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KR101488227B1 - Adsorption surface plate - Google Patents

Adsorption surface plate Download PDF

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KR101488227B1
KR101488227B1 KR20130082759A KR20130082759A KR101488227B1 KR 101488227 B1 KR101488227 B1 KR 101488227B1 KR 20130082759 A KR20130082759 A KR 20130082759A KR 20130082759 A KR20130082759 A KR 20130082759A KR 101488227 B1 KR101488227 B1 KR 101488227B1
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adsorption
grooves
groove
support surface
suction
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KR20140020740A (en
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마사아키 다나베
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다즈모 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • External Artificial Organs (AREA)

Abstract

(과제) 극박의 시트모양의 워크를, 그 표면에 요철을 생기게 하지 않고 하나의 면으로 흡인한다.
(해결수단) 흡착정반(1)은, 지지면(1A)에 설정되는 흡착부에 극박의 시트모양의 워크가 흡인흡착된다. 본 발명에서는, 이러한 흡착정반으로서, 흡착홈(10), 복수의 하혈(20) 및 복수의 연통홈(30)을 구비한다. 흡착홈(10)은, 지지면(1A)에 있어서 흡착부에 형성되고, 복수의 세로홈(11) 및 복수의 가로홈(12)에 의하여 격자모양으로 형성된다. 복수의 하혈(20)은, 지지면(1A)과 반대측의 면(1B)에 있어서 흡착부에 대응하는 영역의 적당한 장소로서, 흡착홈(10)의 바로 아래에 형성된다. 복수의 연통홈(30)은, 흡착홈(10)과 대략 동일한 홈폭으로 흡착홈(10)을 따라 형성되고, 복수의 하혈(20)의 각각의 상단에 접속되어, 하혈과 흡착홈을 통하게 한다.(Problem) A thin sheet-like workpiece is attracted to one surface without causing irregularities on the surface thereof.
(Solution) In the suction platen 1, a sheet-like work of a very thin film is sucked and adsorbed to a suction portion set on the support surface 1A. In the present invention, such an adsorption plate is provided with an adsorption groove (10), a plurality of blood drops (20), and a plurality of communication grooves (30). The adsorption grooves 10 are formed in the adsorption portion on the support surface 1A and are formed in a lattice shape by a plurality of longitudinal grooves 11 and a plurality of transverse grooves 12. The plurality of red blood cells 20 are formed immediately below the adsorption grooves 10 as a suitable place in a region corresponding to the adsorption portion on the surface 1B opposite to the support surface 1A. The plurality of communication grooves 30 are formed along the adsorption grooves 10 with substantially the same groove width as the absorption grooves 10 and are connected to the upper ends of the plurality of red blood cells 20 to allow the blood to pass through the absorption grooves .

Description

흡착정반{ADSORPTION SURFACE PLATE}{ADSORPTION SURFACE PLATE}

본 발명은, 워크(work)를 흡착하는 흡착정반(吸着定盤)에 관한 것으로서, 특히, 두께가 100μm 단위의 박판 글라스(薄板 glass)나 필름 등의 극박(極薄)의 시트모양의 워크의 흡착에 적합한 흡착정반에 관한 것이다.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adsorption plate (adsorption plate) for adsorbing a work, and more particularly to an adsorption plate (adsorption plate) for adsorbing a work such as a thin sheet glass Which is suitable for adsorption.

종래부터 처리대상이 되는 워크를 흡착정반에 흡착하여 소정의 처리를 실시하는 워크 처리장치가 알려져 있다(예를 들면 특허문헌1 참조). 워크의 구체적인 예로서는 반도체 기판, 액정표시장치용 글라스 기판, 포토마스크용 글라스 기판, 광디스크용 기판 등의 낱장모양의 사각형의 워크를 들 수 있다.BACKGROUND ART Conventionally, a work processing apparatus for adsorbing a work to be treated on a suction platen and performing predetermined processing is known (see, for example, Patent Document 1). Specific examples of the work include a single rectangular work such as a semiconductor substrate, a glass substrate for a liquid crystal display, a glass substrate for a photomask, and a substrate for an optical disk.

