KR20080079240A - Method of detaching platelike substance and apparatus therefor - Google Patents

Abstract

A glass substrate detaching apparatus that is capable of efficiently, stably detaching a glass substrate from an adsorption sheet. There is provided a method of detaching a platelike substance held by adsorption on an adsorption sheet from the adsorption sheet, characterized in that detaching of the platelike substance from the adsorption sheet is carried out by retaining the platelike substance held by adsorption on an adsorption sheet from the plane opposite to the adsorption sheet by multiple adsorption pads; emitting a jet of pressurized water through a pressurized water supply nozzle toward a boundary region between the platelike substance and the adsorption sheet to thereby cause an edge of the platelike substance to depart from the adsorption sheet; and while further feeding a pressurized water to the interstice between the departed edge of the platelike substance and the adsorption sheet to thereby cancel the adsorption of the platelike substance onto the adsorption sheet, moving the adsorption pads in the direction of detachment.

Description

Method of peeling plate and body thereof {METHOD OF DETACHING PLATELIKE SUBSTANCE AND APPARATUS THEREFOR}

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a method for peeling a plate and a device thereof, and particularly for flat panel displays (FPDs) used in plate-like bodies such as glass substrates, in particular for liquid crystal displays, in which polishing is completed in a polishing process of a continuous polishing line. The peeling method of a plate-shaped object for peeling a glass substrate from an adsorption sheet, and its apparatus are related.

The glass substrate for FPD used for a liquid crystal display etc. shape | molds molten glass into plate shape by the plate glass manufacturing method called the float method, and polishes and removes the minute unevenness | corrugation and curvature of the surface in the grinding | polishing process of a continuous polishing line. It is manufactured in the form of a thin plate having a thickness of 0.5 to 1.1 mm.

Moreover, since a glass substrate is adsorbed and hold | maintained by the adsorption sheet adhere | attached to the workpiece holding table, and a grinding | polishing line is conveyed, a board | substrate with which a grinding | polishing process is complete is removed from an adsorption sheet in the board | substrate peeling area of a polishing line. I need to peel. However, when it tries to peel only by the force with respect to the peeling direction of the conveying apparatus called an upper transfer machine, when a force with respect to the peeling direction is strong with respect to the adsorption holding force of the said adsorption sheet, if a force is applied once, a glass substrate will be Since it may be broken by the stronger adsorption holding force of an adsorption sheet, it is necessary to raise a force gradually, and when it is too weak, it takes a long time for peeling. Therefore, peeling only relied on upper transfer was difficult from a viewpoint of raising throughput.

So, conventionally, like patent document 1, water is supplied to a compressed air supply nozzle to the edge part of a glass substrate and the adsorption sheet, the compressed air of the normal 0.3-0.5 MPa pressure which mixed water is injected, and compressed air The end of the glass substrate is separated from the adsorption sheet by the pressure of, and then the compressed air is supplied to the gap between the separated end and the adsorption sheet, and the adsorption force of the adsorption sheet is released by the water mixed in the compressed air. Thereby, the glass substrate was efficiently peeled from the adsorption sheet.

Patent document 1; Japanese Laid-Open Patent Publication 2000-94319

Disclosure of the Invention

Problems to be Solved by the Invention

However, in the peeling apparatus of patent document 1, although compressed air exhibits high peeling ability in the vicinity of a nozzle, for example, when it falls 500 mm or more from a nozzle, there exists a problem that peeling ability falls because compressed air disperse | distributes. Therefore, even if it arrange | positions a nozzle along the opposing edge part of a glass substrate, there existed a fault that a sufficient peeling effect was not acquired in the large glass substrate whose plate | board width exceeds 1000 mm. On the other hand, in recent years, with the large screen of a display, manufacture of the large sized board | substrate with one side exceeding 1500 mm is calculated | required. Moreover, compressed air has the problem of the noise with open air | atmosphere, and there existed a desire to reduce noise from the point of work environment improvement.

