KR20100000129A - A deposition mask unit for fabrication of organic light emitting display device - Google Patents

Abstract

PURPOSE: A deposition mask unit for an organic light emitting diode is provided to be prevented from sagging due to the weight of a mask and a substrate by comprising a supporting member which is formed vertically to the divided mask. CONSTITUTION: A frame(110) is composed of four sides surrounding an opening area. A pair of align masks(102) are fixed on the frame and formed on both sides among the four sides of the frame. A plurality of divided masks(120) are composed of an opening(122) transmitting deposition material and a dummy area(124) except the opening area. A plurality of gap masks(104) are positioned between the divided mask and align mask. The frame is placed between the other both sides except the two sides on which the both ends of the divided mask are fixed.

Description

A Deposition Mask Unit For Fabrication of Organic Light Emitting Display Device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deposition mask unit for an organic light emitting display device, and more particularly, to a deposition mask unit having a structure in which a division mask is used and a deflection of the division mask is prevented.

With the development of the information society, it is required to develop a new image display device that improves disadvantages such as heavy weight and large volume of the conventional CRT (Cathode Ray Tube).

Accordingly, liquid crystal display devices (LCDs), organic light emitting diode display devices (OLEDs), plasma panel display devices (PDPs), surface-conduction electron-emitter display devices (SEDs), and the like. The same various flat panel display devices are attracting attention.

Among them, the organic light emitting diode display is an organic light emitting device that is a self-luminous device in which light of a specific wavelength is generated by recombination of electrons and holes to form excitons and energy from the formed excitons. By using a diode, the display characteristics such as contrast ratio and response time are excellent, and a flexible display can be easily implemented to attract attention as an ideal next-generation display.

In general, the organic light emitting diode display has a structure in which a cathode and an anode are wrapped around a thin film of organic material on a substrate, and when a voltage of several volts is applied to the cathode and the anode, current flows while the organic thin film is formed. The luminescence phenomenon will occur within. In other words, the organic molecules are excited into the excited state by the current injection, and then return to the original ground state to emit extra energy as light.

As described above, in order to form an organic light emitting diode display including several layers of organic thin films, it is important to deposit the organic thin films with a uniform thickness over the entire substrate.

In general, a method of forming a thin film on a substrate includes evaporation of a material in a vacuum and coating a uniform film on the surface of an object placed therein, and a gas phase of the material to be deposited by evaporation. Ion plating, which is deposited by ionization with reactive gases or inert gases, and then accelerated to a negatively charged substrate, and metal ions of an inert element such as argon collide with a metal plate. Physical Vaporized Deposition (PVD), such as sputtering, which deposits a film on the surface of a substrate by releasing atoms or molecules, and chemical vapor deposition (CVD), which forms a thin film on a substrate using a gas reaction. Vaporized Deposition). Among them, a vacuum deposition method is mainly used to form the organic thin film constituting the organic light emitting display.

1 is a cross-sectional view illustrating a deposition apparatus used to form an organic thin film and the like of an organic light emitting diode display.

As can be seen in FIG. 1, the deposition apparatus for an organic light emitting display device includes a chamber 10 which maintains an interior in a vacuum state, a deposition source 20 disposed inside the chamber, and an upper portion of the deposition source 20. And a magnet unit 50 disposed between the deposition mask unit 30 and the substrate 40.

The inside of the chamber is maintained at a high degree of vacuum and high temperature when a thin film is formed on the substrate 40. As such, although not shown in order to maintain a high degree of vacuum, a vacuum pump such as a turbo molecular pump (TMP) is provided.

In addition, although not shown, a thickness monitoring sensor for measuring the speed of evaporating material, a thickness controller for controlling the movement of the deposition source according to the measured thickness, and the evaporation from the deposition source. A shutter may be further provided to block the material.

The deposition source 20 is disposed in a bottom portion inside the chamber, and is in the form of a crucible containing a deposition material therein, and deposits the deposition material on a substrate by heat.

The deposition mask unit 30 is composed of a frame composed of four sides having an opening region in the center and formed to surround the opening region, and a mask fixed to the frame to selectively deposit a deposition material on a substrate.

The substrate may include an active region in which a plurality of cells are arranged in a matrix to deposit a deposition material and a dummy region other than the active region, and the mask has an opening in which a region corresponding to each active region is opened.

In addition, the chamber may include an aligner for aligning the substrate and the mask.

