KR101170771B1 - Head cleaning unit, chemical liquid discharging apparatus using the same, and head cleaning method - Google Patents

Abstract

The present invention discloses a head cleaning unit, a chemical liquid ejecting apparatus having the same, and a head cleaning method, wherein a residual chemical liquid of a liquid ejecting surface of an inkjet head is removed using a polyolefin sponge, and the sponge is washed and repeatedly used. It is characterized by. According to this feature, it is possible to prevent foreign substances from being inserted into the nozzle of the inkjet head and to reduce the cost by increasing the replacement cycle of the sponge.

Inkjet Heads, Polyolefins, Sponges, CF Substrates, Pixels

Description

HEAD CLEANING UNIT, CHEMICAL LIQUID DISCHARGING APPARATUS USING THE SAME, AND HEAD CLEANING METHOD}

The present invention relates to a head cleaning unit, a chemical liquid ejecting apparatus having the same, and a head cleaning method. will be.

In recent years, display devices which are electro-optical devices called liquid crystal devices, electroluminescent devices, and the like have been widely used in the display portions of electronic devices such as mobile phones and portable computers, and display of full colors has been increasing by display devices. .

Full color display by a liquid crystal device is displayed by, for example, passing light modulated by the liquid crystal layer through a color filter. The color filter is, for example, a filter element of red (R), green (G), and blue (B) dots on the surface of a substrate formed of glass or the like as a so-called stripe arrangement, delta arrangement, or mosaic arrangement. Formed by side by side in a predetermined arrangement.

It is known that the photolithographic method is conventionally used when patterning various filter elements, such as R, G, and B of a color filter. However, in the case of using the photolithography method, the process is complicated, or a large amount of various materials, photoresist, and the like are consumed, so that there is a problem such as high cost.

In order to solve such a problem, the method of forming the filter element of a dot arrangement by the discharge of the material (ink) of a filter element in a dot form by the inkjet system which discharges a droplet is proposed.

An object of the present invention is to provide a head cleaning unit capable of improving the efficiency and productivity of a chemical liquid ejecting process, a chemical liquid ejecting apparatus having the same, and a head cleaning method.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a head cleaning unit according to the present invention includes a head cleaning unit for cleaning a liquid discharge surface of a head for discharging a chemical liquid on an substrate by an inkjet method, comprising: a porous absorbing member; And a driving member for driving the porous absorbing member such that the porous absorbing member is in contact with the liquid discharge surface of the head.

In the head cleaning unit according to the present invention having the configuration as described above, the porous absorbing member may be a sponge made of synthetic resin.

The porous absorbent member may be a sponge made of polyolefin material.

The head cleaning unit comprises: a processing chamber providing a standby position and a cleaning space of the porous absorbing member; And a first cleaning nozzle installed in the processing chamber and injecting a cleaning liquid into the porous absorbent member.

The head cleaning unit may further include a pressing member installed in the processing chamber and pressurizing the porous absorbing member to squeeze the chemical liquid and the cleaning liquid absorbed in the porous absorbing member.

The pressing member may be provided in a roller shape having a plurality of protrusions protruding from the outer circumferential surface.

The head cleaning unit may further include a second cleaning nozzle for spraying a cleaning liquid on the roller.

The head cleaning unit may further include a dry gas injection nozzle installed in the processing chamber and spraying dry gas on the porous absorbing member.

A first opening through which the porous absorbing member is carried in and out is formed in the processing chamber, and the first opening may be opened and closed by a door.

The driving member may include a first driving member for moving the porous absorbing member in a vertical direction; And a second driving member for moving the porous absorbing member in the lateral direction.

The head cleaning unit may further include a driving chamber disposed adjacent to the processing chamber and accommodating the first driving member and the second driving member.

The head cleaning unit may further include an air injection nozzle installed in the driving chamber and injecting air toward the second opening formed to communicate the processing chamber with the driving chamber.

