KR101098370B1 - Head cleaning unit, and chemical liquid discharging apparatus using the same - Google Patents

Abstract

The present invention discloses a head cleaning unit and a treatment liquid discharge device including the same, wherein a porous absorbent member for performing a blotting process is disposed such that a lower end portion of the outer peripheral surface is immersed in the cleaning fluid of the bath, and a porous absorbent member is disposed below the porous absorbent member. A pressing member for urging the lower end of the member is disposed.

According to this feature, it is possible to reduce the cost by removing consumables such as a wiper used for head cleaning, and to improve the degree of cleaning of the head nozzle surface by cleaning the porous absorbing member.

Inkjet Head, Blotting, Porous Absorbing Member, Pressurizing Member, Solvent

Description

HEAD CLEANING UNIT, AND CHEMICAL LIQUID DISCHARGING APPARATUS USING THE SAME}

The present invention relates to a head cleaning unit and a processing liquid discharge device having the same, and more particularly, a head cleaning unit for cleaning a head for discharging the processing liquid by an inkjet method for discharging droplets, and a processing liquid discharge having the same. Relates to a device.

In recent years, display devices which are electro-optical devices called liquid crystal devices, electroluminescent devices, and the like have been widely used in the display portions of electronic devices such as mobile phones and portable computers, and display of full colors has been increasing by display devices. .

Full color display by a liquid crystal device is displayed by, for example, passing light modulated by the liquid crystal layer through a color filter. The color filter is, for example, a filter element of red (R), green (G), and blue (B) dots on the surface of a substrate formed of glass or the like as a so-called stripe arrangement, delta arrangement, or mosaic arrangement. Formed by side by side in a predetermined arrangement.

It is known that the photolithographic method is conventionally used when patterning various filter elements, such as R, G, and B of a color filter. However, in the case of using the photolithography method, the process is complicated, or a large amount of various materials, photoresist, and the like are consumed, and thus there is a problem of high cost.

In order to solve such a problem, the method of forming the filter element of a dot arrangement by the discharge of the material (ink) of a filter element in a dot form by the inkjet system which discharges a droplet is proposed.

An object of the present invention is to provide a head cleaning unit capable of improving the efficiency and productivity of a head cleaning process (blotting process, blotting) and a treatment liquid discharge device having the same.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a head cleaning unit according to an embodiment of the present invention, the head cleaning unit for cleaning the nozzle surface of the inkjet head, Bath (Bath); A cylindrical porous absorbing member rotatably provided in the bath and in contact with the nozzle face; And a pressurizing member that pressurizes the porous absorbent member to release the liquid absorbed by the porous absorbent member.

According to an embodiment of the present invention, the pressing member may be disposed in parallel to contact the porous absorbing member, and may include a pressing roller having a plurality of protrusions for pressing the porous absorbing member.

According to an embodiment of the present invention, the pressure roller may be disposed to contact the lower end of the porous absorbing member.

According to an embodiment of the present invention, a cleaning fluid may be filled in the bath so that the lower end of the porous absorbing member and the pressure roller are locked.

According to an embodiment of the present invention, the pressure roller, the first pressure roller in contact with the lower end of any one with respect to the center of the porous absorbing member; And a second pressing roller contacting the lower end of the other side with respect to the center of the porous absorbing member.

According to an embodiment of the present disclosure, the pressing member may include a pressing plate having a plurality of protrusions for pressing the porous absorbing member.

According to an embodiment of the present invention, the plurality of protrusions may be formed on the pressing plate so as to extend in parallel to the longitudinal direction of the porous absorbing member and spaced apart from each other.

According to an embodiment of the present invention, the cross section of the protrusion may have a gear tooth shape.

According to an embodiment of the present invention, the pressing plate may be disposed in the horizontal direction under the porous absorbing member to press the lower end of the porous absorbing member.

According to an embodiment of the present invention, the pressing plate may further include a first driving unit for linearly moving in the horizontal direction.

According to an embodiment of the present invention, the porous absorbing member may further include a second driving unit for linearly moving in the vertical direction.

