KR102630945B1 - Photosensitive resin composition - Google Patents
Photosensitive resin composition Download PDFInfo
- Publication number
- KR102630945B1 KR102630945B1 KR1020150163547A KR20150163547A KR102630945B1 KR 102630945 B1 KR102630945 B1 KR 102630945B1 KR 1020150163547 A KR1020150163547 A KR 1020150163547A KR 20150163547 A KR20150163547 A KR 20150163547A KR 102630945 B1 KR102630945 B1 KR 102630945B1
- Authority
- KR
- South Korea
- Prior art keywords
- photosensitive resin
- resin composition
- weight
- white
- insulating film
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 50
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 41
- 239000000178 monomer Substances 0.000 claims description 34
- 239000000203 mixture Substances 0.000 claims description 30
- 229920006243 acrylic copolymer Polymers 0.000 claims description 24
- -1 oligomer Substances 0.000 claims description 24
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims description 14
- 239000002904 solvent Substances 0.000 claims description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 9
- 125000000524 functional group Chemical group 0.000 claims description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 5
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 claims description 5
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 3
- 230000000379 polymerizing effect Effects 0.000 claims description 3
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 claims description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 2
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 claims description 2
- 229940018557 citraconic acid Drugs 0.000 claims description 2
- 239000001530 fumaric acid Substances 0.000 claims description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 2
- 239000011976 maleic acid Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 claims description 2
- 229920000728 polyester Polymers 0.000 claims description 2
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 claims description 2
- 150000001735 carboxylic acids Chemical class 0.000 claims 5
- 150000008064 anhydrides Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 61
- 239000000758 substrate Substances 0.000 abstract description 23
- 239000010409 thin film Substances 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 21
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 238000000576 coating method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 238000001723 curing Methods 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 125000005395 methacrylic acid group Chemical group 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- XHZCGLONCCWGHA-UHFFFAOYSA-N ethyl propanoate;propane-1,2-diol Chemical compound CC(O)CO.CCOC(=O)CC XHZCGLONCCWGHA-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- 150000001991 dicarboxylic acids Chemical class 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- QBVBLLGAMALJGB-UHFFFAOYSA-N methyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OC QBVBLLGAMALJGB-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- KIJJAQMJSXOBIE-UHFFFAOYSA-N (2-methylcyclohexyl) 2-methylprop-2-enoate Chemical compound CC1CCCCC1OC(=O)C(C)=C KIJJAQMJSXOBIE-UHFFFAOYSA-N 0.000 description 1
- SSLASPHAKUVIRG-UHFFFAOYSA-N (2-methylcyclohexyl) prop-2-enoate Chemical compound CC1CCCCC1OC(=O)C=C SSLASPHAKUVIRG-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- DBGSRZSKGVSXRK-UHFFFAOYSA-N 1-[2-[5-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-1,3,4-oxadiazol-2-yl]acetyl]-3,6-dihydro-2H-pyridine-4-carboxylic acid Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1=NN=C(O1)CC(=O)N1CCC(=CC1)C(=O)O DBGSRZSKGVSXRK-UHFFFAOYSA-N 0.000 description 1
- PHPRWKJDGHSJMI-UHFFFAOYSA-N 1-adamantyl prop-2-enoate Chemical compound C1C(C2)CC3CC2CC1(OC(=O)C=C)C3 PHPRWKJDGHSJMI-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- FNBHVKBYRFDOJK-UHFFFAOYSA-N 1-butoxypropan-2-yl propanoate Chemical compound CCCCOCC(C)OC(=O)CC FNBHVKBYRFDOJK-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ODDDCGGSPAPBOS-UHFFFAOYSA-N 1-ethoxypropan-2-yl propanoate Chemical compound CCOCC(C)OC(=O)CC ODDDCGGSPAPBOS-UHFFFAOYSA-N 0.000 description 1
- DOVZUKKPYKRVIK-UHFFFAOYSA-N 1-methoxypropan-2-yl propanoate Chemical compound CCC(=O)OC(C)COC DOVZUKKPYKRVIK-UHFFFAOYSA-N 0.000 description 1
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- RVNBCIQRFGXLRD-UHFFFAOYSA-N 1-propoxypropan-2-yl propanoate Chemical compound CCCOCC(C)OC(=O)CC RVNBCIQRFGXLRD-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RVGLEPQPVDUSOJ-UHFFFAOYSA-N 2-Methyl-3-hydroxypropanoate Chemical compound COC(=O)CCO RVGLEPQPVDUSOJ-UHFFFAOYSA-N 0.000 description 1
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 1
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 1
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 1
- IYVJUFDNYUMRAB-UHFFFAOYSA-N 2-butoxyethyl propanoate Chemical compound CCCCOCCOC(=O)CC IYVJUFDNYUMRAB-UHFFFAOYSA-N 0.000 description 1
- LVWGZOPHFJVQGM-UHFFFAOYSA-N 2-butoxypropyl propanoate Chemical compound CCCCOC(C)COC(=O)CC LVWGZOPHFJVQGM-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- XBHQOMRKOUANQQ-UHFFFAOYSA-N 2-ethoxypropanoic acid Chemical compound CCOC(C)C(O)=O XBHQOMRKOUANQQ-UHFFFAOYSA-N 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-N 2-methoxypropanoic acid Chemical compound COC(C)C(O)=O ICPWFHKNYYRBSZ-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- CVEPFOUZABPRMK-UHFFFAOYSA-N 2-methylprop-2-enoic acid;styrene Chemical compound CC(=C)C(O)=O.C=CC1=CC=CC=C1 CVEPFOUZABPRMK-UHFFFAOYSA-N 0.000 description 1
- QMAQLCVJIYANPZ-UHFFFAOYSA-N 2-propoxyethyl acetate Chemical compound CCCOCCOC(C)=O QMAQLCVJIYANPZ-UHFFFAOYSA-N 0.000 description 1
- XYEUJNLLJMOJGY-UHFFFAOYSA-N 3-butoxypropyl acetate Chemical compound CCCCOCCCOC(C)=O XYEUJNLLJMOJGY-UHFFFAOYSA-N 0.000 description 1
- NXBUZZFXMZBGDW-UHFFFAOYSA-N 3-butoxypropyl propanoate Chemical compound CCCCOCCCOC(=O)CC NXBUZZFXMZBGDW-UHFFFAOYSA-N 0.000 description 1
- SIGKFUCVZMLRFI-UHFFFAOYSA-N 3-ethoxypropyl propanoate Chemical compound CCOCCCOC(=O)CC SIGKFUCVZMLRFI-UHFFFAOYSA-N 0.000 description 1
- ALRHLSYJTWAHJZ-UHFFFAOYSA-M 3-hydroxypropionate Chemical compound OCCC([O-])=O ALRHLSYJTWAHJZ-UHFFFAOYSA-M 0.000 description 1
- HYIRRSOMGIRYKU-UHFFFAOYSA-N 3-methoxypropyl propanoate Chemical compound CCC(=O)OCCCOC HYIRRSOMGIRYKU-UHFFFAOYSA-N 0.000 description 1
- YZLDXPLNKWTMOO-UHFFFAOYSA-N 3-propoxypropanoic acid Chemical compound CCCOCCC(O)=O YZLDXPLNKWTMOO-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- ACQVEWFMUBXEMR-UHFFFAOYSA-N 4-bromo-2-fluoro-6-nitrophenol Chemical compound OC1=C(F)C=C(Br)C=C1[N+]([O-])=O ACQVEWFMUBXEMR-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- DCTLJGWMHPGCOS-UHFFFAOYSA-N Osajin Chemical compound C1=2C=CC(C)(C)OC=2C(CC=C(C)C)=C(O)C(C2=O)=C1OC=C2C1=CC=C(O)C=C1 DCTLJGWMHPGCOS-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- HPFVBGJFAYZEBE-XNBTXCQYSA-N [(8r,9s,10r,13s,14s)-10,13-dimethyl-3-oxo-1,2,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl] 3-cyclopentylpropanoate Chemical compound C([C@H]1[C@H]2[C@@H]([C@]3(CCC(=O)C=C3CC2)C)CC[C@@]11C)CC1OC(=O)CCC1CCCC1 HPFVBGJFAYZEBE-XNBTXCQYSA-N 0.000 description 1
- CQHKDHVZYZUZMJ-UHFFFAOYSA-N [2,2-bis(hydroxymethyl)-3-prop-2-enoyloxypropyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(CO)COC(=O)C=C CQHKDHVZYZUZMJ-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- PSSYEWWHQGPWGA-UHFFFAOYSA-N [2-hydroxy-3-[2-hydroxy-3-(2-hydroxy-3-prop-2-enoyloxypropoxy)propoxy]propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(O)COCC(O)COCC(O)COC(=O)C=C PSSYEWWHQGPWGA-UHFFFAOYSA-N 0.000 description 1
- VEBCLRKUSAGCDF-UHFFFAOYSA-N ac1mi23b Chemical compound C1C2C3C(COC(=O)C=C)CCC3C1C(COC(=O)C=C)C2 VEBCLRKUSAGCDF-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 1
- URBZEXMYYYABCQ-UHFFFAOYSA-N butyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCCC URBZEXMYYYABCQ-UHFFFAOYSA-N 0.000 description 1
- IKRARXXOLDCMCX-UHFFFAOYSA-N butyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCCC IKRARXXOLDCMCX-UHFFFAOYSA-N 0.000 description 1
- VUEYQLJAKGLDNR-UHFFFAOYSA-N butyl 2-ethoxyacetate Chemical compound CCCCOC(=O)COCC VUEYQLJAKGLDNR-UHFFFAOYSA-N 0.000 description 1
- FYRUCHOYGVFKLZ-UHFFFAOYSA-N butyl 2-ethoxypropanoate Chemical compound CCCCOC(=O)C(C)OCC FYRUCHOYGVFKLZ-UHFFFAOYSA-N 0.000 description 1
- VFGRALUHHHDIQI-UHFFFAOYSA-N butyl 2-hydroxyacetate Chemical compound CCCCOC(=O)CO VFGRALUHHHDIQI-UHFFFAOYSA-N 0.000 description 1
