KR101521390B1 - Grid and apparatus for decomposing harmful gas therewith - Google Patents

Abstract

Disclosed is a grid for an apparatus for decomposing harmful gas. The grid includes an edge member, support units which are arranged with a preset gap on the edge member, bending plates which are vertically separated with a preset gap from the support units and are arranged on the edge member. The gap between the bending plates becomes a gas connection hole. A grid set including at least one individual grid is installed at an apparatus for decomposing harmful gas so that a necessary individual grid can be replaced or repaired.

Description

Technical Field [0001] The present invention relates to a grid of a noxious gas decomposition apparatus and a noxious gas decomposition apparatus containing the same.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the field of noxious gas decomposition apparatus, and more particularly, to a grid used in a noxious gas decomposition apparatus including a perfluorinated compound and a decomposition apparatus employing the same.

Perfluorocompounds (PFCs) are compounds in which a large amount of fluorine is substituted in aliphatic hydrocarbons. These perfluorinated compounds are considered to be the main cause of global warming because of their global warming potential which is thousands to tens of thousands times higher than that of carbon dioxide. Some of these perfluorinated compounds are also used as coatings or refrigerants in cooking vessels and paper cups, but they are believed to cause brain, nerve, and liver toxicity and disturb hormones.

Perfluorinated compounds are the main source of semiconductor device manufacturing processes such as memory and LCD. For example, it is widely used as a cleaning agent for an etching etchant and a chemical vapor deposition process, and is discharged in large quantities. Typically, CF ₄ , CHF ₃ , C ₃ F ₆ , CH ₂ F ₂ , C ₃ F ₄ , C ₂ F ₆ , C ₃ F ₈ , C ₄ F ₁₀ , C ₅ F ₈ , SF ₆ and NF ₃ . Other PFCs are also included in the waste gas discharged from the workplace and processes used or manufactured for the purpose of replacing chloro-fluorocarbon (CFC), which is conventionally used, for cleaning agents, etching agents, solvents, reaction materials .

Since the perfluorinated compound is mainly generated in the production process of a commercial product such as a semiconductor device process, it is very important and necessary to efficiently decompose the product.

Conventional apparatuses for decomposing noxious gases such as perfluorinated compounds have a configuration in which a heat accumulator, a catalyst, and the like are accommodated in a chamber, and noxious gas is supplied into the chamber for decomposition treatment. A grid member is used to support the regenerator housed in the chamber. Such a grid member has a structure capable of passing noxious gas or treated gas while supporting the regenerator. On the other hand, the conventional grid was fixed to the bottom of the reactor body providing the chamber, and since the grid itself was made of metal, the maintenance and replacement were very troublesome.

Korean Patent Application No. 10-2006-0008037

SUMMARY OF THE INVENTION The present invention provides a grid for a noxious gas decomposition apparatus that is easy to install and disassemble, taking the above-mentioned problems into consideration.

The present invention provides a grid for a noxious gas decomposition apparatus which is easy to realize a uniform opening distribution and a desired opening ratio in a manufacturing process.

The present invention provides a noxious gas decomposition apparatus employing the above-described improved grid.

The present invention provides a grid for a noxious gas decomposition device comprising: a rim member; A plurality of supports arranged at predetermined intervals on the frame members; And a plurality of bending plates arranged on the frame member spaced apart from each other by a predetermined distance in a direction intersecting the plurality of supports, wherein a distance between the bending plates is a gas communication hole.

Each of the plurality of bending plates may be substantially inverted V-shaped around a folding line in the longitudinal direction, and may be arranged in an inverted V-shape on the frame member.

Each of the plurality of support rods may include a plurality of coupling grooves formed in the longitudinal direction so that the protruding side outer surfaces of the bending plates are inserted.

The rim member, the plurality of supports, and the plurality of bending plates may be joined to each other by a part or whole of the contact portion.

Each of the plurality of support rods further includes a protection member disposed at an upper end portion of the opposite side of the plurality of coupling grooves.

The rim member may be provided with a mounting wing on a part or all of the outer surface.

A grid set including one or more of the grids may be mounted at an installation position of the harmful gas decomposition apparatus so that the individual grids of the grid set may be individually replaceable.