According to an embodiment of the present invention, a cleaning fluid may be filled in the bath so that the lower end of the porous absorbing member and the pressure plate are locked.

In order to achieve the above object, a processing liquid discharge device according to an embodiment of the present invention, the substrate support unit is placed on the substrate linearly movable in the first direction; A plurality of inkjet heads movably provided on a movement path of the substrate support unit and discharging a processing liquid onto the substrate; And a head cleaning unit provided on one side of the substrate support unit, the head cleaning unit cleaning the nozzle surfaces of the inkjet heads, wherein the head cleaning unit comprises: a bath; A cylindrical porous absorbing member rotatably provided in the bath and in contact with the nozzle face; It includes a pressing member for pressing the porous absorbing member so that the liquid absorbed in the porous absorbing member is discharged.

According to an embodiment of the present disclosure, the pressing member may be disposed in parallel to contact the porous absorbing member, and may include a pressing roller having a plurality of protrusions for pressing the porous absorbing member.

According to an embodiment of the present invention, the pressure roller is disposed to contact the lower end of the porous absorbing member, the cleaning fluid may be filled in the bath so that the lower end of the porous absorbing member and the pressure roller is locked.

According to an embodiment of the present invention, the pressure roller, the first pressure roller in contact with the lower end of any one with respect to the center of the porous absorbing member; And a second pressing roller contacting the lower end of the other side with respect to the center of the porous absorbing member.

According to an embodiment of the present disclosure, the pressing member may include a pressing plate having a plurality of protrusions for pressing the porous absorbing member.

According to an embodiment of the present invention, the pressure plate is disposed in the horizontal direction to press the lower end of the porous absorbing member, the cleaning fluid may be filled in the bath so that the lower end of the porous absorbing member and the pressure plate is submerged. .

According to an embodiment of the present invention, the pressing plate may further include a first driving unit which linearly moves in the horizontal direction.

According to an embodiment of the present invention, the porous absorbing member may further include a second driving unit for linearly moving in the vertical direction.

According to the present invention, by replacing the wiper, which is a one-time consumable part used for head cleaning, with a porous absorbent member that can be used repeatedly, the cost can be reduced and productivity can be improved.

And according to this invention, a porous absorbent member can be wash | cleaned.

Moreover, according to this invention, the washing degree of a head nozzle surface can be improved.

Hereinafter, a head cleaning unit and a treatment liquid discharge device including the same according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a view showing the configuration of a treatment liquid application facility according to an embodiment of the present invention. The treatment liquid applying equipment 1 of FIG. 1 applies a treatment liquid to an object by an inkjet method. For example, the object may be a color filter substrate of a liquid crystal display panel, and the treatment liquid may be red (R), green (G), or blue (B) ink in which pigment particles are mixed in a solvent. The ink may be applied to the interior regions of the black matrix arranged in a grid pattern on the color filter substrate.

Referring to FIG. 1, the treatment liquid applying apparatus 1 may include a treatment liquid discharge part 10, a substrate transfer part 20, a baking part 30, a loading part 40, an unloading part 50, and a treatment liquid supply part. 60, and a control unit 70. The processing liquid discharge part 10 and the substrate transfer part 20 may be arranged in a line in the first direction I and may be adjacent to each other. The processing liquid supply unit 60 and the control unit 70 are disposed at positions facing the substrate transfer unit 20 with respect to the processing liquid discharge unit 10, and the processing liquid supply unit 60 and the control unit 70 are in the second direction. It can be arranged in line with (II). The loading part 40 and the unloading part 50 are disposed at a position facing the processing liquid discharge part 10 with respect to the substrate transfer part 20, and the loading part 40 and the unloading part 50 are formed of a substrate. It can be arranged in two directions (II). The bake unit 30 may be disposed adjacent to one side of the substrate transfer unit 20.

Here, the first direction (I) is an arrangement direction of the processing liquid discharge unit 10 and the substrate transfer unit 20, the second direction (II) is a direction perpendicular to the first direction (I) on a horizontal plane, and the third direction The direction III is a direction perpendicular to the first direction I and the second direction II.