- IWPATTDMSUYMJV-UHFFFAOYSA-N butyl 2-methoxyacetate Chemical compound CCCCOC(=O)COC IWPATTDMSUYMJV-UHFFFAOYSA-N 0.000 description 1
- JDJWQETUMXXWPD-UHFFFAOYSA-N butyl 2-methoxypropanoate Chemical compound CCCCOC(=O)C(C)OC JDJWQETUMXXWPD-UHFFFAOYSA-N 0.000 description 1
- WVBJXEYRMVIDFD-UHFFFAOYSA-N butyl 2-propoxyacetate Chemical compound CCCCOC(=O)COCCC WVBJXEYRMVIDFD-UHFFFAOYSA-N 0.000 description 1
- BMOACRKLCOIODC-UHFFFAOYSA-N butyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCCC BMOACRKLCOIODC-UHFFFAOYSA-N 0.000 description 1
- MVWVAXBILFBQIZ-UHFFFAOYSA-N butyl 3-ethoxypropanoate Chemical compound CCCCOC(=O)CCOCC MVWVAXBILFBQIZ-UHFFFAOYSA-N 0.000 description 1
- MENWVOUYOZQBDM-UHFFFAOYSA-N butyl 3-hydroxypropanoate Chemical compound CCCCOC(=O)CCO MENWVOUYOZQBDM-UHFFFAOYSA-N 0.000 description 1
- NPCIWFUNUUCNOM-UHFFFAOYSA-N butyl 3-propoxypropanoate Chemical compound CCCCOC(=O)CCOCCC NPCIWFUNUUCNOM-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- AQNSVANSEBPSMK-UHFFFAOYSA-N dicyclopentenyl methacrylate Chemical compound C12CC=CC2C2CC(OC(=O)C(=C)C)C1C2.C12C=CCC2C2CC(OC(=O)C(=C)C)C1C2 AQNSVANSEBPSMK-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical class OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
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- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
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- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
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- YVWPDYFVVMNWDT-UHFFFAOYSA-N methyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OC YVWPDYFVVMNWDT-UHFFFAOYSA-N 0.000 description 1
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- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
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- UUIQMZJEGPQKFD-UHFFFAOYSA-N n-butyric acid methyl ester Natural products CCCC(=O)OC UUIQMZJEGPQKFD-UHFFFAOYSA-N 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- NWAHZAIDMVNENC-UHFFFAOYSA-N octahydro-1h-4,7-methanoinden-5-yl methacrylate Chemical compound C12CCCC2C2CC(OC(=O)C(=C)C)C1C2 NWAHZAIDMVNENC-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- QIWKUEJZZCOPFV-UHFFFAOYSA-N phenyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=CC=CC=C1 QIWKUEJZZCOPFV-UHFFFAOYSA-N 0.000 description 1
- WRAQQYDMVSCOTE-UHFFFAOYSA-N phenyl prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1 WRAQQYDMVSCOTE-UHFFFAOYSA-N 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- ARJOQCYCJMAIFR-UHFFFAOYSA-N prop-2-enoyl prop-2-enoate Chemical compound C=CC(=O)OC(=O)C=C ARJOQCYCJMAIFR-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical compound CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- FKRCODPIKNYEAC-UHFFFAOYSA-N propionic acid ethyl ester Natural products CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- RVUYACAXXOCJAH-UHFFFAOYSA-N propyl ethaneperoxoate Chemical compound CCCOOC(C)=O RVUYACAXXOCJAH-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Materials For Photolithography (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Filters (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Liquid Crystal (AREA)
Abstract
본 발명은 감광성 수지 조성물에 관한 것으로, 구체적으로 컬러필터 온 박막트랜지스터( Color Filter On TFT ( COT )) 또는 컬러필터 온 어레이 (Color Filter on arry ( COA )) 구조의 액정표시장치 제조에서 컬러필터 패턴이 형성된 기판 위에 유기절연막 형성을 위하여 사용하며, 평탄화도가 우수하면서 해상도, 접착성이 우수하며, 휘도 향상에 적합한 감광성 수지 조성물에 관한 것이다.The present invention relates to a photosensitive resin composition, and specifically, to a color filter pattern in the manufacture of a liquid crystal display device with a color filter on thin film transistor (Color Filter On TFT (COT)) or color filter on array (Color Filter on array (COA)) structure. It is used to form an organic insulating film on the formed substrate, and relates to a photosensitive resin composition that has excellent planarization, resolution, and adhesion, and is suitable for improving brightness.
Description
본 발명은 감광성 수지 조성물에 관한 것으로, 구체적으로 컬러필터 온 박막트랜지스터 (Color Filter On TFT (COT)) 구조의 액정표시장치에서 박막트랜지스터와 컬러필터 패턴이 형성된 기판 위에 보호층으로 유기절연막 형성을 위하여 사용하며, 평탄화도가 우수하면서 해상도, 접착성이 우수하며, 휘도 향상에 적합한 감광성 수지 조성물에 관한 것이다.The present invention relates to a photosensitive resin composition, and specifically, to form an organic insulating film as a protective layer on a substrate on which a thin film transistor and a color filter pattern are formed in a liquid crystal display device with a color filter on thin film transistor (Color Filter On TFT (COT)) structure. It relates to a photosensitive resin composition that has excellent flatness, resolution, and adhesion, and is suitable for improving brightness.
최근 액정표시장치용 디스플레이는 휘도를 향상을 위해 많은 노력을 기울이고 있다. 액정표시장치 제작 업체들은 휘도 향상을 위한 방법으로 컬러필터를 박막트랜지스터 어레이 소자와 동일 기판에 형성하는 씨오티(COT) 구조와 적색, 녹색, 청색, 백색의 4가지 컬러필터를 형성하는 화이트(white) 구조의 씨오티(COT) 액정표시장치를 제작하고 있다.Recently, a lot of effort has been put into improving the brightness of liquid crystal displays. Liquid crystal display manufacturers use a COT structure, which forms a color filter on the same substrate as the thin film transistor array element, as a way to improve brightness, and a white structure, which forms four color filters: red, green, blue, and white. ) structure COT liquid crystal display devices are being manufactured.
이와 같이 백색 컬러필터를 가지는 화이트(white) 구조의 씨오티(COT) 액정표시장치는 백색 컬러필터를 형성함에 따라 마스크 수가 증가하여 공정단계가 많아지며, 화이트(white) 구조의 씨오티(COT) 액정표시 장치의 제조 비용이 증가하는 문제를 해결하고, 컬러필터가 박막트랜지스터 어레이 기판에 위치하기 때문에 액정표시장치의 신뢰성이 저하되는 문제점들을 해결하고자 유기절연막을 사용하여 상기의 문제점들을 해결하고자 하였다.In this way, the white structure COT liquid crystal display device with a white color filter increases the number of masks as the white color filter is formed, which increases the number of processing steps, and the white structure COT liquid crystal display device has a white color filter. In order to solve the problem of increasing manufacturing costs of liquid crystal display devices and the problem of reduced reliability of liquid crystal display devices because the color filter is located on the thin film transistor array substrate, the above problems were attempted to be solved by using an organic insulating film.
대한민국특허공개 제10-2015-0080281호의 도 1은 화이트 COT 구조의 액정표시장치를 개시하였으며, 도 1에서 COT 구조 액정표시장치는 박막트랜지스터(T)와 박막트랜지스터(T) 상부에 컬러필터가 형성된 제1 기판(100)과 공통전극(197)을 포함하는 제2 기판(190)이 이격간격 사이에 액정층(160)을 두고 합착된다.Figure 1 of Korean Patent Publication No. 10-2015-0080281 discloses a liquid crystal display device with a white COT structure. In Figure 1, the COT structure liquid crystal display device has a thin film transistor (T) and a color filter formed on the top of the thin film transistor (T). The first substrate 100 and the second substrate 190 including the common electrode 197 are bonded with the liquid crystal layer 160 spaced apart.
이때, 제1 기판(100) 내면에는 서로 교차하여 다수의 화소 영역(P)을 정의하는 게이트배선(미도시)과 데이터배선(116)이 형성되고, 게이트 배선과 데이터 배선(116)의 교차지점에는 게이트 전극(102)과 액티브층(108)과 소스 전극(112)과 드레인 전극(114)을 포함하는 박막트랜지스터(T)가 형성된다.At this time, gate wires (not shown) and data wires 116 that intersect with each other to define a plurality of pixel areas (P) are formed on the inner surface of the first substrate 100, and the intersection point of the gate wire and data wire 116 is formed. A thin film transistor (T) including a gate electrode 102, an active layer 108, a source electrode 112, and a drain electrode 114 is formed.
그리고, 상기 게이트 전극(102)의 상부에는 게이트 전극(102)을 보호하기 위한 게이트 절연막(106)이 형성되고, 상기 박막트랜지스터(T)의 상부에는 박막트랜지스터(T)를 보호하기 위한 보호막(118)이 형성된다.Additionally, a gate insulating film 106 is formed on the top of the gate electrode 102 to protect the gate electrode 102, and a protective film 118 is formed on the top of the thin film transistor T to protect the thin film transistor T. ) is formed.
또한, 상기 화소 영역(P)에는 컬러필터를 형성하게 되는데, 적색, 녹색, 청색 컬러필터(122a, 122b, 122c)를 다양한 형태로 배열 형성하여 청색, 적색, 녹색 색상을 구현한다.In addition, a color filter is formed in the pixel area P. Red, green, and blue color filters 122a, 122b, and 122c are arranged in various shapes to implement blue, red, and green colors.
이때, 적색, 녹색, 청색 컬러필터(122a, 122b, 122c) 사이에 백색 패턴(124)을 형성하여 백색 색상을 구현할 수 있으며, 백색 패턴(124)은 적색, 녹색, 청색 컬러필터(122a, 122b, 122c)와 동일층에 형성될 수 있다.At this time, white color can be implemented by forming a white pattern 124 between the red, green, and blue color filters 122a, 122b, and 122c, and the white pattern 124 is formed between the red, green, and blue color filters 122a and 122b. , 122c) and may be formed on the same layer.
화이트 씨오티 구조 액정표시장치는 백색 색상의 빛을 외부로 발광할 수 있게 되어 투과율을 향상시킬 수 있다.White COT structure liquid crystal display devices can emit white light to the outside, improving transmittance.