This invention is made | formed in view of such a situation, and an object of this invention is to provide the peeling method and peeling apparatus of a glass substrate which can peel off a glass substrate which has been polished from an adsorption sheet efficiently and stably.

Means to solve the problem

MEANS TO SOLVE THE PROBLEM In order to achieve the said objective, in the peeling method of the plate-shaped object which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, the said plate-shaped body adsorbed-held by the said adsorption sheet, The plate-like body is separated from the suction sheet by holding a plurality of adsorption pads on opposite sides and ejecting the high-pressure water from the high-pressure water supply nozzle toward the boundary between the plate-like body and the adsorption sheet, and separating the plate-like edge from the adsorption sheet. The high pressure water is further supplied to the gap between the edge portion and the adsorption sheet to release the platelet body against the adsorption sheet while moving the adsorption pad in the peeling direction, thereby causing the platelet body to be peeled off from the adsorption sheet. It provides a peeling method (henceforth a peeling method of this invention) of the plate-shaped body characterized by the above-mentioned. do.

Moreover, in order to achieve the said objective, in the peeling apparatus of the plate-shaped object which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, it adsorb | sucks the said plate-shaped object adsorbed and held by the said adsorption sheet. A plurality of adsorption pads held from the surface opposite to the sheet, a high pressure water supply nozzle for separating the plate-shaped edge from the adsorption sheet by ejecting the high pressure water toward the boundary between the plate-like body and the adsorption sheet, and the spaced plate And a pad moving means for moving the suction pad in the peeling direction while supplying the high pressure water to the gap between the upper body edge portion and the suction sheet to release adsorption of the plate body against the suction sheet. The peeling apparatus (henceforth a peeling apparatus of this invention) of a plate-shaped object is provided.

According to the present invention, the peeling effect can be obtained even at a position far from the nozzle because the plate peeling is performed by the high pressure water which is difficult to disperse even if it is far away, instead of the compressed air which is dispersed far away from the air nozzle. Therefore, even a large glass substrate, a glass substrate can be peeled efficiently and stably from an adsorption sheet. Moreover, as a medium which peels a glass substrate, since it changed from compressed air to high pressure water, the noise by the air opening of compressed air can be reduced, and a working environment is improved. Moreover, it is preferable that high pressure water does not contain air other than unavoidable air.

In the peeling method of this invention, in order to achieve the said objective, in the peeling method of the plate-shaped object which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, it is directed toward the boundary part of the said plate-shaped object and the said adsorption sheet. By blowing compressed air from the compressed air supply nozzle, at least a part of the edge of the plate body is separated from the adsorption sheet, and water is supplied from the water supply nozzle to the gap between the spaced apart platen body and the adsorption sheet for adsorption. After releasing the adsorption of the plate-like body to the sheet, it is preferable to carry out the peeling method of the present invention.

Moreover, in order to achieve the said objective, the peeling apparatus of this invention blows compressed air toward the boundary part of the said plate-shaped object and the said adsorption sheet, and at least one edge part of a plate-shaped object in front of the peeling apparatus of this invention. It is preferable to provide a compressed air supply nozzle which separates from the adsorption sheet, and a water supply nozzle which supplies water to the space | interval between the spaced apart said plate-shaped object and the said adsorption sheet, and releases adsorption of a plate-shaped object with respect to an adsorption sheet. .

According to such embodiment of this invention, prior to the said peeling process, compressed air is blown out from a compressed air supply nozzle toward the boundary part of a plate-shaped object and an adsorption sheet, and the edge part of a plate-shaped object is separated from an adsorption sheet in at least one part. Then, water is supplied from the water supply nozzle to the gap between the spaced apart plate and the adsorption sheet, so that the adsorption of the plate body to the adsorption sheet can be partially released. Thereby, while a tact up can be achieved in the said peeling process, a glass substrate can be peeled more stably with respect to an adsorption sheet.

In the peeling method of this invention, it is preferable that the said adsorption pad is arrange | positioned in multiple numbers, and the force which moves a some adsorption pad to a peeling direction is time-controlled for every adsorption pad by a pad moving means.