The substrate to which the treatment liquid (ink) is to be applied is loaded into the loading part 40. The substrate transfer part 40 transfers the substrate carried in the loading part 40 to the processing liquid discharge part 10. The processing liquid discharge unit 10 receives the processing liquid from the processing liquid supply unit 60 and discharges the processing liquid onto the substrate by an inkjet method. The substrate transfer unit 20 transfers the substrate from the processing liquid discharge unit 10 to the bake unit 30. The baking unit 30 heats the substrate to evaporate the remaining liquid substance (solvent) except for the solid component of the processing liquid (ink) discharged on the substrate. The substrate transfer unit 20 transfers the substrate from the bake unit 30 to the unloading unit 50. The substrate to which the treatment liquid is applied is carried out from the unloading part 50. In addition, the control unit 70 performs overall operations of the processing liquid discharge unit 10, the substrate transfer unit 20, the baking unit 30, the loading unit 40, the unloading unit 50, and the processing liquid supply unit 60. To control.

FIG. 2 is a perspective view of the processing liquid discharge part of FIG. 1, and FIG. 3 is a plan view of the processing liquid discharge part of FIG. 2. 2 and 3, the processing liquid discharge part 10 may include a substrate support unit 100, a head unit 200, a moving unit 300 and 400, a first head cleaning unit 500, and a second head cleaning. Unit 600.

The substrate support unit 100 has a support plate 110 on which a substrate is placed. The support plate 110 may be a rectangular plate. The lower surface of the support plate 110 is connected to the rotation axis of the rotation drive motor 120. The rotation drive motor 120 rotates the support plate 110 so that the substrate placed on the support plate 110 is aligned at a predetermined position.

The support plate 110 and the rotation drive motor 120 are linearly moved in the first direction I by the linear drive member 130. The linear drive member 130 includes a slider 132 and a guide member 134. The rotation drive motor 120 is installed on the upper surface of the slider 132. The guide member 134 extends in the first direction (I) at the central portion of the upper surface of the base (B). A linear motor (not shown) is built in the slider 132, and the slider 132 linearly moves in the first direction I along the guide member 134.

The head unit 200 discharges the processing liquid onto the substrate. The head unit 200 includes inkjet heads 210a and 210b and a bracket 220 to which the inkjet heads 210a and 210b are coupled. One inkjet head 210a of the inkjet heads 210a and 210b is coupled to one side facing the first direction I of the bracket 220, and the other inkjet head 210b is connected to the bracket 220. It may be coupled to the other side facing the first direction (I).

Each of the inkjet heads 210a and 210b includes a red (R) head 212, a green (G) head 214, and a blue (B) head 216. The red (R) head 212 discharges red ink to form red pixels on the substrate, and the green (G) head 214 discharges green ink to form green pixels, and the blue (B) head 216 ) May eject blue ink to form a blue pixel. The red (R) head 212, the green (G) head 214, and the blue (B) head 216 may be arranged in a line along the second direction (II), and the support plate may be an inkjet method for ejecting droplets. The processing liquid is discharged to the substrate S placed on the 110.

The moving units 300 and 400 may move the head unit 200 in the upper portion of the path in which the support plate 110 is moved. The first moving unit 300 linearly moves the head unit 200 in the first direction (I), and the second moving unit 400 moves the head unit 200 in the second direction (II) and the third direction ( Can be moved linearly.

The second moving unit 400 includes a horizontal support 410 and a slider 420. The horizontal support 410 is positioned above the base B such that the longitudinal direction thereof faces the second direction II. The horizontal support 410 is provided with a guide rail 412. The guide rail 412 extends long so that a longitudinal direction may face a 2nd direction II. The slider 420 moves linearly in the second direction II along the guide rail 412. The slider 420 includes a linear motor (not shown) that provides a linear driving force. The bracket 220 of the head unit 200 is coupled to the slider 420, and the inkjet heads 210a and 210b installed in the bracket 220 are moved in the second direction II by the linear movement of the slider 420. Go straight. On the other hand, the slider 420 is provided with a driving member (not shown) for linearly moving the bracket 220 of the head unit 200 in the third direction (III).