이와 같은 적색, 녹색, 청색 컬러필터(122a, 122b, 122c) 및 백색 패턴(124)은 일예로, 세로 방향으로 위치한 화소 영역(P)에 동일 색상을 갖는 컬러필터(122a, 122b, 122c) 및 백색 패턴(124)이 형성된 형태인 스트라이프형상(stripe pattern)으로 형성할 수 있다.Such red, green, and blue color filters 122a, 122b, and 122c and the white pattern 124 are, for example, color filters 122a, 122b, and 122c having the same color in the pixel area P located in the vertical direction. It can be formed in a stripe shape in which the white pattern 124 is formed.
이때, 적색, 녹색, 청색 컬러필터(122a, 122b, 122c)는 적어도 하나의 컬러필터가 적층 형성되어 빛으로부터 박막트랜지스터(T)의 노출된 액티브층(108)을 가리는 효과가 있다.At this time, the red, green, and blue color filters 122a, 122b, and 122c are formed by stacking at least one color filter and have the effect of blocking the exposed active layer 108 of the thin film transistor T from light.
그리고, 상기 적색, 녹색, 청색 컬러필터(122a, 122b, 122c)와 백색 패턴(124)을 평탄화 하기 위해 평탄화막(126)이 형성되고, 평탄화막(126)의 상부에는 각 화소영역(P)마다 박막트랜지스터(T)의 드레인 전극(114)과 접촉하는 화소 전극(130)이 형성된다.In addition, a planarization film 126 is formed to planarize the red, green, and blue color filters 122a, 122b, and 122c and the white pattern 124, and each pixel region (P) is formed on the top of the planarization film 126. Each pixel electrode 130 is formed in contact with the drain electrode 114 of the thin film transistor T.
이때, 평탄화막(126)은 백색패턴(124)과 동일 공정, 동일 물질로 형성 될수 있으며, 백색패턴(124)은 평탄화막(126)과 동일 두께로 형성될 수 있다.At this time, the planarization film 126 may be formed using the same process and the same material as the white pattern 124, and the white pattern 124 may be formed with the same thickness as the planarization film 126.
이와 같이 평탄화막(126)과 백색 패턴(124)은 감광성을 가지며, 노광공정을 통해 패터닝되어 형성된다.In this way, the planarization film 126 and the white pattern 124 are photosensitive and are formed by patterning through an exposure process.
하지만, 도1의 백색 컬러필터를 가지는 화이트(white) 구조의 씨오티(COT) 액정표시장치는 백색 컬러필터를 형성함에 따라 종래의 유기절연막 조성물을 코팅하여 형성된 평탄화막(126)은 도 2 및 도 3과 같이 평탄화 되지 못하고, 화이트(white) 영역에 형성된 유기절연막과 RGB 컬러 영역 위에 형성된 유기절연막간 높이 차이(단차: H))가 존재한다. 패턴의 단차(H)가 크게 되면 위치별 굴절률 차이로 인해 휘도 감소가 발생 한다.However, in the COT liquid crystal display device of a white structure with a white color filter in FIG. 1, the planarization film 126 formed by coating a conventional organic insulating film composition as a white color filter is formed in FIG. 2 and As shown in FIG. 3, it is not flattened, and there is a height difference (level difference: H) between the organic insulating film formed in the white area and the organic insulating film formed on the RGB color area. When the step difference (H) of the pattern becomes large, luminance decreases due to the difference in refractive index at each location.
따라서, 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 유기절연막의 단차를 줄일 수 있는 평탄화 향상을 위한 유기절연막 개발이 절실히 요구된다.Therefore, there is an urgent need to develop an organic insulating film to improve planarization that can reduce the step of the organic insulating film between the white area and the RGB color area of a white-structured COT liquid crystal display device.
상기와 같은 종래기술의 문제점을 해결하고자, 본 발명의 목적은 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 유기절연막의 단차를 줄일 수 있으며, 해상도, 접착력이 우수하며, 휘도 향상에 적합한 감광성 수지 조성물을 제공하는 것이다.In order to solve the problems of the prior art as described above, the purpose of the present invention is to reduce the step of the organic insulating film between the white area and the RGB color area of a white-structured COT liquid crystal display device, have excellent resolution and adhesion, and are suitable for improving brightness. To provide a photosensitive resin composition.
본 발명의 또 다른 목적은 상기 감광성 수지 조성물로 형성한 유기절연막을 포함하는 디스플레이 소자를 제공하는 것이다.Another object of the present invention is to provide a display device including an organic insulating film formed from the photosensitive resin composition.
또한 본 발명은 상기 화이트 영역과 RGB 칼라 영역 간의 단차가 적어 휘도가 우수한 화이트 구조의 COT 액정표시장치를 제공하는 것을 목적으로 한다.Another object of the present invention is to provide a COT liquid crystal display device with a white structure having excellent brightness due to a small step between the white area and the RGB color area.
상기 목적을 달성하기 위하여 본 발명은In order to achieve the above object, the present invention
a) ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물; 및 ⅱ) 상기 불포화 카르본산 또는 불포화 카르본산 무수물과 중합 가능한 단량체를 중합하여 제조한 아크릴계 공중합체;a) i) unsaturated carboxylic acid, unsaturated carboxylic anhydride or mixtures thereof; and ii) an acrylic copolymer prepared by polymerizing the unsaturated carboxylic acid or unsaturated carboxylic anhydride and a polymerizable monomer;
b) 광개시제; b) photoinitiator;
c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물; 및c) polyfunctional monomers, oligomers or mixtures thereof having an unsaturated bond; and
d) 용매를 포함하며,d) contains a solvent,
상기 아크릴계 공중합체 100 중량부를 기준으로, 상기 ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물의 중량비(X)와 c) 불포화 결합을 가지는 다관능성 모노머, 올리고머, 다관능성 모노머 또는 이들의 혼합물의 중량비(Y)의 곱(X * Y )이 1200 내지 10500인 감광성 수지 조성물을 제공한다:Based on 100 parts by weight of the acrylic copolymer, the weight ratio (X) of i) unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixtures thereof and c) polyfunctional monomer, oligomer, polyfunctional monomer, or mixture thereof having an unsaturated bond. Provided is a photosensitive resin composition in which the product (X * Y) of the weight ratio (Y) is 1200 to 10500:
또한 본 발명은 상기 감광성 수지 조성물로 형성된 유기절연막을 포함하는 디스플레이 소자를 제공한다.Additionally, the present invention provides a display device including an organic insulating film formed from the photosensitive resin composition.
또한 본 발명은 화이트 영역과 RGB 영역에 동시에 형성된 유기절연막을 포함하는 화이트 구조의 COT 액정표시장치에 있어서,In addition, the present invention relates to a COT liquid crystal display device with a white structure including an organic insulating film formed simultaneously in the white area and the RGB area,
상기 화이트 영역과 RGB 영역 간의 단차는 8,000 Å 이내인 화이트 구조의 COT 액정표시장치를 제공한다.A COT liquid crystal display device with a white structure in which the step between the white area and the RGB area is within 8,000 Å is provided.
본 발명에 따른 감광성 수지 조성물은 평탄화, 해상도, 접착력이 동시에 우수한 유기절연막을 제공할 수 있으며, 특히 화이트 구조의 COT 액정표시장치용 디스플레이에 유기절연막으로 적용할 경우 화이트 영역과 RGB 컬러 영역간 단차를 현저히 개선하여 휘도 향상에 크게 기여할 수 있다.The photosensitive resin composition according to the present invention can provide an organic insulating film that is excellent in planarization, resolution, and adhesion at the same time. In particular, when applied as an organic insulating film to a display for a white COT liquid crystal display device, the step between the white area and the RGB color area is significantly reduced. Improvements can greatly contribute to improving luminance.
도 1은 화이트 영역과 RGB 칼라 영역을 포함하는 화이트 구조의 COT 액정표시장치의 기판을 나타낸 것이고,
도 2는 종래의 화이트 구조의 COT 액정표시장치의 기판을 나타낸 평면도이고,
도 3은 종래의 화이트 구조의 COT 액정표시장치의 기판을 나타낸 단면도이고,
도 4는 본 발명의 일실시예에 따른 감광성 수지 조성물로 화이트 영역과 RGB 칼라필터 영역에 동시에 형성된 유기절연막을 포함하는 화이트 구조의 COT 액정표시장치 기판의 단면도이다.
도면의 부호
100 : 제1 기판 190 : 제2 기판
126 : 평탄화막 122a: 적 컬러필터
122b : 녹 컬러필터 124 : 백색 패턴
130 : 제1 전극 150 : 컬럼 스페이서
197 : 제2 전극 T : 박막트랜지스터
P : 화소영역Figure 1 shows the substrate of a COT liquid crystal display device with a white structure including a white area and an RGB color area.
Figure 2 is a plan view showing the substrate of a conventional white structure COT liquid crystal display device;
Figure 3 is a cross-sectional view showing the substrate of a conventional white structure COT liquid crystal display device;
Figure 4 is a cross-sectional view of a COT liquid crystal display substrate having a white structure including an organic insulating film formed simultaneously in the white area and the RGB color filter area with a photosensitive resin composition according to an embodiment of the present invention.
symbols in drawings
100: first substrate 190: second substrate
126: Planarization film 122a: Red color filter
122b: Green color filter 124: White pattern
130: first electrode 150: column spacer
197: Second electrode T: Thin film transistor
P: Pixel area
이하에서 본 발명을 상세하게 설명한다.The present invention will be described in detail below.
본 발명의 감광성 수지 조성물은 The photosensitive resin composition of the present invention is
a) ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물; 및 ⅱ) 상기 불포화 카르본산 또는 불포화 카르본산 무수물과 중합 가능한 단량체를 중합하여 제조한 아크릴계 공중합체;a) i) unsaturated carboxylic acid, unsaturated carboxylic anhydride or mixtures thereof; and ii) an acrylic copolymer prepared by polymerizing the unsaturated carboxylic acid or unsaturated carboxylic anhydride and a polymerizable monomer;
b) 광개시제; b) photoinitiator;
c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물; 및c) polyfunctional monomers, oligomers or mixtures thereof having an unsaturated bond; and
d) 용매를 포함하며,d) contains a solvent,
상기 아크릴계 공중합체 100 중량부를 기준으로, 상기 ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물의 중량비(X)와 c) 불포화 결합을 가지는 다관능성 모노머, 올리고머, 다관능성 모노머 또는 이들의 혼합물의 중량비(Y)의 곱(X * Y )이 1200 내지 10500이다.Based on 100 parts by weight of the acrylic copolymer, the weight ratio (X) of i) unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixtures thereof and c) polyfunctional monomer, oligomer, polyfunctional monomer, or mixture thereof having an unsaturated bond. The product (X * Y) of the weight ratio (Y) is 1200 to 10500.