도6은, 종래의 흡착정반을 나타내는 평면도이다. 도6에 나타나 있는 바와 같이, 흡착정반(101)은 상면(上面)이 워크(도면에 나타내지 않는다)의 지지면(101A)이 되고 있고, 당해 지지면(101A)의 중앙부에 워크를 흡착하기 위한 사각형의 흡착부(吸着部)가 설정된다. 흡착부는 흡착홈(110)을 구비한다. 흡착홈(110)은, 복수의 세로홈(111) 및 복수의 가로홈(112)에 의하여 격자모양(格子模樣)으로 형성된다. 이러한 흡착홈(110)은, 다이아몬드 커터를 사용한 절삭가공(切削加工) 등에 의하여 용이하게 형성할 수 있다.6 is a plan view showing a conventional suction platen. As shown in Fig. 6, the suction platen 101 has a support surface 101A of a work (not shown) on its upper surface, and a suction surface 101A A quadrangular adsorption unit (adsorption unit) is set. The adsorption portion has an adsorption groove (110). The adsorption grooves 110 are formed in a lattice pattern by a plurality of longitudinal grooves 111 and a plurality of transverse grooves 112. The suction grooves 110 can be easily formed by cutting (cutting) using a diamond cutter.

도7은, 도6에 있어서 쇄선으로 둘러싸인 VII부분의 확대도이다. 도7에 나타나 있는 바와 같이, 흡착정반(101)의 지지면(101A)과 반대측의 면(하면)(101B)으로부터 흡착부에 대응하는 영역의 적당한 장소에는, 흡착홈(110)의 바로 아래에 복수의 원형(圓形)의 하혈(下穴)(12O)이 드릴가공으로 형성된다.Fig. 7 is an enlarged view of a portion VII surrounded by a chain line in Fig. The adsorption surface of the adsorption surface of the adsorption surface of the adsorption unit 101 is adsorbed on the surface of the adsorption surface of the adsorption unit 101 at a suitable position in the region corresponding to the adsorption unit from the surface A plurality of circular bottom holes 120 are formed by drilling.

도8은, 도6에 있어서 화살표 방향에서 본 VIII-VIII 선 단면도이다. 각 하혈(120)은, 흡착정반(101)의 하면으로부터 흡착정반(101)을 관통하지 않는 정도의 깊이(도8의 부호 Dl 참조)로 형성된다. 하혈(120)의 하부에는, 진공펌프(도면에 나타내지 않는다)를 접속하기 위한 부시(bush)(102)가 기밀(氣密)하게 장착된다.Fig. 8 is a sectional view taken along line VIII-VIII in Fig. 6 in the direction of the arrow. Each red blood cell 120 is formed at a depth (see the symbol Dl in Fig. 8) so as not to penetrate the suction platen 101 from the lower surface of the suction platen 101. [ A bush 102 for connecting a vacuum pump (not shown) is airtightly mounted on the lower part of the lower blood 120.

그리고 흡착부에 있어서 복수의 하혈(120)이 가공된 각 위치에, 흡착정반(101)의 상면으로부터 하혈(120)로 관통하는 연통공(連通孔)(130)이 드릴가공으로 형성된다. 연통공(130)에 의하여 각 하혈(120)과 흡착홈(110)이 통하게 된다.A communicating hole (130) penetrating from the upper surface of the adsorption surface plate (101) to the lower blood (120) is formed by drilling at each position where a plurality of blood drops (120) are processed in the adsorption section. And each blood 120 and the suction groove 110 communicate with each other through the communication hole 130.

