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KR101847246B1 - Wafer processing tape - Google Patents

Wafer processing tape Download PDF

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Publication number
KR101847246B1
KR101847246B1 KR1020150170629A KR20150170629A KR101847246B1 KR 101847246 B1 KR101847246 B1 KR 101847246B1 KR 1020150170629 A KR1020150170629 A KR 1020150170629A KR 20150170629 A KR20150170629 A KR 20150170629A KR 101847246 B1 KR101847246 B1 KR 101847246B1
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KR
South Korea
Prior art keywords
film
adhesive layer
tape
adhesive
release film
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KR1020150170629A
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Korean (ko)
Other versions
KR20160067758A (en
Inventor
마사미 아오야마
사또시 오따
가즈히로 기무라
노보루 사꾸마
지로우 스기야마
Original Assignee
후루카와 덴키 고교 가부시키가이샤
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Publication of KR20160067758A publication Critical patent/KR20160067758A/en
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Publication of KR101847246B1 publication Critical patent/KR101847246B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • H01L2924/3512Cracking
    • H01L2924/35121Peeling or delaminating

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  • Engineering & Computer Science (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)

Abstract

A problem to be solved by the present invention is to provide a wafer processing tape capable of reducing occurrence of a label mark and reducing air (air) mixing between an adhesive layer and a release film.
The adhesive layer 12 is formed on the first surface of the release film 11. The adhesive layer 12 is formed on the first surface of the release film 11. The adhesive layer 12 is formed on the first surface of the release film 11, An adhesive film 13 having a label portion 13a having a predetermined planar shape and contacting with the release film 11 and a peripheral portion 13b surrounding the outer side of the label portion 13a; And the support member 14 is provided on both sides in the shorter direction of the release film 11 and the support member 14 is placed on the second surface opposite to the first surface of the adhesive layer 12 at 0.3 times And a thickness less than 1.0 times.

Description

Wafer processing tape {WAFER PROCESSING TAPE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer processing tape, and more particularly, to a wafer processing tape having two functions of a dicing tape and a die bonding film.

BACKGROUND ART [0002] In recent years, in order to adhere a dicing tape for fixing a semiconductor wafer when a semiconductor wafer is cut and separated (diced) into individual chips, for adhering a cut semiconductor chip to a lead frame or a package substrate, A dicing / die bonding tape having two functions of a die bonding film (also referred to as a die attach film) for laminating and bonding semiconductor chips to each other has been developed.

Such a dicing / die bonding tape has been subjected to free cutting in consideration of workability such as attachment to a wafer and installation of a ring frame at the time of dicing.

Examples of the pre-cut dicing and die bonding tapes are shown in Figs. 3 and 4. Fig. Fig. 4 is a plan view of the dicing / die bonding tape. Fig. 4 (b) is a cross-sectional view taken along line sectional view taken along the line BB in FIG. The dicing / die bonding tape 50 includes a release film 51, an adhesive layer 52, and an adhesive film 53. The adhesive layer 52 is formed into a circular shape corresponding to the shape of the wafer and has a circular label shape. The adhesive film 53 is formed by removing the peripheral region of the circular portion corresponding to the shape of the ring frame for dicing. As shown in the figure, the adhesive film 53 has the circular label portion 53a and a peripheral portion 53b surrounding the circular label portion 53a . The circular label portion 53a of the adhesive film 52 and the circular label portion 53a of the adhesive film 53 are laminated by aligning their centers and the circular label portion 53a of the adhesive film 53 covers the adhesive layer 52, And is in contact with the release film 51 at the periphery thereof.

The dicing film 51 is peeled from the adhesive layer 52 and the adhesive film 53 in the laminated state to dice the semiconductor wafer W on the adhesive layer 52 as shown in Fig. And the dicing ring frame R is adhered and fixed to the outer peripheral portion of the circular label portion 53a of the adhesive film 53. [ In this state, the semiconductor wafer W is diced, and then the adhesive film 53 is subjected to a hardening treatment such as ultraviolet irradiation to pick up the semiconductor chips. At this time, since the adhesive force of the adhesive film 53 is lowered by the curing treatment, the adhesive film 53 is easily peeled off from the adhesive layer 52, and the semiconductor chip is picked up with the adhesive layer 52 adhered to the back surface. The adhesive layer 52 attached to the back surface of the semiconductor chip then functions as a die bonding film when the semiconductor chip is bonded to a lead frame, a package substrate, or another semiconductor chip.

In the dicing and die bonding tape 50 as described above, the portion where the adhesive layer 52 and the circular label portion 53a of the adhesive film 53 are laminated is thicker than the peripheral portion 53b of the adhesive film 53 . The stepped portion of the adhesive layer 52 and the laminated portion of the circular label portion 53a of the adhesive film 53 and the peripheral portion 53a of the adhesive film 53 overlap when the product is wound in the form of a roll, A phenomenon that a step is transferred to the surface of the flexible adhesive layer 52, that is, a transfer mark (also referred to as a label mark, a wrinkle, or a winding mark) occurs as shown in Fig. The generation of such a transfer mark is conspicuous particularly when the adhesive layer 52 is formed of a flexible resin, when it has a thickness, and when the number of dicing / die bonding tapes 50 is large. If a transfer mark occurs, there is a possibility that a problem may occur at the time of processing the wafer due to poor adhesion between the adhesive layer and the semiconductor wafer.

In order to solve such a problem, a wafer processing tape having a supporting member provided on both sides of the release film on the second surface opposite to the first surface provided with the adhesive layer and the adhesive film, (See, for example, Patent Document 1). Since such a wafer for processing tapes is provided with a supporting member, the winding pressure applied to the tape can be dispersed or collected in the supporting member when the wafer for processing tape is wound in a roll form. Therefore, Can be suppressed.

Japanese Patent No. 4360653

The adhesive film 52 covers the adhesive layer 52 and contacts the release film 51 around the adhesive layer 52. Depending on the thickness of the adhesive layer 52, An extremely small gap may be formed between the adhesive film 51 and the adhesive film 53 to leave air (air). The air between the releasing film 51 and the adhesive film 53 may be moved to the outside of the circular label portion 53a to relieve it. In such a case, the physical properties are not greatly affected.

Such air penetrates between the adhesive layer 52 and the release film 51 while the wafer for processing tape is being transported or stored and stays there so that the adhesive layer 52 is pressed against air and deformed, There is a case where the smoothness of the core 52 is damaged. Such deformation of the adhesive layer 52 is particularly effective when the adhesive layer 52 is made of a relatively flexible resin and when the thickness of the adhesive layer 52 is thick and when the release film 51 and the adhesive film 53 The difference in elastic modulus is large, and the like.