본 발명의 감광성 수지 조성물에서 상기 a)의 아크릴계 공중합체 100 중량부는 ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물은 15 내지 35 중량부; 및 ⅱ) 상기 불포화 카르본산 또는 불포화 카르본산 무수물과 중합 가능한 단량체 65 내지 85 중량부를 중합하여 제조된다. 중합방법은 공지의 중합방법이 적용될 수 있다.In the photosensitive resin composition of the present invention, 100 parts by weight of the acrylic copolymer of a) includes i) 15 to 35 parts by weight of unsaturated carboxylic acid, unsaturated carboxylic anhydride, or a mixture thereof; and ii) 65 to 85 parts by weight of a monomer polymerizable with the unsaturated carboxylic acid or unsaturated carboxylic anhydride. As the polymerization method, a known polymerization method may be applied.
본 발명에서 상기 a)ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물(이하 “불포화 카르본산 등”이라 한다.)은 아크릴산, 메타크릴산 등의 불포화 모노카르본산; 말레인산, 푸마르산, 시트라콘산, 메타콘산, 이타콘산 등의 불포화 디카르본산; 또는 이들의 불포화 디카르본산의 무수물 등을 단독 또는 2 종 이상 혼합하여 사용할 수 있다.In the present invention, a) i) unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixtures thereof (hereinafter referred to as “unsaturated carboxylic acid, etc.”) include unsaturated monocarboxylic acids such as acrylic acid and methacrylic acid; unsaturated dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, methaconic acid, and itaconic acid; Alternatively, these unsaturated dicarboxylic acid anhydrides can be used alone or in combination of two or more.
상기 ⅱ) 상기 불포화 카르본산 또는 불포화 카르본산 무수물과 중합 가능한 단량체는 에폭시기 함유 불포화 화합물 또는 올레핀계 불포화 화합물이 사용될 수 있다.In ii), the monomer polymerizable with the unsaturated carboxylic acid or unsaturated carboxylic anhydride may be an epoxy group-containing unsaturated compound or an olefinic unsaturated compound.
구체적으로 에폭시기 함유 불포화 화합물은 아크릴산 글리시딜, 메타크릴산 글리시딜, α-에틸아크릴산 글리시딜, α-n-프로필아크릴산 글리시딜, α-n-부틸아크릴산 글리시딜, 아크릴산-β-메틸글리시딜, 메타크릴산-β-메틸글리시딜, 아크릴산-β-에틸글리시딜, 메타크릴산-β-에틸글리시딜, 아크릴산-3,4-에폭시부틸, 메타크릴산-3,4-에폭시부틸, 아크릴산-6,7-에폭시헵틸, 메타크릴산-6,7-에폭시헵틸, α-에틸아크릴산-6,7-에폭시헵틸, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, 또는 p-비닐벤질글리시딜에테르, 메타크릴산 3,4-에폭시 사이클로헥실등을 사용할 수 있으며, 상기 화합물을 단독 또는 2 종 이상 혼합하여 사용할 수 있다.Specifically, unsaturated compounds containing epoxy groups include glycidyl acrylate, glycidyl methacrylate, glycidyl α-ethylacrylate, glycidyl α-n-propylacrylate, glycidyl α-n-butylacrylate, and acrylic acid-β. -Methyl glycidyl, methacrylic acid-β-methylglycidyl, acrylic acid-β-ethylglycidyl, methacrylic acid-β-ethylglycidyl, acrylic acid-3,4-epoxybutyl, methacrylic acid- 3,4-epoxybutyl, acrylic acid-6,7-epoxyheptyl, methacrylic acid-6,7-epoxyheptyl, α-ethylacrylic acid-6,7-epoxyheptyl, o-vinylbenzyl glycidyl ether, m- Vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, 3,4-epoxy cyclohexyl methacrylate, etc. can be used, and the above compounds can be used alone or in a mixture of two or more types.
또한 구체적으로 상기 올레핀계 불포화 화합물은 메틸메타크릴레이트, 에틸메타크릴레이트, n-부틸 메타크릴레이트, sec-부틸 메타크릴레이트, tert-부틸 메타크릴레이트, 메틸아크릴레이트, 이소프로필 아크릴레이트, 시클로헥실 메타크릴레이트, 2-메틸시클로 헥실메타크릴레이트, 디시클로펜테닐아크릴레이트, 디시클로펜타닐아크릴레이트, 디시클로펜테닐메타크릴레이트, 디시클로펜타닐메타크릴레이트, 1-아다만틸 아크릴레이트, 1-아다만틸 메타크릴레이트, 디시클로펜타닐옥시에틸메타크릴레이트, 이소보로닐메타크릴레이트, 시클로헥실아크릴레이트, 2-메틸시클로헥실아크릴레이트, 디시클로펜타닐옥시에틸아크릴레이트, 이소보로닐아크릴레이트, 페닐메타크릴레이트, 페닐아크릴레이트, 벤질아크릴레이트, 2-하이드록시에틸메타크릴레이트, 스티렌, σ-메틸 스티렌, m-메틸 스티렌, p-메틸 스티렌, 비닐톨루엔, p-메톡시 스티렌, 1,3-부타디엔, 이소프렌, 또는 2,3-디메틸 1,3-부타디엔 등을 사용할 수 있으며, 상기 화합물을 단독 또는 2 종 이상 혼합하여 사용할 수 있다.Additionally, specifically, the olefinically unsaturated compounds include methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, tert-butyl methacrylate, methyl acrylate, isopropyl acrylate, and cyclo Hexyl methacrylate, 2-methylcyclohexyl methacrylate, dicyclopentenyl acrylate, dicyclopentanyl acrylate, dicyclopentenyl methacrylate, dicyclopentanyl methacrylate, 1-adamantyl acrylate, 1-Adamantyl methacrylate, dicyclopentanyloxyethyl methacrylate, isoboronyl methacrylate, cyclohexyl acrylate, 2-methylcyclohexyl acrylate, dicyclopentanyloxyethyl acrylate, isoboro Nyl acrylate, phenyl methacrylate, phenyl acrylate, benzyl acrylate, 2-hydroxyethyl methacrylate, styrene, σ-methyl styrene, m-methyl styrene, p-methyl styrene, vinyltoluene, p-methoxy Styrene, 1,3-butadiene, isoprene, or 2,3-dimethyl 1,3-butadiene can be used, and the above compounds can be used alone or in a mixture of two or more.
본 발명의 a) 아크릴계 공중합체 100 중량부는 ⅰ) 불포화 카르본산 등을 15 내지 35 중량부 포함하여 중합되는 바, 상기 ⅰ) 불포화 카르본산 등의 함량이 15 중량부 미만일 경우에는 화이트 영역과 RGB 칼라필터 영역간의 단차가 커지며, 알칼리 수용액에 대한 용해가 느려지는 문제점이 있으며, 35 중량부를 초과하는 경우에는 화이트 영역과 RGB 칼라필터 영역간의 단차가 커지며 용해성이 지나치게 증가하여 접착성이 저하되는 문제점이 있다.100 parts by weight of a) acrylic copolymer of the present invention is polymerized containing 15 to 35 parts by weight of i) unsaturated carboxylic acid, etc., and when the content of i) unsaturated carboxylic acid, etc. is less than 15 parts by weight, white area and RGB color There is a problem in that the step between the filter areas increases and dissolution in aqueous alkaline solution slows down. If it exceeds 35 parts by weight, the step between the white area and the RGB color filter area increases, and the solubility increases excessively, causing a problem that the adhesiveness deteriorates. .
본 발명의 상기 a) 아크릴계 공중합체는 구체적으로 중합에 사용되는 단량체들을 용매와 중합개시제 존재하에서 라디칼 반응시키고, 침전 및 여과, Vacuum Drying 공정을 통하여 미반응 단량체를 제거하여 얻어지며, 보다 구체적으로 제조된 a) 아크릴계 공중합체는 폴리스티렌 환산중량평균분자량(Mw)이 3,000 내지 30,000을 가진다. 이 경우 현상성 및 잔막율을 동시에 향상시킬 수 있다.The a) acrylic copolymer of the present invention is specifically obtained by radically reacting the monomers used for polymerization in the presence of a solvent and a polymerization initiator, and removing unreacted monomers through precipitation, filtration, and vacuum drying processes, and is more specifically manufactured. a) acrylic copolymer has a polystyrene-equivalent weight average molecular weight (Mw) of 3,000 to 30,000. In this case, developability and residual film rate can be improved simultaneously.
본 발명에 사용되는 상기 b)의 광개시제는 네가티브 감광성 수지 조성물에 사용되는 공지의 광개시제가 사용될 수 있으며, 구체적으로 옥심에스테르계 화합물을 사용 할 수 있다.The photoinitiator of b) used in the present invention may be a known photoinitiator used in a negative photosensitive resin composition, and specifically, an oxime ester-based compound may be used.
상기 광개시제의 함량은 상기 a) 아크릴계 공중합체 100 중량부에 대하여 0.1 내지 30 중량부로 포함한다. 상기 광개시제의 함량이 0.1 중량부 미만일 경우에는 낮은 감도로 인해 잔막율이 나빠지게 된다는 문제점이 있으며, 그 함량이 30 중량부를 초과할 경우에는, 현상성이 떨어지고, 해상도가 저하된다는 문제점이 있다. The content of the photoinitiator is 0.1 to 30 parts by weight based on 100 parts by weight of the a) acrylic copolymer. If the content of the photoinitiator is less than 0.1 parts by weight, there is a problem that the residual film rate deteriorates due to low sensitivity, and if the content exceeds 30 parts by weight, there is a problem of poor developability and reduced resolution.
본 발명에 사용되는 상기 c)의 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물은 에틸렌성 불포화 결합을 가지는 다관능성 모노머, 우레탄아크릴레이트, 에폭시아크릴레이트, 폴리에스터 아크릴레이트, 또는 이들의 혼합물이 사용될 수 있다.The polyfunctional monomer, oligomer, or mixture thereof having an unsaturated bond of c) used in the present invention is a polyfunctional monomer having an ethylenically unsaturated bond, urethane acrylate, epoxy acrylate, polyester acrylate, or a mixture thereof. This can be used.
