KR102003880B1 - 연성동박적층필름 및 이의 제조방법 - Google Patents
연성동박적층필름 및 이의 제조방법 Download PDFInfo
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- KR102003880B1 KR102003880B1 KR1020120141285A KR20120141285A KR102003880B1 KR 102003880 B1 KR102003880 B1 KR 102003880B1 KR 1020120141285 A KR1020120141285 A KR 1020120141285A KR 20120141285 A KR20120141285 A KR 20120141285A KR 102003880 B1 KR102003880 B1 KR 102003880B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- polyimide
- nickel
- copper
- chromium alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims description 34
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- 239000010949 copper Substances 0.000 claims abstract description 127
- 229910052802 copper Inorganic materials 0.000 claims abstract description 125
- 238000004519 manufacturing process Methods 0.000 claims abstract description 30
- 239000005001 laminate film Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 281
- 229920001721 polyimide Polymers 0.000 claims description 176
- 239000004642 Polyimide Substances 0.000 claims description 138
- 239000002121 nanofiber Substances 0.000 claims description 114
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims description 74
- 229920005575 poly(amic acid) Polymers 0.000 claims description 25
- 238000000151 deposition Methods 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 239000011247 coating layer Substances 0.000 claims description 14
- 238000001523 electrospinning Methods 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 10
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 9
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 7
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- 239000000126 substance Substances 0.000 claims description 7
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- 239000011651 chromium Substances 0.000 claims description 6
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- 150000001875 compounds Chemical class 0.000 claims description 2
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- 230000000052 comparative effect Effects 0.000 description 30
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- 238000007747 plating Methods 0.000 description 11
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- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 2
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 2
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- OBKARQMATMRWQZ-UHFFFAOYSA-N naphthalene-1,2,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 OBKARQMATMRWQZ-UHFFFAOYSA-N 0.000 description 2
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- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- MXPYJVUYLVNEBB-UHFFFAOYSA-N 2-[2-(2-carboxybenzoyl)oxycarbonylbenzoyl]oxycarbonylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(O)=O MXPYJVUYLVNEBB-UHFFFAOYSA-N 0.000 description 1
- HUWXDEQWWKGHRV-UHFFFAOYSA-N 3,3'-Dichlorobenzidine Chemical compound C1=C(Cl)C(N)=CC=C1C1=CC=C(N)C(Cl)=C1 HUWXDEQWWKGHRV-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical compound C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- LXJLFVRAWOOQDR-UHFFFAOYSA-N 3-(3-aminophenoxy)aniline Chemical compound NC1=CC=CC(OC=2C=C(N)C=CC=2)=C1 LXJLFVRAWOOQDR-UHFFFAOYSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- UCFMKTNJZCYBBJ-UHFFFAOYSA-N 3-[1-(2,3-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)C1=CC=CC(C(O)=O)=C1C(O)=O UCFMKTNJZCYBBJ-UHFFFAOYSA-N 0.000 description 1
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- UCQABCHSIIXVOY-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=CC(=CC=2)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 UCQABCHSIIXVOY-UHFFFAOYSA-N 0.000 description 1
- WCXGOVYROJJXHA-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)S(=O)(=O)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 WCXGOVYROJJXHA-UHFFFAOYSA-N 0.000 description 1
- LJMPOXUWPWEILS-UHFFFAOYSA-N 3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1C2C(=O)OC(=O)C2CC2C(=O)OC(=O)C21 LJMPOXUWPWEILS-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- AVCOFPOLGHKJQB-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)sulfonylphthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1S(=O)(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 AVCOFPOLGHKJQB-UHFFFAOYSA-N 0.000 description 1
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical compound CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 1
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 description 1
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- QHHKLPCQTTWFSS-UHFFFAOYSA-N 5-[2-(1,3-dioxo-2-benzofuran-5-yl)-1,1,1,3,3,3-hexafluoropropan-2-yl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)(C(F)(F)F)C(F)(F)F)=C1 QHHKLPCQTTWFSS-UHFFFAOYSA-N 0.000 description 1
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- 238000003851 corona treatment Methods 0.000 description 1
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Images
Classifications
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0036—Heat treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
- B32B5/028—Net structure, e.g. spaced apart filaments bonded at the crossing points
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/08—Interconnection of layers by mechanical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/246—Vapour deposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/02—Coating on the layer surface on fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
- B32B2255/205—Metallic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2311/00—Metals, their alloys or their compounds
- B32B2311/12—Copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2311/00—Metals, their alloys or their compounds
- B32B2311/22—Nickel or cobalt
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Abstract
Description
도 2는 본 발명의 일 구현예로서, 양면 연성동박적층필름의 개략도 및 단면도이다.
