KR101640473B1

KR101640473B1 - Auto alignment contact connecting unit for test handler

Info

Publication number: KR101640473B1
Application number: KR1020150050786A
Authority: KR
Inventors: 최상일; 김인호
Original assignee: 주식회사 티에프이
Priority date: 2015-04-10
Filing date: 2015-04-10
Publication date: 2016-07-19

Abstract

The automatic alignment contact connecting unit for a test handler according to the present invention comprises an air damper for performing a vertical damping action by an applied air pressure; A position correcting block including a connecting plate coupled to the air damper and a floating plate coupled to the connecting plate so as to be horizontally movable relative to the connecting plate in an external force operation; And an element suction block for directly or indirectly coupling to the floating plate, the air damper comprising: a lower housing member having a piston inlet and a cylinder formed therein and opening downward; An upper housing member formed to communicate with the cylinder and having a through hole for applying a pneumatic pressure, and a piston partially contained in the lower housing member and movable in an up and down direction, And a rod extension portion extending downward from the rod portion and having a first horizontal engagement hole formed therein, wherein the connection plate is provided with a rod portion extending in the vertical direction through the piston entrance portion, A second horizontal coupling hole communicating with one horizontal coupling hole is formed, The piston and the connection plate are coupled by the fastening member passing through the second horizontal coupling hole and the first horizontal coupling hole of the rod extension portion.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an automatic alignment contact connection unit for a test handler,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test handler for testing a semiconductor device, and more particularly, to a test handler for testing a semiconductor device in a state in which a semiconductor device is attracted, To an automatic alignment contact connection unit.

Generally, after the production of a semiconductor device is completed, only defective products that have passed through various test processes such as electrical characteristics, function tests, reliability tests, and the like are finally shipped. A test handler is used.

1 is a plan view schematically showing a structure of a general test handler.

As shown in Fig. 1, the test handler 1 mainly includes a test region 10 in which a semiconductor element is tested, a loading region 20 in which a semiconductor element to be inspected is supplied, An input buffer area 40 between the loading area 20 and the test area 10 and an output buffer area 40 between the unloading area 30 and the test area 10 50).

The semiconductor devices supplied to the test handler 1 are supplied through the loading area 20 and are routed through the input buffer area 40, the test area 10 and the output buffer area 50 and finally the unloading area 30 .

The semiconductor elements are supplied to the loading area 20 through a tray transfer device (not shown) while being loaded on a customer tray 25 having a plurality of loading grooves 21 formed in accordance with a predetermined arrangement rule And then transferred to a buffer tray 45 provided in the input buffer area 40 by a loading picker device 60 capable of simultaneously transferring a plurality of semiconductor elements. The buffer tray 45 has a plurality of loading grooves (for example, 2, 4, 8, 16, or 32) formed in accordance with a predetermined spacing rule different from the loading grooves 21 of the consumer tray 25. [ 41). The loading picker device 60 is equipped with a plurality of vacuum adsorption modules (not shown) capable of adsorbing and fixing semiconductor elements individually and capable of adjusting the interval. The loading picker device 60 moves to the upper portion of the buffer tray 45 in a state in which the vacuum adsorption modules individually adsorb the semiconductor elements and the interval between the loading grooves 41 provided in the buffer tray 45 during the movement The vacuum adsorption modules are spaced from each other, and the semiconductor elements are placed in the loading grooves 41 of the buffer tray 45.

The test region 10 is provided with a test head 15 for executing a test of semiconductor devices and the test head 15 has a plurality of sockets 11 for individually testing one semiconductor element . The arrangement of the plurality of sockets 11 provided in the test head 15 is the same as the arrangement of the plurality of loading grooves 41 provided in the buffer tray 45, 15), the spacing adjustment is unnecessary.

The output buffer region 50 is a region to which the tested semiconductor elements are transferred in the test head 15 of the test region 10 and has a plurality of stacking grooves 51 The buffer tray 55 is provided with the buffer tray 55.

