by attaching and detaching the cap of the pod 110 mounted on the mounting table 122 by the cap detachment mechanism 123.

The sub-mirror 119 comprises the transfer chamber 124 fluidly isolated from the installation space of the pod carrying apparatus 118 or the rotary pod shelf 105. As shown in FIG. The wafer transfer mechanism (substrate transfer mechanism) 125 is provided in the front region of the transfer chamber 124, and the wafer transfer mechanism 125 rotates or moves the wafer 200 in the horizontal direction in a horizontal direction. And a wafer transfer device elevator (substrate transfer device elevating mechanism) 125b for elevating and lifting the wafer transfer device (substrate transfer device) 125a. As typically shown in FIG. 2, the wafer transfer device elevator 125b is provided between the right end portion of the pressure resistant body 111 and the right end portion of the transfer region 124 front region of the sub-body 119. . By the continuous operation of these wafer transfer device elevator 125b and the wafer transfer device 125a, the tweezer (circuit holding body) 125c of the wafer transfer device 125a is used as a mounting part of the wafer 200, It is configured to charge and discharging the wafer 200 with respect to the boat (substrate holding tool) 217.

In the rear region of the transfer room 124, a waiting section 126 is configured to accommodate and wait for the boat 217. The processing furnace 202 is provided above the standby part 126. The lower end of the processing furnace 202 is configured to be opened and closed by a furnace ball shutter (furnace opening and closing mechanism) 147.

As schematically shown in FIG. 2, a boat elevator (substrate holding device elevator) for elevating the boat 217 between the right end portion of the pressure resistant body 111 and the right end portion of the atmospheric portion 126 of the sub-body 119. Old) 115 is provided. The arm 128 as a connecting tool connected to the platform of the boat elevator 115 is horizontally provided with a seal cap 219 as an object, and the seal cap 219 supports the boat 217 vertically. The lower end of the processing furnace 202 is closed.

The boat 217 is provided with a plurality of holding members, each horizontally in a state where the plurality of wafers 200 (for example, about 50-125 sheets) are aligned in the vertical direction with their centers aligned. It is configured to hold.

As typically shown in FIG. 2, clean air, which is a clean atmosphere or an inert gas, is provided on the left end of the transfer room 124 opposite to the wafer transfer device elevator 125b side and the boat elevator 115 side ( A clean unit 134 composed of a supply fan and a dustproof filter is provided to supply the 133, and the wafer circumferential direction is not shown between the wafer transfer device 125a and the clean unit 134. A notch aligning device is provided as a substrate matching device for matching the positions of.

The clean air 133 blown out by the clean unit 134 is distributed to the notch alignment device, the wafer transfer device 125a, and the boat 217 in the waiting section 126, and then to a duct (not shown). Is sucked in, and exhausted to the outside of the housing 111, or circulated to the primary side (supply side), which is the suction side of the clean unit 134, and blown into the transfer chamber 124 by the clean unit 134 again. It is configured to pay.

Next, the operation of the substrate processing apparatus 10 of the present invention will be described.

As shown in FIGS. 2 and 3, when the pod 110 is supplied to the load port 114, the pod loading / unloading port 112 is opened by the front shutter 113, and the load port 114 is loaded. Pod 110 on the ()) is carried in from the pod carrying in and out 112 by the pod carrying device 118 into the interior of the housing 111.

The carried-in pod 110 is automatically conveyed by the pod conveying apparatus 118 to the designated shelf board 117 of the rotary pod shelf 105, is received and temporarily stored, and is then stored in the shelf board 117. Is conveyed to and received from the pod opener 121 from the shelf board 117 to the pod opener 121 and transferred to the mounting table 122, or is directly stored in the pod opener ( 121 is transferred to the mounting table 122. At this time, the wafer loading / unloading port 120 of the pod opener 121 is closed by the cap detaching mechanism 123, and the clean air 133 is flowed and filled in the transfer chamber 124. For example, when the transfer chamber 124 is filled with nitrogen gas as the clean air 133, the oxygen concentration is set to 20 ppm or less, which is set to be much lower than the oxygen concentration in the interior of the housing 111 (atmosphere).

The pod 110 mounted on the mounting table 122 has an opening end face pushed against the edge of the opening of the wafer loading / unloading port 120 at the front wall 119a of the sub-body 119. At the same time, the cap is removed by the cap detachment mechanism 123 and the wafer entrance is opened.

When the pod 110 is opened by the pod opener 121, the wafer 200 is picked up from the pod 110 through the wafer entrance by the tweezers 125c of the wafer transfer device 125a and is not shown. After the wafer is matched with the notched alignment device 135, the wafer is loaded into the standby portion 126 behind the transfer chamber 124 and charged to the boat 217. The wafer transfer device 125a receiving the wafer 200 in the boat 217 returns to the pod 110 and loads the next wafer 110 in the boat 217.

