JP7569950B1 - Coating Equipment - Google Patents

Abstract

[Problem] To provide a coating device that uses suction force due to reduced pressure to prevent a coating liquid from entering a gap formed between a substrate and an enclosing member. [Solution] The device is equipped with a stage 10 having a substrate mounting section 16 on which a substrate 30 is mounted and a surrounding mounting section 17 on which a surrounding member 20 (61, 62) that surrounds the periphery of the substrate 30 is mounted, and a coating section 7 that applies a coating liquid P to the entire front surface of the substrate and the inner part of the front surface of the surrounding member to form a coating film 40, the substrate mounting section having a substrate suction section 12 that suctions the back surface of the substrate, the surrounding mounting section having a surrounding suction section 13 that suctions the back surface of the surrounding member, and an atmosphere communication section 18 that communicates with the atmosphere is provided in a gap 26 formed between the substrate and the surrounding member. [Selected Figure] Figure 4

Description

This invention relates to a coating device that applies coating to a substrate held by suction on a stage, and in particular to a coating device that forms a coating film that is larger than the substrate.

Patent Document 1 discloses that a dummy substrate is attached to the side of a substrate, and a coating liquid is applied across the substrate and dummy substrate, thereby suppressing changes in film thickness at the substrate edge and forming a coating film of uniform thickness.

Even if the side of the substrate and the side of the dummy substrate are brought into close contact with each other, a tiny gap is formed between the two sides. Patent Document 1 does not specifically disclose how the substrate and dummy substrate are held on the stage, but Patent Document 2, for example, discloses holding the substrate by suction.

JP 2012-106203 A JP 2016-197620 A

In the suction holding method, when the suction force caused by the reduced pressure acts on the minute gap formed between the substrate and the surrounding member that surrounds the substrate, the coating liquid will get into the gap. The coating liquid that gets into the gap will then find its way onto the back surface of the substrate or the mounting surface of the stage, causing the problem of soiling the back surface of the substrate or the mounting surface of the stage.

The objective of this invention is to provide a coating device that prevents the coating liquid from entering the gap formed between the substrate and the surrounding member due to the suction force caused by the reduced pressure.

In order to solve the above problems, a coating device according to one aspect of the present invention comprises:
a stage having a substrate placement portion on which a substrate is placed and a surrounding portion on which a surrounding member that surrounds the substrate is placed;
a coating unit that applies a coating liquid to the entire surface of the substrate and an inner portion of the surface of the surrounding member to form a coating film;
the substrate placement section has a substrate suction section that suctions a rear surface of the substrate,
the peripheral placement portion has a peripheral suction portion that suctions the rear surface of the surrounding member,
The present invention is characterized in that an atmosphere communication part communicating with the atmosphere is provided in a gap formed between a side surface of the substrate and a side surface of the surrounding member.

According to this invention, even if an adhesive force due to reduced pressure acts on the gap formed between the substrate and the surrounding member, the gap is open to the atmosphere by the air communication part, so the coating liquid can be prevented from entering the gap.

FIG. 1 is a diagram for explaining a coating device according to a first embodiment of the present invention; FIG. 2 is a plan view illustrating coating using the coating device shown in FIG. 1 . 3 is a cross-sectional view taken along line III-III in FIG. 2. FIG. 4 is an enlarged view of a main portion of a portion surrounded by a dashed line in FIG. 3 . FIG. 4 is a plan view of the suction plate shown in FIG. 3 . FIG. 4 is a bottom view of the suction plate shown in FIG. 3 . 6 is a cross-sectional view of the attraction plate shown in FIG. 5 taken along line VII-VII. FIG. 11 is a plan view illustrating coating using a coating device according to a second embodiment. 9 is a cross-sectional view taken along line IX-IX in FIG. 8. FIG. 11 is a plan view of a stage of a coating device according to a second embodiment. 11 is a cross-sectional view taken along line XI-XI in FIG. FIG. 11 is a plan view illustrating coating using a coating device according to embodiment 3. 13 is a cross-sectional view taken along line XIII-XIII in FIG. 12. FIG. 11 is a plan view of a stage of a coating device according to embodiment 3. 15 is a cross-sectional view taken along line XV-XV in FIG. 14.