Voids are formed between the semiconductor wafer and the adhesive layer 52 when the adhesive layer 52 having defects in smoothness is attached to the semiconductor wafer. Such a void causes a problem in processing a semiconductor wafer, which may lower the yield of the semiconductor device to be manufactured.

In order to suppress the occurrence of the transfer mark, a method of weakening the winding pressure of the tape for processing a wafer can be considered. However, in this method, winding displacement occurs and it becomes difficult, for example, There is a fear that it may interfere.

When the thickness of the supporting member is equal to or more than the thickness of the adhesive layer in order to effectively prevent a transfer mark when the supporting member is provided as in the case of the wafer processing tape of Patent Document 1, It was found that the air at the periphery of the adhesive layer was easily attracted to the inside of the adhesive layer because the pressing force by the pressure was applied to the portion of the outer side of the adhesive layer which was higher than the portion corresponding to the adhesive layer.

Accordingly, it is an object of the present invention to provide a wafer processing tape capable of reducing the occurrence of a label mark and capable of reducing air (air entrainment) between an adhesive layer and a release film .

In order to solve the above problems, a wafer processing tape according to the present invention comprises a long release film, an adhesive layer having a predetermined planar shape provided on a first surface of the release film, and a second adhesive layer covering the adhesive layer, An adhesive film having a label portion having a predetermined planar shape provided to contact the release film around the periphery of the label portion and a peripheral portion surrounding the outside of the label portion; And a support member provided on both ends in the short direction of the release film, wherein the support member has a thickness of 0.3 times or more and less than 1.0 times the thickness of the adhesive layer.

It is preferable that the semiconductor processing tape has a linear expansion coefficient of 300 ppm / 占 폚 or less.

It is preferable that the difference between the linear expansion coefficient of the support member and the linear expansion coefficient of the release film is 250 ppm / 占 폚 or less in the semiconductor processing tape.

It is preferable that the adhesive film of the tape for semiconductor processing has a pressure-sensitive adhesive layer and a base film, and a coefficient of static friction between the base film and the support member is 0.2 to 2.0.

It is preferable that the semiconductor processing tape is provided with a supporting member in a region on the second surface of the release film corresponding to the outside of the adhesive layer provided on the first surface.

It is preferable that the semiconductor processing tape is provided such that the supporting members are continuously provided along the long (length) direction of the release film.

In the semiconductor processing tape, the supporting member may be colored. At this time, it is preferable that the supporting member is colored depending on the kind of the wafer processing tape. It may also be colored depending on the thickness of the wafer processing tape.

In the semiconductor processing tape, it is preferable that the support member has a laminated structure of two or more layers.

It is preferable that the above-mentioned semiconductor processing tape is a dicing tape in which the support member is coated with a point-adhesive on a resin film base material selected from the group consisting of polyethylene terephthalate, polypropylene and high-density polyethylene.

The semiconductor processing tape preferably has a ratio Eb / Ea of the tensile storage elastic modulus Eb of the pressure-sensitive adhesive film at 23 ° C and the tensile storage elastic modulus Ea of the release film at 23 ° C of from 0.001 to 100.

In the semiconductor processing tape, the ratio Ta / Tb of the thickness Ta of the release film to the thickness Tb of the adhesive film is preferably 0.07 to 2.5.

The peeling force F1 between the adhesive layer and the release film in the T-type peeling test under the condition of the temperature of 23 占 폚 and the peeling speed of 300 mm / min is 0.025 to 0.075 N / 100 mm , And the peeling force F2 between the adhesive layer and the adhesive film is 0.08 to 10 N / 100 mm, and F1 < F2 is preferable.

According to the present invention, it is possible to reduce the occurrence of label marks and to reduce the mixing of air (air) between the adhesive layer and the adhesive film.

Fig. 1 (a) is a plan view of a wafer processing tape according to an embodiment of the present invention, and Fig. 1 (b) is a sectional view taken along the line AA in Fig.
2 is a sectional view of a wafer processing tape according to another embodiment of the present invention.
3 is a perspective view of a conventional wafer processing tape.
Fig. 4 (a) is a plan view of a conventional wafer processing tape, and Fig. 4 (b) is a sectional view taken along the line BB in Fig.
5 is a cross-sectional view showing a state in which a wafer processing tape and a dicing ring frame are joined;
6 is a schematic view for explaining a problem of a conventional wafer processing tape.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 (a) is a plan view of a wafer processing tape (dicing and die bonding tape) according to an embodiment of the present invention, and Fig. 1 (b) is a sectional view taken along the line A-A in Fig.

1 (a) and 1 (b), the wafer processing tape 10 comprises a long release film 11, an adhesive layer 12, an adhesive film 13, Member (14).

The adhesive layer 12 is provided on the first surface of the release film and has a circular label shape corresponding to the shape of the wafer. The adhesive film 13 has a circular label portion 13a covering the adhesive layer 12 and provided so as to contact the release film around the adhesive layer 12 and a peripheral label portion 13b surrounding the outer side of the circular label portion 13a. (13b). The peripheral portion 13b includes a shape that completely surrounds the outside of the circular label portion 13a and a shape that is not completely surrounded as shown. The circular label portion 13a has a shape corresponding to the ring frame for dicing. The support member 14 is a second surface 11b of the release film 11 opposite to the first surface 11a on which the adhesive 12 and the adhesive film 13 are provided and also the release film 11 , And has a thickness of 0.3 times or more and less than 1.0 times the thickness of the adhesive layer 12. [

Hereinafter, each component of the wafer processing tape 10 of the present embodiment will be described in detail.

(Release film)

Examples of the release film 11 used for the wafer processing tape 10 of the present invention include polyesters (PET, PBT, PEN, PBN, PTT), polyolefins (PP, PE), copolymers (EVA, EEA, EBA ) Or a film in which these materials are partially substituted to further improve the adhesiveness and mechanical strength can be used. Further, these films may be laminated.

The thickness of the release film is not particularly limited and may be appropriately set, but it is preferably 25 to 50 占 퐉.

(Adhesive layer)

The adhesive layer 12 of the present invention is formed on the first surface 11a of the release film 11 as described above and has a circular label shape corresponding to the shape of the wafer.

The adhesive layer 12 is attached to the back surface of the chip when the semiconductor wafer or the like is bonded and diced and then picked up, and is used as an adhesive for fixing the chip to the substrate or the lead frame. As the adhesive layer 12, a point adhesive containing at least one kind selected from an epoxy resin, an acrylic resin and a phenol resin can be preferably used. In addition, a polyimide resin or a silicone resin may be used. The thickness may be appropriately set, but it is preferably about 5 to 100 mu m.