In order to achieve the above object, the chemical liquid ejecting apparatus according to the present invention includes an inkjet chemical liquid ejecting apparatus, comprising: a substrate support unit on which a substrate is placed and which can be linearly moved in a first direction; A head unit provided on a path through which the substrate supporting unit is moved and having a plurality of heads for discharging a chemical liquid on the substrate; A moving unit for moving the head unit in the first direction and in a second direction perpendicular to the first direction; And a head cleaning unit provided on one side of the substrate support unit, the head cleaning unit cleaning the chemical liquid discharge surfaces of the heads, wherein the head cleaning unit comprises: a porous absorbing member; And a driving member for driving the porous absorbing member such that the porous absorbing member is in contact with the liquid discharge surface of the head.

In the chemical liquid discharge apparatus according to the present invention having the configuration as described above, the porous absorbing member may be a sponge made of polyolefin (Polyolefin) material.

The head cleaning unit comprises: a processing chamber providing a standby position and a cleaning space of the porous absorbing member; And a driving chamber disposed adjacent to the processing chamber and accommodating the driving member.

A first opening through which the porous absorbing member is carried in and out is formed in the processing chamber, and the first opening may be opened and closed by a door.

The head cleaning unit may further include an air injection nozzle installed in the driving chamber and injecting air toward the second opening formed to allow the processing chamber and the driving chamber to communicate with each other.

The head cleaning unit includes: a first cleaning nozzle for injecting a cleaning liquid into the porous absorbent member; A pressurizing member which pressurizes the porous absorbing member to squeeze the chemical liquid and the cleaning liquid absorbed into the porous absorbing member; And a dry gas injection nozzle for injecting dry gas into the porous absorbing member, wherein the first cleaning nozzle, the pressurizing member, and the dry gas injection nozzle may be installed in the processing chamber.

The drive member may include a first drive member for moving the porous absorbing member in an up and down direction; And a second driving member for moving the porous absorbing member in the lateral direction.

The substrate may be a color filter (CF) substrate on which a pixel is formed, and the chemical liquid may be red (R), green (G), or blue (B) ink for forming the pixel.

In order to achieve the above object, a head cleaning method according to the present invention is a method for cleaning a liquid ejecting surface of a head for ejecting a chemical liquid on a substrate by an inkjet method, wherein a porous absorbing member is attached to the liquid ejecting surface of the head. Contacting to absorb the remaining chemical liquid on the liquid discharge surface, and pressurizing the porous absorbing member to squeeze the chemical liquid absorbed into the porous absorbing member.

In the head cleaning method according to the present invention having the configuration as described above, the porous absorbing member is pressed against a rotatable roller, and the chemical liquid absorbed by the porous absorbing member is squeezed out while the porous absorbing member is moved in a horizontal direction. Can be.

The cleaning solution may be sprayed onto the porous absorbent member in which the chemical liquid is absorbed to dilute the absorbed chemical liquid in the porous absorbent member.

The porous absorbing member may be dried by spraying a dry gas onto the porous absorbing member in which the chemical liquid and the cleaning liquid are squeezed out.

The porous absorbing member may be a sponge made of polyolefin.

The substrate may be a color filter (CF) substrate on which a pixel is formed, and the chemical liquid may be red (R), green (G), or blue (B) ink for forming the pixel.

The cleaning liquid may be the same liquid as the solvent contained in the ink.

According to the present invention, foreign matter can be prevented from being inserted into the nozzle of the head.

And according to the present invention it is possible to reduce the cost by increasing the replacement cycle of the consumables for head cleaning.

Hereinafter, a head cleaning unit according to a preferred embodiment of the present invention, a chemical liquid discharge apparatus including the same, and a head cleaning method will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals have the same reference numerals as much as possible even if displayed on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a perspective view of an inkjet type chemical liquid applying apparatus 1. The chemical | medical solution application facility 1 of FIG. 1 is a facility which apply | coats a chemical | medical solution to an object by the inkjet method. For example, the object may be a color filter substrate of a liquid crystal display panel, and the chemical liquid may be red (R), green (G), or blue (B) ink in which pigment particles are mixed in a solvent. The ink may be applied to the inner region of the black mask arranged in a lattice pattern on the color filter substrate.

Hereinafter, a description will be given with an example of applying the ink to the color filter substrate, but the technical idea of the present invention should not be construed as being limited thereto.