Below, an embodiment of the coating device 1 according to the present invention will be described with reference to the drawings. In the following description, terms indicating specific directions or positions (e.g., terms including "up", "down", "right", "left", "front" and "rear") will be used as necessary. However, the use of these terms is for the purpose of making it easier to understand this disclosure with reference to the drawings, and the meaning of these terms does not limit the technical scope of this disclosure. Furthermore, unless otherwise specified, the dimensions, materials, shapes, relative positions, etc. of the components described in the following embodiments are not intended to limit the scope of this invention to only those.

[Overall configuration of coating device]
Fig. 1 is a diagram for explaining a schematic diagram of a coating device 1 according to embodiment 1. The overall configuration of the coating device 1 will be explained with reference to Fig. 1 .

As shown in FIG. 1, the coating device 1 includes a slit die 7, a stage 10, and an adsorption plate 20. The stage 10 is connected to a vacuum exhaust device (not shown). The adsorption plate 20 and a substrate 30 are disposed on the mounting surface 11 of the stage 10. Details of the adsorption plate 20, which acts as an enclosing member, will be described later. The slit die 7 is disposed above the stage 10 at a distance.

The stage 10 penetrates the stage 10 in the thickness direction and has a substrate suction portion 12 and a peripheral suction portion 13. The substrate suction portion 12 and the peripheral suction portion 13 are suction holes that respectively suction the substrate 30 and the suction plate 20 placed on the mounting surface 11 of the stage 10.

The slit die 7 is connected to a coating liquid supply device (not shown), and the coating liquid P stored in the coating liquid supply device is supplied to the slit die 7. The coating liquid P is a general term for liquids having fluidity, such as water-like liquids, paste-like high-viscosity liquids, and high-concentration slurry. The slit die 7 has a first die 7a, a second die 7b, and a shim plate 7c. The shim plate 7c is configured to be sandwiched between the first die 7a and the second die 7b. The first die 7a has a storage section 7d in its internal space, and the coating liquid P supplied from the coating liquid supply device is stored in the storage section 7d. The coating liquid P stored in the storage section 7d is discharged through the supply path 7f of the shim plate 7c. The coating liquid P discharged from the slit die 7 is applied to the entire surface of the substrate 30 and the inner portion of the surface of the suction plate 20.

[First embodiment]
A coating device 1 using an adsorption plate 20 according to a first embodiment will be described with reference to Fig. 5 to Fig. 7. Fig. 5 is a plan view of the adsorption plate 20 shown in Fig. 3. Fig. 6 is a bottom view of the adsorption plate 20 shown in Fig. 3. Fig. 7 is a cross-sectional view of the adsorption plate 20 shown in Fig. 5 taken along line VII-VII.

As shown in Figures 5 to 7, the suction plate 20 acting as a surrounding member for the substrate 30 has an opening 21 configured to surround the periphery of the substrate 30. For example, when the substrate 30 has a rectangular shape in a plan view, the opening 21 has a rectangular opening in a plan view configured to be slightly larger than the substrate 30 so as to accommodate the substrate 30. A minute gap 26 is formed between the inner side surface 22 that defines the opening 21 and the side surface 33 of the substrate 30 (see Figure 4). The minute gap 26 is configured so that the side surface 33 of the substrate 30 and the inner side surface 22 of the opening 21 are adjacent to each other. This makes it possible to prevent the coating liquid P from flowing into the gap 26 due to its own weight.

The suction plate 20 is made of a flat plate-like body and has a coating surface 21a and a coating back surface 21b. The coating surface 21a is the upper surface of the suction plate 20, and is the surface on which the coating film 40 is formed by coating. The coating back surface 21b is the lower surface of the suction plate 20, and is the surface that abuts against the mounting surface 11 of the stage 10. The suction plate 20 has the same thickness as the substrate 30. The coating surface 21a of the suction plate 20 is configured to be flush with the surface 31 of the substrate 30 accommodated in the opening 21. This makes it easier to make the thickness of the coating film 40 uniform.

The suction plate 20 has an air communication section 29 that communicates with the gap 26 and the atmosphere. The air communication section 29 has an opening hole 23, a communication groove 24, and a back surface groove 25. The opening hole 23 is formed in the suction plate 20 so as to connect the communication groove 24 and the back surface groove 25 with the atmosphere. The opening holes 23 penetrate the thickness direction of the suction plate 20, and are provided, for example, at four locations spaced apart from each other on the top, bottom, left, and right.