연통공(130)은, 지지면(101A)에 미리 형성된 흡착홈(110)의 위로부터 드릴가공을 함으로써 형성된다. 이 때문에 연통공(130)의 구멍의 지름은, 1㎜φ나 0.8mmφ 정도가 한계이다. 흡착홈(110)의 홈폭(groove幅)은 보통 이것보다도 작은 치수이다. 특히, 두께가 100μm 단위의 얇은 글라스나 필름 등의 극박의 시트모양의 워크의 흡착에 특화된 흡착정반에서는, 흡착부에 워크의 접촉면적을 확보하는 관점으로부터, 흡착홈(110)의 홈폭이 0.2㎜ 정도인 것도 드물지 않고, 연통공(130)의 구멍의 지름은 흡착홈(110)의 홈폭의 4∼5배 정도로도 되어버린다. 즉, 연통공(130)의 부분에서 흡착홈(110)의 홈폭이 국소적으로 커지게 된다.The communication hole 130 is formed by drilling the upper surface of the suction groove 110 previously formed in the support surface 101A. Therefore, the diameter of the hole of the communication hole 130 is limited to about 1 mm? Or about 0.8 mm?. The groove width of the adsorption grooves 110 is usually smaller than this. Particularly, in an adsorption plate specially designed for adsorption of an ultra thin sheet-like work such as a thin glass or film with a thickness of 100 μm, it is preferable that the groove width of the adsorption groove 110 is 0.2 mm And the diameter of the hole of the communication hole 130 is about 4 to 5 times as large as the groove width of the suction groove 110. [ That is, the groove width of the suction groove 110 locally increases at the portion of the communication hole 130.

이러한 흡착정반(1Ol)의 흡착부에, 상기의 극박의 시트모양의 워크를 흡착시키면 워크의 표면은 연통공(130)의 부분이 스폿적(spot的)으로 패인 것 같이 변형되어서 흡착된다.When the sheet-like work of the ultrashort is adsorbed on the adsorption part of the adsorption plate 100, the surface of the work is deformed and adsorbed as if the part of the communication hole 130 is spot-like.

흡착정반은, 그 지지면에 지지되는 워크의 표면에 소정의 처리를 실시하는 장치에 구비된다. 이러한 처리장치의 일례로서, 도포장치(塗布裝置)가 있다. 도포장치는, 흡착정반의 지지면에 평행하게 주행하는 슬릿 노즐(slit nozzle)을 구비하여, 이 슬릿 노즐로부터 워크의 표면에 도포액(coating液)을 토출시켜서 일정한 막두께로 도포하는 것이다.
The suction platen is provided in an apparatus for performing a predetermined treatment on the surface of a work supported by the support surface. As an example of such a processing apparatus, there is a coating apparatus. The applicator is provided with a slit nozzle which runs parallel to the support surface of the adsorption table and discharges the coating solution onto the surface of the work from the slit nozzle and applies the coating solution with a constant film thickness.

일본국 공개특허 특개 2005-85881호 공보Japanese Patent Application Laid-Open No. 2005-85881

도포장치에 의하여 도포가능한 도포막(塗布膜)의 막두께는, 젖은 상태에서 1∼1.5μm 정도까지 박막화(薄膜化)가 진행되고 있다. 따라서 워크의 표면에 깊이 수μm이라도 스폿적으로 몇 개라도 함몰이 생기면, 그 함몰에 도포액이 쌓여, 도포막이 건조되었을 때에 그 부분만 두껍게 되어, 막두께가 불균일하게 되는 문제가 있었다.The film thickness of the coating film (coating film) which can be coated by the coating apparatus is thinned to 1 to 1.5 mu m or so in a wet state. Therefore, when a depth of several micrometers or more is formed on the surface of a workpiece, a coating liquid accumulates on the depression of the work, and only the portion becomes thick when the coating film is dried, resulting in a problem that the film thickness becomes uneven.

본 발명은, 상기 과제에 비추어 보아서 이루어진 것으로서, 극박의 시트모양의 워크를, 그 표면에 요철을 생기게 하지 않고 하나의 면으로 흡인흡착하는 것을 가능하게 하는 흡착정반을 제공하는 것을 목적으로 한다.
SUMMARY OF THE INVENTION The present invention is made in view of the above problems, and an object of the present invention is to provide a suction platen that enables a sheet-like work of a very thin sheet to be sucked and adsorbed by a single surface without causing irregularities on the surface thereof.