Referring to FIG. 1, the chemical liquid applying apparatus 1 may include a chemical liquid discharge unit 10, a substrate transfer unit 20, a baking unit 30, a loading unit 40, an unloading unit 50, and a chemical liquid supply unit 60. And a control unit 70. The chemical liquid discharge unit 10 and the substrate transfer unit 20 may be disposed in a line in the first direction I and may be adjacent to each other. The chemical liquid supply unit 60 and the control unit 70 are disposed at a position facing the substrate transfer unit 20 around the chemical liquid discharge unit 10, and the chemical liquid supply unit 60 and the control unit 70 are in the second direction (II). Can be arranged in line. The loading part 40 and the unloading part 50 are disposed at a position facing the chemical liquid discharge part 10 with respect to the substrate transfer part 20, and the loading part 40 and the unloading part 50 are formed of a substrate. It can be arranged in two directions (II). The bake unit 30 may be disposed adjacent to one side of the substrate transfer unit 20.

Here, the first direction (I) is a direction in which the chemical liquid discharge part 10 and the substrate transfer part 20 are arranged, and the second direction (II) is a direction perpendicular to the first direction (I) on the horizontal plane, and the third direction. (III) is a direction perpendicular to the first direction I and the second direction II.

The substrate to which the chemical liquid (ink) is to be applied is loaded into the loading part 40. The substrate transfer part 40 transfers the substrate carried in the loading part 40 to the chemical liquid discharge part 10. The chemical liquid discharge unit 10 receives the chemical liquid from the chemical liquid supply unit 60 and discharges the chemical liquid onto the substrate by an inkjet method. The substrate transfer unit 20 transfers the substrate from the chemical liquid discharge unit 10 to the bake unit 30. The baking unit 30 heats the substrate to evaporate the remaining liquid substance (solvent) except for the solid component of the chemical liquid (ink) discharged on the substrate. The substrate transfer unit 20 transfers the substrate from the bake unit 30 to the unloading unit 50. The substrate to which the chemical liquid is applied is carried out from the unloading part 50. The controller 70 controls overall operations of the chemical liquid discharge unit 10, the substrate transfer unit 20, the baking unit 30, the loading unit 40, the unloading unit 50, and the chemical liquid supply unit 60. do.

FIG. 2 is a perspective view of the chemical liquid discharge part 10 of FIG. 1. Referring to FIG. 2, the chemical liquid discharge part 10 includes a substrate support unit 100, a head unit 200, a moving unit 300, 400, and a cleaning unit 500, 600.

The substrate support unit 100 has a support plate 110 on which a substrate is placed. The support plate 110 may be a rectangular plate. The lower surface of the support plate 110 is connected to the rotation axis of the rotation drive motor 120. The rotation drive motor 120 rotates the support plate 110 so that the substrate placed on the support plate 110 is aligned at a predetermined position. The rotation drive motor 120 is installed on the upper surface of the slider 130. The guide member 140 extends in the first direction (I) in the center of the upper surface of the base (B). A linear motor (not shown) is built in the slider 130, and the slider 130 linearly moves in the first direction I along the guide member 140.

The head unit 200 discharges the chemical liquid (ink) to the substrate. The head unit 200 includes inkjet heads 210a and 210b and a bracket 220. One inkjet head 210a of the inkjet heads 210a and 210b is installed at one side facing the first direction I of the bracket 220, and the other inkjet head 210b is disposed at the bracket 220. It may be installed on the other side facing in the first direction (I). Each of the inkjet heads 210a and 210b has a red (R) head 212, a green (G) head 214 and a blue (B) head 216. The red (R) head 212, the green (G) head 214, and the blue (B) head 216 may be arranged in a line in the second direction (II).

The moving units 300 and 400 may move the head unit 200 in the upper portion of the path in which the support plate 110 is moved. The first moving unit 300 linearly moves the head unit 200 in the first direction (I), and the second moving unit 400 moves the head unit 200 in the second direction (II) and the third direction ( Can be moved linearly.