(Adhesive film)

The adhesive film 13 of the present invention has the circular label portion 13a corresponding to the shape of the ring frame for dicing as described above and the peripheral portion 13b surrounding the circular label portion 13a. Such an adhesive film can be formed by removing the peripheral region of the circular label portion 13a from the film-shaped pressure-sensitive adhesive by free cutting.

As the adhesive film 13, there is no particular limitation, and when the wafer is diced, it has a sufficient adhesive force not to peel the wafer, and when the chip is picked up after dicing, the adhesive film 13 exhibits a low adhesive force so as to be easily peeled off from the adhesive layer do. For example, a material having a pressure-sensitive adhesive layer formed on a base film may suitably be used.

The base film of the adhesive film 13 is not particularly limited as far as it is conventionally known and can be used. When a radiation curable material is used as a pressure sensitive adhesive layer described later, it is preferable to use a material having radiation permeability.

Examples of the material include polyethylene, polypropylene, ethylene-propylene copolymer, polybutene-1, poly-4-methylpentene-1, ethylene-vinyl acetate copolymer, ethylene- Homopolymers or copolymers of? -Olefins such as methyl acrylate, methyl acrylate, methyl acrylate, methyl acrylate, methyl acrylate, methyl acrylate, methyl acrylate, methyl acrylate, Thermoplastic elastomers, and mixtures thereof. The base film may be a mixture of two or more kinds of materials selected from these groups, or may be a single layer or a multi-layered film.

The thickness of the base film is not particularly limited and may be appropriately set, but is preferably 50 to 200 占 퐉.

The resin used for the pressure-sensitive adhesive layer of the pressure-sensitive adhesive film (13) is not particularly limited, and known chlorinated polypropylene resin, acrylic resin, polyester resin, polyurethane resin, epoxy resin and the like used for the pressure-sensitive adhesive can be used.

A pressure sensitive adhesive is preferably prepared by appropriately blending an acrylic pressure sensitive adhesive, a radiation polymerizable compound, a photopolymerization initiator, a curing agent and the like to the resin of the pressure sensitive adhesive layer (13). The thickness of the pressure-sensitive adhesive layer 13 is not particularly limited and may be appropriately set, but it is preferably 5 to 30 占 퐉.

The radiation-polymerizable compound can be mixed with the pressure-sensitive adhesive layer and easily peeled from the adhesive layer by radiation curing. As the radiation polymerizing compound, for example, a low-molecular compound having at least two photopolymerizable carbon-carbon double bonds in molecules capable of forming a three-dimensional network by light irradiation is used.

Specific examples include trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol monohydroxypentaacrylate, dipentaerythritol hexaacrylate, 1,4-butylene Glycol diacrylate, 1,6-hexanediol diacrylate, polyethylene glycol diacrylate, oligoester acrylate, and the like are applicable.

In addition to the above acrylate compounds, urethane acrylate oligomers may also be used. The urethane acrylate oligomer is obtained by reacting a polyol compound such as polyester type or polyether type with a polyisocyanate compound (for example, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 1,3-xylylene Acrylate or methacrylate having a hydroxyl group (e.g., an isocyanate group-containing urethane prepolymer, a urethane prepolymer, a urethane prepolymer, a urethane prepolymer, or a urethane prepolymer) is reacted with a terminal isocyanate urethane prepolymer obtained by reacting isocyanate, 1,4-xylylene isocyanate, Hydroxyethyl acrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, polyethylene glycol acrylate, polyethylene glycol methacrylate) Loses.

The pressure-sensitive adhesive layer may be a mixture of two or more kinds selected from the above-mentioned resins.

When a photopolymerization initiator is used, for example, isopropyl benzoin ether, isobutyl benzoin ether, benzophenone, Michler's ketone, chlorothioxanthone, dodecylthioxanthone, dimethylthioxanthone, diethylthioxanthone, Benzyl dimethyl ketal,? -Hydroxycyclohexyl phenyl ketone, 2-hydroxymethylphenyl propane and the like can be used. The blending amount of these photopolymerization initiators is preferably 0.01 to 5 parts by mass relative to 100 parts by mass of the acrylic copolymer.

(Supporting member)

The support member 14 is a second surface 11b of the release film 11 opposite to the first surface 11a on which the adhesive 12 and the adhesive film 13 are provided and the second surface 11b of the release film 11 And has a thickness of 0.3 times or more and less than 1.0 times the thickness of the adhesive layer 12. By providing the support member 14 in this manner, the winding pressure applied to the tape can be dispersed when the wafer for processing tape 10 is wound in the form of a roll, so that the formation of the transfer mark on the adhesive layer 12 can be prevented It becomes possible to inhibit it.

When the support member is formed on the first surface 11a provided with the adhesive layer 12 and the adhesive film 13, the width of the support layer is preferably set within a range that does not hinder the circular label portion 13a, The width of the support member 14 can be kept wide in the structure of the present embodiment, and the occurrence of the transfer mark can be suppressed more effectively than the case where there are restrictions depending on circumstances.

In the case where the support member is formed on the first surface 11a provided with the adhesive 12 and the adhesive film 13, the width of the support layer is limited, It is possible to secure a wide width of the magnetic recording medium and to suppress the occurrence of the transfer mark more effectively.

In addition, by providing the support member 14 on the second surface 11b of the release film 11, there is obtained an effect that the allowance for the positional deviation of the support member 14 is increased.

The supporting member 14 is provided on the second surface 11b of the release film 11 on the area corresponding to the outside of the adhesive layer 12 provided on the first surface, that is, on the second surface 11b, It is preferable to provide the adhesive layer 12 in the region r from the end of the release film 11 to the adhesive layer 12 as shown in Fig. With this structure, since the adhesive layer 12 and the support member 14 provided on the second surface 11b of the release film 11 do not overlap when the tape 10 is wound up, It is possible to prevent the adhesive layer 12 from being stained with the support member 14.

The thickness of the support member 14 is 0.3 times or more and less than 1.0 times the thickness of the adhesive layer 12. [ The support member 14 has a thickness of less than 1.0 times the thickness of the adhesive layer so that the adhesive film 13 and the second surface 11b of the release film 11 overlapping the surface thereof when the tape 10 is wound The adhesive layer 12 is pressed by the winding pressure so that the penetration of air into the gap between the adhesive layer 12 and the release film 11 is prevented so that generation of voids at the time of wafer bonding can be suppressed. It is more preferable that the thickness of the support member 14 is less than 0.9 times the thickness of the pressure-sensitive adhesive layer in order to further prevent intrusion of air into between the adhesive layer 12 and the release film 11. [ Further, since the support member 14 has a thickness of 0.3 times or more the thickness of the adhesive layer, the amount of deformation of the adhesive layer 12 due to the label mark can be reduced and the label mark can be eliminated by heat at the time of wafer bonding, Can be suppressed. In order to extinguish the label mark even at a low junction temperature, it is more preferable that the thickness of the support member 14 is 0.5 times or more of the pressure-sensitive adhesive layer.