Further, the semiconductor elements transferred to the buffer tray 55 of the output buffer area 50 can be transferred to the unloading picker 60, which can simultaneously transfer a plurality of semiconductor elements corresponding to the above-described loading picker device 60, The test is completed by separating the good and bad products into the customer tray 35 waiting in the unloading area 30 by the device 70. [

The test handler 1 is provided between the buffer tray 45 of the input buffer area 40 and the test head 15 and between the test head 15 and the buffer tray 55 of the output buffer area 50, And an element transfer connection device 80 for transferring the element and for connecting the semiconductor element in a pressurized state to the socket 11 of the test head 15.

The element transfer connection device 80 is provided with a transfer mechanism (not shown) capable of horizontal and vertical movements, that is, movement in the X, Y and Z axial directions, and a semiconductor device And a contact connection unit which can be connected to the socket 11 of the head 15 in a pressurized state.

The contact connection unit is typically provided with an upper plate fixed to the body of the element transfer connection device 80 and a plurality of absorption connection modules fixed to the upper plate, A position correcting block including a connecting plate coupled to the air damper and a floating plate coupled to the connecting plate such that the connecting plate can relatively move horizontally relative to the connecting plate in an external force operation; And an element adsorption block for adsorption of the semiconductor element. In some cases, the contact connection unit is provided with a heating means for heating or preheating the semiconductor element in the element adsorption block, and a heat insulating block is interposed between the floating plate and the element adsorption block in order to prevent the heat from being transmitted to the element adsorption block. .

It is necessary to replace the air damper itself or to replace some of the elements constituting the air damper due to the function and the structural characteristics of the air damper while operating the contact connection unit in the field. Since the conventional contact connecting unit is composed of the top plate, the air damper, the connecting plate, the floating plate, the heat insulating block, and the element adsorption block in order from the top to the bottom, the air damper can be disassembled It requires troublesome work to be performed. For example, after the adsorption connection module is detached from the upper plate, the lower element adsorption block is separated from the adsorption connection module, then the insulation block on the upper side is separated, the floating plate is separated from the connection plate, The air damper can be removed only by removing the damper. Even when the air damper is replaced, the above disassembly process must be performed in reverse, which is a very cumbersome task.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an air damper which can separate an air damper from a contact connecting unit by a simple operation, and also combine a separated (or replaced) air damper with other elements by a simple operation, And to provide an automatic alignment contact connection unit for a test handler that can be assembled.

It is to be understood, however, that the technical scope of the present invention is not limited to the above-described technical problems, and other technical problems may be derived from the following description.

According to an aspect of the present invention, there is provided an automatic alignment contact connecting unit for a test handler, comprising: an air damper for performing up-and-down damping by applied air pressure; A position correcting block including a connecting plate coupled to the air damper and a floating plate coupled to the connecting plate so as to be horizontally movable relative to the connecting plate in an external force operation; And an element suction block for directly or indirectly coupling to the floating plate, the air damper comprising: a lower housing member having a piston inlet and a cylinder formed therein and opening downward; An upper housing member formed to communicate with the cylinder and having a through hole for applying a pneumatic pressure, and a piston partially contained in the lower housing member and movable in an up and down direction, And a rod extension portion extending downward from the rod portion and having a first horizontal engagement hole formed therein, wherein the connection plate is provided with a rod portion extending in the vertical direction through the piston entrance portion, A second horizontal coupling hole communicating with one horizontal coupling hole is formed, The piston and the connection plate are coupled by the fastening member passing through the second horizontal coupling hole and the first horizontal coupling hole of the rod extension portion.

Wherein the connecting plate includes a hole through which the rod extending portion is inserted from the top to the bottom and a protrusion which is protruded downward and in which the second horizontal coupling hole communicating with the first horizontal coupling hole of the rod extending portion is inserted, Member.

The floating plate may have a receiving space on an upper surface for receiving the protruding member and the rod extending portion.

In the floating plate, an insertion space through which the fastening member can be horizontally inserted can be formed.

Wherein the protruding member includes a first protruding member corresponding to the first surface of the rod extending portion and a second protruding member corresponding to the first surface of the rod extending portion so that the rod extending portion is interposed between the first protruding member and the second protruding member, And a second protruding member corresponding to the second surface.

And a second horizontal coupling hole of the coupling plate and a coupling member penetrating the first horizontal coupling hole of the rod extension portion in a state where the rod extension portion is interposed between the first projecting member and the second projecting member, The piston and the connecting plate may be combined.

