KR102010004B1 - 연성동박적층필름 및 이의 제조방법 - Google Patents
연성동박적층필름 및 이의 제조방법 Download PDFInfo
- Publication number
- KR102010004B1 KR102010004B1 KR1020120141315A KR20120141315A KR102010004B1 KR 102010004 B1 KR102010004 B1 KR 102010004B1 KR 1020120141315 A KR1020120141315 A KR 1020120141315A KR 20120141315 A KR20120141315 A KR 20120141315A KR 102010004 B1 KR102010004 B1 KR 102010004B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- polyimide
- copper
- film
- laminated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 36
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 168
- 239000010949 copper Substances 0.000 claims abstract description 141
- 229910052802 copper Inorganic materials 0.000 claims abstract description 139
- 238000004519 manufacturing process Methods 0.000 claims abstract description 32
- 239000011889 copper foil Substances 0.000 claims abstract description 31
- 239000010410 layer Substances 0.000 claims description 233
- 229920001721 polyimide Polymers 0.000 claims description 190
- 239000004642 Polyimide Substances 0.000 claims description 154
- 239000002121 nanofiber Substances 0.000 claims description 113
- 239000011247 coating layer Substances 0.000 claims description 26
- 229920005575 poly(amic acid) Polymers 0.000 claims description 26
- 238000001523 electrospinning Methods 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000005001 laminate film Substances 0.000 claims description 9
- 235000015110 jellies Nutrition 0.000 claims description 8
- 239000008274 jelly Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 7
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229920005604 random copolymer Polymers 0.000 claims description 6
- 230000006855 networking Effects 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 abstract description 13
- 230000001070 adhesive effect Effects 0.000 abstract description 13
- 239000010408 film Substances 0.000 description 73
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 19
- 239000000243 solution Substances 0.000 description 18
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- 238000007747 plating Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 6
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 4
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- 239000002904 solvent Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- MXPYJVUYLVNEBB-UHFFFAOYSA-N 2-[2-(2-carboxybenzoyl)oxycarbonylbenzoyl]oxycarbonylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(O)=O MXPYJVUYLVNEBB-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
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- WCXGOVYROJJXHA-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)S(=O)(=O)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 WCXGOVYROJJXHA-UHFFFAOYSA-N 0.000 description 2
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 2
- GEYAGBVEAJGCFB-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 GEYAGBVEAJGCFB-UHFFFAOYSA-N 0.000 description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 2
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- PAYRUJLWNCNPSJ-UHFFFAOYSA-N N-phenyl amine Natural products NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
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- WRPSKOREVDHZHP-UHFFFAOYSA-N benzene-1,4-diamine Chemical compound NC1=CC=C(N)C=C1.NC1=CC=C(N)C=C1 WRPSKOREVDHZHP-UHFFFAOYSA-N 0.000 description 2
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 2
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- BAVYZALUXZFZLV-UHFFFAOYSA-N mono-methylamine Natural products NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
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- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- HUWXDEQWWKGHRV-UHFFFAOYSA-N 3,3'-Dichlorobenzidine Chemical compound C1=C(Cl)C(N)=CC=C1C1=CC=C(N)C(Cl)=C1 HUWXDEQWWKGHRV-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical compound C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical compound C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- LXJLFVRAWOOQDR-UHFFFAOYSA-N 3-(3-aminophenoxy)aniline Chemical compound NC1=CC=CC(OC=2C=C(N)C=CC=2)=C1 LXJLFVRAWOOQDR-UHFFFAOYSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- UCFMKTNJZCYBBJ-UHFFFAOYSA-N 3-[1-(2,3-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)C1=CC=CC(C(O)=O)=C1C(O)=O UCFMKTNJZCYBBJ-UHFFFAOYSA-N 0.000 description 1