The magnet unit 50 is disposed to face the deposition mask unit with the substrate 40 therebetween, and the substrate and the mask are brought into close contact with each other by using a magnetic force.

2 is a plan view showing the deposition mask unit.

As can be seen in Figure 2, the deposition mask unit 30 has a frame 32 composed of four sides formed to surround the opening area and having an opening area of a substantially rectangular shape in the center, and is fixed to the frame and selectively And a mask 34 having a plurality of openings 36 each corresponding to a cell region for depositing a deposition material on a substrate.

However, in the case of the deposition mask unit for an organic light emitting display, which is conventionally used to form an organic thin film or the like, one mask is a mother-field method corresponding to the entire substrate, so that the substrate size and the high resolution display are increased. It has a limitation that it is not easy to cope with the high definition of the pattern for implementation.

That is, as the substrate is enlarged, the deposition mask is also enlarged, and thus, the mask does not maintain a flat state due to the load of the mask itself.

In addition, as the size of the substrate increases, the substrate is bent (sagging) in the direction of gravity due to the load of the substrate itself, and the bending of the substrate affects the mask, thereby causing a problem in that the deposition pattern is distorted. .

The present invention has been made to solve these problems, by adopting a split mask to reduce the mask itself load to prevent the bending of the mask, and also through the support member provided in the frame to cross the split mask and the substrate and It aims at preventing curvature by the load of a mask.

In order to achieve the above object, a deposition mask unit for an organic light emitting display according to an embodiment of the present invention, a pair disposed in the side portion to have a frame having an opening area in the center and an area overlapping the opening area A plurality of division masks having an alignment mask of the plurality of alignment masks and an opening corresponding to the pattern of the deposition material to be formed between the alignment masks, and having an opening corresponding to the pattern of the deposition material to be formed; It includes a gap mask to prevent the deposition material is deposited in the unnecessary area,

The frame may include a support member for supporting the alignment mask, the division mask, and the gap mask.

In addition, the support member may have a groove in an area overlapping the gap mask, and the gap mask may be inserted into the groove to improve adhesion to the division mask.

In addition, the alignment mask, the division mask, and the gap mask may include a groove into which the support member is inserted in an area overlapping the support member.

As described above, the deposition mask unit for the organic light emitting diode display according to the embodiment of the present invention,

By adopting a split mask method in which a deposition mask is divided into a plurality of divided masks instead of a single ledger, it is possible not only to cope with the enlargement and high definition of the substrate, but also to effectively repair a mask in which local defects occur. Have

In addition, by reducing the load of one mask itself, it prevents sagging due to the load of the mask itself, and includes a support member provided in a direction perpendicular to the division mask to prevent sagging due to the load of the mask and the substrate. It has an effect that can be prevented.

In addition, the deposition mask unit for an organic light emitting diode display according to an exemplary embodiment of the present invention may reduce the time required for alignment of the mask by minimizing deformation and distortion of the division mask, thereby improving productivity. to provide.

Next, a deposition mask unit for an organic light emitting diode display according to an exemplary embodiment of the present invention will be described in detail.

The deposition mask for an organic light emitting diode display according to an exemplary embodiment of the present invention includes a frame having an opening area at a center thereof and having four sides surrounding the opening area, and an amount corresponding to two opposite sides of the four sides of the frame. A pair of alignment masks provided on the side part and fixed to the frame, and spaced apart from each other between the pair of alignment masks so as to be parallel to the alignment masks, and both ends of which are fixed to two other sides of the frame, respectively. A plurality of divided masks and a plurality of gap masks disposed between adjacent neighboring masks or between the divided masks and the align mask to prevent the space between the masks from being opened;

The frame is arranged to be parallel to each other in a direction perpendicular to the split mask, and has a groove in an area intersecting the gap mask, and the gap mask is inserted into the groove so that the alignment mask, the split mask, and It is characterized by including a plurality of support members for supporting the gap mask.

In addition, the deposition mask unit for an organic light emitting diode display according to another embodiment of the present invention,

A pair of four-sided frames surrounding the opening region, a pair of alignment masks provided at both side portions corresponding to two opposite sides of the four sides of the frame, and fixed to the frame; A plurality of splitting masks disposed to be parallel to the alignment mask and spaced apart from each other between the pair of alignment masks, and both ends of which are fixed to two other sides of the frame, and between the masks that are adjacent to each other; Includes a plurality of crevice masks positioned to cover the space,

The alignment mask, the division mask, and the gap mask may be inserted into a groove provided in an area intersecting with the support member to support the alignment mask, the division mask, and the gap mask.