The present invention provides a noxious gas decomposition apparatus comprising: a reactor body provided with a processing chamber therein and having an exhaust port through which a noxious gas is introduced or a processed gas is discharged; And a first grid disposed in the air supply port and providing gas communication through which the harmful gas and the treated gas are communicated while supporting the elements accommodated in the processing chamber, wherein the first grid includes one or more And a grid set containing individual grids.

The individual grids of the first grid comprising: a rim member; A plurality of supports arranged at predetermined intervals on the frame members; And a plurality of bending plates arranged on the frame member spaced apart from each other by a predetermined distance in a direction intersecting the plurality of supports, wherein a distance between the bending plates is a gas communication hole.

Wherein each of the plurality of bending plates is bent in a substantially inverted V-shape around a longitudinal folding line, the plurality of bending plates are arranged in an inverted V-shape on the frame member, And a plurality of coupling grooves formed in the longitudinal direction so that the projecting side outer surfaces of the plates are inserted.

A hopper is further provided on a bottom surface of the reactor main body at the air supply / discharge port, and a second grid is installed in the hopper.

According to the present invention, there is provided a grid for a harmful gas decomposition apparatus that can be easily mounted and replaced. This permits the individual grids to be replaced and repaired, respectively, since a grid set including a plurality of individual grids is installed at the installation position of the harmful gas decomposition apparatus. Therefore, it is possible to replace only the individual grids simply during maintenance and replacement, so that appropriate measures can be taken quickly. In addition, a desired opening ratio can be easily realized by adjusting the arrangement interval of the coupling grooves of the support rods in the manufacturing process of the individual grids. Moreover, the components of these grids are also very economical / productive since they can be simply welded together after being fabricated. In addition, since it is applied to the harmful gas decomposition device as a double grid, the heat loss is suppressed and the heat recovery rate is improved.

1 is a perspective view showing a noxious gas decomposition apparatus employing the grid of the present invention.
2 is a front view showing a noxious gas decomposition apparatus employing the grid of the present invention.
3 is a side view showing a noxious gas decomposition apparatus employing the grid of the present invention.
4 is a plan view showing a noxious gas decomposition apparatus employing the grid of the present invention.
FIG. 5 is a view showing the inside of the reactor main body by removing side walls and a ceiling portion of the reactor main body in the noxious gas decomposition apparatus of FIG. 1;
6 is a view showing an air supply and exhaust unit employed in the noxious gas decomposition apparatus of FIG.
7 is a diagram showing a grid of the present invention.
Figure 8 is a diagram illustrating a grid set comprising one or more of the individual grids of the present invention.
9 is a view showing an example of a state in which the grid of the present invention is placed on a frame at the installation position of the noxious gas decomposition apparatus.
10 is a view showing a process of manufacturing the grid of the present invention.
11 is a view showing an example of a grid according to the present invention, which includes a protection member disposed on each of a plurality of support members.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the embodiments of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

7 to 10 are diagrams for explaining the grid of the present invention.

For reference, the grid of the present invention is an element that is employed in a harmful gas decomposition apparatus as described below to provide a gas communication port while supporting other elements such as a regenerator. In the example of the noxious gas decomposition apparatus, the grid of the present invention can be installed at two places, and in the state of being mounted in the noxious gas decomposition apparatus, the first grid 14 and the second grid 17 However, here, the individual grids are denoted by the reference numeral 14 and will be described.

7 to 10, the grid 14 of the present invention includes a frame member 141, a plurality of support members 142 arranged at predetermined intervals on the frame member 141, and a plurality of supports 142, And a plurality of bending plates 143 arranged in the frame member 141 at a predetermined interval in a direction in which the bending members 141 are arranged. Since the bent plates 143 are arranged so as to be spaced apart from each other, a gas communication hole 144 is provided at an interval therebetween.

10, each of the plurality of bending plates 143 is bent in a substantially inverted V-shape around the folding line in the longitudinal direction. Further, these bent plates 143 are arranged in an inverted V-shape on the frame member 141.

The grid 14 in a state in which the bent plates 143 are arranged in an inverted V-shape is mounted on the air supply / discharge port 113 of the noxious gas decomposition apparatus or the like. That is, the bent plates 143 are mounted at the installation position of the noxious gas decomposition apparatus with the projecting side outer surface facing upward.