The automatic alignment contact connection unit for the test handler comprises: an upper plate; And a fastening member for coupling the upper housing and the upper housing member.

According to the present invention described above, it is possible to separate the air damper from the contact connection unit by a simple operation, and to assemble the contact connection unit by combining the separated (or replaced) air damper with other elements by a simple operation There are advantages.

However, the effects of the present invention are not limited to those described above, and other technical effects may be derived from the following description.

1 is a plan view schematically showing a structure of a general test handler.
2 is a perspective view showing a contact connecting unit according to an embodiment of the present invention.
3 is an exploded perspective view of the contact connecting unit according to the embodiment of FIG.
4 is an exploded perspective view in which the air damper 120 is further disassembled in the exploded perspective view of Fig.
5 is an exploded perspective view of the exploded perspective view of FIG. 4 viewed from another angle.
6 is a partial cutaway cross-sectional view of the contact connecting unit according to the embodiment of FIG. 2 across the cylinder 123;
7 is a partially cutaway cross-sectional view of the contact connection unit according to the embodiment of FIG. 2 across the fastening member 111. FIG.
8 is a partially cutaway cross-sectional view of the contact connecting unit according to the embodiment of FIG. 2 across the fastening member 163. FIG.
9 is a partial cross-sectional view across the fastening member 145 in the contact connection unit according to the embodiment of FIG.
10A and 10B are views showing a process of separating the air damper 120 from the contact connection unit 100 according to the embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In the following description and the accompanying drawings, substantially the same components are denoted by the same reference numerals, and redundant description will be omitted. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

3 is an exploded perspective view of the contact connecting unit according to the embodiment of FIG. 2, and FIG. 4 is an exploded perspective view of the air damper FIG. 5 is an exploded perspective view of the exploded perspective view of FIG. 4 viewed from another angle. FIG. 6 is a partial cutaway cross-sectional view of the contact connecting unit according to the embodiment of Fig. 2 across the cylinder 123, and Fig. 7 is a cross-sectional view of the contact connecting unit across the fastening member 111 Fig. 8 is a partially cutaway cross-sectional view of the contact connecting unit according to the embodiment of Fig. 2 across the fastening member 163, and Fig. 9 is a partial cutaway cross-sectional view of the contact connecting unit according to the embodiment of Fig. ). &Lt; / RTI >

2, the contact connection unit 100 includes an upper plate 110 fixed to a main body (not shown) of the element transfer connection device 80, a plurality of absorption connection modules 115 fixed to the upper plate 110, Respectively. 2 shows an example of the contact connection unit 100 having four adsorption connection modules 115, the number of the adsorption connection modules 115 may be, for example, 2, 8, 16, or 32 And the contact connection unit 100 having, for example, four adsorption connection modules 115 can be used by being attached to two or more element transfer connection devices 80, So that the number of semiconductor elements capable of carrying out transfer and connection at the same time can be variously changed. Of course, the number and arrangement of the loading grooves 41, 51 provided in the buffer trays 45, 55, corresponding to the number and arrangement of the suction connecting modules 115 provided in the element transfer connecting device 80, And the number and arrangement of the sockets 11 provided in the test head 15 can also be changed.

2 and 3, the adsorption connection module 115 includes an air damper 120 that performs a damping action in the vertical direction, a connection plate 131 that is coupled to the air damper 120, A position correcting block 130 including a floating plate 132 coupled to the connection plate 131 so as to be relatively horizontally movable relative to the substrate 131, a device adsorption block 160 for adsorption of the semiconductor device, A heating block 150 coupled to an upper portion of the heating block 160 for heating the semiconductor devices to be adsorbed, a heat blocking block 150 provided between the heating block 150 and the floating plate 132 to block heat from the heating block 150 140).

In one embodiment of the present invention, the element adsorption block 160 is indirectly coupled to the floating plate 132 through the heating block 150 and the heat insulating block 140. In some embodiments, the heating block 150 and the heat- The element adsorption block 160 may be directly coupled to the floating plate 132 because the heat insulating block 140 does not exist.

3 and 7, the adsorption connection module 115 is fixed to the top plate 110 by the fastening member 111. As shown in FIG. Specifically, the upper housing member 121 of the air damper 120, which will be described later, and the upper plate 110 are coupled by the fastening member 111. The various fastening members, including the fastening members 111, that appear in embodiments of the present invention may be, for example, bolts.