Next, a deposition mask unit according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

4 is a plan view showing the configuration of the deposition mask unit according to the embodiment of the present invention, and FIG.

As can be seen in Figure 4, the deposition mask unit 100 according to an embodiment of the present invention, a frame 110 having four sides surrounding the opening area and having an opening area 105 of a substantially rectangular shape in the center, A pair of alignment masks 102 and two pairs of alignment masks 102 provided on both side portions corresponding to two sides 112a and 112b facing each other among the four sides of the frame and fixed to the frame. A plurality of split masks 120 disposed to be parallel to the alignment mask and spaced apart from each other, and fixed at two ends 112c and 112d of the frame, respectively, and between or adjacent to the split masks. And a plurality of gap masks 104 disposed between the alignment masks to prevent the space between the masks from being opened.

The frame 110 is parallel to each other in a direction perpendicular to the division mask 120 over the two sides 112a and 112b except for two sides 112c and 112d at which both ends of the division mask 120 are fixed. And a plurality of support members 130 for supporting the alignment mask, the division mask, and the gap mask.

In addition, the support member is formed in an area that intersects the gap mask, and has a plurality of gap mask insertion grooves 132 into which the gap mask is inserted.

The frame 110 serves to fix and support the alignment mask 102, the gap mask 104, the division mask 120, and the like. In addition, the frame is formed of a material having a sufficient rigidity, because it has a predetermined elastic force, in particular, to support the split mask in a stable state in a stable state.

The alignment mask 102 is formed of a rectangular thin plate, as shown, and is located at side portions corresponding to two sides 112a and 112b of the four sides of the frame facing each other in the opening region. Some overlap with the opening area while the other is located above the frame. The alignment mask includes a separate alignment mark in each of the regions overlapping the opening area and the region located above the frame, to align the frame and the division mask, and to align the deposition mask unit and the substrate. Do.

The alignment mask may be fixed to the frame by welding with a laser or the like, or may be fixed to be detachable with a bolt or the like.

The division mask 120 is also formed as a rectangular thin plate, and the openings 122 and the openings respectively corresponding to one cell region are spaced apart at predetermined intervals along the length direction so that the deposition material can pass therethrough. The dummy area 124 is excluded.

In the drawings, the opening is shown in a rectangular shape, but if necessary, the opening may be patterned to deposit a fine pattern.

The division mask is preferably formed of a material having sufficient rigidity and low thermal expansion, and having magnetic properties so as to be stable to tensile force. Specifically, it may be formed of nickel or a nickel alloy, especially a nickel-cobalt alloy capable of forming a fine pattern and having a good surface roughness.

As described above, in the division mask having the openings, a resist layer having the same pattern as each opening is formed on the thin plate using a photoresist, or a film having the same pattern as the opening is attached to the thin plate, and then the thin plate is etched ( by etching). It will also be possible to produce by electroforming using the electroplating method.

Each end of the split mask is fixed to two other sides 112c and 112d facing each other at the top of the frame. At this time, it may be preferable to apply a tensile force to the splitting mask to fix the splitting mask so as to maintain sufficient flatness. For example, it can also be fixed by welding to a frame with a laser, or fixing so that attachment or detachment is possible with a bolt etc.

The gap mask 104 is also formed of a rectangular thin plate, and is disposed between the partition masks adjacent to each other, or between the partition masks and the alignment masks, so that the space between the masks is not opened, thereby eliminating unnecessary cell regions on the substrate. Prevent deposition of deposition material in the area.

The gap mask may be fixed to two sides 112c and 112d of opposite frames to which both ends of the split mask are fixed, for example, to be fixed by laser welding or removable by bolts. Can be.

In addition, as shown in FIG. 5, the gap mask is provided on the bottom surface of the alignment mask and the division mask, that is, the surface facing the deposition source.

The support member 130 is formed to traverse the opening region between the two sides 112a and 112b except for two sides on which both ends of the split mask are fixed in the frame. That is, they are formed in a direction perpendicular to the longitudinal direction of the division mask and are formed to be spaced apart from each other and side by side. In addition, the support member is formed to overlap the remaining dummy region except for the opening region of the division mask.

In addition, the support member may be formed integrally with the frame. As such, when the frame and the support member are integrally formed, since the support member expands and contracts at the same rate as the frame that expands and contracts with temperature changes, the mask is prevented from applying tension due to the difference in thermal expansion rate to the support member. Has the effect of further increasing the flatness.