The first moving unit 300 includes guide rails 310 and sliders 320. The guide rails 310 are elongated so that the longitudinal direction thereof faces the first direction I, and are disposed at both edge portions of the upper surface of the base B around the guide member 134 of the substrate support unit 100. . Each of the sliders 320 is coupled to the guide rail 310 so as to linearly move in the first direction I along the respective guide rail 310. The sliders 320 include a linear motor (not shown) that provides a linear driving force. Both ends of the horizontal support 410 of the second moving unit 400 are connected to the sliders 320, respectively. When the sliders 320 are linearly moved in the first direction (I) by a linear motor (not shown), the horizontal support 410 and the bracket 220 and the inkjet heads 210a and 210b coupled thereto are the first. It is linearly moved in the direction (I).

The head unit 200 may be linearly moved in the first direction (I), the second direction (II), and the third direction (III) by the first moving unit 300 and the second moving unit 400. The support plate 110 on which the substrate is placed may be linearly moved in the first direction I by the slider 132 and the guide member 134. When discharging the processing liquid onto the substrate, the head unit 200 may be fixed at a predetermined position, and the supporting plate 110 on which the substrate is placed may move in the first direction (I). Alternatively, the support plate 110 on which the substrate is placed may be fixed at a predetermined position, and the head unit 200 may be moved in the first direction (I).

The first head cleaning unit 500 and the second head cleaning unit 600 periodically clean nozzle surfaces of the inkjet heads 210a and 210b, that is, surfaces on which nozzles for discharging the processing liquid are formed. Typically, after the process liquid ejecting process is performed on one substrate, cleaning of the process liquid ejecting surfaces of the inkjet heads 210a and 210b may proceed.

The first head cleaning unit 500 and the second head cleaning unit 600 may be provided on one side of the substrate support unit 100 on the upper surface of the base B, and may be arranged in a line in the first direction (I). have. The inkjet heads 210a and 210b are moved to the top of the first head cleaning unit 500 and the second head cleaning unit 600 by the first moving unit 300 and the second moving unit 400 and are cleaned. During the process, the first head cleaning unit 500 and the second head cleaning unit (500, 600) may be moved in the first direction (I).

The first head cleaning unit 500 performs a purging process and a blading process, and the second head cleaning unit 600 performs a blotting process. The purging process, the blading process, and the blotting process are performed sequentially. The purging process is a process of spraying a portion of the processing liquid contained in the inkjet heads 210a and 210b at a high pressure. The blading process is a process of removing the process liquid remaining on the process liquid discharge surfaces of the inkjet heads 210a and 210b in a non-contact manner after a purging process. The blotting process is a process of removing the treatment liquid remaining on the treatment liquid discharge surfaces of the inkjet heads 210a and 210b by a contact method after the blading process.

The first head cleaning unit 500 performs a purging process and a blading process. The inkjet heads 212, 214, 216 are moved to the top of the first head cleaning unit 500 by the first and second moving units 300, 400 after the process of discharging the processing liquid to the substrate. The inkjet heads 212, 214, and 216 discharge the processing liquid to the bath (not shown) of the first head cleaning unit 500 by the positive pressure provided by the pressure regulating member (reference numeral 213 of FIG. 4).

Thereafter, the inkjet heads 212, 214, and 216 move downward so that the treatment liquid remaining on the nozzle surface contacts the blade (not shown). The blades contact the treatment liquid remaining on the nozzle face of the inkjet heads 212, 214, 216 to remove the treatment liquid from the nozzle face. At this time, the nozzle surface of the inkjet heads 212, 214, 216 is in contact with the blade while the blade removes the treatment liquid from the nozzle surface.