Each of the plurality of support rods 142 has a plurality of engagement grooves 1421 formed in the longitudinal direction so that the protruding side outer surfaces of the bending plates 143 are inserted. The projecting side outer surface of the bending plate 143 is inserted into each of the engaging grooves 1421 and is joined by a joining method such as welding.

The rim member 141, the plurality of supports 142, and the plurality of bending plates 143 may be partly or entirely joined to each other in a joining manner such as welding.

As can be seen in the drawing, such a grid 14 can be in a very solid state. In addition, the size and the aperture ratio of the gas communication hole 144 can be adjusted by adjusting the arrangement intervals of the bending plates 143, for example, by arranging the intervals of the engagement grooves 1421 formed in the support members 142.

Preferably, the rim member 141 may be provided with a mounting wing 1411 on a part or the whole of its outer surface. As shown in FIG. 9, when the stowing wing 1411 is mounted on the stowage frame 1311 provided at the installation position when the stowing wing 1411 is mounted to the air supply / discharge port 113 of the noxious gas decomposition apparatus, . As shown in the drawing, these stowing wings 1411 may be additionally provided with reinforcing elements so as to maintain a firm engagement and attachment to the frame member 141.

Further, as will be described in detail below, the grid 14 of the present invention can be mounted as a grid set including a plurality of individual grids 14 in the installation position (see Figs. 8 and 9). In this way, since the grid set including at least one of the individual grids 14 is mounted at the installation position of the harmful gas decomposition apparatus, the individual grids of the grid sets can be individually replaced. Therefore, not only the necessary individual grids 14 can be replaced and repaired, but also the weight is relatively small, so that there is an advantage that the operator is easy to handle in reality.

Since the individual grids 14 are closely attached to each other and mounted on the frame 1311 at the mounting position, the grids 14 can be installed at the required portions of the mounting wing 1411, The mounting wing 1411 may be provided on the entire outer surface of the frame member 141. In this case,

The grid 14 described above can be manufactured in the order as shown in FIG. For example, after the frame member 141, the support member 142, and the bending plate 143 are manufactured, the bending plates 143 and the support members 142 are joined together by welding or the like. Then, the folding plate 143 and the support base 142 are joined to the frame member 141 by welding.

As shown in Fig. 9, the individual grids 14 manufactured as described above can be mounted as many as necessary at the installation position.

Hereinafter, a noxious gas decomposition apparatus employing the grid 14 of the present invention will be described.

1 to 5 are views showing a noxious gas decomposition apparatus employing the grid of the present invention. Figure 1 is a schematic perspective view, Figure 2 is a schematic front view, Figure 3 is a schematic side view, and Figure 4 is a top plan view from above. For reference, in FIG. 2, for the sake of understanding, the inside of the reactor body is shown to be seen. FIG. 5 is a view showing the inside of the reactor main body in which the side walls and the ceiling portion are removed in the noxious gas decomposition apparatus of FIG. 1. FIG. 6 is a view showing an air supply and exhaust unit employed in the noxious gas decomposition apparatus of FIG.

1 to 6, a harmful gas decomposition apparatus employing the grid of the present invention includes a reactor body 11 for providing a process chamber 111 in which harmful gas is treated, And an air supply and exhaust unit 12 connected to the reactor body 11 for supplying gas and exhausting the treated gas.

The reactor body 11 provides a sealed processing chamber 111 within which the decomposition treatment of noxious gases is performed. To this end, the reactor body 11 may be composed of walls forming a bottom portion, a side wall portion, and a ceiling portion so as to have a closed space therein. As shown, the reactor main body 11 may have the same shape as a hexahedron, but is not limited thereto. Also, the walls may have a refractory member disposed on the inner surface thereof.

As can be seen in the figure, the reactor body 11 is supported at a predetermined height by the support frame 13, and the air supply and exhaust unit 12 is capable of supplying or discharging gas below the reactor body 11 have.

The processing chamber 111 provided inside the reactor body 11 can be divided into a plurality of compartment spaces 1111, 1112 and 1113 by one or more partitions 112, preferably at a predetermined height. Because the partitions 112 have a lower height than the ceiling of the reactor body 11, the upper space inside the processing chamber 111 is connected so that the gas can move.