3 and 6, the element adsorption block 160 includes a vacuum pad 166 and an adsorption pad 162 coupled to one end of the vacuum line 166 located at the lower center of the element. And two or more guide pins 165 installed to extend vertically downward from a lower edge of the suction block 160. The element transfer connection device 80 transfers the contact connection unit 100 to the determined position on the buffer tray 45 or the test head 15 by the transfer mechanism and aligns the position, Or in order to connect the semiconductor elements in the adsorption fixed state in a pressurized state. At this time, the guide pins 165 installed in the element adsorption block 160 are inserted into the vertical guide holes (not shown) formed in the guide jig 47 (17) installed in the buffer tray 45 or the test head 15, In the docking process. That is, after the positional alignment of the contact connection unit 100 by the transfer mechanism is performed, the guide pin 165, which is formed in a conical shape in the docking process in which the contact connection unit 100 is further lowered, The floating plate 132 of the position correcting block 130 is relatively moved in the horizontal direction relative to the connecting plate 131 while being guided by the guide hole having the portion of the position correcting block 130. Thus, In addition, when negative pressure is applied via the vacuum piping 166 and the adsorption pad 162, the adsorption of the semiconductor element is carried out by the suction force by the negative pressure.

3 to 6, the air damper 120 is provided for relieving the impact in the vertical direction during the process of adsorbing and pressing the semiconductor element, and is formed to communicate with the cylinder 1221, A lower housing member 121 having an upper housing member 121 having a hole 1211 and a piston inlet 1222 coupled to a lower portion of the upper housing member 121 and having a cylinder 1221 formed therein and opened downward, And a piston 123, which is partly embedded in the lower housing member 122 and can be moved up and down. The upper housing member 121 and the lower housing member 122 are coupled by a fastening member 1212. The lower housing member 122 has a ring receiving groove 1224 for fixing the O-ring 1223 on its upper surface. The O-ring 1223 serves to prevent air in the cylinder 1221 from leaking between the upper housing member 121 and the lower housing member 122.

The piston 123 includes a piston cap 1231 constrained to the inner circumferential surface of the cylinder 1221, a head portion 1232 constrained to the inner circumferential surface of the cylinder 1221, And a rod extension portion 1234 extending downward from the rod portion 1233. [ The head portion 1232, the rod portion 1233 and the rod extension portion 1234 are integrally formed and the piston cap 1231 is coupled to the head portion 1232 by the fastening member 1239.

The head portion 1232 has a quad ring 1237 made of rubber and a ring receiving groove 1238 for fixing the O-ring 1236 on the outer peripheral surface of the upper portion. The quad ring 1237 and the O-ring 1236 are closely contacted between the outer circumferential surface of the head portion 1232 and the inner circumferential surface of the cylinder 1221 to keep the inner space of the cylinder 1221 airtight when the pneumatic pressure is applied through the through hole 1211 . When the impact is transmitted from the outside through the rod extension portion 1234 and the rod portion 1233 of the piston 123 to the air damper 120 in such a state that the air pressure is applied, Thereby relieving the shock by absorbing the shock by the air pressure while rising within a certain range.

The position correcting block 130 is provided to overcome the limit of the position control accuracy by the feed mechanism (not shown). The position correcting block 130 includes a connection plate 131 fixed to the rod extension portion 1234 of the piston 123, And a floating plate 132 coupled to a lower portion of the plate 131 and coupled to the connection plate 131 in a horizontal direction relative to the connection plate 131 within a predetermined range. An example of the coupling structure of the connection plate 131 and the floating plate 132 is described in the applicant's patent application No. 2011-0073561, so a detailed description thereof will be omitted.

