KR20070073373A - A grinding - table - Google Patents

Abstract

A grinding table is provided to quickly discharge pressure applied to a flat display panel disposed on the grinding table, by converting the vertical flow of air applied from the center of the grinding table into horizontal flow. A grinding table(100) includes an adsorption table(110) and an adsorption bolt(120). The adsorption table has an air flow channel for forming a vacuum. The adsorption bolt is coupled onto the center of the adsorption table, and has an air flow hole communicated to the air flow channel. The air flow channel includes a first flow channel(112) extended into a cross shape from the center of the adsorption table; and a second flow channel(114) which is communicated to the first flow channel and formed along an edge of the adsorption table.

Description

A grinding table using the adsorption method of flat panel display panel polishing machine {A grinding-table}

1 is a view showing a polishing table of a polishing apparatus according to the prior art,

2 is a perspective view showing a polishing table according to the present invention,

3 and 4 are views showing another embodiment of the first flow path shown in FIG.

5 is a cross-sectional view taken along the line A-A of FIG. 2, and

Figure 6 is an enlarged perspective view of the adsorption bolt shown in FIG.

<Description of the symbols for the main parts of the drawings>

100: polishing table 110: adsorption table

112: first flow path 114: second flow path

120: adsorption bolt 122: body portion

124: head 126: vertical flow ball

128: horizontal flow ball

The present invention relates to a table provided for polishing a flat panel display panel, and more particularly, the air flowing in a vertical direction from the bottom of the center portion of the table can flow along the half-open flow path on the surface of the polishing table. By changing the flow of air from vertical to horizontal so that the pressure acting on the flat panel display panel placed on the polishing table is discharged quickly.

In general, as much attention has been focused on the enlargement and high quality of the display device as a transmission medium of image information, various flat panel display devices have been developed and disseminated in place of the CRT (Cathode Ray Tube) which has been used until now. It is well known that one of the devices, the liquid crystal display, has been developed to a level higher than the CRT in terms of color of image quality.

The general manufacturing process of the general TFT-LCD panel (Thin Film Transistor Liquid Crystal Display Panel) constituting the liquid crystal display device as described above is as follows. First, as an overview, one pixel (comprising three subpixels R, G, and B) of a TFT-LCD panel is as fine as about 0.3 mm in width. Of course, the TFT (Thin Film Transistor) that fits in it is smaller. Furthermore, to reach a resolution of 1600 x 1200, the number of pixels is 1.19 million, which requires 3 times (R, G, B), considering each sub-pixel, and requires 576 million TFTs. Therefore, a semiconductor level process is required as a process that requires high precision of the entire process itself.

Meanwhile, the manufacturing process of the TFT-LCD panel as described above is largely divided into a TFT process, a color filter (CF) process, a cell process, and a module process, and has two glasses that have undergone a TFT process and a CF process. One panel is made through the cell process, and the panel processed through the cell process is made through the module process, and a TFT-LCD panel that is actually used for a monitor or a TV is made.

First, the TFT (Thin Film Trasistor) process is a process of forming a basic electrode, which makes an electrode of each cell as the most basic and essential process. The process sequence includes five steps of gate electrode generation, insulating film and semiconductor film generation, data electrode generation, protective film generation, and pixel electrode generation, but at least one pattern process is required for each step. This pattern process can be called the core of the TFT-LCD panel manufacturing process. Similar pattern processes are required for the CF process as well as the TFT process.

The pattern process as described above is a very precise and complicated process by itself. At least this process is performed several times to make a single TFT-LCD panel. Of course, the same process is not used then, but the schematic process is similar. This pattern process consists of deposition, cleaning, photoresist (PR) coating, exposure, development, etching (PR) process, PR stripping (Strip process), and inspection process. This is necessary.

TFT-LCD, on the other hand, does not emit light on its own like PDP or OLED (organic EL), but controls the brightness of light by controlling the arrangement of liquid crystals in each cell for constant light from the backlight. Since the backlight itself is white light, CF (Color Filter) plays an important role in changing the arrangement of liquid crystals to control the amount of light, but to make R, G, and B to realize color. This CF is located on the top of the TFT-LCD panel and is made through a process separate from the TFT process. The CF process also requires the pattern process described above.

The above-described CF (Color Filter) process requires a BM (Black Matrix) process (deposition, cleaning, PR coating, exposure, development, etching, and peeling pattern process), and pixel-by-pixel process (this pattern process was performed as described above. It is a slightly different process from the process of evaporation and cleaning, and it is possible to apply the photosensitive material with color and go through the process of exposure and development) and ITO process (Indum Tin Oxide: good permeability and conductivity, chemical and thermal stability Excellent transparent electrode material). In addition, some additional processes may be added depending on the type of panel (VA, IPS, TN, etc.).

In addition, the cell process is a process of combining and cutting two glasses made in the CF process and the TFT process into one, and cleaning the CF, TFT, alignment printing, rubbing process, spacer scattering, and bonding. (TFT substrate and CF substrate are precisely bonded), cutting (the bonded substrate is cut and separated into respective panels), liquid crystal injection, and final inspection.