During the loading operation of the wafer boat 217 by the wafer transfer mechanism 125 in this one (top or bottom) pod opener 121, the other (bottom or top) pod opener 121 is rotatable. The pod 110 which is separate from the pod shelf 105 is conveyed by the pod conveying apparatus 118, and is transferred, and the opening operation of the pod 110 by the pod opener 121 advances simultaneously.

When the predetermined number of wafers 200 are loaded in the boat 217, the lower end of the processing furnace 202 closed by the furnace shutter 147 is opened by the furnace bulb 147. Subsequently, the boat 217 holding the wafer 200 group is loaded into the processing furnace 202 by raising the seal cap 219 by the boat elevator 115.

After loading, an arbitrary process is performed on the wafer 200 in the processing furnace 202.

After the treatment, the wafer 200 and the pod 110 are carried out of the housing in the reverse order as described above, except for the wafer matching step in the notched alignment device 135 (not shown).

Next, a control means (main controller) for controlling the components of the substrate processing apparatus 10 will be described.

4 shows a hardware configuration centering on a main controller.

The main controller is composed of a process system controller 14 and an input / output device 16. The process system controller 14 transmits and receives data to and from the CPU (control unit) 140, the read-only memory (ROM) 142, the random-access memory (RAM) 144, and the input / output device 16. I / O control unit 148 which performs I / O control with the transmission / reception processing unit 146, the temperature control unit 150, the gas control unit 152, the pressure control unit 154, the transfer control unit 156, and the temperature control unit 150. Has The ROM 142 and the RAM 144 constitute a storage unit. The CPU 140, based on the recipe created or edited on the operation display screen 18 of the input / output device 16 described above and stored in the RAM 144 or the like, controls the data (control instruction) for processing the substrate. Output to the temperature control part 150, the gas control part 152, and the pressure control part 154. The CPU 140 similarly outputs a control instruction to the conveyance control unit 156. Moreover, it receives the data transmitted from these control parts.

The ROM 142 or the RAM 144 stores a sequence program, a plurality of recipes or input data input from the input / output device 16, commands of recipes, history data at the time of recipe execution, and the like. The process controller 14 may also include a storage device (not shown) realized by a hard disk drive (HDD) or the like, in which case the storage device is identical to the data stored in the RAM 144. The data is stored. In this way, the ROM 142 or the RAM 144 is used as a storage means for storing a recipe in which a procedure for processing the substrate is described. The input instruction (input data) refers to an instruction from the operation display screen 18 of the input / output device 16. The input instruction (input data) may be, for example, an instruction for setting the operation authority of each user, in addition to the instruction for executing the recipe, but is not limited thereto.

The input / output device 16 includes an input unit 160 for receiving a user's (worker's) input instruction from the operation display screen 18, a display unit 162 for displaying data stored in the RAM 144, and the like, and an input unit ( The input instruction received from the temporary storage unit 166 and the input unit 160 are stored until the input instruction received by the display control unit 164 is transmitted to the transmission / reception processing unit 146, which will be described later. To the display unit 162 or the transmission / reception processing unit 146. In addition, as described later, the display control unit 164 causes the CPU 140 to execute any of a plurality of recipes stored in the ROM 142 or the RAM 144 via the transmission / reception processing unit 146. An instruction (control instruction) is accepted, and the display unit 162 is configured to display any recipe indicated by the instruction from the display control unit 164 on the operation display screen 18. In addition, the display unit 162 displays, on the operation display screen 18, an authority setting screen for setting an operation right of a user (worker), an editing screen for editing a recipe, and the like, as described later.

The temperature control part 150 controls the temperature in the process chamber 202 by the heater 338 provided in the outer peripheral part of the process furnace 202 mentioned above. The gas control unit 152 controls the supply amount of the reactive gas supplied into the processing furnace 202 based on the output value from the mass flow controller (MFC) 342 installed in the gas pipe 340 of the processing furnace 202. . The pressure control unit 154 controls the pressure in the processing chamber 202 by opening and closing the valve 348 based on the output value of the pressure sensor 346 provided in the exhaust pipe 344 of the processing furnace 202. In this way, the sub controller such as the temperature control unit 150 is based on the control instruction from the CPU 140 (each of the heater 338, the MFC 342, the valve 348, and the like) of the substrate processing apparatus 10. To control.