The support member 14 may be provided intermittently or continuously along the longitudinal direction of the release film 11 but may be continuously installed along the longitudinal direction of the base film 11 from the viewpoint of more effectively suppressing the occurrence of transfer marks .

The support member 14 of the present invention preferably has a linear expansion coefficient of 300 ppm / DEG C or less. When the wafer processing tape is maintained at a low temperature, for example, at -20 to 5 캜 during storage or transportation, and when bonding the adhesive layer of the wafer processing tape to the wafer, the adhesive is heat- , The heating tape is heated to about 70 to 80 DEG C on the heater table, and the wafer processing tape is placed in an environment with a large temperature change. When the size of the support member 14 changes with the temperature change, air enters between the release film 11 and the adhesive film 13 and between the adhesive layer 12 and the adhesive film 13, Bonding failure to the wafer occurs, which may lead to a decrease in the yield in the subsequent dicing step of the wafer, the expanding step of the tape, and the pick-up step or mounting step of the chip. In the present invention, by using the support member having a low coefficient of linear expansion of 300 ppm / 占 폚 or less, generation of transfer marks on the adhesive layer 12 is sufficiently suppressed, and even under a use environment with a large temperature change, ) Is small and the occurrence of voids can be suppressed.

The coefficient of linear expansion of the support member 14 is preferably 150 ppm / ° C or less, and more preferably 70 ppm / ° C or less, in order to more effectively suppress the generation of transfer marks and generation of voids. The lower limit of the coefficient of linear expansion is not particularly limited, and is usually 0.1 ppm / 占 폚.

The difference between the linear expansion coefficient of the support member 14 and the linear expansion coefficient of the release film 11 is preferably 250 ppm / ° C or less. When the difference in coefficient of linear expansion is larger than 250 ppm / 占 폚, a difference in dimension between the support member 14 and the release film 11 occurs depending on a low temperature state during storage and transportation and a temperature change in a normal temperature state during use. And the like.

(1) When a dimensional difference occurs in accordance with the temperature change, voids may occur between the release film 11 and the adhesive film 13 and between the adhesive layer 12 and the adhesive film 13 as described above.

(2) When the user handles in a roll shape, the possibility of collapse of the winding increases. More specifically, for example, even when normally wound at the time of manufacture and shipping, there is a possibility that a dimensional difference occurs at the time of use at room temperature from refrigeration storage at the user side and at refrigeration storage at the time of use at room temperature, and the possibility of collapse of winding is increased.

(3) A clearance is formed between the sheets wound in a roll shape by the dimensional difference, and the possibility of contamination of the foreign matters from the roll side is increased.

(4) In the case where the tape for wafer processing has a large number of windings or a wide product width, the cooling speed is lower than or equal to the cooling rate on the roll center side and the outer peripheral side of the roll when refrigerated from room temperature. As a result, the difference in dimension between the support member 14 and the release film 11 due to the linear expansion difference on the roll center side and the roll outer circumferential side is different, and the shape of the entire roll is likely to change.

In the present invention, the coefficient of linear expansion refers to an increasing rate of spatial expansion of an object when the temperature is changed under static pressure. When the temperature is T and the length of the solid is L, the coefficient of linear expansion? Is given by the following equation.

? = (1 / L) (? L /? T)

The coefficient of linear expansion in the present invention can be measured using a thermomechanical analyzer (TMA), for example, according to JIS K7197, a linear expansion coefficient test method by thermomechanical analysis of plastic, 5 mm and a distance between the chucks of 10 mm. The sample can be measured under the conditions of a tensile load of 10 g, a temperature rise rate of 5 ° C / min, an N 2 gas atmosphere, and a measurement temperature range of -20 ° C to 50 ° C.

The supporting member 14 is preferably made of a material having a certain degree of friction coefficient with respect to the adhesive film 13 from the viewpoint of preventing the winding off of the tape 10 for wafer processing. As a result, it is possible to prevent the wafer processing tape 10 from being wrapped around, and to achieve high-speed winding and increasing the number of windings.

The coefficient of static friction between the support member 14 and the base film of the adhesive film 13 is preferably 0.2 to 2.0, more preferably 0.6 to 1.6. The peripheral portion 13a of the adhesive film 13 provided on the first surface 11a side of the release film 11 and the peripheral portion 13b of the release film 11 on the second surface 11b side If the coefficient of static friction between the supporting member 14 and the base film of the adhesive film 13 is as small as less than 0.2, a winding deviation occurs at the time of manufacture or use The handling becomes worse. On the other hand, if it is larger than 2.0, the resistance between the base film and the supporting member 14 of the adhesive film 13 becomes excessively large, which leads to deterioration of the handling property in the manufacturing process, Therefore, by setting the coefficient of static friction between them to the above range, it is possible to prevent winding deviation of the wafer for processing tape 10, enable high-speed winding, and increase the number of windings.

In the present invention, the coefficient of static friction between the support member 14 and the base film of the pressure-sensitive adhesive film 13 conforms to JIS K7125 and can be obtained by the following measurement method.

The lower film is fixed by superposing both the base film of the adhesive film 13 cut with 25 mm (width) x 100 mm (length) and both film samples of the support member 14. Subsequently, a weight of 200 g in weight was placed as a load W on the laminated film, and the upper film was pulled at a speed of 200 mm / min to measure the force Fd (g) at the time of slipping out, The friction coefficient (μd) is obtained.

μd = Fd / W

As the support member 14, for example, a dicing tape in which a point adhesive is applied to a resin film base can be suitably used. By attaching such a viscous adhesive tape to predetermined positions of both end portions of the second surface 11b of the release film 11, the wafer processing tape 10 of the present embodiment can be formed.

The base resin of the viscous adhesive tape is not particularly limited as long as it satisfies the range of the linear expansion coefficient and can withstand the winding pressure. However, from the viewpoints of heat resistance, smoothness and easy accessibility, polyethylene terephthalate (PET) And high-density polyethylene.

The composition and physical properties of the pressure-sensitive adhesive of the pressure-sensitive adhesive tape are not particularly limited and may be those that can not be peeled off from the release film 11 in the winding process and the storage process of the wafer for processing tape 10.