도 3은 DC 스퍼터링 방법에 대한 개략도이다.
구분 | 폴리이미드층 두께(㎛) |
폴리이미드 나노섬유층 두께(㎛) |
니켈-크롬 합금층 중량비 및 두께(㎛) | 구리코팅층 두께(㎛) |
구리층 두께(㎛) |
실시예 1 | 20 | 5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 2 | 20 | 5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 3 | 20 | 5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 4 | 20 | 5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 5 | 20 | 5 | 80 : 20 중량비 / 0.0008 ㎛ | 0.2 | 10 |
실시예 6 | 20 | 5 | 80 : 20 중량비 / 0.04 ㎛ | 0.2 | 10 |
실시예 7 | 20 | 1 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 8 | 20 | 10 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 9 | 20 | 5 | 72 : 28 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 10 | 20 | 5 | 88 : 12 중량비 / 0.005 ㎛ | 0.2 | 10 |
실시예 11 (양면) |
20 | 5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 1 | 20 | X | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 2 | 20 | 플라즈마 개질처리 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 3 | 20 | 5 | 80 : 20 중량비 / 0.0004 ㎛ | 0.2 | 10 |
비교예 4 | 20 | 5 | 80 : 20 중량비 / 0.1 ㎛ | 0.2 | 10 |
비교예 5 | 20 | 0.5 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 6 | 20 | 12 | 80 : 20 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 7 | 20 | 5 | 65 : 35 중량비 / 0.005 ㎛ | 0.2 | 10 |
비교예 8 | 20 | 5 | 95 : 5 중량비 / 0.005 ㎛ | 0.2 | 10 |
구분 | 초기박리강도 (25℃, 0h, 단위:g/㎝) |
후 박리강도 (150℃, 168h, 단위:kg/㎝) |
실시예 1 | 0.96 | 0.80 |
실시예 2 | 0.95 | 0.80 |
실시예 3 | 0.93 | 0.79 |
실시예 4 | 0.82 | 0.71 |
실시예 5 | 0.82 | 0.64 |
실시예 6 | 0.95 | 0.81 |
실시예 7 | 0.81 | 0.69 |
실시예 8 | 0.93 | 0.86 |
실시예 9 | 0.90 | 0.75 |
실시예 10 | 0.91 | 0.75 |
실시예 11 (양면) |
0.90 | 0.76 |
비교예 1 | 0.86 | 0.59 |
비교예 2 | 0.95 | 0.71 |
비교예 3 | 0.78 | 0.55 |
비교예 4 | 0.90 | 0.81 |
비교예 5 | 0.79 | 0.58 |
비교예 6 | 0.84 | 0.69 |
비교예 7 | 0.88 | 0.70 |
비교예 8 | 0.89 | 0.73 |
Claims (21)
- 삭제
- 삭제
- 폴리이미드층; 폴리이미드 나노섬유층; 니켈-크롬(Ni-Cr) 합금층; 및 구리(Cu)층; 순으로 적층되어 있으며,
상기 폴리이미드 나노섬유층은 폴리이미드 나노섬유가 그물 형태의 네트워킹 구조를 형성하고 있고, 상기 폴리이미드 나노섬유의 일부는 니켈-크롬 합금층 내부에 심초(caisson) 및 혼재되어 있는 것을 특징으로 하는 연성동박적층필름.