It is preferable that the peeling apparatus of this invention is equipped with the said pad to which the said adsorption pad is arrange | positioned, and the pad moving means which controls the force which moves a some adsorption pad in a peeling direction for every adsorption pad for time.

According to the said pad moving means of this invention, when adsorb | sucking and holding a glass substrate with a some adsorption pad, rather than moving these adsorption pads in the peeling direction all at once, it is a plurality so that it may move to the peeling direction sequentially from the peeled point. The force for moving in the peeling direction of the suction pad can be controlled for each suction pad by the pad moving means. Thereby, a glass substrate can be peeled efficiently and stably from an adsorption sheet.

According to the peeling method of the present invention and the peeling apparatus of the present invention, first, the pad moving unit moves the suction pad for holding and holding the corner portion of the plate-like body in the peeling direction, and then adsorbs and holds the edge of the plate-shaped body. The time control of the force for moving the plurality of adsorption pads in the peeling direction is performed for each of the adsorption pads so as to move the adsorption pads in the peeling direction, and then move the adsorption pads that adsorb and hold the central portion of the plate-like body in the peeling direction, It is preferable to remove the plate-like body from the adsorption sheet in order from the end of the plate-like body toward the center part.

In the present invention, the pad moving means first moves the adsorption pad that adsorbs and holds the corner portion of the plate-like body in the peeling direction, and then moves the adsorption pad that adsorbs and holds the edge of the plate-shaped body in the peeling direction. The time control of the force for moving the plurality of adsorption pads in the peeling direction is performed for each of the adsorption pads so as to move the adsorption pads which hold and hold the center portion of the plate body in the peeling direction. Since it was made to separate from an adsorption sheet in order, the glass substrate can be peeled more efficiently and stably with respect to an adsorption sheet.

Effects of the Invention

According to the peeling method of the plate-shaped object concerning this invention, and its apparatus, since peeling is performed by the high pressure water which has little pressure loss in air instead of the compressed air which has a high pressure loss in air, peeling effect is performed even in the position far from a nozzle. You can get it. Therefore, the processed glass substrate can be peeled off efficiently and stably from an adsorption sheet.

Moreover, according to this invention, prior to this peeling process, compressed air is blown out from a compressed air supply nozzle toward the boundary part of a plate-shaped object and an adsorption sheet, and at least one edge part of a plate-shaped object is separated from an adsorption sheet, The compressed air in which water is mixed is blown into the gap between the spaced apart platen and the adsorption sheet, and the adsorption of the platen body to the adsorption sheet is partially released. Thus, a tact up can be achieved in the peeling step. In addition, the glass substrate can be peeled more efficiently and stably with respect to the adsorption sheet.

According to the present invention, a plurality of adsorption pads are arranged, and a plurality of high pressure water supply nozzles are arranged along the edge portions of two opposite sides of the plate body, and the pad moving means first adsorbs and holds the edge portions of the plate body. The suction pad to be moved in the peeling direction, and then, the suction pad holding and adsorbing the edge portions of the two opposite sides of the plate-like body is moved in the peeling direction, and then the suction pad holding and adsorbing and holding the central portion of the plate-shaped body in the peeling direction. In order to move, the time control of the force which moves a some adsorption pad in a peeling direction was performed for every adsorption pad, and the said plate-shaped object was separated from an adsorption sheet in order toward the center part at the edge part of the two opposite sides of a plate-shaped object in order. The glass substrate can be peeled more efficiently and stably with respect to the adsorption sheet.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the whole structure of the glass substrate peeling apparatus of preferable embodiment of this invention.

FIG. 2 is an enlarged view of a main part schematically showing a rising operation of the suction pad. FIG.

It is explanatory drawing which showed the point which peeled by the upward movement of an adsorption pad by oblique line.

4 is a block diagram showing a control system of a suction pad.