구체적으로 상기 불포화 결합을 함유한 다관능성 모노머 또는 올리고머 내 관능기의 수가 2 내지 6인 경우 ‘저관능’, 관능기의 수가 6을 초과 할 경우 ‘고관능’으로 규정하고, 저관능 또는 고관능을 1종 이상을 혼합하여 사용이 가능하며, 보다 구체적으로는 저관능 10 내지 90 중량%와 고관능 90 내지 10 중량%를 혼합하여 사용할 수 있다. 이때 저관능과 고관능이 혼합된 혼합물의 점도는 100 내지 20,000 mPa·s (25 ℃)인 것이 좋다. 상기 범위를 벗어나는 경우 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 단차가 커지거나 접착성 및 해상도가 저하되는 문제가 발생할 수 있다.Specifically, if the number of functional groups in the polyfunctional monomer or oligomer containing the unsaturated bond is 2 to 6, it is defined as 'low functionality', and if the number of functional groups exceeds 6, it is defined as 'high functionality', and low or high functionality is defined as 1. It is possible to mix more than one type, and more specifically, 10 to 90% by weight of low functionality and 90 to 10% by weight of high functionality can be mixed. At this time, the viscosity of the mixture of low and high functionality is preferably 100 to 20,000 mPa·s (25°C). If it is outside the above range, the level difference between the white area and the RGB color area of the COT liquid crystal display device with a white structure may increase, or problems with deterioration of adhesion and resolution may occur.
보다 구체적으로 불포화 결합을 함유한 다관능 모노머 또는 올리고머의 예로는 에틸렌성 불포화 결합을 가지는 다관능성 모노머로 디펜타에리스리톨헥사아크릴레이트, 및 펜타에리스리톨디아크릴레이트, 펜타에리스리톨트리아크릴레이트, 펜타에리스리톨테트라아크릴레이트, 프탈릭다이아크릴레이트, 폴리에틸렌글리콜디아크릴레이트, 테트라에틸렌글리콜디아크릴레이트, 트리사이클로데칸디메탄올디아크릴레이트, 트리글리세롤디아크릴레이트, 트리스아크릴옥시에틸이소시아뉴레이트, 트리메틸올프로판트리아크릴레이트 유도체 및 이들의 메타크릴레이트류, 우레탄 아크릴레이트로는 수산기를 가지는 1관능 아크릴레이트류, 3관능 아크릴레이트, 5관능 아크릴레이트류; 상기 아크릴레이트 단독 또는 2종 이상의 모노머를 혼합하여 디이소시아네이트와 축합반응을 통해 합성된 2 관능 이상의 관능기를 가지는 우레탄 아크릴레이트류; 아크릴산 또는 아크릴산 무수물과 단독 또는 혼합 사용하여 크레졸노볼락 에폭시, 페놀노볼락에폭시, 비스페놀 A형 에폭시, 지방족 에폭시, 방향족 에폭시류와 합성된 2관능 이상의 관능기를 가지는 에폭시 아크릴레이트류;에서 1종 이상을 혼합하여 사용할 수 있다. More specifically, examples of polyfunctional monomers or oligomers containing unsaturated bonds include dipentaerythritol hexaacrylate, pentaerythritol diacrylate, pentaerythritol triacrylate, and pentaerythritol tetraacrylate. Latex, phthalic diacrylate, polyethylene glycol diacrylate, tetraethylene glycol diacrylate, tricyclodecane dimethanol diacrylate, triglycerol diacrylate, trisacryloxyethyl isocyanurate, trimethylolpropane triacrylate Rate derivatives and their methacrylates and urethane acrylates include mono-, tri- and penta-functional acrylates having a hydroxyl group; Urethane acrylates having two or more functional groups synthesized through condensation reaction with diisocyanate, either alone or by mixing two or more monomers; Cresol novolac epoxy, phenol novolac epoxy, bisphenol A-type epoxy, aliphatic epoxy, aromatic epoxy, and epoxy acrylates having two or more functional groups, using acrylic acid or acrylic anhydride alone or mixed. Can be used by mixing.
상기 c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 함량은 상기 a) 아크릴계 공중합체 100 중량부에 대하여 80 내지 300 중량부로 포함된다. 그 함량이 80 중량부 미만일 경우에는 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 단차가 커지며, 낮은 감도로 인해 잔막율이 나빠지게 된다는 문제점이 있으며, 그 함량이 300 중량부를 초과할 경우에는 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 단차가 커지며, 현상성이 떨어지고, 해상도가 저하된다는 문제점이 있다. The content of c) the polyfunctional monomer, oligomer, or mixture thereof having an unsaturated bond is 80 to 300 parts by weight based on 100 parts by weight of the a) acrylic copolymer. If the content is less than 80 parts by weight, the difference between the white area and the RGB color area of the COT liquid crystal display device with a white structure increases, and there is a problem that the residual film rate deteriorates due to low sensitivity. If the content exceeds 300 parts by weight, There is a problem that the step between the white area and the RGB color area of the COT liquid crystal display device with a white structure increases, developability deteriorates, and resolution decreases.
본 발명에 사용되는 상기 d)의 용매는 유기절연막의 평탄성과 코팅얼룩을 발생하지 않게 하여 균일한 패턴 프로파일(pattern profile)을 형성하게 한다.The solvent of d) used in the present invention maintains the flatness of the organic insulating film and prevents coating stains from occurring, thereby forming a uniform pattern profile.
상기 용매로는 유기절연막 형성을 위한 네가티브 감광성 수지 조성물에 통상적으로 사용가능한 공지의 용매가 사용될 수 있으며, 구체적인 예로, 프로필렌글리콜모노에틸프로피오네이트, 프로필렌글리콜메틸에테르프로피오네이트, 프로필렌글리콜에틸에테르프로피오네이트, 프로필렌글리콜프로필에테르프로피오네이트, 프로필렌글리콜부틸에테르프로피오네이트 등의 프로필렌글리콜알킬에테르아세테이트류; 메탄올, 에탄올 등의 알코올류; 테트라히드로퓨란 등의 에테르류; 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르 등의 글리콜에테르류; 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트 등의 에틸렌글리콜알킬에테르 아세테이트류; 디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜디메틸에테르 등의 디에틸렌글리콜류; 프로필렌글리콜메틸에테르, 프로필렌글리콜에틸에테르, 프로필렌글리콜프로필에테르, 프로필렌글리콜부틸에테르 등의 프로필렌글리콜모노알킬에테르류; 프로필렌글리콜메틸에테르아세테이트, 프로필렌글리콜에틸에테르아세테이트, 프로필렌글리콜프로필에테르아세테이트, 프로필렌글리콜부틸에테르아세테이트 등의 프로필렌글리콜알킬에테르아세테이트류; 톨루엔, 크실렌 등의 방향족 탄화수소류; 메틸에틸케톤, 시클로헥사논, 4-히드록시 4-메틸 2-펜타논 등의 케톤류; 또는 초산메틸, 초산에틸, 초산프로필, 초산부틸, 2-히드록시 프로피온산 에틸, 2-히드록시 2-메틸프로피온산 메틸, 2-히드록시 2-메틸프로피온산 에틸, 히드록시초산메틸, 히드록시초산에틸, 히드록시초산부틸, 유산메틸, 유산에틸, 유산프로필, 유산부틸, 3-히드록시프로피온산메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산프로필, 3-히드록시프로피온산부틸, 2-히드록시 3-메틸부탄산 메틸, 메톡시초산메틸, 메톡시초산에틸, 메톡시초산프로필, 메톡시초산부틸, 에톡시초산메틸, 에톡시초산에틸, 에톡시초산프로필, 에톡시초산부틸, 프로폭시초산메틸, 프로폭시초산에틸, 프로폭시초산프로필, 프로폭시초산부틸, 부톡시초산메틸, 부톡시초산에틸, 부톡시초산프로필, 부톡시초산부틸, 2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산프로필, 2-메톡시프로피온산부틸, 2-에톡시프로피온산메틸, 2-에톡시플피온산에틸, 2-에톡시프로피온산프로필, 2-에톡시프로피온산부틸, 2-부톡시프로피온산메틸, 2-부톡시프로피온산에틸, 2-부톡시프로피오산프로필, 2-부톡시프로피온산부틸, 3-메톡시프로피온산메틸 3-메톡시프로피온산에틸, 3-메톡시프로피온산프로필, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산프로필, 3-에톡시프로피온산부틸, 3-프로폭시프로피온산메틸, 3-프로폭시프로피온산에틸, 3-프로폭시프로피온산프로필, 3-프로폭시프로피온산부틸, 3-부톡시프로피온산메틸, 3-부톡시프로피온산에틸, 3-부톡시프로피온산프로필, 3-부톡시프로피온산부틸 등의 에스테르류 등을 사용할 수 있으며, 이들은 필요에 따라 1종 이상 혼합 사용이 가능하다.As the solvent, any known solvent commonly used in negative photosensitive resin compositions for forming an organic insulating film can be used. Specific examples include propylene glycol monoethyl propionate, propylene glycol methyl ether propionate, and propylene glycol ethyl ether propionate. propylene glycol alkyl ether acetates such as cypionate, propylene glycol propyl ether propionate, and propylene glycol butyl ether propionate; Alcohols such as methanol and ethanol; ethers such as tetrahydrofuran; Glycol ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; Ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate; Diethylene glycols such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, and diethylene glycol dimethyl ether; propylene glycol monoalkyl ethers such as propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol propyl ether, and propylene glycol butyl ether; propylene glycol alkyl ether acetates such as propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, and propylene glycol butyl ether acetate; Aromatic hydrocarbons such as toluene and xylene; Ketones such as methyl ethyl ketone, cyclohexanone, and 4-hydroxy 4-methyl 2-pentanone; or methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxy propionate, 2-hydroxy 2-methyl methyl propionate, 2-hydroxy 2-methyl ethyl propionate, methyl hydroxy acetate, ethyl hydroxy acetate, Butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, 3-hydroxypropionate, butyl 3-hydroxypropionate, 2-hydroxy 3 -Methyl methyl butanoate, methyl methoxy acetate, ethyl methoxy acetate, propyl methoxy acetate, butyl methoxy acetate, methyl ethoxy acetate, ethyl ethoxy acetate, propyl ethoxy acetate, butyl ethoxy acetate, methyl propoxy acetate. , propoxyethyl acetate, propoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, butoxypropyl acetate, butyl butoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2-methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate , 2-butoxyethyl propionate, 2-butoxypropyl propionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, 3-methoxypropyl propionate, 3-ethoxymethyl propionate, Ethyl 3-ethoxypropionate, 3-ethoxypropyl propionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxypropionate, butyl 3-propoxypropionate, 3 -Esters such as methyl butoxypropionate, ethyl 3-butoxypropionate, 3-butoxypropyl propionate, and butyl 3-butoxypropionate can be used, and one or more types can be mixed as needed.