For example, data such as data for setting a recipe or operation authority of a user (worker) with respect to the recipe by the input unit 160 via the operation display screen 18 of the input / output device 16 (input data). Is input, the corresponding input data (input instruction) is stored in the storage unit 166 and displayed on the display unit 162 via the display control unit 164, and is further displayed by the display control unit 164 by the PMC 14; ) Is transmitted to the transmission / reception processing unit 146 of. The CPU 140 stores the input data in the RAM 144 and, for example, confirms setting inputs such as a recipe stored in the ROM 142 and a user's (operator's) operation authority with respect to the recipe. The CPU 140 starts the sequence program and, in accordance with the sequence program, invokes and executes a command of a recipe stored in the RAM 144, for example, so that the steps are executed in sequence and the I / O control unit 148 is executed. The control instruction for processing a substrate is transmitted to the temperature control part 150, the gas control part 152, the pressure control part 154, and the conveyance control part 156 via (circle). A controller such as the temperature control unit 150 controls each unit (heater 338, MFC 342, valve 348, etc.) in the substrate processing apparatus 10 according to a control instruction from the CPU 140. do. As a result, the above-described wafer 200 is processed.

In the substrate processing apparatus in this embodiment, the operation authority of a user (worker) is set for each kind of file. In addition, for each type of file, operation authority of a group in which a plurality of users are registered is set. For example, a process recipe among various recipes will be described. When a process group's operation authority is set to be editable for a process recipe, each user registered in the group can refer to and edit a file that is a process recipe. have. The operation authority is set by a predetermined operator such as an administrator (also called a master user).

It is preferable that the operation authority of each of these users is set corresponding to the operation state of a substrate processing apparatus. In other words, it is necessary to allow recipe editing by a person in charge of a line, etc. in off-line, and to change the contents of the recipe because in the on-line, the substrate processing apparatus is operated by an instruction from the host computer. Therefore, recipe editing by the person in charge of a line is prohibited. At the time of online and trouble occurrence, it is preferable to permit editing of a recipe by a maintenance engineer, for example.

Next, a method of setting a user's (worker's) operation authority for each recipe stored in the substrate processing apparatus 10 will be described based on FIGS. 5 to 8.

FIG. 5 is a diagram illustrating a user setting screen 300 displayed on the input / output device 16 of the substrate processing apparatus 10 as an operation display screen 18 and operated by, for example, an administrator. On the user setting screen 300, a user name, a group name to which each user belongs, and a password corresponding to each user are displayed, and each item can be edited (updated, modified, input, etc.).

As illustrated in FIG. 5, the user setting screen 300 includes a table selection display unit 302 and a user setting table 304. The table selection display unit 302 has a plurality of selection units 306, and when a single selection unit 306 is selected (pressed), a predetermined number of user setting tables 304 corresponding to the selection unit 306 are provided. Is supposed to be displayed.

In the user setting table 304, a group name setting unit 308 for editing an attribute of a user called a group name, a user name setting unit 310 for editing a user name, and a password corresponding to each user name are provided. A password setting unit 312 for inputting is included. In the group name, a name of a group to which each user belongs, for example, a product, an engineer, maintenance, recovery, or the like is input or selected.

For example, 'product' includes users who are line managers, 'engineers' includes users who are process engineers, and 'maintenance' includes users who are maintenance engineers. In addition, the number of group names is not limited, Group name names are also arbitrarily set as needed. For example, you may give names, such as an online engineer and a maintenance person, as a group name. The user name represents the name of the user, and the password is, for example, a character string composed of English and numbers. As shown in FIG. 5, for example, the administrator inputs 'user 1' into the user name input unit 310, and inputs 'product' into the group name input unit 308. Input '1' into the password input unit 312.

FIG. 6 is a diagram illustrating an authority setting screen 400 displayed on the input / output device 16 of the substrate processing apparatus 10 as an operation display screen 18 and operated by, for example, an administrator. In this authority setting screen 400, the operation authority of a user (group) with respect to each recipe is set.

As illustrated in FIG. 6, the authority setting screen 400 includes a group selection unit 402 for selecting a target group name, a file list display unit 404 for displaying a plurality of recipes, and a plurality of these recipes, respectively. The authority input unit 406 for inputting the operation authority of the corresponding group is included. In the group selection unit 402, a plurality of group names set in the user setting table 304 described above are displayed, and a group name as a target can be selected.

The file list display unit 404 displays a list of a plurality of recipes and the like stored in the substrate processing apparatus 10 as a file. In addition, you may display not only a recipe but a file for a predetermined process. For example, the process list, sub recipe, alarm recipe, and the like are displayed on the file list display unit 404. On the other hand, the file list display unit 404 has a display switching button 408, so that when the list of recipes cannot be displayed on one screen, it is possible to change the display or scroll the display as necessary. It is.