Explanation of the sign

One … Corner part 2. Edge

3…. Part 4 located inward. Center

10... Glass substrate peeling apparatus 12. Adsorption pad

14. Glass substrate transfer device 16. High pressure water supply nozzle

18. High pressure water supply 20. Walkway holding table

22. Adsorption sheet 24... Fre peeling device

26. Pre-peeling area 28. Exfoliation area

30. High pressure water 32. A temporary tank

34. Water 36. High pressure water pump

38. Header tube 40... Boundary

42. Frame 44... guide

46. Air cylinder 48.. piston

50…. Pad A group 52. Pad B group

54. Pad C group 56. Pad D group

58, 60, 62, 64... Solenoid valve 66. Control

68, 70, 72, 74... Regulator 76... Air pump

78. Valve 80.. Electromagnetic Regulator

82... Vacuum pump 84. Compressed air supply nozzle

Implement the invention  Best form for

EMBODIMENT OF THE INVENTION Hereinafter, according to an accompanying drawing, preferable embodiment (henceforth this example) of the peeling method of the plate-shaped object which concerns on this invention, and its apparatus is demonstrated in detail.

1: is a perspective view which showed the whole structure of the glass substrate peeling apparatus 10 of this example. The glass substrate peeling apparatus 10 is an apparatus which inlines the continuous grinding | polishing apparatus (not shown) and glass substrate cleaning apparatus (not shown) of glass substrate G, and is equipped with many adsorption pads 12, 12 ... It consists of the high pressure water supply apparatuses 18 and 18 provided with the one glass substrate transfer apparatus 14 and many high pressure water supply nozzles 16 and 16. This glass substrate peeling apparatus 10 is arrange | positioned at the exit of the said continuous polishing apparatus, and the glass substrate transfer apparatus 14 can convey the peeled glass substrate G to the said glass substrate washing apparatus.

In addition, the glass substrate peeling apparatus 10 of this example makes the apparatus which peels the glass substrate G of thickness 0.5-1.1mm used for a liquid crystal display from the adsorption sheet 22 of the workpiece holding table 20, It is not limited to this, and if it is an apparatus which peels the plate-shaped object adsorbed-held by the adsorption sheet from an adsorption sheet, it is applicable. Moreover, although the glass substrate G of embodiment is a large size board | substrate of 1500 * 1800 mm, for example, size is not limited to this, The further size or width may be 1000 mm or less. However, the glass substrate peeling apparatus 10 of embodiment which produces | generates a peeling effect by the high pressure water mentioned later is suitable for peeling of the glass substrate of width 1000mm or more which is difficult to achieve stable peeling by compressed air.

First, the flow of the glass substrate G in a continuous polishing line is demonstrated. The glass substrate G polished by the said continuous polishing apparatus is the exit of a grinding | polishing apparatus in the state which carried out the vacuum suction holding to the adsorption sheet (for example, porous urethane sheet) 22 adhere | attached to the workpiece | work holding table 20. It is carried out one by one or plural pieces from. And the glass substrate G passes through the pre peeling area 26 by the pre peeling apparatuses 24 and 24 arrange | positioned upstream of the glass substrate peeling apparatus 10, and the glass substrate peeling apparatus 10 It is conveyed to the peeling area 28. The glass substrate G conveyed to the peeling area 28 is adsorbed by the adsorption pads 12, 12 ... of the glass substrate transfer apparatus 14, and is peeled off from the adsorption sheet 22, and then adsorption pads 12, 12 …) Is supplied to the mounting table of the said board | substrate cleaning apparatus by the glass substrate transfer apparatus 14 in the state hold | maintained by adsorption | suction. And after glass substrate G is wash | cleaned by the said washing | cleaning apparatus, it is conveyed to the next process not shown.

The high pressure water supply devices 18 and 18 are disposed at two opposite sides of the glass substrate G conveyed to the peeling area 28, and the high pressure water supply nozzles 16 and 16 of the respective devices 18 and 18. ...) These are arranged at predetermined intervals along the boundary between the edge and the suction pad.