상기 d) 용매는 상기 a) 아크릴계 공중합체 100 중량부에 대하여 50 내지 500 중량부로 포함되며, 이 경우 용해성, 각 성분과의 반응성, 및 도포막 형성이 더욱 용이한 장점이 있다.The solvent d) is included in an amount of 50 to 500 parts by weight based on 100 parts by weight of the a) acrylic copolymer. In this case, it has the advantages of solubility, reactivity with each component, and easier coating film formation.
본 발명의 감광성 수지 조성물은 필요에 따라 특정 물성을 향상시키기 위하여 네가티브 감광성 수지 조성물에 사용되는 통상의 첨가제를 더욱 포함할 수 있으며, 구체적으로 상기 첨가제는 실란커플링제 또는 계면활성제일 수 있다.The photosensitive resin composition of the present invention may further include common additives used in negative photosensitive resin compositions in order to improve specific physical properties as needed. Specifically, the additive may be a silane coupling agent or a surfactant.
보다 구체적으로 상기 첨가제는 각각 독립적으로 상기 a) 아크릴계 공중합체 100 중량부에 대하여 0.01 내지 5 중량부로 포함될 수 있다.More specifically, the additives may each independently be included in an amount of 0.01 to 5 parts by weight based on 100 parts by weight of the a) acrylic copolymer.
특히 본 발명에 따른 감광성 수지 조성물은 a) 아크릴계 공중합체 100 중량부를 기준으로 하였을 때, 메타크릴산의 중량비(X)와 c)의 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 중량비(Y)의 중량비의 곱(X * Y )이 1200 내지 10500이다. 상기 범위 내인 경우 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 단차가 8,000 Å 이내의 단차를 나타내면서 현상성 및 해상도를 동시에 만족시킬 수 있다.In particular, the photosensitive resin composition according to the present invention is a) based on 100 parts by weight of the acrylic copolymer, the weight ratio of methacrylic acid ( The product of the weight ratio of Y) (X * Y) is 1200 to 10500. If it is within the above range, the step difference between the white area and the RGB color area of the white-structured COT liquid crystal display device can be within 8,000 Å, while simultaneously satisfying both developability and resolution.
더욱 구체적으로 상기 X * Y가 2400 내지 5000인 경우 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 단차가 5,000 Å 이내의 단차를 나타내면서 유기절연막의 우수한 접착력을 동시에 만족시킬 수 있다.More specifically, when X
또한 본 발명은 상기 감광성 수지 조성물을 이용한 디스플레이 소자의 유기절연막 형성방법을 제공한다.Additionally, the present invention provides a method of forming an organic insulating film of a display device using the photosensitive resin composition.
구체적으로, 상기 유기절연막 형성방법은 기판 상에 본 발명의 감광성 수지 조성물을 코팅하고 열처리 후, 노광, 현상한 후, 큐어링하는 단계를 포함한다.Specifically, the method of forming an organic insulating film includes the steps of coating the photosensitive resin composition of the present invention on a substrate, followed by heat treatment, exposure, development, and curing.
본 발명에 있어서, 상기 기판은 컬러필터 온 박막트랜지스터(Color Filter On TFT ( COT )), COT 액정표시장치, 또는 화이트 구조의 COT 액정표시장치의 기판일 수 있으며, 구체적으로는 화이트 구조의 COT 액정표시장치의 기판이다. 또한 상기 열처리 및 큐어링은 네거티브 감광성 수지 조성물을 대상으로 하는 통상적인 온도에서 수행될 수 있다.In the present invention, the substrate may be a color filter on thin film transistor (Color Filter On TFT (COT)), a COT liquid crystal display, or a substrate of a white-structured COT liquid crystal display, specifically, a white-structured COT liquid crystal display. It is the substrate of a display device. Additionally, the heat treatment and curing may be performed at a typical temperature for a negative photosensitive resin composition.
이때, 상기 방법으로 형성되는 유기절연막의 두께 및 각 조건 등은 특별히 한정되지 않고, 통상의 소자 제작에 사용되는 범위로 설정될 수 있다. 따라서 상기 네거티브 감광성 수지 조성물을 제외한 나머지 사항은 당업자가 공지의 방법을 적절히 이용할 수 선택하여 적용할 수 있음은 물론이다. 보다 구체적으로 디스플레이 소자에 있어서, 네거티브 감광성 수지 조성물을 이용하여 유기절연막을 형성하는 방법의 일예는 다음과 같다.At this time, the thickness and each condition of the organic insulating film formed by the above method are not particularly limited and can be set to the range used in normal device manufacturing. Therefore, it goes without saying that the remaining matters except for the negative photosensitive resin composition can be appropriately selected and applied by a person skilled in the art using known methods. More specifically, in a display device, an example of a method of forming an organic insulating film using a negative photosensitive resin composition is as follows.
먼저 본 발명의 네거티브 감광성 수지 조성물을 스프레이법, 롤코터법, 회전도포법 등으로 기판 표면에 도포하고, 프리베이크에 의해 용매를 제거하여 도포막을 형성한다. 이때, 상기 열처리는 80 내지 130 ℃의 온도에서 1 내지 5 분간 실시하는 것이 바람직하다.First, the negative photosensitive resin composition of the present invention is applied to the surface of the substrate using a spray method, roll coater method, rotational coating method, etc., and the solvent is removed by prebaking to form a coating film. At this time, the heat treatment is preferably performed at a temperature of 80 to 130 ° C. for 1 to 5 minutes.
그 다음, 미리 준비된 패턴에 따라 가시광선, 자외선, 원자외선, 전자선, 엑스선 등을 상기 형성된 도포막에 조사하고, 현상액으로 현상하여 불필요한 부분을 제거함으로써 소정의 패턴을 형성한다.Next, visible light, ultraviolet light, deep ultraviolet light, electron beam,
상기 현상액은 알칼리 수용액을 사용하는 것이 좋으며, 구체적으로 수산화나트륨, 수산화칼륨, 탄산나트륨 등의 무기 알칼리류; n-프로필아민 등의 1급 아민류; 디에틸아민, n-프로필아민 등의 2급 아민류; 트리메틸아민, 메틸디에틸아민, 디메틸에틸아민, 트리에틸아민 등의 3급 아민류; 디메틸에탄올아민, 메틸디에탄올아민, 트리에탄올아민 등의 알콜아민류; 또는 테트라메틸암모늄히드록시드, 테트라에틸암모늄히드록시드 등의 4급 암모늄염의 수용액 등을 사용할 수 있다. 이때, 상기 현상액은 알칼리성 화합물을 0.1 내지 10 중량%의 농도로 용해시켜 사용되며, 메탄올, 에탄올 등과 같은 수용성 유기용매 및 계면활성제를 적정량 첨가할 수도 있다.It is recommended to use an aqueous alkaline solution as the developer, and specifically, inorganic alkalis such as sodium hydroxide, potassium hydroxide, and sodium carbonate; Primary amines such as n-propylamine; secondary amines such as diethylamine and n-propylamine; Tertiary amines such as trimethylamine, methyldiethylamine, dimethylethylamine, and triethylamine; Alcohol amines such as dimethylethanolamine, methyldiethanolamine, and triethanolamine; Alternatively, an aqueous solution of quaternary ammonium salt such as tetramethylammonium hydroxide or tetraethylammonium hydroxide can be used. At this time, the developer is used by dissolving an alkaline compound at a concentration of 0.1 to 10% by weight, and an appropriate amount of a water-soluble organic solvent such as methanol, ethanol, etc., and a surfactant may be added.
또한, 상기와 같은 현상액으로 현상한 후 초순수로 50 내지 180 초간 세정하여 불필요한 부분을 제거하고 건조하여 패턴을 형성하고, 선택적으로 상기 형성된 패턴에 자외선 등의 빛을 조사한 후, 패턴을 오븐 등의 가열장치에 의해 150 내지 250 ℃의 온도에서 30 내지 90 분간 큐어링하여 최종 유기절연막을 얻을 수 있다.In addition, after developing with the above developer, washing with ultrapure water for 50 to 180 seconds to remove unnecessary parts and drying to form a pattern. After selectively irradiating light such as ultraviolet rays to the formed pattern, the pattern is heated in an oven, etc. The final organic insulating film can be obtained by curing for 30 to 90 minutes at a temperature of 150 to 250 ° C. using a device.
구체적으로 본 발명의 기판이 화이트 구조의 COT 액정표시장치인 경우 화이트 영역은 RGB 영역에 비하여 단차가 1 내지 3 um 정도 낮으며, 1 내지 10 um, 보다 구체적으로는 3 내지 6 um의 두께로 네가티브 감광성 수지 조성물을 코팅하고, 열처리-노광-현상-큐어링 단계를 거쳐 유기절연막이 형성될 수 있다. 상기 유기절연막의 형성방법에서 종래의 일반적인 감광성 수지를 사용할 경우 화이트 영역과 RGB 영역 간에 10,000 Å를 넘는 단차를 나타내는 반면, 본원발명의 감광성 수지 조성물을 사용하여 유기절연막을 형성할 경우 화이트 영역과 RGB 영역 간에 8,000 Å 이내의 단차를 나타내어, 평탄성이 우수하여 휘도를 현저히 향상시킬 수 있으며, 동시에 해상도 및 접착력이 우수한 장점을 가질 수 있다. Specifically, when the substrate of the present invention is a COT liquid crystal display device with a white structure, the white area has a level difference of about 1 to 3 um lower than the RGB area, and has a negative thickness of 1 to 10 um, more specifically 3 to 6 um. An organic insulating film can be formed by coating a photosensitive resin composition and going through heat treatment-exposure-development-curing steps. In the above method of forming an organic insulating film, when a conventional photosensitive resin is used, a step difference exceeding 10,000 Å appears between the white area and the RGB area, whereas when an organic insulating film is formed using the photosensitive resin composition of the present invention, the white area and the RGB area are By exhibiting a step difference of less than 8,000 Å between the surfaces, luminance can be significantly improved due to excellent flatness, and at the same time, it can have the advantage of excellent resolution and adhesion.