흡착정반은, 지지면에 설정되는 흡착부에 극박의 시트모양의 워크가 흡인흡착된다. 본 발명에서는, 이러한 흡착정반으로서, 흡착홈, 복수의 하혈 및 복수의 연통홈을 구비한다. 흡착홈은, 지지면에 있어서 흡착부에 형성되고, 복수의 세로홈 및 복수의 가로홈에 의하여 격자모양으로 형성된다. 복수의 하혈은, 지지면과 반대측의 면에 있어서의 흡착부에 대응하는 영역의 장소로서, 흡착홈의 바로 아래에 형성된다. 여기에서 대응하는 영역의 장소란, 물리적으로 대응하는 영역의 정확한 장소뿐만 아니라 대응하는 영역의 적당한 장소를 포함하는 의미이다. 복수의 연통홈은, 흡착홈과 동일한 홈폭으로 흡착홈을 따라 형성되고, 복수의 하혈의 각각의 상단(上端)에 접속되어, 하혈과 흡착홈을 통하게 한다. 여기에서 동일한 홈폭이란, 물리적으로 정확하게 동일한 홈폭뿐만 아니라 대략 동일한 홈폭를 포함하는 의미이다.In the suction platen, an ultra thin sheet-like workpiece is sucked and adsorbed to a suction portion set on a support surface. In the present invention, such an adsorption tablet is provided with an adsorption groove, a plurality of blood drops, and a plurality of communication grooves. The adsorption grooves are formed in the adsorption portion on the support surface and are formed in a lattice shape by a plurality of longitudinal grooves and a plurality of transverse grooves. A plurality of hemorrhages are formed immediately below the adsorption grooves as a location of a region corresponding to the adsorption section on the surface opposite to the support surface. Here, the place of the corresponding area is meant to include not only the exact place of the physically corresponding area but also a suitable place of the corresponding area. The plurality of communication grooves are formed along the suction grooves with the same groove width as the suction grooves, and are connected to the upper ends of the plurality of lower blood, respectively, to allow the lower blood to pass through the suction grooves. Here, the same groove width means not only physically exactly the same groove width but also approximately the same groove width.

이 구성에 의하면, 흡착정반의 지지면내에 설정되는 흡착부에 흡착홈의 홈폭보다 커지게 되는 개구(開口)가 발생하지 않는다.
According to this configuration, an opening (opening) that becomes larger than the groove width of the suction groove does not occur in the suction portion set in the support surface of the suction platen.

본 발명에 의하면, 극박의 시트모양의 워크를, 그 표면에 요철을 생기게 하지 않고 하나의 면으로 흡착할 수 있다. 본 발명의 흡착정반을 도포장치에 채용함으로써 극박의 시트모양의 워크의 표면에 균일한 막두께로 도포액을 도포할 수 있다.
According to the present invention, it is possible to adsorb a thin sheet-like workpiece on one surface without causing irregularities on the surface thereof. By employing the adsorptive surface plate of the present invention in a coating apparatus, it is possible to apply the coating liquid to the surface of a sheet-shaped work of ultra-thin film with a uniform film thickness.

도1 본 발명의 1실시형태에 있어서 흡착정반을 나타내는 평면도이다.
도2 도1에 있어서 일점쇄선으로 둘러싸인 II부의 확대도이다.
도3 도1에 있어서 화살표 방향에서 본 III-III 선 단면도이다.
도4 도1에 있어서 일점쇄선으로 둘러싸인 IV부의 확대도이다.
도5 도1에 있어서 화살표 방향에서 본 V-V의 선 단면도이다.
도6 종래의 흡착정반을 나타내는 평면도이다.
도7 도6에 있어서 일점쇄선으로 둘러싸인 VII부의 확대도이다.
도8 도6에 있어서 화살표 방향에서 본 VIII-VIII 선 단면도이다.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an adsorption tablet according to one embodiment of the present invention. Fig.
2 is an enlarged view of a portion II surrounded by a one-dot chain line in Fig.
3 is a sectional view taken along the line III-III in Fig. 1, taken in the direction of the arrow.
Fig. 4 is an enlarged view of the portion IV surrounded by a one-dot chain line in Fig.
5 is a line sectional view taken along the line VV in Fig.
6 is a plan view showing a conventional adsorptive plate.
Fig. 7 is an enlarged view of a portion VII surrounded by a one-dot chain line in Fig.
8 is a sectional view taken along the line VIII-VIII in FIG.