In order to fix the connection plate 131 to the rod extension part 1234 of the piston 123, the rod extension part 1234 is provided with first horizontal engagement holes 1235_1 and 1235-2 through which the fastening members 124_1 and 124_2 pass, And the connecting plate 131 is provided with a hole 1312 through which the rod extending portion 1234 is inserted from the top to the bottom and a hole 1312 extending downward from the rod extending portion 1234 in the state where the rod extending portion 1234 is inserted, Protrusions 1311 and 1312 in which second horizontal coupling holes 1313_1, 2, 3 and 4 are formed to communicate with the first horizontal coupling holes 1235_1 and 1231 are provided below the holes 1312. [ 3 and 4) of the rod extending portion 1234 and the second projecting member 1312 corresponds to the first projecting portion 1312 of the rod extending portion 1234 And corresponds to the second surface (the rear surface in Figs. 3 and 4) facing the one surface. When the rod extension portion 1234 is inserted into the hole 1312, the rod extension portion 1234 is interposed between the first projection member 1311 and the second projection member 1312, The first horizontal coupling hole 1235_1 of the rod extension portion 1234 is communicated with the second horizontal coupling holes 1313_1 and 1313_2 of the first projection member 1311 and the second projection member 1312, The engaging holes 1235_2 are communicated with the second projecting members 1312 and the second horizontal engaging holes 1313_3 and 1313_4 of the first projecting members 1311. [ Thus, the fastening member 124_1 passes through the second horizontal coupling hole 1313_1, the first horizontal coupling hole 1235_1 and the second horizontal coupling hole 1313_2, and the fastening member 124_2 passes through the second horizontal coupling hole 1313_3 ), The first horizontal coupling hole 1235_2, and the second horizontal coupling hole 1313_4, the piston 123 and the coupling plate 131 are coupled.

The floating plate 132 is provided with a receiving space 137 on the upper surface for accommodating the rod extending portions 1234 interposed between the projecting members 1311 and 1312 and the projecting members 1311 and 1312, The insertion spaces 135_1 and 135_2 can be inserted horizontally from the outside of the floating plate 132, respectively. That is, the rod extension portion 1234 is inserted into the hole 1312 of the connection plate 131 and interposed between the projecting members 1311 and 1312, and the projecting members 1311 and 1312 and the rod extension portion 1234 are connected to the floating plate The fastening members 124_1 and 124_2 are inserted through the insertion spaces 135_1 and 135_2 of the floating plate 132 and are inserted into the receiving spaces 137 of the first and second protruding members 1311 and 1312, respectively, Can penetrate through the horizontal coupling holes 1313_1, 2, 3, 4 and the first horizontal coupling holes 1235_1, 1235 of the rod extension portion 1234.

3 and 8 to 9, the heating block 150 may be in the shape of a plate corresponding to the upper surface shape of the element adsorption block 160 so as to cover the upper surface of the element adsorption block 160, and the heating block 150 ) May have a built-in heating wire for heat generation. By forming the heating block 150 in the form of a plate, the entire element adsorption block 160 can be heated, thereby improving heat transfer efficiency. The heat absorbing block 160, the heating block 150 and the heat insulating block 140 are coupled by the first fastening member 163 and the heat insulating block 140 and the floating float 132 are fastened by the first fastening member 163 And a second fastening member 145 which is separate from the first fastening member 145. Although the first fastening member 163 and the second fastening member 145 may be, for example, bolts and are shown as four each, the number may be less than or greater than four as long as it can provide the required degree of rigid coupling. have. The heat generated in the heating block 150 can be effectively blocked through the heat insulating block 140 by preventing the first fastening member 163 and the second fastening member 145 from contacting each other. The heat insulating block 140 may be made of a peek material. The peek material has a higher heat-resistant temperature than the epoxy and has excellent heat insulation performance, so that the heat from the heating block 150 can be more effectively blocked.

3 and 8, in order to engage the element adsorption block 160, the heating block 150, and the heat insulating block 140 through the first fastening member 163, the element adsorption block 160, And the heating block 150 are formed with through holes 161 and 151 through which the first fastening member 163 penetrates and the heat blocking block 140 is provided with through holes 161 and 151 corresponding to the through holes 161 and 151 An insertion groove 142 into which the first fastening member 163 is inserted is formed. That is, the axes of the through holes 161 and 151 and the insertion groove 142 coincide with each other. Further, the heat insulating block 140 is formed with a cylindrical fastening boss 141 protruding downward, and the fastening boss 141 may have an insertion groove 142 formed therein. The upper end of the heating block 150 is formed with an insertion groove 152 into which a lower end portion of the fixing boss 141 is inserted so that the lower end of the insertion boss 141 is inserted into the insertion groove 152 And may be formed in the through hole 151.