Thus, the formed support member has the effect of preventing sagging of the alignment mask, the division mask and the clearance mask with respect to the gravity direction.

6 is a perspective view illustrating the support member 130 and the frame. As shown in FIG. 6, the support member 130 includes a plurality of gap mask insertion grooves 132 in a region corresponding to the gap mask, and the depth of the gap mask insertion groove is equal to the thickness of the gap mask. It is formed to correspond. That is, in the area where the gap mask and the support member intersect, the gap masks are inserted into the gap mask insertion groove, thereby increasing the adhesion between the support member and the division mask as shown in FIG. 5.

As described above, in the deposition mask unit according to the exemplary embodiment of the present invention, the support member has a structure in which the split mask is directly supported, thereby enabling the support member to more stably support the split mask.

Next, the deposition mask unit according to another exemplary embodiment of the present invention will be described with reference to FIGS. 7 and 8.

FIG. 7 is a cross-sectional view illustrating a cross-sectional view of parts I to I of FIG. 4 in a deposition mask unit according to another embodiment of the present invention, and FIG. 8 is an alignment mask in the deposition mask unit according to another embodiment of the present invention. And a perspective view showing a crevice mask and a split mask.

As can be seen in Figures 7 and 8, the deposition mask unit according to another embodiment of the present invention, the frame 110 having an opening area of approximately rectangular shape in the center and surrounding the opening area, and the frame 110, A pair of alignment masks 102 fixed to the frame and spaced apart from each other between the pair of alignment masks 102 provided at both side portions corresponding to two sides of the four sides opposite to each other; A plurality of split masks 120 arranged parallel to the alignment mask and having end portions fixed to two other sides of the frame, respectively, having openings 122 corresponding to the deposition patterns and dummy regions 124 excluding the openings; A plurality of gap masks 104 are disposed between neighboring split masks or between split masks and alignment masks to prevent the space between the masks from opening. Together,

The frame 110 is arranged to be parallel to each other in a direction perpendicular to the split mask 120 over two sides except for two sides where both ends of the split mask 120 are fixed. A plurality of support members 130 for supporting the mask and the gap mask,

Each of the alignment mask, the division mask, and the gap mask has a plurality of grooves provided in an area crossing the support member, and the support member is inserted into the groove provided in each of the alignment mask, the division mask, and the gap mask. It is characterized by.

8 is a perspective view illustrating an alignment mask, a gap mask, and a division mask in a deposition mask unit according to another embodiment of the present invention.

As shown in FIG. 8, each of the alignment mask 102, the gap mask 104, and the division mask 120 has a plurality of grooves, and the grooves provided in each mask are formed to be parallel to each other. In this way, the support member is inserted into the groove formed to be parallel to each mask.

The alignment mask 102 is formed of a rectangular thin plate, as shown in the figure, and is located in a side portion corresponding to two sides of the four sides of the frame facing each other among the opening regions, and part of the alignment mask 102 In addition to the overlap, the remaining part is located at the top of the frame. The alignment mask includes a separate alignment mark in each of the regions overlapping the opening region and the region located above the frame, to align the frame and the division mask, and to align the deposition mask unit and the substrate. Do.

The alignment mask may be fixed to the frame by welding with a laser or the like, or may be fixed to be detachable with a bolt or the like.

The division mask 120 is also formed as a rectangular thin plate, and the openings 122 and the openings respectively corresponding to one cell region are spaced apart at predetermined intervals along the length direction so that the deposition material can pass therethrough. The dummy area 124 is excluded.

In the drawings, the opening is illustrated in a rectangular shape, but if necessary, the opening may be patterned to deposit a fine pattern.

The division mask is preferably formed of a material having sufficient rigidity and low thermal expansion, and having magnetic properties so as to be stable to tensile force. Specifically, it may be formed of nickel or a nickel alloy, especially a nickel-cobalt alloy capable of forming a fine pattern and having a good surface roughness.

Each of the split masks has both ends fixed to two other sides opposing each other at the top of the frame. At this time, it may be preferable to apply a tensile force to the splitting mask to fix the splitting mask so as to maintain sufficient flatness. For example, it can also be fixed by welding to a frame with a laser, or fixing so that attachment or detachment is possible with a bolt etc.