As shown in FIG. 2A, the high pressure water 30 injected from the high pressure water supply nozzles 16, 16... Toward the edge of the glass substrate G is water 34 stored in the temporary storage tank 32. Is generated by sucking and feeding the high pressure water pump (36). This high pressure water 30 is sprayed with the pressure of 0.1-0.3 Mpa normally from the each high pressure water supply nozzle 16, 16 ... via the header tube 38 toward the edge part of glass substrate G. As shown in FIG.

The high-pressure water supply nozzles 16, 16..., For example, in the case of a rectangular glass substrate G having a size of 1500 mm × 1800 mm, are arranged in plural at a pitch of 100 to 150 mm along two opposite sides thereof. Moreover, the high pressure water supply nozzles 16, 16... Are rocked in the horizontal direction along the edge of the glass substrate G by a horizontal swing mechanism (not shown).

The injection angle and the injection position of the high pressure water 30 by the high pressure water supply nozzles 16, 16... Are very important, and the injection angle at the start of peeling is the pressure of the high pressure water 30 at the end of the glass substrate G. And it is preferable to set in the range of 0-40 degree with respect to the horizontal glass substrate G so that it may act effectively on the boundary part 40 of the adsorption sheet 22, Preferably it is about 30 degree | times. Furthermore, as the vertical tilt mechanism is formed in the high pressure water supply nozzles 16 and 16, and the glass substrate G is peeled from the adsorption sheet 22 during the injection of the high pressure water 30, The inclination angle of the high pressure water supply nozzle 16 (the injection angle of the high pressure water) may be further adjusted so that the high pressure water 30 reaches the adhesion boundary between the glass substrate G and the adsorption sheet 22.

In addition, the injection position at the beginning of a start is not limited to the edge part 40 of the glass substrate and the adsorption sheet, You may set so that it may aim at the adsorption sheet 22 just before it. In addition, the high-pressure water supply nozzle 16 is rocked in the horizontal direction by the horizontal rocking mechanism, so that the high-pressure water 30 is injected to the entirety of the boundary portion 40, so that the edge portion of the glass substrate G can be peeled evenly. Can be. In addition, the several high pressure water supply nozzles 16, 16 ... arrange | positioned along the two opposite sides of the glass substrate G raise the adsorption pad 12 mentioned later that spraying the high pressure water 30 simultaneously. It is preferable from the viewpoint of time management (control).

As shown in FIG. 1, a plurality of suction pads 12, 12... Are arranged above the glass substrate G. As shown in FIG. Although these adsorption pads 12 and 12 are arrange | positioned at the frame 42 of the glass substrate transfer apparatus 14 in a checkerboard graduation shape, arrangement | positioning may not be an equal pitch. The frame 42 moves downward along the guides 44, 44... At the time of peeling of the glass substrate G, and the suction pads 12, 12... Are on the surface of the glass substrate G (adsorption sheet 22. The lowering movement is stopped by a lifting device (not shown) at the timing just before contacting the surface).

Regarding the size of the adsorption pad 12, if the size is small, the holding force of the glass substrate G is insufficient, and the number of the adsorption pads 12, 12 ... increases, which is uneconomical. Moreover, when the size of the adsorption pad 12 is too big | large, since the deformation | transformation of the glass substrate G of a adsorption center part becomes large by vacuumization, it becomes a cause of glass substrate G damage in some cases. In such circumstances, the appropriate size (for example, φ50 to 80mm) and the number of adsorption pads 12 are selected according to the size and thickness of the glass substrate G and the like.

The suction pads 12, 12... Are connected to the pistons 48 of the independent air cylinders 46, respectively, and the suction pads 12 are moved up and down by the expansion and contraction operation of the pistons 48. By the lowering operation of the adsorption pad 12, the adsorption pad 12 is pressed against the glass substrate G and abuts, the glass substrate G is adsorbed onto the adsorption pad 12, and the ascending operation of the adsorption pad 12. The glass substrate G is peeled from the adsorption sheet 22 by this.

By the way, the raising operation of the adsorption pads 12, 12 ... does not raise the adsorption pads 12, 12 ... of the whole glass substrate G all at once, but it moves toward the center from the edge part of the glass substrate G. It is in turn controlled to rise.