The module process of the TFT-LCD panel manufacturing process as described above is a final step for attaching a polarizing plate, a PCB, a backlight unit, etc. to a panel made of a cell process as a final process for making a finished product panel. , TAB attachment, autoclave, PCB attachment, BLU (Back Light Unit) assembly, and inspection.

On the other hand, after precisely bonding the TFT substrate and the CF substrate in the cell process of the TFT-LCD panel manufacturing process as described above, it is cut from the original plate to the LCD panel of a certain standard, from the original LCD panel of a certain standard When cutting with a grind evenly polished the side by removing protrusions or microcracks generated on the edge (edge) surface that is the cutting surface. At this time, the LCD panel is fixed horizontally through the vacuum suction of the LCD panel ground polishing work during the polishing operation of the LCD panel.

Such polishing is not limited to the production of the LCD panel as described above, but is commonly used for the production of all flat panel display panels.

Preferably, the polishing table forms an air tunnel 2 for vacuum formation on the upper surface of the polishing table 1 as shown in FIG. 1, and an air flow hole perpendicular to the inside of the polishing table 1 is formed in the center portion of the polishing table 1. 4) The adsorption bolts 3 formed therein are combined to set the flat panel display panel 5 on the upper side of the polishing table 1 to suck or supply air from the adsorption bolts 3, thereby providing a flat panel display panel 5 ) Is adsorbed or discharged.

However, in the current society, the size of flat panel display panels is gradually increasing, and in the process of fixing them to the polishing table by air adsorption method during the polishing process, the flow path of air is as long as the size of the larger polishing table. There was a problem that a time delay occurs.

In addition, when air is discharged from the lower part of the polishing table near the center of the polishing table and the flat panel display panel in which the air is adsorbed on the upper surface of the polishing table is discharged as air, polishing is performed in a manner in which the air transfer direction is vertical. By showing the concentrated pressure distribution near the center of the flat panel display panel before showing even distribution of air even near the edge of the table, there was a fear that the flat panel panel may be warped and the flat panel panel could be damaged.

In addition, since the size of the polishing table increases as the size of the flat panel display panel increases, the weight of the polishing table is increased, thereby increasing the manufacturing cost. Alternatively, when the polishing table is formed thin in order to reduce the weight, both sides of the polishing table extend in the longitudinal direction, and there is a fear of damage to the flat panel display panel. There was a fear that the precision would drop.

The present invention has been made to solve the above problems, the vertical flow of air so that the air flowing in the vertical direction from the bottom of the center portion of the polishing table to flow along the flow path in the half-open state on the surface of the polishing table It is to provide a polishing table using the adsorption method of the flat panel display panel polishing apparatus for quickly discharging the pressure acting on the flat panel display panel placed on the polishing table by changing from the horizontal direction.

The present invention to achieve the above object,

A device for polishing a flat panel display panel, the suction table having an air flow path for forming a vacuum on the upper surface thereof, and a suction bolt having a vertical air flow hole coupled to a central portion thereof to communicate with the air flow path. In a polishing table comprising:

The flow path comprises a first flow path extending in a crisscross or radial direction from the center of the adsorption table, and a second flow path formed along the edge of the adsorption table while communicating with the first flow path. Provided is a polishing table using the adsorption method of a flat panel display panel polishing apparatus.

Here, it may be desirable to further form a horizontal flow hole in the head of the suction bolt so as to be in communication with the vertical flow hole so as to extend in the traveling direction of the first flow path.

In addition, it is preferable that the first flow path has a relatively narrow width while being deeply dug and the second flow path has a shallow width and a relatively wide width so that adsorption and discharge can be performed more quickly.

Hereinafter, a polishing table using the adsorption method of the flat panel display panel polishing apparatus according to the preferred embodiment of the present invention will be described with reference to the accompanying drawings.

Figure 2 is a perspective view showing a polishing table according to the present invention, Figures 3 and 4 is a view showing another embodiment of the first flow path shown in Figure 2, Figure 5 is a view along the line AA of Figure 2 6 is a perspective view showing an enlarged suction bolt shown in FIG.

Referring to FIG. 2, the polishing table 100 according to the present invention has a configuration including a suction table 110 and a suction bolt 120.

First, the size of the adsorption table 110 is determined in accordance with the size of the flat panel display panel to be manufactured to the place where the flat panel display panel (not shown). In the center of the suction table 110, a through hole (not shown) to which the suction bolt 120 is coupled is formed. The suction table 110 has a first flow path 112 formed in all directions around the through hole, and the second flow path communicates with the first flow path 112 at the edge of the suction table 110. 114 is formed.

The first flow path 112 is formed on the upper surface of the adsorption table 110, and is preferably formed in a cross shape so as to extend in the middle of the longitudinal direction and the width direction of the adsorption table 110 around the through hole. At this time, the first flow path 112 is formed in a narrow shape while being deeply dug. Alternatively, the first flow path 112 may be formed in the “X” direction around the through hole as shown in FIG. 3, or as shown in FIG. 4 in order to increase the adsorption force, as shown in FIG. 4. Together may be further formed in the "X" direction.