The second moving unit 400 includes a horizontal support 410 and a slider 420. The horizontal support 410 is located above the base B such that the longitudinal direction thereof faces the second direction II. The horizontal support 410 is provided with a guide rail 412 along the longitudinal direction. A linear motor (not shown) may be built in the slider 420, and the slider 420 moves linearly in the second direction II along the guide rail 412. The bracket 220 of the head unit 200 is connected to the slider 420, and the inkjet heads 210a and 210b installed on the bracket 220 are moved in the second direction II by the linear movement of the slider 420. Go straight. On the other hand, the slider 420 may be provided with a driving member (not shown) for linearly moving the bracket 220 of the head unit 200 in the third direction (III).

The first moving unit 300 includes a guide rail 310 and a slider 320. The guide rail 310 has a longitudinal direction toward the first direction (I), and is provided at both side edge portions of the upper surface of the base B with respect to the guide member 140 of the substrate support unit 100. The slider 320 includes a linear motor (not shown) and linearly moves in the first direction I along the guide rail 310. Both ends of the horizontal support 410 of the second moving unit 400 are connected to the slider 320, respectively. The second moving unit 400 including the horizontal support 410 is moved in the first direction I by the linear movement of the slider 320, and the second moving unit is moved by the movement of the second moving unit 400. The head unit 200 connected to 400 is linearly moved in the first direction (I).

The head unit 200 may linearly move in the first direction (I), the second direction (II), and the third direction (III) by the first moving unit 300 and the second moving unit 400, and the substrate The laid support plate 110 may be linearly moved in the first direction I by the slider 130 and the guide member 140. When the chemical liquid is discharged onto the substrate, the head unit 200 is fixed at a predetermined position, and the support plate 110 on which the substrate is placed may move in the first direction (I). Alternatively, the support plate 110 on which the substrate is placed may be fixed at a predetermined position, and the head unit 200 may be moved in the first direction (I).

The cleaning units 500 and 600 periodically clean the chemical liquid discharge surfaces of the inkjet heads 210a and 210b, that is, the surfaces on which the nozzles for discharging the chemical liquid are formed. Typically, after the chemical liquid ejecting process is performed on one substrate, cleaning of the chemical liquid ejecting surfaces of the inkjet heads 210a and 210b may proceed.

The cleaning units 500 and 600 include a first cleaning unit 500 and a second cleaning unit 600. The first cleaning unit 500 and the second cleaning unit 600 may be provided on one side of the substrate support unit 100 on the upper surface of the base B, and may be arranged in a line in the first direction (I). The inkjet heads 210a and 210b are moved to the top of the cleaning units 500 and 600 by the first moving unit 300 and the second moving unit 400, and at the top of the cleaning units 500 and 600 during the cleaning process. It can be moved in the first direction (I).

The first cleaning unit 500 performs a purging process and a blading process, and the second cleaning unit 600 performs a blotting process. The purging process, the blading process, and the blotting process are performed sequentially. Purging is a process of spraying a part of the chemical liquid contained in the inkjet heads 210a and 210b at a high pressure. The blading process is a process of removing the chemical liquid remaining on the chemical liquid discharge surfaces of the inkjet heads 210a and 210b in a non-contact manner using a blade. The blotting process is a process of removing the chemical liquid remaining on the chemical liquid discharge surfaces of the inkjet heads 210a and 210b by a contact method using a porous absorbing member.

3 is a side view of the second cleaning unit 600 of FIG. 2. The second cleaning unit 600 is called a head cleaning unit according to the claims.

Referring to FIG. 3, the second cleaning unit 600 has a porous absorbing member 610. The porous absorbing member 610 may be a sponge made of synthetic resin, and specifically, may be a sponge made of polyolefin. The porous absorbing member 610 contacts the chemical liquid discharge surface 211 of the inkjet head 210a, absorbs the chemical liquid remaining on the chemical liquid discharge surface 211, and removes the chemical liquid from the chemical liquid discharge surface 211. In this case, the porous absorbing member 610 is fixed, and the inkjet head 210a may linearly move in one direction.