The connecting groove 24 and the back groove 25, which act as a back recess, are formed on the coated back surface 21b of the suction plate 20 and are configured to connect the opening 21 and the opening hole 23. The back groove 25 is formed as a recess so as to connect the opening 21 and the connecting groove 24 and to surround the opening 21. This ensures communication with the gap 26 via the opening 21, and makes the pressure in the gap 26 equal to atmospheric pressure. The back groove 25 has, for example, a square shape. The connecting groove 24 is a groove that extends in the up, down, left and right directions in a plan view so as to connect the back groove 25 and the opening hole 23.

With reference to Figures 2 to 4, coating using the suction plate 20 according to embodiment 1 will be described. Figure 2 is a plan view illustrating coating using the coating device 1 shown in Figure 1. Figure 3 is a cross-sectional view taken along line III-III in Figure 2. Figure 4 is an enlarged view of the main part of the area surrounded by the dashed line in Figure 3.

As shown in Figures 2 to 4, the suction plate 20 and the substrate 30 are placed on the mounting surface 11 of the stage 10, and the substrate 30 is configured to be accommodated in the opening 21 of the suction plate 20 and surrounded by the suction plate 20. The side surface 33 of the substrate 30 and the inner side surface 22 of the opening 21 are adjacent to each other via a minute gap 26.

The stage 10 has a substrate placement section 16 and a peripheral placement section 17. A substrate 30 is placed on the substrate placement section 16, and the substrate 30 is adsorbed and held by a substrate suction section 12 arranged on the substrate placement section 16. An adsorption plate 20 is placed on the peripheral placement section 17, and the adsorption plate 20 is adsorbed and held by a peripheral suction section 13 arranged on the peripheral placement section 17.

The coating liquid P is applied to the coating surface 21a of the suction plate 20 and the surface 31 of the substrate 30, which are held by suction on the mounting surface 11 of the stage 10, in a size larger than the substrate 30. Then, a coating film 40 is formed on the entire surface 31 of the substrate 30 and on the inner part of the coating surface 21a of the suction plate 20. The coating film 40 has a substrate coating section 41, a gap coating section 43, and a peripheral coating section 42, which are continuously connected. The substrate coating section 41 is formed on the entire surface of the surface 31 of the substrate 30. The peripheral coating section 42 is formed on the coating surface 21a so as to extend from the inner side surface 22 to just before the opening hole 23. The gap coating section 43 is located between the substrate coating section 41 and the peripheral coating section 42 and is formed on the gap 26.

As shown in FIG. 4, even if the substrate suction portion 12 and/or the peripheral suction portion 13 are located near the gap 26, the gap 26 is open to the atmosphere by the atmosphere communication portion 29. This prevents the suction force of the substrate suction portion 12 and/or the peripheral suction portion 13 from acting on the gap 26, and prevents the gap coating portion 43 from entering the gap 26.

Therefore, even if an adsorption force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the adsorption plate 20, the gap 26 is open to the atmosphere by the atmosphere communication part 29, so that the coating liquid P can be prevented from entering the gap 26.

[Embodiment 2]
A coating device 1 using a horizontal dummy substrate 61 and a vertical dummy substrate 62 according to a second embodiment will be described with reference to Figures 8 to 11. Figure 8 is a plan view illustrating coating using the coating device 1 according to the second embodiment. Figure 9 is a cross-sectional view taken along line IX-IX in Figure 8. Figure 10 is a plan view of a stage 10 of the coating device 1 according to the second embodiment. Figure 11 is a cross-sectional view taken along line XI-XI in Figure 10.

As shown in Figures 10 and 11, the stage 10 of the coating device 1 has a stage recess 18 that functions as an air-communicating section. The stage recess 18 is formed to separate the substrate mounting section 16 and the peripheral mounting section 17, and is in communication with the atmosphere. For example, the stage recess 18 is a groove having a rectangular cross section that is recessed downward relative to the mounting surface 11.