Like the first flow path 112, the second flow path 114 is formed on the upper surface of the adsorption table 110, and is formed along the circumference of the adsorption table 110 to extend in all directions. It is preferable to be formed so as to be in communication with the 112, in which the second flow path 114 is formed in a wide shape while being shallowly recessed.

In other words, when the length of the depression in the downward direction in the first flow path 112 and the second flow path 114 is 'a', and the width length is 'b', the first flow path 112 is a > b, and the second flow path 114 is a <b (see FIG. 5).

Alternatively, the second flow path 114 of the second flow path 114, which is relatively longer in length, may be formed in two or more lines so as to be two or more lines in order to widen the range of adsorption. That is, when the flat panel display panel is placed in the adsorption table 110, it takes this form because it has to pull a lot of force in a relatively larger length than the width direction.

On the other hand, the adsorption table 110 having a large size should be thick in order to prevent sag, at this time, by giving an oblique gradient from the center to the edge side on the lower surface of the adsorption table 110 to prevent sag and light weight It can have a structure that can be made.

Next, the adsorption bolt 120 is coupled to the through-hole formed in the center of the adsorption table 110 as described above, as shown in Figure 6 body 122 and the head 124 is integrally formed It is made of, the body portion 122 is coupled so as to face the lower side of the suction table 110, the head portion 124 protrudes at the tip of the through hole.

An air flow hole for adsorption is formed inside the adsorption bolt 120. The air flow ball includes a vertical flow hole 126 formed perpendicular to the inner axial center of the body portion 122, and a horizontal flow hole 128 formed to be split in four directions of the head 124.

The vertical flow hole 126 is formed to extend from the bottom of the body portion 122 to the head 124, it is connected to a separate air supply / suction device (not shown).

The horizontal flow hole 128 communicates with the vertical flow hole 126 and is formed in a crisscross direction so as to be in the same direction as the first flow path 112 formed in the suction table 110.

Hereinafter, the use state of the polishing table 100 using the adsorption method of the flat panel display panel polishing apparatus formed as described above will be briefly described.

When the flat panel display panel is placed on the top of the suction table 110 in a state in which the suction bolt 120 is coupled to the suction table 110, the lower surface of the flat panel display panel and the upper surface of the suction table 110 contact each other. .

In addition, when the air is sucked in a separate air supply / suction device (not shown) to fix the flat panel display panel for polishing, the vertical flow hole 126 and the horizontal flow hole 128 of the suction bolt 120 are removed. By virtue of evacuating the first flow path 112 and the second flow path 114 of the suction table 110 through this, the flat panel display panel mounted on the suction table 110 is strongly held.

On the contrary, when discharging the flat panel display panel, if air is supplied from the air supply / suction device, the first flow path of the suction table 110 is provided through the vertical flow hole 126 and the horizontal flow hole 128 of the suction bolt 120. Air is blown into the 112 and the second flow path 114 so that the flat panel display panel mounted on the suction table 110 is easily discharged.

At this time, the polishing table 100 according to the present invention will have a structure that can quickly reverse the flow of air in accordance with the groove of the first flow path 112 and the second flow path (114).

That is, when the air is sucked or supplied by the air supply / suction device, since the width is narrow in the first flow path 112, the air flows at a high speed so that the horizontal flow hole of the suction bolt 120 is provided. Despite the distance between the 128 and the second flow path 114, the air flows to the edge of the suction table 110 in a short time.

As described above, in the polishing table according to the present invention, the first flow path and the second flow path formed on the surface of the adsorption table are less expensive to manufacture than the air tunnel structure embedded in the existing polishing table, but the flow path structure is close to the center portion. The flow path near the rim of the polishing table has a shape such that the effect is large on the flow rate required for the discharge, and the flow path near the edge of the polishing table is larger for the discharge and the effect formation required for the adsorption.

Although described above with reference to a preferred embodiment of the present invention, those skilled in the art can be variously modified and changed within the scope of the invention without departing from the spirit and scope of the invention described in the claims You will understand.

Claims (6)

An apparatus for polishing a flat panel display panel, the suction table having an air flow path for forming a vacuum on an upper surface thereof, and an adsorption bolt having a vertical air flow hole coupled to a central portion thereof to communicate with the air flow path. In the polishing table comprising: The flow path comprises a first flow path extending from the center of the adsorption table in a cross direction and a second flow path formed along an edge of the adsorption table while communicating with the first flow path. Polishing table using adsorption method of display panel polishing machine. According to claim 1, The adsorption of the flat display panel polishing apparatus, characterized in that the head portion of the adsorption bolt is further formed in the horizontal flow hole in communication with the vertical flow hole so as to extend in the traveling direction of the first flow path. Polishing table using the method. 2. The polishing table according to claim 1, wherein the first flow path is further formed in the direction of "X" along with a crosswise direction from the center of the suction table. 4. The polishing table according to claim 1 or 3, wherein the first flow path is deeply recessed and has a relatively narrow width. The polishing table according to claim 1, wherein the second flow path is shallow and has a relatively wide width. The polishing table according to claim 1 or 5, wherein both sides of the second flow path in the longitudinal direction are formed in one or more lines.

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