The second head cleaning unit 600 undergoes a blotting process. A blotting process is a process of removing the process liquid remaining on the process liquid discharge surface of the inkjet head 212 by a contact method after the blading process.

4 is a side cross-sectional view of the second head cleaning unit of FIGS. 2 and 3, and FIG. 5 is a side cross-sectional view of the second head cleaning unit of FIG. 4 viewed from another side. 4 and 5, the second head cleaning unit 600 includes a bath 610, a porous absorbing member 620, a rotation driving member 630, and a pressing member 640.

The bath 610 has a cylindrical shape with an open top. The cleaning fluid is contained in the inner lower portion of the bath 610. Solvent may be used as the cleaning fluid.

The porous absorbing member 610 contacts the nozzle face of the inkjet head 212 to remove the treatment liquid remaining on the nozzle face. By the absorption of the treatment liquid, the residual treatment liquid on the nozzle surface is removed. The porous absorbing member 620 has a cylindrical shape. The porous absorbing member 620 is provided so that the longitudinal direction is directed toward the arrangement direction of the plurality of nozzles 219 provided on the nozzle face of the inkjet head 212. The porous absorbent member 620 is disposed horizontally in the bath 610 such that the lower end of the outer peripheral surface is immersed in the cleaning fluid. The porous absorbing member 610 may be a sponge made of synthetic resin, and specifically, may be a sponge made of polyolefin.

Conventionally, a wiper has been used as a means for removing the residual treatment liquid on the nozzle surface by a contact method, but the microfiber of the wiper has been inserted into the nozzle on the nozzle surface to block the nozzle. However, since the present invention removes the residual treatment liquid on the nozzle surface by using the porous absorbing member 610, that is, a synthetic resin sponge, it is possible to prevent foreign substances from being inserted into the nozzle 219. In addition, since the wiper used as a one-time consumable is replaced with the porous absorbing member 610 that can be used repeatedly, productivity can be improved through cost reduction.

Rotating shafts 622 are connected to both ends of the porous absorbing member 620, respectively. The rotation axes 622 are rotatably supported by the bearing member 624. Bearing members 624 are coupled to sidewalls of bath 610. The rotation drive member 630 is connected to any one of the rotation shafts 622. The rotary drive member 630 includes a drive motor 632 and a drive shaft 634 connected to the drive motor 632. The drive shaft 634 is connected to the rotation shaft 622 by a coupling member or the like, and transmits the rotational force of the drive motor 63 to the rotation shaft 622.

The pressing member 640 pressurizes the porous absorbing member 620 to discharge the treatment liquid and the cleaning fluid of the nozzle surface absorbed by the porous absorbing member 620. The pressing member 640 includes a first pressing roller 640a and a second pressing roller 640b. The first and second pressure rollers 640a and 640b have a cylindrical shape, and a plurality of protrusions 642a and 642b are formed on the circumferential surface to press the porous absorbing member 620.

The first and second pressure rollers 640a and 640b are immersed in the cleaning fluid contained in the bath 610 and are disposed parallel to the porous absorbing member 620 to contact the porous absorbing member 620. For example, the first pressure roller 640a is disposed to contact the lower end of any one side with respect to the center of the porous absorbent member 620, and the second pressure roller 640b is disposed at the center of the porous absorbent member 620. It may be arranged to contact the lower end of the other side as a reference. The first pressure roller 640a and the second pressure roller 640b may be arranged to be symmetrical with respect to the center of the porous absorbing member 620.

Rotating shafts 644a are connected to both ends of the first pressing roller 640a, respectively. The rotation axes 644a are rotatably supported by the bearing member 646a, and the bearing members 646a are coupled to the sidewall of the bath 610. Rotating shafts 644b are connected to both ends of the second pressure roller 640b, respectively, and the rotating shafts 644b are rotatably supported by the bearing member 646b, and the bearing members 646b of the bath 610 are rotated. Is coupled to the side wall.