The stage 10 shown in FIG. 10 has a substrate placement section 16 located in the center and extending in the horizontal direction, and a peripheral placement section 17 arranged to surround the substrate placement section 16. The peripheral placement section 17 is configured to correspond to each of a plurality of horizontal dummy substrates 61 and vertical dummy substrates 62. For example, the peripheral placement section 17 has two horizontally elongated sections extending in the horizontal direction, two vertically elongated sections extending in the vertical direction, and four rectangular corner sections. For example, the substrate placement section 16 has four substrate suction sections 12, the two horizontal sections of the peripheral placement section 17 have four peripheral suction sections 13, and the two vertical sections and the four corner sections of the peripheral placement section 17 have one peripheral suction section 13. This makes it easy and reliable to suction and hold a plurality of dummy substrates 61, 62.

As shown in Figures 8 and 9, a horizontally long substrate 30 is placed on the substrate placement section 16, and the substrate 30 is adsorbed and held by the substrate suction section 12 arranged on the substrate placement section 16. A horizontal dummy substrate 61 and a vertical dummy substrate 62 that act as surrounding members for the substrate 30 are placed on the peripheral placement section 17, and the multiple dummy substrates 61, 62 are adsorbed and held by the peripheral suction section 13 arranged on the peripheral placement section 17.

The upper and lower horizontal dummy substrates 61 are disposed on the upper and lower parts of the stage 10 in FIG. 8 so as to surround the substrate 30, and two vertical dummy substrates 62 are disposed between the upper and lower horizontal dummy substrates 61. Thus, the horizontal dummy substrates 61 and the vertical dummy substrates 62 act as surrounding members that surround the periphery of the substrate 30. The horizontal dummy substrates 61 and the vertical dummy substrates 62 have the same thickness as the substrate 30, and the surfaces of the horizontal dummy substrates 61 and the vertical dummy substrates 62 are configured to be flush with the surface 31 of the substrate 30. This makes it easier to make the thickness of the coating film 40 uniform.

The side surfaces of the substrate 30 and the horizontal and vertical dummy substrates 61 and 62 are aligned by the alignment section 51 so that they are sandwiched in close contact with each other. An extremely small gap 26 is formed between each of these side surfaces. The aligned substrate 30, horizontal dummy substrate 61, and vertical dummy substrate 62 are adsorbed and held on the mounting surface 11 of the stage 10.

As in the first embodiment, the coating film 40 is formed using a slit die 7 to a size larger than the substrate 30, that is, formed on the entire surface of the substrate 30 and on the inner portions of the surfaces of the horizontal dummy substrate 61 and the vertical dummy substrate 62.

Therefore, even if an adsorption force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the horizontal dummy substrate 61 and vertical dummy substrate 62, the gap 26 is open to the atmosphere by the stage recess 18 which acts as an atmosphere communication portion, so that the coating liquid P can be prevented from entering the gap 26. In addition, by appropriately changing the arrangement of the multiple horizontal dummy substrates 61 and vertical dummy substrates 62, it is possible to flexibly respond to the coating of various substrates 30.

Then, the substrate 30 on which the coating film 40 has been formed, the horizontal dummy substrate 61, and the vertical dummy substrate 62 are lifted from the stage 10 using the lifter 55, and then moved laterally and transported to a drying device (not shown).

Third Embodiment
A coating device 1 using a horizontal dummy substrate 61 and a vertical dummy substrate 62 according to a third embodiment will be described with reference to Figs. 12 to 15. Fig. 12 is a plan view illustrating coating using the coating device 1 according to the third embodiment. Fig. 13 is a cross-sectional view taken along line XIII-XIII in Fig. 12. Fig. 14 is a plan view of the stage 10 of the coating device 1 according to the third embodiment. Fig. 15 is a cross-sectional view taken along line XV-XV in Fig. 14.

The third embodiment is characterized by forming a coating film 40 on a group of multiple substrates 30 of the same size in one coating operation. The following will focus on the differences from the coating device 1 of the second embodiment described above.

The stage 10 shown in FIG. 14 has a plurality of substrate placement sections 16 positioned in the center and arranged side by side in the horizontal direction, and peripheral placement sections 17 arranged to surround the substrate placement sections 16. For example, four substrate placement sections 16 are arranged side by side in the horizontal direction, and each of the substrate placement sections 16 has a substrate suction section 12.

As shown in Figures 12 and 13, a substrate 30 is placed on each of the four substrate placement sections 16, and each of the four substrates 30 is adsorbed and held by a substrate adsorption section 12 disposed on each substrate placement section 16.