- 제3항에 있어서, 상기 폴리이미드층의 상부면 및 하부면 각각 면에 상기 폴리이미드 나노섬유층, 상기 니켈-크롬 합금층 및 상기 구리층 순으로 적층되어 있는 것을 특징으로 하는 연성동박적층필름.
- 제3항에 있어서, 상기 폴리이미드층은 평균두께 10 ~ 50 ㎛이고, 상기 니켈-크롬 합금층은 평균두께 0.0005 ~ 0.05 ㎛이며, 상기 구리층은 평균두께 5 ~ 50 ㎛인 것을 특징으로 하는 연성동박적층필름.
- 삭제
- 삭제
- 제3항에 있어서, 상기 나노섬유의 평균직경은 10 ~ 500 ㎚인 것을 특징으로 하는 연성동박적층필름.
- 제3항에 있어서, 상기 니켈-크롬(Ni-Cr) 합금층은 니켈 및 크롬을 70 ~ 90 : 30 ~ 10 중량비로 포함하고 있는 것을 특징으로 하는 연성동박적층필름.
- 제10항에 있어서, JIS C6471 방법으로 50 mm/분의 속도로 측정시, 초기 박리강도가 0.75 ~ 1.00 ㎏/㎝이고, 150℃, 168 시간 후 상술한 조건 하에서 측정시, 박리강도가 0.6 ~ 0.85 kg/cm인 것을 특징으로 하는 연성동박적층필름.
- 폴리이미드 필름의 상부면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계;
상기 폴리이미드 나노섬유층 상부면에 니켈-크롬 합금을 증착시켜서 니켈-크롬 합금층을 형성시키는 단계; 및
상기 니켈-크롬 합금층 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항에 있어서,
상기 폴리이미드 필름의 하부면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계;
상기 폴리이미드 나노섬유층 상부면에 니켈-크롬 합금을 증착시켜서 니켈-크롬 합금층을 형성시키는 단계; 및
상기 니켈-크롬 합금층 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 폴리이미드 필름의 상부면 및 하부면에 폴리아믹산 용액을 전기방사하여 나노섬유를 형성시킨 후, 열처리하여 폴리이미드 나노섬유층을 형성시키는 단계;
폴리이미드 필름의 상부면 및 하부면에 형성된 각각 폴리이미드 나노섬유층의 상부면에 니켈-크롬 합금을 증착시켜서 니켈-크롬 합금층을 형성시키는 단계; 및
상기 니켈-크롬 합금층 상부면에 구리층을 형성시키는 단계;
를 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 상기 구리층을 형성시키는 단계는
니켈-크롬 합금층의 상부면에 구리를 증착시켜서 구리코팅층을 형성시키는 단계를 더 포함하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 상기 폴리이미드 나노섬유층을 형성시키는 단계의 열처리전의 폴리이미드 필름은 젤리상태인 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 상기 폴리이미드 나노섬유층은 평균두께 1 ~ 10 ㎛ 두께인 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 상기 전기방사는 5 ~ 25 kV 의 고전압에서 수행하는 하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 상기 열처리는 10 ~ 30℃부터 300 ~ 400℃까지 분당 2 ~ 6℃의 속도로 승온시키면서 수행하는 것을 특징으로 연성동박적층필름의 제조방법.
- 제13항 내지 제15항 중에서 선택된 어느 한 항에 있어서, 니켈-크롬 합금층을 형성시키는 단계는
아르곤기체 1×10-2 ~ 1×10 Pa 분위기 하에서, DC 스퍼터링(DC sputtering)법으로 수행하는 것을 특징으로 하는 연성동박적층필름의 제조방법.
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JP2005225209A (ja) * | 2004-02-16 | 2005-08-25 | Oji Paper Co Ltd | 繊維補強樹脂付き銅箔およびその製造方法 |
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