2 (A) to 2 (C) are enlarged views of principal parts schematically showing the ascending operation of the adsorption pads 12 and 12, and FIGS. 3A to 3D are adsorption pads 12 and 12. 4 is a block diagram showing a control system of the suction pad 12. FIG. 2 to 4, the pad A group 50 and the pad A group 50 in FIG. 3 are provided with four adsorption pads 12, 12..., Which separate four corner portions of the glass substrate G from each other. The adsorption pads 12, 12... Of the first row from the top and the first row from the bottom except the pad B group 52, the adsorption pads 12, 12 ... 54), the adsorption pads 12, 12 ... on the third row from the top and the third row from the bottom are respectively referred to as pad D group 56 for convenience.

The solenoid valve 58 for every air cylinder 46, 46 ... of the pad A group 50-D group 56 like FIG. 4 so that these pad A group 50-D group 56 may operate independently, respectively. , 60, 62, 64 are formed, and the opening / closing timing of these solenoid valves 58, 60, 62, 64 is time-controlled by the controller (pad moving means) 66. That is, it is controlled so that the pad A group 50-D group 56 may move up at predetermined time intervals from the point which removed the adsorption force by the high pressure water 30 in order. Thereby, breakage of the glass substrate G by forcibly raising the point where adsorption force remain | survives can be prevented.

The air cylinders 46, 46... Of the pads A group 50 to D group 56 are interposed between the solenoid valves 58, 60, 62, and 64 and the electromagnetic regulators 68, 70, 72, and 74. The air regulators 76 are connected to the air pump 76, and these electric regulators 68, 70, 72, and 74 are controlled by the controller 66, respectively. That is, the force which raises the suction pad 12 by controlling the electric regulators 68, 70, 72, 74 by the control part 66 gradually, and gradually increasing the air quantity supplied to the air cylinders 46, 46 ... Can be gradually increased. By performing such a force control, the damage problem of the glass substrate G resulting from raising the force which rises forcibly from the beginning can be avoided, and the required time required for peeling can be shortened to the minimum.

On the other hand, the suction pads 12, 12... Are connected to the vacuum pump 82 via the valve 78 and the electric regulator 80 controlled by the control unit 66. Control of the air pressure of the suction pad 12 is performed by the electromagnetic regulator 80. The rising timing and the rising force of the suction pad 12 can be set by the operator to an arbitrary value by operating a switch (not shown) such as a touch panel formed on the operation panel of the control unit 66.

Next, the effect | action of the glass substrate peeling apparatus 10 comprised as mentioned above is demonstrated.

When the glass substrate G adsorbed by the adsorption sheet 22 is conveyed to the peeling area 28 and stopped, the frame 42 of the glass substrate transfer apparatus 14 will move down, and adsorption pads 12, 12 ... The downward movement stops at the timing just before contacting the surface of the glass substrate G. Subsequently, the piston 48 of the air cylinder 46 is extended, the suction pads 12, 12... Are moved downward, and are pressed against the glass substrate G to abut. And the air pressure of the suction pads 12, 12 ... is controlled by the electro-pneumatic regulator 80, and the air pressure of the suction pads 12, 12 ... is raised to the said set pressure over a some time. Thereby, all the adsorption pads 12, 12 ... are attracted to the glass substrate G. As shown in FIG.

Then, the high pressure water 30 is sprayed (refer FIG. 2 (A)) from the all high pressure water supply nozzles 16, 16 ... toward the two sides which the glass substrate G opposes, and the high pressure water 30 Pressure separates the edges of the two sides. And the control part 66 controls the solenoid valve 58 of FIG. 4, and peels the pad A group 50 which adsorbs-holds the edge part 1 of glass substrate G like FIG. 2 (B). Direction is moved up, and the edge part 1 of the glass substrate G is separated from the adsorption sheet 22 (refer FIG. 3 (A)).

Next, the control part 66 opens-controls the solenoid valve 60 of FIG. 4, and peels the pad B group 52 which adsorbs-holds the edge part 2 of glass substrate G like FIG. 2 (C). Direction is moved up, and the edge part 2 of the glass substrate G is separated from the adsorption sheet 22 (refer FIG. 3 (B)).