또한 본 발명은 상기 감광성 수지 조성물로 형성된 유기절연막을 포함하는 디스플레이 소자를 제공한다. Additionally, the present invention provides a display device including an organic insulating film formed from the photosensitive resin composition.
상기 유기절연막은 다양한 종류의 디스플레이의 유기절연막으로 사용가능하며, 구체적으로 화이트 구조의 COT 액정표시장치의 유기절연막인 것이 좋다. The organic insulating film can be used as an organic insulating film for various types of displays, and specifically, it is preferably an organic insulating film for a white-structured COT liquid crystal display device.
또한 본 발명은 화이트 영역과 RGB 영역에 동시에 형성된 유기절연막을 포함하는 화이트 구조의 COT 액정표시장치에 있어서, 상기 화이트 영역과 RGB 영역 간의 유기절연막의 단차는 8,000 Å 이내인 화이트 구조의 COT 액정표시장치를 제공하는 바, 본 발명에 따른 COT 액정표시장치는 본 발명에 따른 감광성 수지 조성물을 사용하여 상기 유기절연막 형성방법에 의하여 형성될 수 있다. 상기에서 “동시에 형성된”이란 화이트 영역과 RGB 영역의 유기절연막이 한 번에 같이 형성된 것을 의미하며, 본 발명에 따른 화이트 구조의 COT 액정표시장치는 종래의 화이트 구조의 COT 액정표시장치과 비교하여 휘도가 현저히 우수한 특징으로 가진다. 도 3과 같이 종래의 유기절연막 조성물을 코팅하여 형성된 유기절연막은 평탄화되지 못하고 화이트(white) 영역과 RGB 컬러 영역간 높이 차이(단차: H))가 10,000 Å 보다 큰 반면, 본 발명의 감광성 수지 조성물을 사용하여 유기절연막을 형성한 경우 도 4와 같이 화이트(white) 영역과 RGB 컬러 영역간 높이 차이(단차: H1))가 8,000 Å 이내이며, 특히 상기 감광성 수지 조성물의 메타크릴산의 중량비(X)와 c)의 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 중량비(Y)의 중량비의 곱(X * Y )이 2400 내지 5000인 것이 경우 화이트 구조의 COT 액정표시장치의 화이트 영역과 RGB 컬러 영역간 유기절연막의 단차가 5,000 Å 이내의 단차를 나타내어 휘도 감소를 최소화 할 수 있다.In addition, the present invention relates to a COT liquid crystal display device with a white structure including an organic insulating film formed simultaneously in the white area and the RGB area, wherein the step difference of the organic insulating film between the white area and the RGB area is within 8,000 Å. Provided, the COT liquid crystal display device according to the present invention can be formed by the above organic insulating film forming method using the photosensitive resin composition according to the present invention. In the above, “simultaneously formed” means that the organic insulating films in the white area and the RGB area are formed together at the same time, and the white-structured COT liquid crystal display device according to the present invention has a brightness higher than that of the conventional white-structured COT liquid crystal display device. It has remarkably excellent features. As shown in Figure 3, the organic insulating film formed by coating the conventional organic insulating film composition is not flattened and the height difference (step difference: H) between the white area and the RGB color area is greater than 10,000 Å, whereas the photosensitive resin composition of the present invention is not flattened. When an organic insulating film is formed using the same, as shown in FIG. 4, the height difference (step difference: H1) between the white area and the RGB color area is within 8,000 Å, and in particular, the weight ratio (X) of methacrylic acid in the photosensitive resin composition and In the case where the product (X The difference in luminance can be minimized by having a difference in the organic insulating film between regions of less than 5,000 Å.
이하, 본 발명의 이해를 돕기 위하여 바람직한 실시예를 제시하나, 하기 실시예는 본 발명을 예시하는 것일 뿐 본 발명의 범위가 하기 실시예에 한정되는 것은 아니다.Hereinafter, preferred examples are presented to aid understanding of the present invention. However, the following examples are merely illustrative of the present invention and the scope of the present invention is not limited to the following examples.
실시예Example 1: 감광성 수지 조성물의 제조 1: Preparation of photosensitive resin composition
아크릴계 공중합체의 제조에서 단량체 중 메타크릴산의 함량이 35 중량부, 메타크릴산 글리시딜 30 중량부, 스티렌 35 중량부를 사용하여 중량평균분자량(Mw)이 5000인 아크릴계 공중합체를 제조하였다.In the production of an acrylic copolymer, an acrylic copolymer with a weight average molecular weight (Mw) of 5000 was prepared using 35 parts by weight of methacrylic acid, 30 parts by weight of glycidyl methacrylate, and 35 parts by weight of styrene among the monomers.
상기 아크릴계 공중합체, 광개시제로 옥심에스테르계 광개시제, 저관능으로 디펜타에리스리톨헥사아크릴레이트, 고관능으로 9관능 기능 가지는 우레탄 아크릴레이트를 혼합하여 점도가 11,000 mPa·s ( 25 ℃)인 불포화 결합을 함유한 다관능 모노머 또는 올리고머, 실란커플링제, 계면활성제를 하기 표 1에 기재된 조성에 따라 혼합한 다음, 상기 혼합물에 플로필렌글리콜모노에틸프로피오네이트를 가하여 용해시킨 후, 0.2 ㎛의 밀리포아필터로 여과하여 네거티브 감광성 수지 조성물을 제조하였다.The acrylic copolymer, an oxime ester photoinitiator as a photoinitiator, dipentaerythritol hexaacrylate with low functionality, and urethane acrylate with high functionality with 9 functional functions are mixed to contain an unsaturated bond with a viscosity of 11,000 mPa·s (25°C). A multifunctional monomer or oligomer, a silane coupling agent, and a surfactant were mixed according to the composition shown in Table 1 below, and then propylene glycol monoethyl propionate was added to the mixture to dissolve it, and then filtered through a 0.2 ㎛ Millipore filter. A negative photosensitive resin composition was prepared by filtration.
실시예Example 2 내지 7 및 2 to 7 and 비교예Comparative example 1 내지 3: 감광성 수지 조성물의 제조 1 to 3: Preparation of photosensitive resin composition
상기 실시예 1에 기재된 방법을 준용하고, 하기 표 1에 기재된 함량에 따라 감광성 수지 조성물을 제조하였으며, 아크릴계 공중합체의 제조시 메타크릴산의 감소 또는 증가된 함량은 스티렌의 함량을 조절(메타크릴산의 함량 + 스티렌의 함량 = 70 중량%)하여 아크릴계 공중합체를 제조하였다.The method described in Example 1 was applied, and a photosensitive resin composition was prepared according to the content shown in Table 1 below. When preparing the acrylic copolymer, the content of methacrylic acid was reduced or increased to control the content of styrene (methacrylic acid). Acid content + styrene content = 70% by weight) to prepare an acrylic copolymer.
X는 아크릴계 공중합체 100 중량부에 대한 메타크릴산 함량(중량부)이다.X is the methacrylic acid content (parts by weight) relative to 100 parts by weight of the acrylic copolymer.
시험test
상기 실시예 1 내지 7 및 비교예 1 내지 3에서 제조된 감광성 수지 조성물을 이용하여 하기와 같은 방법으로 물성을 평가한 후, 그 결과를 하기 표 2에 나타내었다. The photosensitive resin compositions prepared in Examples 1 to 7 and Comparative Examples 1 to 3 were used to evaluate physical properties in the following manner, and the results are shown in Table 2 below.
1. 화이트 구조의 COT 기판 준비1. Preparation of COT substrate with white structure
깨끗하게 세정된 글래스 위에 레드 컬러(Red Color) 레지스트를 코팅 후 90 ℃ 핫플레이트에서 100초간 프리베이크를 실시하였다. 포토마스크를 이용하여 100 mJ/sq.cm 의 노광량으로 노광한 후, 0.04% KOH현상액을 이용하여 60초간 현상을 실시하고 230 ℃ 컨벡션오븐(Convection Oven)에서 30분간 추가로 큐어링(curing)을 실시하였다.Red color resist was coated on the cleanly cleaned glass and pre-baked for 100 seconds on a hot plate at 90°C. After exposure at an exposure dose of 100 mJ/sq.cm using a photomask, development was performed for 60 seconds using a 0.04% KOH developer, and curing was performed in a convection oven at 230°C for an additional 30 minutes. It was carried out.
상기 방법으로 그린(Green), 블루(Blue) 컬러 레지스트를 코팅 후 큐어링(curing)까지 각각 실시하였다. 화이트 패턴은 레드 컬러 (Red Color)레지스트 노광 공정에서 포토마스크의 다크 패턴으로 형성하였다.Green and blue color resists were coated and then cured using the above method, respectively. The white pattern was formed as a dark pattern on the photomask during the red color resist exposure process.
큐어링 후 RGB 컬러의 두께는 2.5㎛ 로 형성되었다.After curing, the thickness of the RGB color was formed to be 2.5㎛.
2. 유기절연막 공정2. Organic insulation film process
상기 준비된 화이트 구조의 COT 기판 위에 상기 실시예 1 내지 7 및 비교예 1 내지 3에서 제조된 감광성 수지 조성물을 각각 코팅 후 105 ℃ 핫플레이트에서 100초간 프리베이크를 실시하였다. 포토마스크를 이용하여 5-70 mJ/sq.cm의 노광량으로 노광한 후, 2.38% TMAH 현상액을 이용하여 100초간 현상을 실시하고 230 ℃ 컨벡션오븐(Convection Oven)에서 30분간 추가로 큐어링(curing)을 실시하였다.The photosensitive resin compositions prepared in Examples 1 to 7 and Comparative Examples 1 to 3 were coated on the prepared white structured COT substrate, respectively, and then prebaked for 100 seconds on a hot plate at 105°C. After exposure at an exposure dose of 5-70 mJ/sq.cm using a photomask, development was performed for 100 seconds using a 2.38% TMAH developer, and curing was performed in a convection oven at 230°C for an additional 30 minutes. ) was carried out.