As the support member 14, a colored support member may be used. By using such a coloring supporting member, the kind of the wafer processing tape 10 can be clearly identified when the wafer processing tape is wound in a roll form. For example, by changing the color of the coloring supporting member 14 depending on the type and thickness of the wafer processing tape 10, it is possible to easily identify the type and thickness of the wafer processing tape 10, Can be suppressed and prevented.

The tape 10 for wafer processing has a ratio Eb / Ea of the tensile storage elastic modulus Eb of the adhesive film 13 at 23 ° C to the tensile storage elastic modulus Ea of the release film 11 at 23 ° C of from 0.001 to 100 Is preferable.

As the value of Eb / Ea is larger, the adhesive film 13 is relatively hard and the release film 11 is flexible. On the other hand, the smaller the value of Eb / Ea, the more flexible the adhesive film 13 and the harder the release film 11. According to the above constitution, since the Eb / Ea is 0.001 or more, the hardness (tensile storage modulus of elasticity Eb) of the pressure-sensitive adhesive film becomes constant or higher. Therefore, it is possible to suppress the occurrence of transfer marks on the adhesive layer 12 constituting the wafer 10 for tape processing. The Eb / Ea is 0.001 or more, and the hardness (tensile storage modulus of elasticity Eb) of the adhesive film 13 is equal to or more than a certain value. Therefore, when the adhesive film 13 and the release film 11) can be adequately peeled (picked).

Since the Eb / Ea is not more than 100, the hardness (tensile storage elastic modulus Ea) of the release film 11 becomes a certain value or more and the hardness (tensile storage elastic modulus Eb) of the adhesive film 13 becomes constant or less . Therefore, it is possible to prevent the release film 11 from being bent when the adhesive layer 12 is bonded to the release film 11, and the surface of the adhesive layer 12 can be damaged, It can be prevented that it is mixed. As a result, occurrence of voids between the adhesive layer (12) and the semiconductor wafer (W) at the time of lifting the film of the release film (11) or mounting the semiconductor wafer (W) can be suppressed.

As described above, according to the above constitution, it is possible to suppress the occurrence of the transfer-causing mark on the adhesive layer 12 when the film is rolled up. It is also possible to suppress the occurrence of voids between the adhesive layer 12 and the semiconductor wafer W when the film of the release film 11 is lifted or when the semiconductor wafer W is mounted.

In the above configuration, the thickness of the release film 11 is preferably 10 to 100 占 퐉, and the thickness of the adhesive film 13 is preferably 25 to 180 占 퐉.

In the above constitution, the tensile storage elastic modulus Eb of the pressure-sensitive adhesive film 13 at 23 ° C is preferably 1 to 500 MPa, and the tensile storage elastic modulus Ea of the release film 11 at 23 ° C is 1 to 100 MPa. 5000 MPa.

In the above configuration, it is preferable that the adhesive layer 12 has a glass transition temperature in the range of 0 to 100 占 폚 and a tensile storage modulus at 23 占 폚 before curing of 50 to 5000 MPa. By setting the glass transition temperature of the adhesive layer 12 to 0 占 폚 or more, the adhesiveness of the adhesive layer 12 in the B-stage state can be prevented from being increased, and good handling properties can be maintained. Further, at the time of dicing, it is possible to prevent a part of the adhesive layer 12 from melting and adhering the adhesive to the semiconductor chip. As a result, good pickup performance of the semiconductor chip can be maintained. On the other hand, by lowering the glass transition temperature to 100 占 폚 or less, the fluidity of the adhesive layer 12 can be prevented from lowering. In addition, good adhesion with the semiconductor wafer W can be maintained. When the adhesive layer 12 is of a thermosetting type, the glass transition temperature of the adhesive layer 12 refers to that before the thermosetting. Further, by setting the tensile storage modulus of the adhesive layer 12 at 23 占 폚 before curing to 50 Mpa or more, it is possible to prevent the adhesive layer 12 from being partially melted and sticking to the semiconductor chip during dicing . On the other hand, when the tensile storage elastic modulus is 5000 MPa or less, good adhesion with the semiconductor wafer W and the substrate can be maintained.

The wafer processing tape 10 preferably has a Ta / Tb ratio within the range of 0.07 to 2.5 when the thickness of the release film 11 is Ta and the thickness of the adhesive film 13 is Tb.

When the thickness Ta of the release film 11 is made constant, the Ta / Tb becomes thicker as the value becomes smaller, for example, and the adhesive film 13 becomes thicker. According to the above configuration, since Ta / Tb is 0.07 or more, the step difference between the portion where the adhesive film 13 is laminated and the portion where the adhesive film 13 is not laminated is a certain level or less. Therefore, it is possible to suppress the occurrence of transfer marks. In addition, since the Ta / Tb is 0.07 or more and the thickness of the adhesive film 13 is thicker than that of the release film 11, stress can be absorbed according to the thickness of the release film 11, . The adhesive film 13 and the release film 11 are bonded to each other at the time of bonding to the semiconductor wafer W because the Ta / Tb is 0.07 or more and the thickness of the adhesive film 13 is thicker than that of the release film 11, (Pecking) the substrate W. Further, when the thickness Tb of the adhesive film 13 is kept constant, the thickness of the release film 11 becomes thinner as the value becomes smaller. Since the Ta / Tb is 2.5 or less, the thickness of the release film 11 is a certain value or less. Therefore, the step coverage of the portion where the adhesive film 13 is laminated and the portion where the adhesive film 13 is not laminated is favorable. Further, since the thickness of the release film 11 is less than or equal to the Ta / Tb of 2.5 or less, the pressure at the time of laminating the pressure-sensitive adhesive film 13 on the release film can be made uniform, . Thus, when the wafer processing tape 10, in which the adhesive layer 12 and the release film 11 are sequentially laminated on the adhesive film 13, is rolled up in the form of a roll, Can be suppressed.

The peel force F1 between the adhesive layer 12 and the release film 11 in the T-type peel test under the condition of a temperature of 23 占 폚 and a peeling speed of 300 mm / min is 0.025 to 0.075 N / And the peeling force F2 between the adhesive layer 12 and the adhesive film 13 is in the range of 0.08 to 10 N / 100 mm, and F1 and F2 satisfy the relationship of F1 < F2 desirable.