Conventionally, a wiper has been used as a means for removing the residual chemical liquid of the chemical liquid discharge surface 211 by a contact method, but there has been a problem that the microfiber of the wiper is inserted into the nozzle of the chemical liquid discharge surface 211 to block the nozzle. However, the present invention removes the residual chemical liquid from the chemical liquid discharge surface 211 by using a sponge made of synthetic resin, so that foreign matters can be prevented from being inserted into the nozzle.

The porous absorbing member 610 waits at the standby position in the processing chamber 620 during the chemical liquid ejecting process of the inkjet head 210a, and is discharged from the processing chamber 620 during the blotting process to eject the chemical liquid of the inkjet head 210a. Clean the cotton. The porous absorbing member 610 is carried into the process chamber 620 after the blotting process and cleaned.

A first opening 623 is formed in the upper wall 622 of the processing chamber 620 to allow the porous absorbing member 610 to be carried in and out, and the first opening 623 is opened and closed by the door 630. An exhaust port 625 is formed at one sidewall 624 of the processing chamber 620 to exhaust fumes generated during the cleaning process of the porous absorbing member 610. The lower wall 626 of the processing chamber 620 is formed with a drain 627 for draining the cleaning liquid used in the cleaning process of the porous absorbing member 610.

Inside the process chamber 620, a first cleaning nozzle 642, a second cleaning nozzle 644, a dry gas injection nozzle 646, and a pressurizing member 650 for cleaning / drying the porous absorbing member 610 are installed. Can be.

The first cleaning nozzle 642 sprays the cleaning liquid on the porous absorbing member 610. As the cleaning liquid, a solvent contained in the chemical liquid (ink) may be used. This is to dilute the chemical liquid (ink) absorbed in the porous absorbent member 610.

The pressing member 650 may pressurize the porous absorbing member 610 to squeeze out the chemical liquid (ink) and the cleaning liquid (solvent) absorbed in the porous absorbing member 610. The pressing member 650 may be provided as a roller 654 having a plurality of protrusions 652 protruding from the outer circumferential surface thereof. Both ends of the roller 654 are supported by bearings (not shown) to allow free rotation. When the porous absorbing member 610 is in linear contact with the pressing member 650 in the horizontal direction by the driving members 670 and 680 which will be described later, the protrusion 652 of the pressing member 650 is moved into the porous absorbing member. The 610 may be pressurized to squeeze out the chemical liquid (ink) and the cleaning liquid (solvent) absorbed by the porous absorbing member 610. In addition, a second cleaning nozzle 644 may be installed above the pressing member 650 to spray the cleaning liquid onto the pressing member 650.

The dry gas injection nozzle 646 injects dry gas to the porous absorbing member 610. At this time, the amount of dry gas injected from the dry gas injection nozzle 646 should be adjusted so that the porous absorbent member 610 is not 100% dried and has a sufficient cleaning liquid therein.

The drive chamber 660 is disposed adjacent to the process chamber 620. The driving chamber 660 accommodates driving members 670 and 680 for driving the porous absorbing member 610. A second opening 662 is formed at a sidewall where the processing chamber 620 and the driving chamber 660 contact each other so that the processing chamber 620 and the driving chamber 660 can communicate with each other. The air injection nozzle 648 is installed in the drive chamber 660. The air jet nozzle 648 injects air toward the second opening 662. This is to prevent the fume generated during the cleaning process of the porous absorbing member 610 from flowing into the driving chamber 660 through the second opening 662.

The driving members 670 and 680 include a first driving member 670 for moving the porous absorbing member 610 in the vertical direction and a second driving member 680 for moving the porous absorbing member 610 in the horizontal direction. do. The first drive member 670 has a linear reciprocating mechanism 672, such as a cylinder, and a first connecting member 674 that connects the linear reciprocating mechanism 672 to the porous absorbing member 610. The first connection member 674 may be provided as a rod-shaped rod, and the shape is not limited thereto and may be provided in various other shapes. The second drive member 680 has a motor 682, a lead screw 684 connected to the rotating shaft of the motor 682, and a second connecting member 686 installed on the lead screw 684. The motor 682 and the lead screw 682 are arranged so that the rotational center axis thereof faces the horizontal direction, and the linear connecting reciprocating mechanism 672 is provided on the second connecting member 686. The driving members 670 and 680 having the above-described configuration move the porous absorbing member 610 in the upward direction such that the porous absorbing member 610 is in contact with the liquid discharge surface 211 of the inkjet head 210a. The porous absorbent member 610 is moved to a position corresponding to the nozzles 642 and 646 and the pressing member 650 in the 620.