The gap mask 104 is also formed of a rectangular thin plate, and is disposed between the partition masks adjacent to each other, or between the partition masks and the alignment masks, so that the space between the masks is not opened, thereby eliminating unnecessary cell regions on the substrate. Prevent deposition of deposition material in the area.

The gap mask is fixed to two sides of the frame opposite to each other, both ends of which are fixed to both ends of the division mask, for example, may be fixed by laser welding or the like by detachable bolts.

In addition, the gap mask is provided on the bottom surface of the alignment mask and the division mask, that is, the surface facing the deposition source.

In addition, in the deposition mask unit according to another embodiment of the present invention, the frame includes a support member formed to cross the opening region between two sides 112a and 112b except for two sides at which both ends of the split mask are fixed. 130).

The support member 130 is formed in a direction perpendicular to the longitudinal direction of the splitting mask and is formed to be spaced apart from each other and side by side. In addition, the support member is formed to overlap the remaining dummy region except for the opening region of the division mask. In addition, the support member may be formed integrally with the frame.

The support member may be fixed to the alignment mask, the division mask, and the gap mask by, for example, laser welding, or may be fixed to be detachable using a bolt or the like.

Thus, the formed support member has the effect of preventing sagging of the alignment mask, the division mask and the clearance mask with respect to the gravity direction.

In addition, in the deposition mask unit according to another embodiment of the present invention, the alignment mask, the division mask, and the gap mask have a plurality of grooves formed in an area crossing the support member, and the support member inside the groove. Has a structure to be inserted. That is, the support member is inserted into the groove provided in the alignment mask, the division mask, and the gap mask, thereby increasing the adhesion between the support member and the division mask.

As described above, the deposition mask unit according to another exemplary embodiment of the present invention also has a structure in which the support member directly supports the division mask, thereby enabling the support member to more stably support the division mask.

In addition, the present invention described above is not limited to the above-described embodiment and the accompanying drawings, it is possible that various substitutions, modifications and changes within the scope without departing from the technical spirit of the present invention. It will be apparent to those skilled in the art.

1 is a cross-sectional view showing the configuration of a deposition apparatus for a general organic light emitting display.

2 is a plan view showing the structure of a deposition mask unit for a conventional organic light emitting display.

3 is a view for explaining a problem of a deposition mask for a conventional organic light emitting display.

4 is a plan view illustrating a configuration of a deposition mask unit for an organic light emitting diode display according to an exemplary embodiment of the present invention.

Fig. 5 is a sectional view showing a cross section of I to I 'in Fig. 4;

6 is a perspective view illustrating a frame and a supporting member in a deposition mask unit for an organic light emitting display according to an embodiment of the present invention.

FIG. 7 is a cross-sectional view of a portion corresponding to I to I ′ of FIG. 4 in a deposition mask unit for an organic light emitting diode display according to another exemplary embodiment of the present disclosure; FIG.

8 is a perspective view illustrating an alignment mask, a division mask, and a gap mask in a deposition mask unit for an organic light emitting display according to another embodiment of the present invention.

Claims (6)

A frame consisting of four sides surrounding a central opening area; A pair of alignment masks fixed to both side portions corresponding to two opposite sides of the four sides of the frame; A plurality of split masks disposed between the pair of alignment masks to be spaced apart from each other, and having an opening for forming a deposition pattern at both ends of the pair of alignment masks, and a dummy region excluding the opening; A plurality of crevice masks disposed between neighboring split masks or between split masks and alignment masks to prevent deposition of deposition material through the spaces between the masks; The frame has a plurality of support members disposed so as to span between the remaining two sides except the two sides fixed to both ends of the split mask to support the alignment mask, the split mask and the gap mask Deposition mask unit for light emitting display device. The method of claim 1, And the support member has a plurality of gap mask insertion grooves formed in an area intersecting the gap mask, and the gap mask is inserted into the gap mask insertion grooves. The method of claim 2, The depth of the gap mask insertion groove formed in the support member, the depth of the gap mask corresponding to the thickness of the gap mask deposition mask unit for an organic light emitting display device. The method of claim 1, The alignment mask, the division mask, and the gap mask have grooves formed in an area crossing the support member, and the support member is inserted into the grooves formed in the alignment mask, the division mask, and the gap mask. A deposition mask unit for an organic light emitting display device. The method of claim 1, The support member is integrally formed with the frame, the deposition mask unit for an organic light emitting display. The method of claim 1, And the alignment mask, the division mask, and the gap mask, and the support member are welded to each other or fixed by bolts.

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