The wafer processing tape 10 is subjected to tensile stress to the adhesive film 13, the adhesive layer 12 and the release film 11 from the viewpoints of relaxation, winding displacement, positional deviation, . As a result, the wafer processing tape 10 is produced in the state where tensile residual deformation exists in any of the films constituting the tape. This tensile residual strain causes shrinkage in each film when it is transported at a low temperature of, for example, -30 to 10 DEG C or stored for a long time. In addition, the degree of shrinkage is also different because each film has a different physical property. For example, the adhesive film 13 has the greatest degree of shrinkage among the respective films, and the release film 11 has the smallest degree of shrinkage. As a result, interfacial peeling may occur between the adhesive film 13 and the adhesive layer 12, or film peeling of the release film 11 may occur.

In the above-described constitution, the peeling force F1 between the adhesive layer 12 and the release film 11 is set in the range of 0.025 to 0.075 N / 100 mm, and the peeling force F2 between the adhesive layer 12 and the adhesive film 13 is set to 0.08 to 10 N / 100 mm, then the relationship of F1 < F2 is satisfied. As described above, the shrinkage in each of the films is the largest in the adhesive film, so that the peeling force F1 between the adhesive layer 12 and the release film 11 is greater than the peeling force F1 between the adhesive layer 12 and the release film 11. [ It is possible to suppress shrinkage of the adhesive film 13 having the greatest shrinkage percentage and to prevent peeling of the interface between the adhesive film 13 and the adhesive layer 12 and peeling of the film of the release film 11 by increasing the peeling force F2 . It is also possible to prevent part or all of the adhesive layer 12 from being transferred to the release film 11. [

[Example]

EXAMPLES Next, examples of the present invention will be described, but the present invention is not limited to these examples.

(1) Release film

The following release films were prepared.

Release film A1: A polyethylene terephthalate film (having a tensile storage modulus of 4070 MPa and a coefficient of linear expansion of 60 ppm)

Release film A2: A polyethylene terephthalate film having a thickness of 100 占 퐉 and subjected to silicone release treatment (tensile storage modulus of elasticity: 3910 MPa, coefficient of linear expansion: 60 ppm)

Release film A3: a polyethylene terephthalate film (having a tensile storage modulus of 4020 MPa and a coefficient of linear expansion of 60 ppm)

Release film A4: a polyethylene terephthalate film having a thickness of 38 mu m and subjected to silicone release treatment (tensile storage modulus 4020 MPa, coefficient of linear expansion 60 ppm)

Release film A5: Low density polyethylene (LDPE) film having a thickness of 25 占 퐉 and a silicon release treatment (tensile storage modulus: 105 MPa; coefficient of linear expansion: 230 ppm)

(2) Production of adhesive film

<Adhesive Film B1>

A copolymer having 2-ethylhexyl acrylate, 2-hydroxyethyl acrylate and methacrylic acid, a ratio of 2-ethylhexyl acrylate of 60 mol% and a weight average molecular weight of 70,000, as an acrylic copolymer having a functional group . Next, 2-isocyanate ethyl methacrylate was added so that the iodine value was 20, and an acrylic copolymer (b-1) having a glass transition temperature of -50 占 폚, a hydroxyl value of 10 mgKOH / g and an acid value of 5 mgKOH / ).

5 parts by mass of Coronate L (manufactured by Nippon Polyurethane Co., Ltd.) as polyisocyanate and 3 parts by mass of Esacure KIP 150 (manufactured by Lamberti) as a photopolymerization initiator were added to 100 parts by mass of the acrylic copolymer (b-1) Dissolved in ethyl acetate, and stirred to prepare a pressure-sensitive adhesive composition.

Next, the pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉, dried at 110 占 폚 for 3 minutes and then stuck to an ethylene / vinyl acetate copolymer 1, Ultra sensor 636), and an adhesive film B1 having a thickness of 60 m was produced. The tensile storage modulus was 40 MPa.

<Adhesive film B2>

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying was 5 占 퐉, dried at 110 占 폚 for 3 minutes, and then covered with low density polyethylene (LDPE, no release treatment) (Having a thickness of 40 mu m) to prepare a pressure-sensitive adhesive film B2 having a thickness of 45 mu m. The tensile storage modulus was 105 MPa.

&Lt; Adhesive film B3 &

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉, dried at 110 占 폚 for 3 minutes, and then washed with an ionomer of an ethylene / methacrylic acid copolymer (150 占 퐉 in thickness), which had a thickness of 120 占 퐉 and a thickness of 30 占 퐉 and a thickness of 30 占 퐉, manufactured by Mitsui DuPont Polychemicals Co., Ltd., High Milan 1554). The tensile storage modulus was 301 MPa.

&Lt; Adhesive Film B4 &

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉, dried at 110 占 폚 for 3 minutes, and then washed with an ionomer of an ethylene / methacrylic acid copolymer (110 占 퐉 in thickness) including a polyethylene terephthalate film (manufactured by Mitsui DuPont Polychemical Co., Ltd., High Milan 1554). Thus, an adhesive film B4 having a thickness of 120 占 퐉 was produced. The tensile storage modulus was 289 MPa.

<Adhesive film B5>

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉 and dried at 110 占 폚 for 3 minutes. Then, an ethylene / propylene block copolymer , Prime Polypro F707W) to prepare an adhesive film B5 having a thickness of 120 mu m. The tensile storage elastic modulus was 980 MPa.

(3) Formation of adhesive layer

<Adhesive Layer C1>

15.0 parts by mass of an epoxy resin "YX4000" (biphenyl novolak type epoxy resin, epoxy equivalent 185), 40.0 parts by mass of a phenol resin "LF-6161" (manufactured by DIC, novolak phenol resin, hydroxyl equivalent 118) 45.0 parts by weight of an epoxy resin "Epicoat 828" (bisphenol A epoxy resin, epoxy equivalent 190, Mitsubishi Kagaku Co., Ltd.), 5 parts by mass of "Aerosil R972" (average particle diameter of primary particle diameter: , MEK was added to the composition and stirred to obtain a uniform composition.

To this was added 66.7 parts by mass of an acrylic copolymer (weight average molecular weight: 8,500,000, Tg of 20 占 폚) containing monomer units derived from glycidyl acrylate or glycidyl methacrylate as a polymer containing a functional group, 0.6 part by mass of KBM-802 (manufactured by Shin-Etsu Silicone Co., Ltd., mercaptopropyltrimethoxysilane) and "Cure Sol 2PHZ-PW" (available from Shikoku Chemicals Inc .; 2-phenyl-4,5-dihydroxymethylimide Sol, decomposition temperature 230 占 폚), and the mixture was stirred and mixed until homogeneous. Further, this was filtered with a filter of 100 mesh, and vacuum degassing was carried out to obtain a varnish (c-1) of an adhesive composition.