A process of cleaning the porous absorbing member that has cleaned the liquid ejecting surface of the inkjet head using the second cleaning unit 600 having the above configuration will be described below.

4 to 6 are views showing an operating state of the second cleaning unit.

4 to 6, the porous absorbing member 610 is carried into the process chamber 620 by the first driving member 670, and the door 630 opens the first opening 623 of the process chamber 620. To close. The porous absorbing member 610 is moved to a position corresponding to the first cleaning nozzle 642, and the first cleaning nozzle 642 sprays the cleaning liquid (solvent) onto the porous absorbing member 610. The cleaning liquid (solvent) dilutes the chemical liquid absorbed by the porous absorbing member 610 (FIG. 4).

The second cleaning nozzle 644 sprays the cleaning liquid onto the pressing member 650 to clean the pressing member 650. The second driving member 680 moves the porous absorbing member 610 in the horizontal direction to contact the pressing member 650. In this state, when the second driving member 680 linearly reciprocates in the horizontal direction, the protrusion 652 of the pressing member 650 pressurizes the porous absorbing member 610 to absorb the chemical liquid absorbed by the porous absorbing member 610. (Ink) and washing liquid (solvent) can be squeezed out (Fig. 5).

The second driving member 680 retracts the porous absorbing member 610 in the horizontal direction, and the first driving member 670 moves the porous absorbing member 610 in the upward direction, so that the porous absorbing member 610 is dried. It is moved to the position corresponding to the gas injection nozzle 646. The dry gas injection nozzle 646 injects dry gas to the porous absorbing member 610 (FIG. 6).

4 to 6, the air jet nozzle 648 injects air toward the second opening 662 such that the fume is driven from the process chamber 620 through the second opening 662 to the driving chamber 660. To prevent ingress.

As described above with reference to FIGS. 4 to 6, the present invention can reduce the cost spent on consumable parts and improve productivity through the repeated use of the porous absorbent member that is a consumable part.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a perspective view of an inkjet type chemical liquid application equipment.

FIG. 2 is a perspective view of the chemical liquid discharge part of FIG. 1. FIG.

3 is a side view of the second cleaning unit of FIG. 2.

4 to 6 are views showing an operating state of the second cleaning unit.

Description of the Related Art

200: head unit 500: first cleaning unit

600: second cleaning unit 610: porous absorbent member

620: processing chamber 630: door

642, 644: cleaning nozzle 646: dry gas injection nozzle

648: air injection nozzle 650: pressure member

660: drive chamber 670, 680: drive member

Claims (27)