The authority setting unit 406 includes an online authority setting unit 410 and an offline authority setting unit 412. In the online authority setting unit 410, a state in which the operation state of the substrate processing apparatus 10 is operated by the substrate processing apparatus 10, which is the processing target according to an instruction from a management apparatus such as online (online remote: host apparatus 20). In the case of], the operation authority of the group (user) for each recipe is input (selected). The offline authority setting unit 412 is configured to input (select) an operation authority of a group (user) for each recipe when the operation state of the substrate processing apparatus 10 is offline (non-online remote). The operation authority of a group (user) is set for each recipe, for example, among 'Inhibit', 'ReadOnly', 'Edit' and 'Exec'. Which one.

Here, "Inhibit" is a right to prohibit editing and reference of a file such as a recipe, and "ReadOnly" is a right to prohibit editing a file such as a recipe and permits a reference. It is the authority to permit editing and reference of a file such as a recipe. Execution is an authority to allow execution (start) of a recipe or the like.

In addition, the authority setting screen 400 includes a button group 414 composed of a plurality of buttons. In this button group 414, for example, an edit button 416, a command button 418, and the like are arranged. 6 is a diagram when the edit button 416 is pressed. When the command button 418 is pressed, although not shown, the file list display unit 404 displays a plurality of files stored as commands. The command button can also be set on the authority setting screen 400.

As shown in Fig. 7, on the authority setting screen 400, the edit button 412 is selected, and for example, an online authority input unit 410 or an offline authority input unit 412 corresponding to a predetermined recipe is selected. If so, the selection screen 420 is displayed. In the selection screen 420, for example, one of 'Inhibit', 'ReadOnly', 'Edit' and cancel can be selected.

For example, in the authority setting screen 400, the administrator selects 'Default' from the group name selection unit 402, selects the edit button 416, and the offline authority input unit 412 corresponding to the process recipe. ) Is selected on the selection screen 420. Thereby, the setting which allows reference of the process recipe on the substrate processing apparatus 10 side to the user belonging to the "Default" group can be made "ReadOnly".

For example, in the authority setting screen 400, the group name selection unit 402 selects 'Engineer' or 'Maintenance' and selects the predetermined value via the selection screen 420. When the user selects 'Edit' for the online authority setting unit 410 corresponding to the recipe of the user, the substrate processing apparatus 10 is online for users belonging to the 'engineer' or 'maintenance' group. The setting which allows the reference and editing of the predetermined recipe on the side can be performed.

In addition, in the authority setting screen 400, a user selects "Product" in the group name selection part 402, and respond | corresponds to a predetermined recipe via the selection screen 420, for example. The online permission setting unit 410 selects 'ReadOnly' or 'Inhibit'. Thereby, the setting which prohibits editing of the predetermined recipe on the board | substrate processing apparatus 10 side can be performed for the user belonging to a "product" group.

As shown in Fig. 8, on the authority setting screen 400, the command button 418 is selected, and the online authority setting unit 410 or the offline authority setting unit 412 corresponding to the predetermined command displayed is selected. If so, the selection screen 420 is displayed. In the selection screen 420, for example, any one of 'Inhibit', 'Exec' and cancellation can be selected. Here, the online permission setting unit 410 is selected for the user belonging to the 'product' group, and the user is allowed to not display (or operate) the return command button by 'inhibit' the return command among predetermined commands. Can't). As a result, it is possible to prevent the hoop 110 from being put online or the like.

 For example, in the authority setting screen 400, the administrator selects 'Default' in the group name selection unit 402, selects the command button 418, and sets the offline authority corresponding to the file maintenance command. The unit 412 is selected, and an executable (Exec) is selected on the selection screen 420. Thereby, the setting which allows the user belonging to the 'Default' group to be allowed to execute file maintenance on the substrate processing apparatus 10 side when offline is performed. In this case, a command button for executing file maintenance is displayed on the screen.

Here, file maintenance is a file maintenance operation such as file copying between the internal storage of a hard disk and an external storage medium such as a floppy disk or the backup of a file set in a system. It is a function to carry out.

As described above, the authority setting screen 400 is used as a setting screen for setting the operation authority of the user (worker) with respect to a predetermined recipe stored in the ROM 142 or the RAM 144.

9 is a diagram illustrating a main screen 500 displayed on the input / output device 16 of the substrate processing apparatus 10 as an operation display screen 18 and operated by, for example, a user (worker).

As shown in FIG. 9, the main screen 500 displays a login button 502, an edit button 504, and various conditions (for example, a temperature condition, a pressure condition, and the like) for processing a recipe or a substrate. Display sections 506a to 506g are included.

The login screen 600 is displayed on the main screen 500 by selecting (pressing) the login button 502. The login screen 600 includes a user name input unit 602 for inputting a user name, a password input unit 604 for inputting a password corresponding to the user name, and a login button 606 for executing a login. And a cancel button 608 for canceling the login. In the login screen 600, a user inputs a user name into the user name input part 602, inputs a password into the password input part 604, and logs in by pressing the login button 606. FIG.