The varnish (c-1) was coated on the release film A1 by a coater so as to have a dry film thickness of 30 占 퐉 and dried at 120 占 폚 for 5 minutes to produce an adhesive layer C1 having a thickness of 30 占 퐉.

<Adhesive Layer C2>

The varnish (c-1) was coated on the release film A2 with a coater so as to have a dry film thickness of 30 占 퐉 and dried at 120 占 폚 for 5 minutes to prepare an adhesive layer C2 having a thickness of 30 占 퐉.

<Adhesive Layer C3>

The varnish (c-1) was coated on the release film A1 by a coater so as to have a dry film thickness of 60 占 퐉 and dried at 120 占 폚 for 8 minutes to prepare an adhesive layer C3 having a thickness of 60 占 퐉. Thereafter, the adhesive layer C3 was transferred from the release film A1 to the release film A3.

<Adhesive Layer C4>

The varnish (c-1) was coated on the release film A4 with a coater so as to have a dry film thickness of 60 占 퐉 and dried at 120 占 폚 for 8 minutes. Two sheets of the varnish Layer C4 was produced, and one release film A4 was peeled off.

<Adhesive Layer C5>

The varnish (c-1) was coated on the release film A4 by a coater so as to have a dry film thickness of 60 탆, and dried at 120 캜 for 8 minutes to prepare an adhesive layer C5 having a thickness of 60 탆.

<Adhesive Layer C6>

The varnish (c-1) was coated on the release film A4 by a coater so as to have a dry film thickness of 60 탆 and dried at 120 캜 for 8 minutes to form an adhesive layer C6 having a thickness of 60 탆. Thereafter, the adhesive layer C6 was transferred from the release film A4 to the release film A5.

<Adhesive Layer C7>

The varnish (c-1) was coated on the release substrate A1 with a coater so as to have a dry film thickness of 30 占 퐉 and dried at 120 占 폚 for 5 minutes to prepare an adhesive layer C7 having a thickness of 30 占 퐉.

<Adhesive Layer C8>

40 parts by mass of epoxy resin "1002" (solid bisphenol A type epoxy resin, epoxy equivalent 600), 100 parts by mass of epoxy resin "806" (bisphenol F type epoxy resin, epoxy equivalent 160, specific gravity 1.20) , 5 parts by mass of a curing agent &quot; Dyhard 100SF &quot; (Degussa, dicyandiamide), 200 parts by mass of a silica filler &quot; SO-C2 &quot; (Admafine, average particle diameter 0.5 탆) MEK was added to a composition containing 3 parts by mass of an average particle diameter of primary particle diameter of 0.016 mu m, manufactured by Nippon Aerosil Co., Ltd.) and stirred to prepare a uniform composition.

100 parts by mass of a phenoxy resin &quot; PKHC &quot; (product of INCHEM, weight average molecular weight: 43,000, glass transition temperature: 89 占 폚), 100 parts by mass of KBM-802 (manufactured by Shinsei Silicone Co., Ltd., mercaptopropyltrimethoxysilane) And 0.5 parts by mass of "Cure Sol 2PHZ-PW" (2-phenyl-4,5-dihydroxymethylimidazole, decomposition temperature: 230 ° C., Shikoku Chemicals Co., Ltd.) as a mass part and a curing accelerator were added and stirred Respectively. This was further filtered through a 100-mesh filter and vacuum degassed to obtain a varnish (c-2) of an adhesive composition.

The varnish (c-2) was coated on the release film A4 by a coater so as to have a dry film thickness of 60 占 퐉 and dried at 120 占 폚 for 8 minutes to prepare an adhesive layer C8 having a thickness of 60 占 퐉.

(4) Production of Supporting Member

<Support member D1>

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉 and dried at 110 占 폚 for 3 minutes. Thereafter, a polyethylene terephthalate (without release treatment) And bonded to a resin film base material (thickness 16 mu m) to prepare a support member D1 having a thickness of 26 mu m. The tensile storage elastic modulus was 980 MPa and the linear expansion coefficient was 60 ppm.

<Support member D2>

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉 and dried at 110 占 폚 for 3 minutes, and then polypropylene (OPP, no release treatment) (Thickness: 25 mu m), and a support member D2 having a thickness of 35 mu m was produced. The linear expansion coefficient was 120 ppm.

&Lt; Support member D3 >

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying was 5 占 퐉, dried at 110 占 폚 for 3 minutes, and then covered with low density polyethylene (LDPE, no release treatment) (Having a thickness of 50 mu m), and transferred to prepare a support member D3 having a thickness of 55 mu m. The coefficient of linear expansion was 230 ppm.

<Support member D4>

The pressure-sensitive adhesive composition was applied to a release liner including a release-treated polyethylene terephthalate film so that the thickness after drying became 10 占 퐉 and dried at 110 占 폚 for 3 minutes. Thereafter, a polyethylene terephthalate (without release treatment) And bonded to a resin film base (thickness: 40 mu m) to prepare a support member D4 having a thickness of 50 mu m. The linear expansion coefficient was 60 ppm.

&Lt; Support member D5 >

A commercially available clean line tape TW-PLT (manufactured by Danimura) for a clean room was used as the support member D5. A resin film base material in which a polyvinyl chloride layer having a thickness of 75 占 퐉 and a polyethylene terephthalate layer having a thickness of 12 占 퐉 were laminated and had a total thickness of 142 占 퐉 and a coefficient of linear expansion of 80 ppm.

(Example 1)

The adhesive layer C1 formed on the release film A1 kept in the refrigerator was returned to room temperature, and the adhesive layer was adjusted to have a cut (infeed) depth of not more than 1/2 of the thickness of the release film, and a circular free- . Thereafter, unnecessary portions of the adhesive layer were removed, and the adhesive film B1 was laminated to the release film A1 at room temperature so that the pressure-sensitive adhesive layer was in contact with the adhesive layer. The adhesive film B1 was adjusted so as to have a cutting depth equal to or less than 1/2 of the thickness of the release film, and circular cut-off processing with a diameter of 370 mm was performed concentrically with the adhesive layer, and 300 sheets were wound with a tensile force of 20 N. Next, the adhesive layer on the release film A1 and the surface on which the adhesive film was provided were opposite to each other, and the supporting member D1 was bonded to both end portions in the short direction of the release film A1 to manufacture the wafer processing tape of Example 1. [

(Examples 2 to 7 and Comparative Examples 1 to 3)

The wafer processing tapes of Examples 2 to 7 and Comparative Examples 1 to 3 were produced in the same manner as in Example 1 with the combination of Table 1.