가) 단차A) Step difference
상기 1. 화이트 구조의 COT 기판에 2. 유기절연막 공정을 진행 후 화이트 영역의 유기절연막과 RGB 컬러 영역 상부의 유기절연막의 단차를 유기절연막의 최적 감도에서 접촉식 두께 측정 장비인 텐코 (Tencor)를 통하여 측정하였다.After performing the above 1. white structured COT substrate and 2. organic insulating film process, the level difference between the organic insulating film in the white area and the organic insulating film in the upper part of the RGB color area is measured using Tencor, a contact-type thickness measurement equipment, at the optimal sensitivity of the organic insulating film. It was measured through.
텐코 (Tencor) 장비에서 화이트 영역부터 RGB 영역의 유기절연막 표면을 스켄 (Scan)하여 측정 후 화이트 영역에서 유기절연막의 최소 두께와 RGB 영역 상부에서 유기절연막의 최대 두께를 구하고 이들의 두께 편차를 단차로 나타내었다.After scanning and measuring the surface of the organic insulating film from the white area to the RGB area with Tencor equipment, the minimum thickness of the organic insulating film in the white area and the maximum thickness of the organic insulating film in the upper part of the RGB area are calculated, and the thickness deviation is calculated as a step. indicated.
나) 해상력 B) Resolution
상기 가) 단차 측정 방법과 동일한 공정으로 최적 감도 지점에서 화이트 컬러부에서 유기절연막의 홀 사이즈를 광학현미경을 이용하여 측정하였다.( 마스크 홀 사이즈는 14 um 기준 사이즈에서 측정 하였다.)
The hole size of the organic insulating film was measured using an optical microscope in the white color area at the optimal sensitivity point using the same process as the step measurement method a) above. (The mask hole size was measured at a standard size of 14 um.)
다) 접착력 c) Adhesion
상기 가) 단차 측정 방법과 동일한 공정으로 진행 후 유기막이 뜯기는 패턴의 사이즈를 광학 현미경을 이용하여 측정하였다.After proceeding with the same process as the step measurement method A) above, the size of the pattern where the organic film was torn was measured using an optical microscope.
상기 표 2에 나타난 바와 같이, 본 발명에 따른 실시예 1 내지 7의 감광성 수지 조성물은 화이트 영역과 RGB 영역 간에 8,000 Å 이내의 단차를 나타내었으며, 특히 실시예 1 내지 5의 경우 5,000 Å 이내의 작은 단차를 나타내었으며, 반면 비교예 1 내지 2의 경우 실시예들에 비하여 현저히 큰 단차를 나타내었으며, 비교예 3의 경우 해상력이 떨어져 단차가 측정되지 않았다. 또한 실시예의 경우 해상력 및 기판과의 접착성 면에서도 동시에 우수한 결과를 나타내었다.
As shown in Table 2, the photosensitive resin compositions of Examples 1 to 7 according to the present invention exhibited a step difference of less than 8,000 Å between the white area and the RGB area, and in particular, in the case of Examples 1 to 5, a small step of less than 5,000 Å. A step difference was shown. On the other hand, Comparative Examples 1 and 2 showed a significantly larger step difference than the Examples, and in the case of Comparative Example 3, the step difference was not measured due to poor resolution. In addition, the examples showed excellent results in terms of resolution and adhesion to the substrate.
Claims (14)
b) 광개시제;
c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물; 및
d) 용매를 포함하며,
상기 아크릴계 공중합체 100 중량부를 기준으로, 상기 ⅰ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물의 중량비(X)와 c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 중량비(Y)의 곱(X * Y )이 1200 내지 10500이고,
상기 c)의 상기 불포화 결합을 가지는 다관능성 모노머 또는 올리고머는, 관능기의 수가 2 내지 6인 저관능의 불포화 결합을 가지는 다관능성 모노머 또는 올리고머, 및 관능기의 수가 6을 초과하는 고관능의 불포화 결합을 갖는 다관능성 모노머 또는 올리고머의 혼합물인 감광성 수지 조성물. a) i) unsaturated carboxylic acid, unsaturated carboxylic anhydride or mixtures thereof; and ii) an acrylic copolymer prepared by polymerizing the unsaturated carboxylic acid or unsaturated carboxylic anhydride and a polymerizable monomer;
b) photoinitiator;
c) polyfunctional monomers, oligomers or mixtures thereof having an unsaturated bond; and
d) contains a solvent,
Based on 100 parts by weight of the acrylic copolymer, i) the weight ratio of the unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixture thereof (X) and c) the weight ratio of the polyfunctional monomer, oligomer, or mixture thereof having an unsaturated bond (Y) ) the product (X * Y) is 1200 to 10500,
The polyfunctional monomer or oligomer having the unsaturated bond of c) includes a polyfunctional monomer or oligomer having a low-functional unsaturated bond with a number of functional groups of 2 to 6, and a high-functional unsaturated bond with a number of functional groups exceeding 6. A photosensitive resin composition that is a mixture of multifunctional monomers or oligomers.
a) 아크릴계 공중합체 100 중량부;
b) 광개시제 0.1 내지 30 중량부;
c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물 80 내지 300 중량부; 및
d) 용매 50 내지 500 중량부를 포함하는 감광성 수지 조성물. According to paragraph 1,
a) 100 parts by weight of acrylic copolymer;
b) 0.1 to 30 parts by weight of photoinitiator;
c) 80 to 300 parts by weight of polyfunctional monomers, oligomers, or mixtures thereof having an unsaturated bond; and
d) A photosensitive resin composition containing 50 to 500 parts by weight of a solvent.
상기 X는 15≤X≤35인 감광성 수지 조성물.According to paragraph 1,
The photosensitive resin composition wherein X is 15≤X≤35.
상기 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물은 아크릴산, 메타크릴산; 말레인산, 푸마르산, 시트라콘산, 메타콘산, 이타콘산; 및 이들의 무수물 중에서 선택된 1종 이상의 물질을 포함하는 감광성 수지 조성물.According to clause 1,
The unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixtures thereof include acrylic acid, methacrylic acid; Maleic acid, fumaric acid, citraconic acid, metaconic acid, itaconic acid; A photosensitive resin composition comprising at least one material selected from among anhydrides thereof.
상기 광개시제가 옥심에스테르계 화합물인 감광성 수지 조성물.According to clause 1,
A photosensitive resin composition wherein the photoinitiator is an oxime ester-based compound.
상기 불포화 결합을 가지는 다관능성 모노머 또는 올리고머는 에틸렌성 불포화 결합을 가지는 다관능성 모노머, 우레탄 아크릴 레이트, 에폭시 아크릴 레이트, 폴리에스터 아크릴레이트, 또는 이들의 혼합물인 감광성 수지 조성물.According to paragraph 1,
The photosensitive resin composition wherein the polyfunctional monomer or oligomer having an unsaturated bond is a polyfunctional monomer having an ethylenically unsaturated bond, urethane acrylate, epoxy acrylate, polyester acrylate, or a mixture thereof.
상기 불포화 결합을 가지는 다관능성 모노머 또는 올리고머는,
관능기의 수가 2 내지 6인 저관능의 불포화 결합을 가지는 다관능성 모노머 또는 올리고머 10 내지 90 중량%와,
관능기의 수가 6을 초과하는 고관능의 불포화 결합을 가지는 다관능성 모노머 또는 올리고머 90 내지 10 중량%의 혼합물인 감광성 수지 조성물.According to paragraph 1,
The polyfunctional monomer or oligomer having the unsaturated bond is,
10 to 90% by weight of a polyfunctional monomer or oligomer having a low-functional unsaturated bond having 2 to 6 functional groups,
A photosensitive resin composition that is a mixture of 90 to 10% by weight of polyfunctional monomers or oligomers having highly functional unsaturated bonds in which the number of functional groups exceeds 6.
상기 c) 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 25 ℃에서 측정한 점도가 5,000 내지 11,000 mPa·s인 감광성 수지 조성물.According to paragraph 1,
Above c) a photosensitive resin composition wherein the polyfunctional monomer, oligomer, or mixture thereof having an unsaturated bond has a viscosity of 5,000 to 11,000 mPa·s measured at 25°C.
상기 불포화 카르본산은 메타크릴산이고,
상기 a) 아크릴계 공중합체 100 중량부를 기준으로 하였을 때, 메타크릴산의 중량비(X)와 c)의 불포화 결합을 가지는 다관능성 모노머, 올리고머 또는 이들의 혼합물의 중량비(Y)의 중량비의 곱(X * Y )이 2400 내지 5000인 감광성 수지 조성물.According to paragraph 1,
The unsaturated carboxylic acid is methacrylic acid,
Based on 100 parts by weight of a) acrylic copolymer, the product of the weight ratio of the weight ratio of methacrylic acid ( * A photosensitive resin composition where Y ) is 2400 to 5000.
첨가제를 더욱 포함하는 감광성 수지 조성물.According to paragraph 1,
A photosensitive resin composition further comprising an additive.
상기 화이트 영역과 RGB 영역 간의 유기절연막의 단차는 8,000 Å 이내이고,
상기 유기절연막은 제1항 내지 제10항 중 어느 한 항 기재의 감광성 수지 조성물로 형성된 것인 화이트 구조의 COT 액정표시장치.In the COT liquid crystal display device with a white structure including an organic insulating film formed simultaneously in the white area and the RGB area,
The step difference of the organic insulating film between the white area and the RGB area is within 8,000 Å,
A COT liquid crystal display device with a white structure, wherein the organic insulating film is formed of the photosensitive resin composition according to any one of claims 1 to 10.
상기 화이트 영역과 RGB 영역 간의 유기절연막의 단차는 5,000 Å 이내인 화이트 구조의 COT 액정표시장치.According to clause 12,
A COT liquid crystal display device with a white structure where the step difference of the organic insulating film between the white area and the RGB area is within 5,000 Å.
상기 유기절연막은 제1항 내지 제10항 중 어느 한 항 기재의 감광성 수지 조성물로 형성된 것인 화이트 구조의 COT 액정표시장치.
According to clause 12,
A COT liquid crystal display device with a white structure, wherein the organic insulating film is formed of the photosensitive resin composition according to any one of claims 1 to 10.
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