If the edit button 504 is selected after login, the edit menu screen 700 described later is displayed. This eliminates the need to enter a user name and password each time you edit (or reference) a given recipe. Thereby, the operation time at the time of editing (or referencing) a recipe is reduced.

FIG. 10 is a diagram illustrating an editing menu screen 700 displayed on the input / output device 16 of the substrate processing apparatus 10 as an operation display screen 18 and operated by, for example, a user (worker). This edit menu screen 700 is displayed when the edit button 504 of the main screen 500 mentioned above is selected.

The edit menu screen 700 includes, for example, a recipe selecting unit 702, a temperature setting selecting unit 704, a pressure setting selecting unit 706, and the like. In the recipe selection unit 702, for example, a process recipe selection button 710, a sub recipe selection unit 712, an alarm recipe selection unit 714, and the like are displayed. These process recipe selection buttons 710, sub recipe selection section 712, alarm recipe selection section 714, and the like, can be read in the permission input section 406 of the permission setting screen 400 described above. ',' Edit 'and' Exec 'are selected when they are selected. In other words, of the plurality of recipes stored in the ROM 142 or the RAM 144, a recipe in which 'Inhibit' is selected in the authority input unit 406 is not displayed on the edit menu screen 700. It is.

When the process recipe selection button 710 is pressed (selected) in the above-described editing menu screen 700, a recipe editing menu screen (not shown) is displayed.

In the recipe editing menu screen, for example, a process recipe button, a variable parameter button, a recipe data range check parameter button, and the like are displayed.

If a process recipe button is selected on the above-described recipe editing menu screen 800, a process recipe list screen (not shown) is displayed.

The process recipe list display screen displays a list of a plurality of recipes related to the process recipe, and displays attributes such as file name (recipe name), editing date and time, editor and comment for each recipe. In this process recipe list display screen, for example, a file AAA edited by the editor ABC, a file BBB edited by the editor EFG, and the like are displayed. When a file name displayed on the process recipe list display screen is selected, a recipe editing screen 900 (to be described later with reference to FIG. 11) corresponding to the file is displayed.

FIG. 11 is a diagram illustrating a recipe editing screen 900 displayed on the input / output device 16 of the substrate processing apparatus 10 as an operation display screen 18 and operated by, for example, a user (worker). This recipe editing screen 900 is displayed when the predetermined file name (recipe name) displayed on the process recipe list display screen mentioned above is selected. In the recipe editing screen 900, the details of a predetermined recipe are displayed, and an instruction such as editing (update) of a predetermined recipe is input. In this figure, the recipe name "AAA" is shown on the process recipe list display screen 850 mentioned above.

As shown in FIG. 11, in the recipe editing screen 900, the recipe name display part 902, the save button 904, and several input parts which edit the manufacturing conditions for processing a recipe or a board | substrate, for example, reaction gas Flow condition input unit 906 for setting the flow rate of the light, temperature condition input unit 908 for setting the temperature in the furnace, etc., pressure condition input unit 910 for setting the pressure in the furnace, etc. A step input unit 912 and the like. In the recipe editing screen 900, a user inputs each condition or command in a recipe (for example, recipe 'AAA') displayed on the recipe name display unit 902 to each input unit, and saves the button 902. Press to update the recipe.

As described above, the recipe editing screen 900 is used as an editing screen for editing recipes stored in the ROM 142 or the RAM 144 based on the operation authority set via the authority setting screen 400. In addition, the input / output device 16 is used as display means for displaying the authority setting screen 400 and the recipe editing screen 900, and the substrate processing is performed via the authority setting screen 400 displayed by the input / output device 16. The operation authority can be set in each case when the operating state of the device 10 is online or offline. Therefore, the items that can be edited on the recipe editing screen 900 differ between on-line and off-line. In the recipe editing screen 900, whether or not to display the item name (MFC, temperature, pressure, etc.) is determined according to the operation authority set for the user who edited the recipe 'AAA'. It is preferable not to display it on the screen.

Next, a control program 80 for realizing the control method of the substrate processing apparatus 10 according to the embodiment of the present invention will be described. 12 is a diagram illustrating a configuration of a control program 80 operating on the process system controller 14 of the substrate processing apparatus 10.

As shown in FIG. 12, the control program 80 includes a user interface (UI) unit 82, a screen display unit 84, an authority setting unit 86, a display control unit 88, a recipe storage unit 90, The authority storage unit 92 and the user information storage unit 94 are provided. The control program 80 is supplied to the process controller 14 from the host device 20 via a network, loaded into the RAM 144, for example, by the CPU 140 on an OS (not shown). Is executed. The control program 80 may be supplied via a storage medium such as an FD, a CD, or a DVD, or may be input via an input / output device 16.