Figure 112015117939077-pat00001

[Evaluation of inhibition of air intrusion and transfer marks]

The adhesive sheets of Examples and Comparative Examples were stored in a bag made of polyethylene, degassed, heat sealed, and side plates made of polypropylene were provided at both ends. Further, two PP bands were placed so as to be crossed and fused and bonded. Each gonocytoma was stored in a refrigerator (5 ° C) for one month, taken out from the refrigerator, stored in a packing box together with plate-shaped dry ice, loaded on a transport track, and transported from Hiratsuka to Akita As shown in FIG. Then, the rolls were returned to room temperature, and then the packaging bag was opened to unroll the rolls, and the air between the adhesive layer and the release film was visually inspected. And the presence of transcripts were observed. The results are shown in Table 2.

[Evaluation of inhibition of voids after mounting]

The adhesive sheets of Examples and Comparative Examples were stored in a bag made of polyethylene, degassed, heat sealed, and side plates made of polypropylene were provided at both ends. Further, two PP bands were placed so as to be crossed and fused and bonded. Each gonocytoma was stored in a refrigerator (5 ° C) for one month, taken out from the refrigerator, stored in a packing box together with plate-shaped dry ice, loaded on a transport track, and transported from Hiratsuka to Akita As shown in FIG. Thereafter, the film was further stored in a refrigerator (5 DEG C) for 3 months, and then the respective gonocytes were opened and the rolls were returned to room temperature. Then, the packaging bag was opened and mounting was performed on the semiconductor wafer. Thereafter, the presence or absence of voids (bubbles) on the bonding surface between the adhesive layer and the semiconductor wafer was confirmed by a microscope. The results are shown in Table 2. As the semiconductor wafer, a wafer having a size of 12 inches and a thickness of 50 탆 was used. Mounting conditions of the semiconductor wafer are as follows.

&Lt; Bonding condition &

Mounting apparatus: wafer mounter DAM-812M (made by Takatori)

Attachment speed meter: 50 mm / sec Mounting pressure: 0.1 MPa

Mounting temperature: 60 ° C, 90 ° C

Figure 112015117939077-pat00002

As shown in Table 2, in the wafer processing tapes according to Examples 1 to 3, 7 and 8, the thickness of the support member is 0.58 times or more and 0.87 times or less the thickness of the adhesive layer, But was destroyed by the heat at the time of bonding. Further, no penetration of air was observed between the adhesive layer and the release film, and good results were obtained in evaluating inhibition of voids after mounting. Since the thickness of the supporting member according to Examples 5 and 6 is 0.92 times or more and less than 1.0 times the thickness of the adhesive layer, air intrusion and transfer marks between the adhesive layer and the release film are shown in part, And the result was good in evaluating the inhibition of the void after mounting. Since the thickness of the supporting member according to Example 4 was 0.46 times as thick as the thickness of the adhesive layer, a slightly strong transfer mark was seen, and when bonded to the semiconductor wafer at 60 캜, voids were partially observed, In the case of joining to a semiconductor wafer, voids did not occur, and the range was practically acceptable.

On the other hand, since the wafer processing tape according to Comparative Example 1 was not provided with the supporting member, the transfer mark remained intense and voids were formed in some cases even when the wafer was bonded to the semiconductor wafer at 90 占 폚. Since the thickness of the support member of the wafer processing tape according to Comparative Example 2 was thicker than the thickness of the adhesive layer, air penetration between the adhesive layer and the release film was observed and the adhesive layer was deformed. Voids were formed in some cases. Since the thickness of the support member is larger than the thickness of the adhesive layer, air penetration is observed between a part of the adhesive layer and the release film, and similarly, at 90 deg. C, Voids were formed in some cases.

10: Wafer processing tape
11: release film
12: adhesive layer
13: Adhesive film
13a: circular label portion
13b: peripheral portion
14, 14 ": supporting member

Claims (15)

A long release film,
An adhesive layer having a planar shape provided on the first surface of the release film,
An adhesive film having a label portion covering the adhesive layer and having a planar shape provided so as to contact the release film around the adhesive layer and a peripheral portion surrounding the outer side of the label portion;
And a support member provided on both sides of the release film in a short direction on the second surface opposite to the first surface provided with the adhesive layer and the adhesive film,
Wherein the support member has a thickness of 0.3 times or more and less than 1.0 times the thickness of the adhesive layer.
The tape for wafer processing according to claim 1, wherein the coefficient of linear expansion of the support member is 300 ppm / 占 폚 or less. The tape for wafer processing according to claim 1 or 2, wherein a difference between a coefficient of linear expansion of the support member and a coefficient of linear expansion of the release film is 250 ppm / ° C or less. The pressure-sensitive adhesive sheet according to claim 1 or 2, wherein the pressure-sensitive adhesive film comprises a pressure-sensitive adhesive layer and a base film,
Wherein a coefficient of static friction between the base film and the supporting member is 0.2 to 2.0.
3. The wafer processing apparatus according to claim 1 or 2, wherein the support member is provided on the second surface of the release film in a region corresponding to an outer side of the adhesive layer provided on the first surface tape. The tape for wafer processing according to claim 1 or 2, wherein the support member is provided continuously along the longitudinal direction of the release film. delete The tape for wafer processing according to claim 1 or 2, wherein the support member is colored. The wafer processing tape according to claim 8, wherein the support member is colored depending on the type of the wafer processing tape. The tape for wafer processing according to claim 8, wherein the support member is colored depending on the thickness of the wafer processing tape. The tape for wafer processing according to claim 1 or 2, wherein the supporting member has a laminated structure of two or more layers. The tape for wafer processing according to claim 1 or 2, wherein the support member is a pressure-sensitive adhesive tape coated with a point-adhesive on a resin film base material selected from the group consisting of polyethylene terephthalate, polypropylene and high-density polyethylene. The adhesive tape according to claim 1 or 2, characterized in that the ratio Eb / Ea of the tensile storage elastic modulus Eb of the pressure-sensitive adhesive film at 23 DEG C to the tensile storage elastic modulus Ea of the release film at 23 DEG C is 0.001 to 100 Wherein the tape is a tape. The tape for wafer processing according to claim 1 or 2, wherein the ratio Ta / Tb of the thickness Ta of the release film to the thickness Tb of the adhesive film is 0.07 to 2.5. The adhesive sheet according to claim 1 or 2, wherein the peeling force F1 between the adhesive layer and the release film in the T-type peel test under the condition of a temperature of 23 占 폚 and a peeling speed of 300 mm / min is 0.025 to 0.075 N / 100 mm, and the peeling force F2 between the adhesive layer and the adhesive film is 0.08 to 10 N / 100 mm, and F1 < F2.
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