5, the reactor main body 11 is provided with one or more air exhaust ports 113 through which a harmful gas is introduced or a processed gas is discharged, and these are arranged in a plurality of compartment spaces 1111, 1112, and 1113, respectively do. Preferably, the air supply / exhaust ports 113 are formed in the bottom portions of the compartment spaces 1111, 1112, and 1113, and the harmful gas is introduced into the compartment spaces 1111, 1112, and 1113 of the process chamber 111 The treated gas is discharged. FIG. 4 shows a state in which the first grid 14 is disposed in the air supply opening 113. FIG. Here, the first grid 14 may be a grid set including one or more of the above-described individual grids.

The regenerator 151 and the catalyst 152 are accommodated in the respective compartment spaces 1111, 1112 and 1113 of the process chamber 111. The regenerator 151 and the catalyst 152 may be arranged in an integrated manner stacked in each of the partition spaces 1111, 1112, and 1113 as shown in the figure.

5, the grid 14 of the present invention is disposed in each of the air supply / exhaust ports 113. As shown in FIG. For reference, examples of the harmful gas employing the grid 14 of the present invention may be disposed in the hopper portion 116 as well as the air supply / discharge port 113 of the reactor main body 11 as described later. Therefore, as described above, the grid disposed in the air discharge opening 113 is referred to as a first grid 14, and the grid disposed in the hopper portion 116 is referred to as a second grid 17.

The first grid 14 allows gas to flow in or out while supporting the regenerator 151 and the catalyst 152 disposed in the respective compartment spaces 1111, 1112 and 1113 of the processing chamber 111.

Therefore, the first grid 14 disperses the flow of gas flowing into the processing chamber 111, specifically, the compartment spaces 1111, 1112, and 1113, so that a uniform air volume flows through the compartment spaces 1111, 1112, and 1113, To be transferred to the inside. The first grid 14 also prevents dust from flowing into the processing chamber 111 and prevents heat loss of the heat storage element 151.

A hopper portion 116 is disposed outside the bottom surface of the reactor main body 11 at each of the air supply / exhaust ports 113. The air supply and exhaust unit 12, which will be described below, is connected to each air supply port 113 through this hopper unit 116.

And the second grid 17 is disposed in the hopper portion 116. [ The second grid 17 also functions to disperse the airflow and to reduce the dust contained in the gas flowing into the processing chamber 111 and to prevent the heat loss of the heat storage element 151 disposed in the processing chamber 111 .

Here, it goes without saying that the second grid 117 can also be applied as a grid set including at least one of the above-described individual grids.

As described above, since the noxious gas decomposition apparatus including the perfluorinated compound of the present invention has the double grid structure of the first grid 14 and the second grid 17, the heat loss of the heat storage element 151 is effectively prevented In addition, the heat recovery rate can be improved.

As described above, the air supply and exhaust unit 12 is connected to the air supply and exhaust port 113 through the hopper 116, and FIG. Fig. 7 is a view showing the exhaust device part 12; Fig.

6, the air supply and exhaust unit 12 includes a connection line 121 as a pipe connected to the air supply and exhaust ports 113 of the reactor main body 11. An air supply line 122 in the form of a pipe is connected to one side of the connection lines 121 and an exhaust line 123 is connected to the other side of the connection line 121. A damper portion 124 is provided at a connection portion between the connection lines 121 and the air supply line 122 and at a connection portion between the connection lines 121 and the exhaust line 123. Each of the connecting lines 121 is connected to the air supply line 122 or to the air exhaust line 123 by the opening and closing operation of each of the damper portions 124. Accordingly, the noxious gas is supplied to the corresponding compartment spaces 1111, 1112, and 1113 of the processing chamber 111, or the processed gas is exhausted.

Preferably, the air supply / discharge unit 12 of the noxious gas decomposition apparatus including the perfluorinated compound of the present invention controls opening and closing operations of the respective damper units 124 so as to periodically supply the flow of gas, Direction. Namely, noxious gas can be introduced into the air supply / discharge port 113 of any partition space and exhausted to the air supply / exhaust port 113 of another partition space, and the gas flow direction can be periodically switched. Therefore, the heat recovery rate can be improved.