이하, 본 발명의 실시형태를 도면을 참조하여 설명한다.DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.

도1은, 본 발명의 실시형태에 관한 흡착정반을 나타내는 평면도이다. 도1에 나타나 있는 바와 같이, 흡착정반(1)은 상면이 워크(도면에 나타내지 않는다)의 지지면(1A)이 되어 있고, 당해 지지면(1A)의 중앙부에 워크를 흡착하기 위한 사각형의 흡착부가 설정된다.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a suction platen according to an embodiment of the present invention. Fig. 1, the upper surface of the suction platen 1 is a support surface 1A of a work (not shown), and a quadrangular adsorption for adsorbing the work at the center of the support surface 1A Is set.

흡착부는 흡착홈(10)을 구비한다. 도2는, 도1에 있어서 쇄선으로 둘러싸인 II부분의 확대도이다. 도3은, 도1에 있어서 화살표 방향에서 본 III-III 선 단면도이다. 도2, 도3에 나타나 있는 바와 같이, 흡착홈(10)은, 복수의 세로홈(11) 및 복수의 가로홈(12)에 의하여 격자모양으로 형성된다. 또, 흡착부를 복수의 블록으로 분할하여, 블록 단위로 세로홈(11)과 가로홈(12)을 형성하고, 흡착부 전체로서 도1과 같은 격자모양을 나타나게 하여도 상관없다. 이러한 흡착홈(10)은, 다이아몬드 커터를 사용한 절삭가공에 의하여 용이하게 형성시킬 수 있다.The adsorption section has an adsorption groove (10). Fig. 2 is an enlarged view of a portion II surrounded by a chain line in Fig. 1. Fig. 3 is a sectional view taken along the line III-III in Fig. As shown in Figs. 2 and 3, the adsorption grooves 10 are formed in a lattice shape by a plurality of longitudinal grooves 11 and a plurality of transverse grooves 12. It is also possible to divide the adsorption section into a plurality of blocks and form the vertical grooves 11 and the transverse grooves 12 on a block-by-block basis, so that the lattice shape as shown in Fig. Such a suction groove 10 can be easily formed by cutting using a diamond cutter.

도4는, 도1에 있어서 쇄선으로 둘러싸인 IV부분의 확대도이다. 도4에 나타나 있는 바와 같이, 흡착정반(1)의 지지면(1A)과 반대측의 면(하면)(1B)으로부터 흡착부에 대응하는 영역의 적당한 장소(본 실시형태에서는 12곳)에는, 흡착홈(10)(본 실시형태에서는 가로홈(12))의 바로 아래에 복수의 원형의 하혈(20)이 드릴가공으로 형성된다.4 is an enlarged view of a portion IV surrounded by a chain line in Fig. As shown in Fig. 4, in a suitable place (12 places in this embodiment) of the region corresponding to the adsorption section from the surface (lower surface) 1B opposite to the support surface 1A of the adsorption tablet 1, A plurality of circular blood drops 20 are formed by drilling right under the groove 10 (in this embodiment, the lateral grooves 12).

도5는, 도1에 있어서 화살표 방향에서 본 V-V 선 단면도이다. 각 하혈(20)은, 흡착정반(1)의 하면으로부터 흡착정반(1)을 관통하지 않을 정도의 깊이(도5의 부호 D1 참조)에서 형성된다. 하혈(20)의 하부에는, 진공펌프(도면에 나타내지 않는다)를 접속하기 위한 부시(2)가 기밀하게 장착된다.5 is a sectional view taken along the line V-V in Fig. Each red blood cell 20 is formed at a depth (refer to a reference numeral D1 in Fig. 5) not to penetrate the suction platen 1 from the lower surface of the suction platen 1. [ A bush 2 for connecting a vacuum pump (not shown) is airtightly mounted on the lower part of the lower blood 20.