In the control program 80, the recipe storage unit 90 is realized as a file and stores a plurality of recipes in which a procedure for processing the substrate is described. The recipe storage unit 90 is realized by at least one of the RAM 144 and an HDD (not shown).

The user information storage unit 94 stores user information (user name, group name to which the user belongs, password, etc.). This user information storage section 94 is realized similarly to the recipe storage section 90.

The authority storage unit 92 stores the operation authority of each user with respect to each recipe stored in the recipe storage unit 90. More specifically, when the operation state of the substrate processing apparatus 10 is online or offline, the operation authority of each user with respect to each recipe is memorize | stored, respectively. This authority storage unit 92 is realized similarly to the recipe storage unit 90.

The screen display part 84 displays the user setting screen 300 (FIG. 5) on the operation display screen 18 by the input / output device 16, and inputs through this user setting screen 300, ie, user information. (A user name, a group name to which the user belongs, and a password corresponding to the user) are accepted and output to the user information storage unit 94. In addition, the screen display unit 84 displays the authority setting screen 400 (FIG. 6) on the operation display screen 18 by the input / output device 16, that is, the input via the authority setting screen 400, that is, The user's operation authority for each recipe is accepted and output to the authority storage unit 86. In addition, the screen display unit 84 displays the operation authority set by the authority setting unit 86 described later on the authority setting screen 400.

The display control unit 88 displays the login screen 600 (FIG. 9) on the operation display screen 18 by the input / output device 16, and inputs through this login screen, that is, user information (user name and corresponding). Password corresponding to the user), and outputs to the authority setting unit 92.

The authority setting unit 92 compares the user information output from the display control unit 88 with the user information stored in the user information storage unit 94, and the input user name exists in the user information storage unit 94. In addition, it is determined whether the input password is correct. In addition, the authority setting unit 86 outputs the determined result to the display control unit 88 as user inquiry information.

In addition, the authority setting unit 86 includes recipes stored in the recipe storage unit 90, operation authority information of the user (group to which the user belongs) stored in the authority storage unit 92, and a substrate processing apparatus ( Based on the operation state of 10), the user's operation authority is set. More specifically, the authority setting unit 92 has operation authority information input via the authority setting screen 400 displayed by the screen display unit 84 and the operation state of the substrate processing apparatus 10 online or offline. Based on the case, the user's operation authority is set and output to the display control unit 88 as authority setting information. That is, the authority setting part 86 sets each operation authority via the authority setting screen 400 displayed by the screen display part 84, when the operation state of the substrate processing apparatus 10 is online or offline. I'm making it possible. In this manner, the authority setting unit 86 configures operation authority setting means for setting the operation authority of the user (worker) with respect to the recipe.

When the display control unit 88 receives the authority setting information output from the authority setting unit 86, the input / output device 16 displays a recipe editing screen (see FIG. 8) on the operation display screen 18 based on the authority setting information. The display of 900 (FIG. 12) is controlled. That is, the display control part 88 is based on the operation authority set via the authority setting screen 400 displayed by the authority setting part 86, and the operation state of the substrate processing apparatus 10 online or offline, It is determined whether the detailed display of the predetermined recipe stored in the recipe storage unit 90 or the editing of the recipe is permitted.

In addition, the display control unit 88 controls the display of the recipe editing screen 900 based on the user inquiry information output from the authority setting unit 86. Specifically, the display control unit 88 sends the input / output device 16 to the input / output device 16 when the user name or password input to the login screen 600 does not match the user information stored in the user information storage unit 94. In this way, the recipe editing screen 900 is not displayed on the operation display screen 18. In this way, the display control unit 88 is a recipe for editing the recipe stored in the recipe storage unit 90 based on the operation authority set via the authority setting screen 400 displayed by the screen display unit 84. A display means for displaying the edit screen 900 is configured.

The UI unit 82 receives a user's operation on the input / output device 16 and outputs the output to each component of the control program 80. The UI unit 82 also outputs, to the input / output device 16, information and data created by each component of the control program 80, processing contents of each component, and the like.

Next, the control process of the substrate processing apparatus 10 which concerns on embodiment of this invention is demonstrated.

FIG. 13 is a flowchart showing display control processing S10 based on the user's (operator's) operating authority by the substrate processing apparatus 10 according to the embodiment of the present invention.

As shown in FIG. 13, in step 100 (S100), the display control unit 88 of the control program 80 operating on the PMC 14 logs in to the operation display screen 18 by the input / output device 16. Display the screen 600. The display control unit 88 accepts an input via the login screen 600, that is, a user name and a password corresponding to the user name.