3 and 9, a second fastening member 145 is fastened to the heat insulating block 140 for coupling the heat insulating block 140 and the floating plate 132 through the second fastening member 145 The insertion hole 136 is formed in the floating plate 132 at a position corresponding to the through hole 143 and into which the second fastening member 145 is inserted. That is, the axes of the through hole 143 and the insertion groove 136 coincide with each other.

3 and 8 to 9, the through holes 161 and 151 for the first fastening member 163 formed in the element adsorption block 160, the heating block 150 and the heat insulating block 140, The axes of the through hole 143 and the insertion groove 136 for the shaft of the insertion groove 142 and the second fastening member 145 formed on the heat insulating block 140 and the floating plate 132 are spaced from each other. The shaft of the through hole 143 and the insertion groove 136 for the second fastening member 145 may be inserted into the through holes 161 and 151 for the first fastening member 163 and the through holes 161 and 151 for the first fastening member 163, It can be formed inside the shaft. However, according to the embodiment, on the contrary, the through hole 143 and the insertion groove 136 for the second fastening member 145 are formed on the outside and the through holes 161 and 151 for the first fastening member 163 And the insertion groove 142 may be formed on the inner side.

10A and 10B are views showing a process of separating the air damper 120 from the contact connection unit 100 according to the embodiment of the present invention. Referring to FIG. 10A, the suction connection module 115 can be separated from the upper plate 110 by releasing the fastening member 111. Referring to FIG. 10B, the air damper 120 can be separated by releasing the fastening members 124_1 and 124_2. The process of coupling the air damper 120 may be performed in the reverse order of the above procedure. As described above, according to the present invention, the air damper can be separated from the contact connection unit by a simple operation, and the contact connection unit can be assembled by combining the air damper with a simple operation.

The present invention has been described with reference to the preferred embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the present invention is defined by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof should be construed as being included in the present invention.

100: contact connection unit 110: top plate
115: suction connection module 120: air damper
130: Position correction block 140: Insulation block
150: heating block 160: element adsorption block
131: connecting plate 132: floating plate
121: upper housing member 122: lower housing member
1221: cylinder 1222: piston entrance
123: Piston 1231: Piston cap
1232: Head part 1233: Rod part
1234: rod extension part 1235: first horizontal coupling hole
1311, 1312: projecting member 1313: second horizontal joining hole

Claims

An air damper for performing a vertical damping action by an applied air pressure;
A position correcting block including a connecting plate coupled to the air damper and a floating plate coupled to the connecting plate so as to be horizontally movable relative to the connecting plate in an external force operation; And
And an element adsorption block for adsorption of the semiconductor element, which is directly or indirectly coupled to the floating plate,
The air damper includes a lower housing member having a piston inlet and a cylinder opening formed therein and having a piston therein, an upper housing member formed to communicate with the cylinder and having a through hole for applying a pneumatic pressure, And a piston built in the lower housing member and movable up and down,
Wherein the piston includes a head portion restrained by the inner circumferential surface of the cylinder, a rod portion extending vertically through the piston entrance, and a rod extending portion extending downward from the rod portion and having a first horizontal engagement hole,
Wherein the connecting plate includes a hole through which the rod extending portion is inserted from the top to the bottom and a second horizontal coupling hole communicating with the first horizontal coupling hole of the rod extending portion in a state where the rod extending portion is inserted, And,
Wherein the protruding member includes a first protruding member corresponding to the first surface of the rod extending portion and a second protruding member corresponding to the first surface of the rod extending portion so that the rod extending portion is interposed between the first protruding member and the second protruding member, And a second projection member corresponding to the second surface,
And a second horizontal coupling hole of the coupling plate and a coupling member penetrating the first horizontal coupling hole of the rod extension portion in a state where the rod extension portion is interposed between the first projecting member and the second projecting member, The piston and the connecting plate are coupled,
Wherein the floating plate has a receiving space on an upper surface for receiving the first projecting member and the second projecting member and the rod extending portion in a state where the rod extending portion is interposed between the first projecting member and the second projecting member, Wherein an insertion space is formed in which the fastening member can be horizontally inserted.

delete

The method according to claim 1,
Top plate; And
Further comprising a fastening member for engaging the upper housing and the upper housing member.