그리고 흡착부에 있어서 복수의 하혈(20)이 가공된 각 위치에, 흡착정반(1)의 상면으로부터 하혈(20)로 관통하는 연통홈(30)이 형성된다. 연통홈(30)에 의하여 하혈(20)과 흡착홈(10)이 통하게 된다.A communicating groove 30 penetrating from the upper surface of the adsorption tablet 1 to the lower blood 20 is formed at each position where a plurality of blood drops 20 are processed in the adsorption section. And the lower blood 20 and the suction groove 10 communicate with each other by the communication groove 30.

도4, 도5에 나타나 있는 바와 같이, 연통홈(30)은 가로홈(12)과 대략 동일한 홈폭으로 가로홈(12)을 따라 형성된다. 연통홈(30)은, 가로홈(12)과 하혈(20)의 상단과 접속하고 있다. 연통홈(30)에 의하여 각 하혈(20)과 흡착홈(10)이 통하게 된다. 또, 연통홈(30)의 홈폭은, 가공정밀도 등에 의하여 가로홈(12)의 홈폭보다 약간 커지게 되는 경우도 있기 때문에 엄밀하게 동일한 것이 요구되는 것은 아니다.As shown in Figs. 4 and 5, the communication groove 30 is formed along the lateral groove 12 with substantially the same groove width as the lateral groove 12. The communication groove 30 is connected to the upper end of the lateral groove 12 and the lower blood 20. The blood drops 20 and the suction grooves 10 are communicated with each other by the communication groove 30. In addition, the groove width of the communication groove 30 may be slightly larger than the groove width of the lateral groove 12 due to machining accuracy or the like, and therefore, the groove width is not strictly the same.

이러한 연통홈(30)은, 다이아몬드 커터를 사용한 흡착홈(10)(본 실시형태에서는 가로홈(12))의 형성공정에서, 다이아몬드 커터의 절삭깊이를 조정함으로써 형성할 수 있다. 즉 흡착홈(10)의 형성공정에서, 연통홈(30)을 동시에 만드는 것이 가능하기 때문에, 종래의 연통공(130)(도7 참조)과 같이 별도의 드릴가공의 공정이 불필요하게 되어, 흡착정반의 제조효율의 향상이 도모된다.Such a communication groove 30 can be formed by adjusting the cutting depth of the diamond cutter in the process of forming the suction groove 10 (the lateral groove 12 in this embodiment) using the diamond cutter. That is, in the process of forming the adsorption grooves 10, since the communication grooves 30 can be made at the same time, a separate drilling process like the conventional communication hole 130 (see FIG. 7) becomes unnecessary, The manufacturing efficiency of the base is improved.

본 실시형태에서는, 가로홈(12)의 바로 아래로서 세로홈(11)과 가로홈(12)의 교점 이외의 부분에 하혈(20)이 형성되어 있지만, 하혈(20)은 세로홈(11)의 바로 아래에 형성해도 좋고, 세로홈(11)과 가로홈(12)의 교점의 바로 아래에 하혈(20)을 형성하여도 좋다. 또 세로홈(11)과 가로홈(12)의 교점의 바로 아래에 하혈(20)을 형성한 경우에는, 당해 교점에서 십자(十字)로 교차하도록 세로홈(11)과 가로홈(12)의 양방으로 연통홈(30)을 형성해도 좋다.In the present embodiment, the lower blood 20 is formed just below the lateral groove 12 at a portion other than the intersection of the vertical groove 11 and the lateral groove 12, The lower blood 20 may be formed just below the intersection of the vertical groove 11 and the lateral groove 12. [ When the lower blood 20 is formed immediately below the intersection of the vertical grooves 11 and the horizontal grooves 12, the vertical grooves 11 and the lateral grooves 12 are formed so as to intersect with the cross at the intersections. The communication grooves 30 may be formed in both directions.