In the head cleaning unit for cleaning the liquid discharge surface of the head for ejecting the chemical liquid on the substrate by the inkjet method, A porous absorbent member; A drive member for driving the porous absorbing member such that the porous absorbing member contacts the liquid discharge surface of the head; A processing chamber providing a standby position and a cleaning space of the porous absorbing member; And And a first cleaning nozzle installed in the processing chamber and spraying the cleaning liquid onto the porous absorbent member. The method of claim 1, The porous absorbing member is a head cleaning unit, characterized in that the sponge (Sponge) made of a synthetic resin material. The method of claim 2, The porous absorbing member is a head cleaning unit, characterized in that the sponge made of polyolefin (Polyolefin) material. delete The method of claim 1, And a pressurizing member installed in the processing chamber and pressurizing the porous absorbing member to squeeze out the chemical liquid and the cleaning liquid absorbed by the porous absorbing member. 6. The method of claim 5, The pressing member is a head cleaning unit, characterized in that provided in the shape of a roller with a plurality of projections protruding on the outer peripheral surface. 6. The method of claim 5, And a second cleaning nozzle for injecting a cleaning liquid into the pressing member. The method according to claim 5 or 7, And a dry gas injection nozzle installed in the processing chamber and injecting dry gas into the porous absorbing member. 9. The method of claim 8, And a first opening through which the porous absorbing member is carried in and out of the processing chamber, and the first opening is opened and closed by a door. 9. The method of claim 8, The drive member, A first driving member for moving the porous absorbing member in a vertical direction; And And a second drive member for moving the porous absorbing member in the lateral direction. 11. The method of claim 10, And a drive chamber disposed adjacent to the processing chamber and accommodating the first drive member and the second drive member. The method of claim 11, wherein And an air jet nozzle installed in the drive chamber and for injecting air toward a second opening formed in the process chamber and the drive chamber. In the inkjet method of chemical liquid discharge device, A substrate support unit on which the substrate is placed and which is linearly movable in the first direction; A head unit provided on a path through which the substrate supporting unit is moved and having a plurality of heads for discharging a chemical liquid on the substrate; A moving unit for moving the head unit in the first direction and in a second direction perpendicular to the first direction; And A head cleaning unit provided on one side of the substrate supporting unit and cleaning the chemical liquid discharge surface of the heads, The head cleaning unit, A porous absorbent member; A drive member for driving the porous absorbing member such that the porous absorbing member contacts the liquid discharge surface of the head; A processing chamber providing a standby position and a cleaning space of the porous absorbing member; And And a first cleaning nozzle disposed in the processing chamber and spraying the cleaning liquid onto the porous absorbing member. The method of claim 13, The head cleaning unit, And a driving chamber disposed adjacent to the processing chamber and accommodating the driving member. 15. The method of claim 14, And a first opening through which the porous absorbing member is carried in and out of the processing chamber, and the first opening is opened and closed by a door. 16. The method of claim 15, The head cleaning unit, And an air jet nozzle installed in the drive chamber and for injecting air toward the second opening formed to allow the process chamber and the drive chamber to communicate with each other. 17. The method of claim 16, The head cleaning unit, A pressurizing member which pressurizes the porous absorbing member to squeeze the chemical liquid and the cleaning liquid absorbed into the porous absorbing member; And Further comprising a dry gas injection nozzle for injecting a dry gas to the porous absorbing member, And the first cleaning nozzle, the pressurizing member, and the dry gas injection nozzle are provided in the processing chamber. The method of claim 17, The drive member, A first driving member for moving the porous absorbing member in a vertical direction; And And a second driving member for moving the porous absorbing member in the lateral direction. The method according to any one of claims 13 to 18, The porous absorbing member is a chemical liquid discharge device, characterized in that the sponge made of polyolefin (Polyolefin) material. The method according to any one of claims 13 to 18, The substrate is a color filter (CF) substrate on which pixels are formed. And the chemical liquid is red (R), green (G), or blue (B) ink forming the pixel. In the method for cleaning the liquid discharge surface of the head for ejecting the chemical liquid on the substrate by the inkjet method, A porous absorbent member is brought into contact with the liquid discharge surface of the head to absorb residual chemical liquid on the liquid discharge surface, Spraying a cleaning solution onto the porous absorbing member into which the chemical liquid is absorbed, diluting the absorbed liquid into the porous absorbing member, And pressurizing the porous absorbing member to squeeze out the chemical liquid absorbed by the porous absorbing member. 22. The method of claim 21, And pressing the porous absorbing member against the rotatable roller and squeezing the chemical liquid absorbed into the porous absorbing member while moving the porous absorbing member in a horizontal direction. delete 22. The method of claim 21, And drying the porous absorbing member by injecting a dry gas into the porous absorbing member in which the chemical liquid and the cleaning liquid are squeezed out. 25. The method of claim 24, The porous absorbing member is a head cleaning method, characterized in that the sponge (Sponge) made of polyolefin (Polyolefin) material. The method according to any one of claims 21, 22, 24 or 25, The substrate is a color filter (CF) substrate on which pixels are formed. And the chemical liquid is red (R), green (G), or blue (B) ink forming the pixel. The method according to any one of claims 21, 22, 24 or 25, And the cleaning liquid is the same liquid as the solvent contained in the ink.

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