Subsequently, the control part 66 opens-controls the solenoid valve 62 of FIG. 4, and moves the pad C group 54 up and down in the peeling direction, and is located inside the edge part 2 of the glass substrate G inside. The part 3 is peeled from the adsorption sheet 22 (refer FIG. 3 (C)).

And finally, the control part 66 opens-controls the solenoid valve 64 of FIG. 4, and raises and moves the pad D group 56 to a peeling direction, and moves the center part 4 of the glass substrate G to an adsorption sheet ( 22) (see FIG. 3 (D)). As a result, the glass substrate G is completely peeled off from the adsorption sheet 22.

Thus, according to the glass substrate peeling apparatus 10 of this example, since peeling of plate is performed by the high pressure water 30 which is hard to be disperse | distributed even if it is far apart, instead of the compressed air which disperse | distributes when it is far from a nozzle, peeling also in the position far from a nozzle The effect can be fully obtained.

Therefore, even if it is a large glass substrate G, glass substrate G can be peeled efficiently and stably from the adsorption sheet 22. FIG. Moreover, as a medium which peels glass substrate G, since it changed from compressed air to high pressure water, the noise by air | atmosphere opening of compressed air can be reduced, and a working environment is improved. Specifically, in the peeling of the plate by compressed air, the noise level due to the air opening is 90 dB or more, and it is treated as a workplace where earplugs should be used in the Labor Standards Act. do.

Moreover, according to the glass substrate peeling apparatus 10 of this example, time control of the force which moves the pad A group 50-D group 56 to a peeling direction for every pad A group 50-D group 56 is carried out. The glass substrate G is separated from the adsorption sheet 22 in order from the edge portion 1 of the glass substrate G toward the end portion 2 and from the end portion 2 toward the center portion 4. Therefore, the glass substrate G can be peeled more efficiently and stably with respect to the adsorption sheet 22.

In addition, the upward movement start timing of the adsorption pad 12 is not limited to control by time management, In the upward movement of the pad group of the previous group, the point of the glass substrate G adsorbed to the pad group is completely You may provide the sensor which detects whether it peeled and raises the next pad group when this sensor detects peeling.

By the way, in the glass substrate peeling apparatus 10 of this example, the pre peeling area 26 by the pre peeling apparatuses 24 and 24 is formed in the upstream side of the peeling area 28. The pre-peeling apparatus 24 supplies compressed air supply nozzles 84, 84... To supply a plurality of compressed air and water supply nozzles for supplying water to the tip of the compressed air supply nozzle 84 to mix the water with the compressed air. Compressed air supply nozzles 84, 84... Are compressed in which water is mixed toward the boundary portion 40 of the glass substrate G and the adsorption sheet 22 similarly to the high pressure water supply nozzle 16. Blow out the air. The water supply nozzle may have a double pipe structure with the compressed air supply nozzles 84, 84... And may be formed independently of the distal end of the compressed air supply nozzles 84, 84. Moreover, the compressed air supply nozzles 84, 84 ... upstream of the pre-peeling apparatus 24 may make only compressed air blow off.

Therefore, the glass substrate G conveyed to the pre peeling area 26 is the edge of the two sides which oppose the glass substrate G by the compressed air which the water from the compressed air supply nozzles 84, 84 ... mix | blended. While separating the parts 2 and 2 from the adsorption sheet 22, the adsorption of the edges 2 and 2 of the glass substrate G to the adsorption sheet 22 is caused by the water mixed in the compressed air. Is released. Then, glass substrate G is conveyed to the peeling area 28 and plate peeling mentioned above is performed.

In this way, prior to the peeling process in the peeling area 28, adsorption | suction of the edge part 2, 2 of the glass substrate G with respect to the adsorption sheet 22 is previously released, and the peeling area 28 is carried out. In the peeling process in, it is possible to further tact up, and the glass substrate G can be peeled more efficiently and stably with respect to the adsorption sheet.