In step 102 (S102), the authority setting unit 86 determines whether or not the input user name exists. Specifically, the authority setting unit 86 determines whether or not the user name input via the login screen 600 is the same as that stored in the user information storage unit 94, and if it is determined to be the same, steps. If it is determined that it is not the same, the processing proceeds to the processing of step 106 (S106).

In step 104 (S104), the authority setting unit 86 sets a corresponding operation authority for the input user name. Specifically, the authority setting unit 86 sets the operation authority of the user (group to which the user belongs) stored in the authority storage unit 92 with respect to the user name input to the login screen 600. More specifically, the authority setting unit 86, when the operation state of the substrate processing apparatus 10 is on-line or off-line, with respect to the user name input to the login screen 600, the user's information on the recipe. Set the operation permission.

In step 106 (S106), the authority setting unit 86 sets the operation authority to 'Inhibit' for the input user name. More specifically, as shown in Fig. 6, the authority setting unit 804 sets the group to which the input user name belongs to 'Default', and sets the operation authority for all recipes to 'Inhibit'. Shall be.

In step 108 (S108), the display control unit 88 controls the display of the recipe editing screen 900 based on the operation authority set by the authority setting unit 92. FIG. More specifically, the display control unit 88 controls the operation authority of the user (group) with respect to each recipe set by the authority setting unit 86 and the case where the operation state of the substrate processing apparatus 10 is online or offline. Based on this, the recipe editing screen 900 is displayed or the editing of the displayed recipe is allowed. For example, the display control unit 88 may display 'Inhibit' when the operation authority of the group to which the input user name belongs is 'Inhibit' when the process recipe is online, and 'Edit' when it is offline. When set, the recipe editing screen 900 is displayed on the operation display screen 18 by the input / output device 16 only when the operation state of the substrate processing apparatus 10 is offline, and the process by the user is performed. Allows editing (update) of recipe.

In this embodiment, 'Default' is installed so that login processing can be performed even if there is no registration of the entered user name. However, 'Default' does not necessarily need to be installed. In this case, the form which disables login process may be sufficient.

Specific embodiments will be described. For example, on the authority setting screen 400 in the predetermined command shown in FIG. 8, the authority setting for file maintenance is set to 'Inhibit' online and 'Exec' offline. By setting, the file maintenance processing which has nothing to do with the substrate processing is not performed while the substrate processing apparatus 10 is automatically operated at the time of online. In other words, the main controller does not need to be loaded more than necessary.

For example, a user A is a line manager (online manager) and a user B is a process engineer (offline manager). On the authority setting screen 400 in the predetermined command shown in Fig. 8, the user A is set to 'Inhibit' when the authority setting of the return command and the PM command is on-line or off-line, respectively. On the other hand, since the user B is automatically operated when online and the process recipe designated to the host device 20 is executed, the user B is set to 'Inhibit', but when offline, the user B is executable. Is set to '. Next, on the authority setting screen 400 in the predetermined recipe shown in FIG. 6, the user A is either "Inhibit" or "ReadOnly" whether the authority setting of the process recipe is online or offline, respectively. 'B' is set to 'Inhibit' or 'ReadOnly', while 'B' is set to 'Edit' when offline. do. In this way, a manual process can be performed offline (a substrate can be returned or a recipe can be executed), and the test operation of the process performed at the time of device setup, in particular, is not authorized. This operation is disabled so that it can be safely performed. In addition, regardless of whether the process recipe designated by the host device 20 is downloaded online, an error caused by editing and downloading the process recipe on the operation display screen 18 can be prevented.

For example, if user A is a line manager (online manager) and user B is a maintenance engineer (offline manager), user A is a transfer command on the authority setting screen 400 in the predetermined command shown in FIG. While the user's permission is set to 'Inhibit' both online and offline, User B is set to 'Inhibit' because it is automatically operated while online, 'Exec' is set. With this setting, it is possible to safely and manually carry out operations such as replacing the boat for cleaning the boat or the reaction tube or teaching the transfer machine during maintenance. In addition, it is possible to manually and safely perform a recovery process such as recovery of a cracked substrate at the time of trouble occurrence.

As described above, according to the present invention, when the operation state of the substrate processing apparatus 10 is on-line or off-line via the operation display screen 18 of the input / output device 16, the operation of the user (operator) is performed. You can set permissions. Accordingly, even when the operation state of the substrate processing apparatus 10 is online and a trouble occurs, a predetermined user, for example, a user (maintenance engineer, process engineer) belonging to a group such as maintenance or engineer, is usually used. Allows editing or starting of recipes that are not allowed. Therefore, it can respond quickly to the trouble on the substrate processing apparatus 10 side, can shorten the time spent for trouble processing, and can realize productivity improvement. On the other hand, when the operation state of the substrate processing apparatus 10 is online, for example, recipe editing or starting of a user (line person in charge) belonging to the product can be prohibited, thereby preventing the occurrence of trouble due to misoperation or the like. can do.