The upper and lower horizontal dummy substrates 61 are disposed at the upper and lower parts of the stage 10 in FIG. 12 so as to surround the group of four substrates 30 arranged side by side in the horizontal direction, and two vertical dummy substrates 62 are disposed between the upper and lower horizontal dummy substrates 61 and on the left and right parts of the four substrates 30. Thus, the horizontal dummy substrates 61 and the vertical dummy substrates 62 act as surrounding members that surround the periphery of the group of four substrates 30.

The sides of the four substrates 30, the sides of the four substrates 30 and the horizontal dummy substrate 61, the sides of the four substrates 30 and the vertical dummy substrate 62, and the sides of the horizontal dummy substrate 61 and the vertical dummy substrate 62 are aligned by the alignment section 51 so that they are sandwiched in close contact with each other. An extremely small gap 26 is formed between these sides. The aligned substrates 30, the horizontal dummy substrate 61, and the vertical dummy substrate 62 are adsorbed and held by the substrate adsorption section 12 and the peripheral adsorption section 13 on the mounting surface 11 of the stage 10.

As in the first embodiment, the coating film 40 is formed using a slit die 7 to a size larger than the size of the group of four substrates 30, i.e., it is formed on the entire surface of the group of four substrates 30 and on the inner portions of the surfaces of the horizontal dummy substrate 61 and the vertical dummy substrate 62.

Therefore, even if an adsorption force due to reduced pressure acts on the gaps 26 formed between the substrates 30 and the gaps 26 formed between the substrate 30 and the horizontal dummy substrate 61 and the vertical dummy substrate 62, the gaps 26 are open to the atmosphere by the stage recess 18, which acts as an atmosphere communication section, so that the coating liquid P can be prevented from entering the gaps 26.

Although specific embodiments of the present invention have been described, the present invention is not limited to the above embodiments and can be modified and implemented in various ways within the scope of the present invention.

In the above embodiment 1, the atmospheric communication section 29 has an opening hole 23 penetrating the thickness direction of the suction plate 20, but the communication groove 24 may extend to the outer side surface of the suction plate 20 to communicate with the atmosphere.

In the above-mentioned second and third embodiments, the stage recess 18 is a groove having a rectangular cross section, but the stage recess 18 may be a groove having a semicircular or crescent cross section.

In the above embodiment, the substrate 30 has a rectangular shape in a plan view, but the substrate 30 may have a circular, elliptical, or polygonal shape in a plan view.

The invention and its embodiments can be summarized as follows:

The coating device 1 according to the first aspect of the present invention is
A stage 10 having a substrate placement portion 16 on which a substrate 30 is placed, and a periphery placement portion 17 on which an enclosing member 20; 61, 62 surrounding the periphery of the substrate 30 is placed;
a coating unit 7 that applies a coating liquid P to the entire surface 31 of the substrate 30 and the inner parts of the surfaces of the surrounding members 20; 61, 62 to form a coating film 40;
The substrate placement portion 16 has a substrate suction portion 12 that suctions the rear surface 32 of the substrate 30,
The peripheral placement portion 17 has a peripheral suction portion 13 that suctions the rear surfaces of the surrounding members 20; 61, 62,
A gap 26 formed between the substrate 30 and the surrounding members 20; 61, 62 is provided with an atmosphere communication portion 29 communicating with the atmosphere.

According to the above aspect, even if an adhesive force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the surrounding members 20; 61, 62, the gap 26 is open to the atmosphere by the atmosphere communication portion 29, so that the coating liquid P can be prevented from entering the gap 26.

In addition, the coating device 1 according to the second aspect is the same as the first aspect,
The surrounding member 20 is an adsorption plate 20 having an opening 21 for accommodating the substrate 30,
The atmosphere communication portion 29 has back surface recesses 24, 25 formed on the back surface of the suction plate 20 so as to connect to the opening 21, and an atmosphere connection portion 23 formed on the suction plate 20 so as to connect between the back surface recesses 24, 25 and the atmosphere.

According to the above embodiment, the shape of the opening 21 of the suction plate 20 can be changed appropriately to flexibly accommodate coating of various substrates 30.

Further, the coating device 1 according to the third aspect is the same as the coating device 1 according to the second aspect,
The atmosphere connection portion 23 is an opening hole 23 penetrating the suction plate 20 in the thickness direction.

The above aspect makes it easier to form the atmospheric connection part 23.