- IGGHMIKCHPZMAC-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC=1C=C(OC2=CC(=CC=C2)OC2=CC(=CC=C2)N)C=CC1.NC=1C=C(OC2=CC(=CC=C2)OC2=CC(=CC=C2)N)C=CC1 IGGHMIKCHPZMAC-UHFFFAOYSA-N 0.000 description 1
- LJMPOXUWPWEILS-UHFFFAOYSA-N 3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1C2C(=O)OC(=O)C2CC2C(=O)OC(=O)C21 LJMPOXUWPWEILS-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical compound CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 1
- IJJNNSUCZDJDLP-UHFFFAOYSA-N 4-[1-(3,4-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 IJJNNSUCZDJDLP-UHFFFAOYSA-N 0.000 description 1
- BZIVKXRNXXPVJD-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=C(OC2=CC(=CC=C2)OC2=CC=C(C=C2)N)C=C1.NC1=CC=C(OC2=CC(=CC=C2)OC2=CC=C(C=C2)N)C=C1 BZIVKXRNXXPVJD-UHFFFAOYSA-N 0.000 description 1
- UTDAGHZGKXPRQI-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(S(=O)(=O)C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 UTDAGHZGKXPRQI-UHFFFAOYSA-N 0.000 description 1
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
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- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- RZIPTXDCNDIINL-UHFFFAOYSA-N cyclohexane-1,1,2,2-tetracarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCCC1(C(O)=O)C(O)=O RZIPTXDCNDIINL-UHFFFAOYSA-N 0.000 description 1
- SSJXIUAHEKJCMH-UHFFFAOYSA-N cyclohexane-1,2-diamine Chemical compound NC1CCCCC1N SSJXIUAHEKJCMH-UHFFFAOYSA-N 0.000 description 1
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- ZZMOAXANMUHBCH-UHFFFAOYSA-N cyclohexane-1,4-diamine Chemical compound NC1CCC(N)CC1.NC1CCC(N)CC1 ZZMOAXANMUHBCH-UHFFFAOYSA-N 0.000 description 1
- SSOKWJZBRNYWLM-UHFFFAOYSA-N cyclopentane-1,2-diamine Chemical compound NC1CCCC1N.NC1CCCC1N SSOKWJZBRNYWLM-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/14—Layered products comprising a layer of metal next to a fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/12—Layered products comprising a layer of synthetic resin next to a fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
- B32B5/028—Net structure, e.g. spaced apart filaments bonded at the crossing points
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/10—Interconnection of layers at least one layer having inter-reactive properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/246—Vapour deposition
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/02—Coating on the layer surface on fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
- B32B2255/205—Metallic coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2311/00—Metals, their alloys or their compounds
- B32B2311/12—Copper
Landscapes
- Laminated Bodies (AREA)
Abstract
Description
도 2는 본 발명의 연성동박적층필름의 개략도 및 단면도이며, A 및 B는 폴리이미드 나노섬유층(20)이 폴리이미드층(10)과 및 구리코팅층(25)-구리층(30)을 바인딩(binding)시킨 형태에 대한 개략도이다.
도 3 및 도 4 각각은 본 발명의 일 구현예로서, 양면 연성동박적층필름의 개략도 및 단면도이다.
도 5는 DC 스퍼터링 방법에 대한 개략도이다.
구분 | 폴리이미드층 두께(㎛) |
폴리이미드 나노섬유층 두께(㎛) |
니켈-크롬 합금층 중량비 및 두께(㎛) | 구리코팅층 두께(㎛) |
구리층 두께(㎛) |
실시예 1 | 20 | 5 | - | 0.2 | 10 |
실시예 2 | 20 | 5 | - | 0.2 | 10 |
실시예 3 | 20 | 5 | - | 0.2 | 10 |
실시예 4 | 20 | 5 | - | 0.2 | 10 |
실시예 5 | 20 | 1 | - | 0.2 | 10 |
실시예 6 | 20 | 10 | - | 0.2 | 10 |
실시예 7 (양면) |
20 | 5 | - | 0.2 | 10 |
비교예 1 | 20 | X | - | 0.2 | 10 |
비교예 2 | 20 | 플라즈마 개질처리 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 3 | 20 | 0.5 | - | 0.2 | 10 |
비교예 4 | 20 | 12 | - | 0.2 | 10 |
구분 | 초기박리강도 ( 25℃, 0hr, 단위:g/㎝) |
박리강도 (150℃, 168hr, 단위:kg/㎝) |
실시예 1 | 0.86 g/㎝ | 0.70 g/㎝ |
실시예 2 | 0.90 g/㎝ | 0.75 g/㎝ |
실시예 3 | 0.85 g/㎝ | 0.72 g/㎝ |
실시예 4 | 0.86 g/㎝ | 0.67 g/㎝ |
실시예 5 | 0.78 g/㎝ | 0.63 g/㎝ |
실시예 6 | 0.94 g/㎝ | 0.81 g/㎝ |
실시예 7 (양면) |
0.87 g/㎝ | 0.69 g/㎝ |
비교예 1 | 0.83 g/㎝ | 0.58 g/㎝ |
비교예 2 (개질+합금) |
0.95 g/㎝ | 0.71 g/㎝ |
비교예 3 | 0.75 g/㎝ | 0.55 g/㎝ |
비교예 4 | 0.95 g/㎝ | 0.82 g/㎝ |
Claims (20)
- 폴리이미드층; 폴리이미드 나노섬유층; 및 구리(Cu)층;을 포함하며,
상기 폴리이미드 나노섬유층은 폴리이미드 나노섬유가 그물 형태의 네트워킹 구조를 형성하고 있고, 상기 폴리이미드 나노섬유의 일부는 구리층 내부에 심초(caisson) 및 혼재되어 있는 것을 특징으로 하는 연성동박적층필름.