5, a horizontal damper unit in which the cylinders of the damper unit 124 are installed to operate in the horizontal direction may be applied, and as shown in the remaining drawings, the cylinder of the damper unit 124 may be in the vertical direction A vertical damper unit which operates as a vertical damper unit may be applied.

As shown in FIG. 2, a collecting container 125 is disposed below each connection line 121 to receive dust to be discharged.

In addition, the hopper portion 116, the collecting container 125, and the like can be provided with a sight window 18 to observe the internal state, so that quick measures can be taken when a problem occurs.

11 is a view showing an example of a grid according to the present invention, which includes a protection member disposed on each of a plurality of support members.

As shown in Fig. 11, the grid of the present invention may be provided with a protection member 1422 at least in contact with the heat accumulator 151 supported on the upper portion thereof. For example, the grid substantially contacts the upper end of the plurality of support members 142 with the regenerator 151, and may be disposed, for example, in the form of a protective cap at the upper end of each support member. When the protective member is applied in the form of a protective cap as in the illustrated example, it may have a structure in which the upper end portions of the respective support members 142 are fitted.

The protective member 1422 may be, for example, polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), fluorinated ethylene propylene copolymer (FEP), or ethylene tetrafluoroethylene copolymer (ETFE). These materials have excellent corrosion resistance and a small frictional force with the heat accumulator 151. Therefore, the upper surface of the grid can be protected and prevented from corrosion, and furthermore, the heat accumulator 151 can be easily moved for proper alignment when the heat accumulator 151 is installed.

It is needless to say that the protective member 1422 may be disposed at a position exposed to the upper part such as the frame member 141 in addition to the plurality of supporting members 142.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments.

11: Reactor main body 12: Supply and exhaust unit
13: support frame 14: first grid
17: second grid 111: processing chamber
112: partition 113:
1111, 1112, 1113: compartment space 116: hopper section
118: view window 121: connection line
122: air supply line 123: exhaust line
124: damper part 125: collection container
141: rim member 142: support member
143: bending plate 144: gas communication port
1311: frame 1411:
1421: coupling groove 1422: protective member

Claims (12)

There is provided a grid for a noxious gas decomposition apparatus which is provided on a bottom surface of a reactor body for providing a processing chamber therein and which provides a gas communication passage between the inside and the outside of the chamber while supporting elements including a regenerator and a catalyst accommodated in the chamber,
A frame member;
A plurality of supports arranged at predetermined intervals on the frame members; And
And a plurality of bending plates arranged in the frame member spaced apart from each other by a predetermined distance in a direction intersecting the plurality of supports, each of the plurality of bending plates bent in an inverted V-shape about a longitudinal folding line,
The gap between the bending plates serves as a gas communication hole,
Wherein each of the plurality of support rods has a plurality of coupling grooves into which the projecting side outer surfaces of the plurality of bending plates are inserted and the projecting side outer surfaces of the bending plates are inserted into the coupling grooves, For the grid.
delete delete delete delete The method according to claim 1,
Wherein each of the plurality of supports further comprises a protection member disposed at an upper end portion of the opposite side of the plurality of coupling grooves,
Grid for decomposition of harmful gas.
The method according to claim 1,
Wherein the rim member is provided with a stationary blade at part or all of the outer side surface thereof.
The method according to any one of claims 1, 6, and 7,
Wherein a grid set including one or more of the grids is mounted to an installation position of the noxious gas decomposition apparatus such that the individual grids of the grid set are individually replaceable.
As the harmful gas decomposition apparatus:
A reactor body provided with a processing chamber therein and having an exhaust port for introducing a noxious gas into the bottom surface or discharging the processed gas; And
And a first grid for supporting the element including the regenerator and the catalyst disposed in the air supply port and accommodated in the processing chamber and providing gas communication through which the harmful gas and the processed gas are communicated,
Wherein the first grid comprises a set of grids, wherein the individual grids of any one of Claims 1, 6, and 7,
Hazardous gas decomposition apparatus.
delete delete The method of claim 9,
A hopper is further provided on a bottom surface of the reactor main body at the air supply /
And a second grid is installed in the hopper portion.

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