Further, the coating device 1 according to the fourth aspect is the same as the coating device 1 according to the second aspect.
The rear surface recess 25 has a rear surface groove 25 formed so as to surround the opening 21 .

According to the above embodiment, communication with the gap 26 can be reliably achieved through the opening 21.

Further, the coating device 1 according to the fifth aspect is the same as the first aspect,
The surrounding members 61, 62 are configured by arranging a plurality of horizontal dummy substrates 61 and vertical dummy substrates 62,
The surrounding members 61 and 62 each have, as the atmosphere communication section 29, a stage recess 18 formed so as to separate the peripheral placement section 17 and the substrate placement section 16,
The stage recess 18 communicates with the atmosphere.

According to the above embodiment, the arrangement of the multiple horizontal dummy substrates 61 and vertical dummy substrates 62 can be changed appropriately to flexibly accommodate coating of various substrates 30.

Further, the coating apparatus 1 according to the sixth aspect is the same as the coating apparatus 1 according to the fifth aspect,
The peripheral placement portions 17 are configured to correspond to the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62, respectively.

According to the above aspect, the horizontal dummy substrates 61 and the vertical dummy substrates 62 can be easily and reliably held by suction.

Further, the coating device 1 according to the seventh aspect is the same as the first aspect,
The gap 26 is configured so that the substrate 30 and the surrounding members 20; 61, 62 are adjacent to each other.

According to the above aspect, it is possible to prevent the coating liquid P from flowing into the gap 26 due to its own weight.

Further, the coating device 1 according to the eighth aspect is the same as the first aspect,
The surrounding members 20 ; 61 , 62 have the same thickness as the substrate 30 .

The above aspect makes it easier to make the thickness of the coating film 40 uniform.

1... Coating device 7... Slit die (coating section)
7a: first die; 7b: second die; 7c: shim plate; 7d: storage section; 7f: supply channel; 10: stage; 11: mounting surface; 12: substrate suction section; 13: peripheral suction section; 16: substrate mounting section; 17: peripheral mounting section; 18: stage recess (atmosphere communication section)
20...Suction plate (enclosure member)
21: Opening 21a: Coating surface 21b: Coating back surface 22: Inner side surface (side surface)
23...Opening hole (atmospheric connection part)
24...Connecting groove (rear recess)
25...Back groove (back recess)
26: Gap 29: Atmosphere communication portion 30: Substrate 31: Front surface 32: Back surface 33: Side surface 40: Coating film 41: Substrate coating portion 42: Peripheral coating portion 43: Gap coating portion 51: Alignment portion 55: Lifter 61: Horizontal dummy substrate (dummy substrate, surrounding member)
62: Vertical dummy substrate (dummy substrate, surrounding member)
P... Coating liquid

Claims (8)

a stage having a substrate placement portion on which a substrate is placed and a surrounding portion on which a surrounding member that surrounds the substrate is placed;
a coating unit that applies a coating liquid to the entire surface of the substrate and an inner portion of the surface of the surrounding member to form a coating film;
the substrate placement section has a substrate suction section that suctions a rear surface of the substrate,
the peripheral placement portion has a peripheral suction portion that suctions the rear surface of the surrounding member,
In the coating device, an atmosphere communication part communicating with the atmosphere is disposed in the gap formed between the substrate and the surrounding member. the surrounding member is an adsorption plate having an opening for receiving the substrate,
2. The coating device according to claim 1, wherein the atmosphere communication portion has a back surface recess formed on the back surface of the suction plate so as to connect to the opening, and an atmosphere connection portion formed on the suction plate so as to connect between the back surface recess and the atmosphere. The coating device according to claim 2, wherein the air connection portion is an opening hole penetrating the suction plate in the thickness direction. The coating device according to claim 2, wherein the back recess has a back groove formed to surround the opening. the surrounding member is configured by arranging a plurality of dummy substrates,
the surrounding member has, as the atmosphere communication part, a stage recess formed so as to separate the periphery placement part and the substrate placement part,
The coating device according to claim 1 , wherein the stage recess is in communication with the atmosphere. The coating device according to claim 5, wherein the peripheral placement section is configured to correspond to each of the plurality of dummy substrates. The coating device according to claim 1, wherein the gap is configured so that the substrate and the surrounding member are adjacent to each other. The coating device of claim 1, wherein the surrounding member has the same thickness as the substrate.

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