- 제1항에 있어서, 상기 폴리이미드층, 상기 폴리이미드 나노섬유층 및 상기 구리층 순으로 적층되어 있는 것을 특징으로 하는 연성동박적층필름.
- 제1항에 있어서, 상기 폴리이미드층의 상부면 및 하부면 각각 면에 상기 폴리이미드 나노섬유층 및 상기 구리층 순으로 적층되어 있는 것을 특징으로 하는 연성동박적층필름.
- 제1항에 있어서, 상기 폴리이미드 나노섬유층 및 상기 구리층 사이에 구리코팅층을 더 포함하는 것을 특징으로 하는 연성동박적층필름.
- 삭제
- 삭제
- 제1항에 있어서, 상기 나노섬유의 평균직경은 10 ~ 500 ㎚인 것을 특징으로 하는 연성동박적층필름.
- 제1항에 있어서, 상기 폴리이미드층은 평균두께 10 ~ 50 ㎛이고, 상기 구리층은 평균두께 5 ~ 50 ㎛인 것을 특징으로 하는 연성동박적층필름.
- 제9항에 있어서, JIS C6471 방법으로 50 mm/분의 속도로 측정시, 초기 박리강도가 0.75 ~ 1.00 ㎏/㎝이고, 150℃, 168 시간 후 상술한 조건 하에서 측정시, 박리강도가 0.6 ~ 0.85 kg/cm인 것을 특징으로 하는 연성동박적층필름.
- 폴리이미드 필름의 상부면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계; 및
상기 폴리이미드 나노섬유층의 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항에 있어서,
상기 폴리이미드 필름의 하부면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계; 및
상기 폴리이미드 나노섬유층의 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 폴리이미드 필름의 상부면 및 하부면 각각의 면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계; 및
폴리이미드 필름의 상부면 및 하부면에 형성된 각각 폴리이미드 나노섬유층의 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항 내지 제14항 중에서 선택된 어느 한 항에 있어서, 상기 구리층을 형성시키는 단계는
폴리이미드 나노섬유층의 상부면에 구리를 증착시켜서 구리코팅층을 형성시키는 단계;를 더 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항 내지 제14항 중에서 선택된 어느 한 항에 있어서, 상기 폴리이미드 나노섬유층을 형성시키는 단계의 열처리전의 폴리이미드 필름은 젤리상태인 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항 내지 제14항 중에서 선택된 어느 한 항에 있어서, 상기 폴리이미드 나노섬유층은 평균두께 1 ㎛ ~ 10 ㎛인 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항 내지 제14항 중에서 선택된 어느 한 항에 있어서, 상기 전기방사는 5 ~ 25 kV의 고전압에서 수행하는 하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제12항 내지 제14항 중에서 선택된 어느 한 항에 있어서, 상기 열처리는 10 ~ 30℃부터 300 ~ 400℃까지 분당 2 ~ 6℃의 속도로 승온시키면서 수행하는 것을 특징으로 연성동박적층필름의 제조방법.
- 제15항에 있어서, 구리코팅층을 형성시키는 단계는 아르곤기체 1×10-2 ~ 1×10 Pa 분위기 하에서, DC 스퍼터링(DC sputtering)법으로 수행하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
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