This invention is especially preferable for peeling a large plate-shaped object of the same thickness as the glass substrate for FPD from an adsorption sheet.

In addition, all the content of the JP Patent application 2006-004053, a claim, drawing, and the abstract for which it applied on January 11, 2006 is referred here, and it takes in as an indication of the specification of this invention.

Claims (8)

In the peeling method of the plate-shaped body which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, The plate-shaped object adsorbed and held on the adsorption sheet is held by a plurality of adsorption pads from a surface opposite to the adsorption sheet, By ejecting the high pressure water from the high pressure water supply nozzle toward the boundary between the plate and the adsorption sheet, the edge of the plate is separated from the adsorption sheet, The plate member is moved by moving the adsorption pad in the peeling direction while supplying the high pressure water to the gap between the separated plate member edge portion and the adsorption sheet to release adsorption of the plate member to the adsorption sheet. It peels from an adsorption sheet, The peeling method of the plate-shaped body characterized by the above-mentioned. In the peeling method of the plate-shaped body which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, By blowing compressed air from the compressed air supply nozzle toward the boundary between the plate and the suction sheet, at least a portion of the edge of the plate is separated from the suction sheet and between the plate and the suction sheet. The peeling method of the plate-shaped object characterized by performing the peeling method of Claim 1, after supplying water from a water supply nozzle to a clearance gap, and releasing the adsorption of a plate-shaped object to an adsorption sheet. The method according to claim 1 or 2, A plurality of said adsorption pads are arrange | positioned, and the force which moves a some adsorption pad to a peeling direction is time-controlled for every adsorption pad by a pad moving means, The plate-shaped peeling method of Claim 2 characterized by the above-mentioned. The method of claim 3, wherein The adsorption pad which adsorbs-holds the edge part of the said plate-shaped object is moved to a peeling direction, Then, the adsorption pad which adsorbs and holds the edge part of a plate-shaped object is moved to a peeling direction, and then the adsorption pad which adsorbs and holds the center part of a plate-shaped body is carried out. The time control of the force for moving the plurality of adsorption pads in the peeling direction is performed for each of the adsorption pads so as to move in the peeling direction, and the plate-shaped body is separated from the adsorption sheet in order from the end of the plate-shaped body toward the center portion. The peeling method of the plate-shaped object to make. In the peeling apparatus of the plate-shaped body which peels the plate-shaped object adsorbed-held by the adsorption sheet from the said adsorption sheet, A plurality of adsorption pads for holding the plate-shaped object adsorbed and held on the adsorption sheet from a surface opposite to the adsorption sheet; A high-pressure water supply nozzle which separates the plate-shaped edge from the adsorption sheet by blowing high pressure water toward the boundary between the plate-like edge and the suction sheet; And a pad moving means for moving the suction pad in a peeling direction while supplying the high pressure water to the gap between the separated plate and the suction sheet to release adsorption of the plate against the suction sheet. The peeling apparatus of the plate-shaped object made into. In front of the peeling apparatus of the plate-shaped body of claim 5, Compressed air supply nozzle which blows compressed air toward the boundary part of a said plate-shaped object and the said adsorption sheet, and separates the edge part of a plate-shaped object from an adsorption sheet in at least one part, And a water supply nozzle for supplying water to the gap between the separated platen body and the adsorption sheet to release adsorption of the platen body to the adsorption sheet. The method according to claim 5 or 6, A plurality of said adsorption pads are arrange | positioned, and it provided with the pad movement means which controls the force which moves a several adsorption pad in a peeling direction for every adsorption pad for time, The plate-shaped peeling apparatus characterized by the above-mentioned. The method of claim 7, wherein The pad shifting means moves the adsorption pad for adsorbing and holding the corner portion of the plate-like body in the peeling direction, and then moves the adsorption pad for adsorption-holding the edge of the plate-shaped body in the peeling direction, and then the center portion of the plate-shaped body. An adsorption pad for holding adsorption is moved in a peeling direction, characterized in that the plate-like peeling device.

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