The present invention can be applied to a device for processing a glass substrate such as an LCD device as well as a semiconductor manufacturing device. The film forming process includes, for example, a process of forming CVD, PVD, an oxide film, a nitride film, a process of forming a film containing metal, and the like. In addition, in this embodiment, although the vertical processing apparatus was described, it is similarly applicable also to a sheet | leaf apparatus. Moreover, it is applicable also to the system or management apparatus which combined the some substrate processing apparatus and the apparatus which manages each substrate processing apparatus.

 INDUSTRIAL APPLICABILITY The present invention can be used when it is necessary to shorten the time spent in trouble generation in a substrate processing apparatus for processing a semiconductor wafer, a glass substrate, or the like.

The present invention includes the following embodiments in addition to those described in the claims.

(1) storage means for storing a plurality of files including a plurality of recipes in which a procedure for processing a substrate is described and a user's operation authority corresponding to the plurality of recipes, and an operation state of the substrate processing apparatus is online or offline In each case, a substrate processing system having display means for displaying an authority setting screen for setting the user's operation authority for each of the recipes, and an editing screen for editing a recipe stored in the storage means.

(2) The substrate processing system of (1), wherein the recipe (process recipe) for manufacturing a product substrate among the plurality of recipes is set so that editing is not possible online.

(3) a command for executing a predetermined function in the substrate processing apparatus, storage means for storing the user's operation authority corresponding to the command, and an operation state of the substrate processing apparatus in each case of online or off-line. A display for displaying a function setting screen for executing a command stored in the storage means on the basis of an authority setting screen for setting the user's operation authority for the command and an operation authority set via the authority setting screen. A substrate processing system having means.

(4) The substrate processing system according to (3), wherein the command is set so as not to be executed online.

(5) Any one of (1) to (4), wherein the group to which the user belongs has a group parameter set in advance corresponding to the user ID and password, and the authority of the user can be set for each of the groups. The substrate processing system described in.

(6) The substrate processing system described in (1) or (2), wherein each recipe is set differently at the time of online and offline.

(7) The substrate processing system described in (3) or (4), wherein the command is set differently at the time of online and offline.

10 substrate processing apparatus 16 input / output device
18: Operation display screen 142: ROM
144: RAM 400: permission setting screen
900: Recipe edit screen

Claims (8)

As a display method of the substrate processing apparatus which displays the authority setting screen which sets the operation authority corresponding to the said some recipe with respect to the various files containing the some recipe in which the process of processing a board | substrate was described,
And the authority setting screen is configured to set the operation authority when the operation state of the substrate processing apparatus is on-line or off-line, respectively. A substrate processing apparatus comprising an authority setting screen for setting an operation right corresponding to the plurality of recipes with respect to various files including a plurality of recipes in which a process of processing a substrate is described,
And the authority setting screen is configured to set the operation authority when the operation state of the substrate processing apparatus is online or offline. As the display method of the substrate processing apparatus which displays the authority setting screen which sets the operation authority corresponding to the said command with respect to the command for performing a predetermined function in a substrate processing apparatus,
And the authority setting screen is configured to set the operation authority when the operation state of the substrate processing apparatus is on-line or off-line, respectively. A substrate processing apparatus for displaying an authority setting screen for setting an operation authority corresponding to the command with respect to a command for executing a predetermined function in the substrate processing apparatus,
And the authority setting screen is configured to set the operation authority when the operation state of the substrate processing apparatus is online or offline. As a display method of the substrate processing apparatus which displays the authority setting screen which sets the operation authority corresponding to the said some recipe with respect to the various files containing the some recipe in which the process of processing a board | substrate was described,
The authority setting screen is a display method of a substrate processing apparatus configured to differ in the operation authority in each case when an operation state of the substrate processing apparatus is online or offline. A substrate processing apparatus comprising an authority setting screen for setting an operation right corresponding to the plurality of recipes with respect to various files including a plurality of recipes in which a process of processing a substrate is described,
And the authority setting screen is configured to change the operation authority when the operation state of the substrate processing apparatus is on-line or off-line, respectively. As the display method of the substrate processing apparatus which displays the authority setting screen which sets the operation authority corresponding to the said command with respect to the command for performing a predetermined function in a substrate processing apparatus,
The authority setting screen is a display method of a substrate processing apparatus configured to differ in the operation authority in each case when an operation state of the substrate processing apparatus is online or offline. A substrate processing apparatus for displaying an authority setting screen for setting an operation authority corresponding to the command with respect to a command for executing a predetermined function in the substrate processing apparatus,
And the authority setting screen is configured to change the operation authority when the operation state of the substrate processing apparatus is on-line or off-line, respectively.

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