본 발명에 의하면, 흡착정반(1)의 지지면(1A)내에 설정되는 흡착부에 흡착홈(10)의 홈폭보다 커지게 되는 개구가 발생하지 않는다. 이에 따라서 극박의 시트모양의 워크를, 그 표면에 요철을 생기게 하지 않고 하나의 면으로 흡착할 수 있다. 본 발명의 흡착정반을 도포장치에 채용함으로써 극박의 시트모양의 워크의 표면에 균일한 막두께로 도포액을 도포할 수 있다.According to the present invention, an opening that is larger than the groove width of the adsorption groove (10) is not generated in the adsorption portion set in the support surface (1A) of the adsorption surface plate (1). Accordingly, it is possible to adsorb a thin sheet-like workpiece on one surface without causing irregularities on the surface thereof. By employing the adsorptive surface plate of the present invention in a coating apparatus, it is possible to apply the coating liquid to the surface of a sheet-shaped work of ultra-thin film with a uniform film thickness.

상기 실시형태의 설명은, 모든 면에서 예시로서, 제한적인 것은 아니라고 생각되어야 한다. 본 발명의 범위는, 상기의 실시형태가 아니고 특허청구범위에 의하여 나타난다. 또한 본 발명의 범위에는, 특허청구범위와 균등한 의미 및 범위내에서의 모든 변경이 포함된다.
The description of the above embodiments is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than the above embodiments. The scope of the present invention includes all modifications within the meaning and range equivalent to the claims.

1 : 흡착정반
1A : 지지면
2 : 부시
10 : 흡착홈
11 : 세로홈
12 : 가로홈
20 : 하혈
30 : 연통홈
101 : 흡착정반
101A : 지지면
102 : 부시
110 : 흡착홈
110A : 지지면
111 : 세로홈
112 : 가로홈
120 : 하혈
130 : 연통공1: Adsorption plate
1A: Support surface
2: Bush
10: Adsorption groove
11: Vertical groove
12: Horizontal groove
20: Red blood cell
30: communicating groove
101: Adsorption plate
101A: Support surface
102: Bush
110: adsorption groove
110A: Support surface
111: Vertical groove
112: Horizontal groove
120: Red blood cell
130:

Claims (3)

지지면(支持面)에 설정되는 흡착부(吸着部)에 극박(極薄)의 시트모양의 워크(work)가 흡인흡착되는 흡착정반(吸着定盤)으로서,
상기 지지면에 있어서 상기 흡착부에 형성되고, 복수의 세로홈 및 복수의 가로홈에 의하여 격자모양으로 형성되는 흡착홈과,
상기 지지면과 반대측의 면에 있어서 상기 흡착부에 대응하는 영역의 장소로서 상기 흡착홈의 아래에 형성되는 복수의 하혈(下穴)과,
상기 흡착홈과 동일한 홈폭으로 상기 흡착홈을 따라 형성되고, 상기 복수의 하혈의 각각의 상단에 접속되어, 상기 하혈과 상기 흡착홈을 통하게 하는 복수의 연통홈을
구비하며,
상기 연통홈은, 상기 흡착홈과 동시에 또한 동일하게 형성될 수 있는 흡착정반.
(Adsorptive surface) on which a sheet-like work of an ultrathin shape is sucked and adsorbed on a suction portion (suction portion) set on a support surface (support surface)
An adsorption groove formed in the adsorption section on the support surface in a lattice shape by a plurality of longitudinal grooves and a plurality of transverse grooves,
A plurality of hypotenuses (bottom holes) formed under the suction grooves as places of a region corresponding to the suction portions on a surface opposite to the support surface,
A plurality of communication grooves formed along the adsorption grooves at the same groove width as the adsorption grooves and connected to upper ends of the plurality of lower bloods to communicate the lower blood and the adsorption grooves,
Respectively,
Wherein the communication groove can be formed at the same time as the absorption groove .
제1항에 있어서,
상기 연통홈이 상기 세로홈 혹은 상기 가로홈에만 따라 형성되는 흡착정반.
The method according to claim 1,
And the communication groove is formed only along the vertical groove or the horizontal groove.
제2항에 있어서,
상기 연통홈이 상기 세로홈과 상기 가로홈의 교점 이외의 부분에 형성되는 흡착정반.3. The method of claim 2,
And the communication groove is formed at a portion other than an intersection of the longitudinal groove and the lateral groove.
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