The inkjet head 212 is secondly formed by the first and second moving units (No. 300,400 in Fig. 2) after the purging step and the blading step in the first head cleaning unit (No. 500 in Fig. 2). The porous absorbing member 620 of the head cleaning unit 600 is moved above. Thereafter, the inkjet head 212 is lowered by the second moving unit 400 to contact the porous absorbing member 620. The porous absorbing member 620 rotates while in contact with the nozzle face of the inkjet head 212, and absorbs the treatment liquid remaining on the nozzle face. Since the porous absorbent member 620 rotates, the portion of the porous absorbent member 620 that contacts the inkjet head 212 is continuously changed along the circumferential direction.

The portion of the porous absorbent member 620 that has absorbed the residual treatment liquid on the nozzle face is immersed in the cleaning fluid by the rotation of the porous absorbent member 620, and the protrusions of the first and second pressure rollers 640a and 640b ( 642a, 642b). Since the porous absorbent member 620 is formed of a sponge material, when the pressing force of the protrusions 642a and 642b is applied to the porous absorbent member 620, the cleaning fluid and the processing liquid absorbed by the porous absorbent member 620 are released. . Through this process, the portion of the porous absorbing member 620 that absorbs the residual treatment liquid on the nozzle surface is cleaned. The portion of the cleaned porous absorbent member 620 is in contact with the nozzle face of the inkjet head 212 again by the rotation of the porous absorbent member 620. At this time, since the porous absorbing member 620 is cleaned, not only the cleaning degree of the nozzle surface of the inkjet head 212 can be improved, but also the reverse contamination of the nozzle surface of the inkjet head 212 by the porous absorbing member 620 is prevented. It can prevent.

6 is a side cross-sectional view showing another embodiment of the second head cleaning unit, and FIG. 7 is a plan view of the porous absorbent member and the pressure plate of FIG. 6.

6 and 7, the second head cleaning unit 600 ′ may include a bath 610 ′, a porous absorbing member 620 ′, a rotation drive member (not shown), and a pressing member 640 ′. ). Since the embodiment of FIG. 6 is the same as the embodiment of FIG. 4 except for the pressing member 640 ', the description of the same elements will be omitted.

The pressing member 640 'includes a pressing plate 642' and first and second drivers 646 'and 648'. The pressure plate 642 ′ may be provided in a flat plate shape and disposed horizontally under the porous absorbing member 620 ′ so as to be immersed in the cleaning fluid. A plurality of protrusions 644 'for pressing the lower end of the porous absorbing member 620' is formed on the upper surface of the pressing plate 642 '. The protrusions 644 ′ extend in parallel to the longitudinal direction of the porous absorbing member 620 ′ and protrude on the upper surface of the pressure plate 642 ′ so as to be spaced apart from each other. The cross sections of the protrusions 644 ′ may be gear tooth shaped.

When cleaning the nozzle face of the inkjet head 212, the portion of the porous absorbent member 620 'that absorbs the residual treatment liquid on the nozzle face is immersed in the cleaning fluid by the rotation of the porous absorbent member 620', and the press plate ( 642 ') is pressed by protrusions 644'. Since the porous absorbent member 620 'is formed of a sponge material, when the pressing force of the protrusions 644' is applied to the porous absorbent member 620 ', the cleaning fluid and the treatment liquid absorbed by the porous absorbent member 620' Is released. Through this process, the portion of the porous absorbing member 620 'that absorbs the residual treatment liquid on the nozzle surface is cleaned. The portion of the cleaned porous absorbent member 620 'is in contact with the nozzle face of the inkjet head 212 again by the rotation of the porous absorbent member 620'. At this time, since the porous absorbing member 620 'is cleaned, not only the cleaning degree of the nozzle surface of the inkjet head 212 can be increased, but also the inverse of the nozzle surface of the inkjet head 212 by the porous absorbing member 620'. Contamination can be prevented.

The first drive part 646 'linearly moves the pressure plate 642' in the horizontal direction. When the pressure plate 642 'is moved in the horizontal direction, the pressing force applied by the protrusions 644' of the pressure plate 642 'to the porous absorbent member 620' becomes large, thereby cleaning the porous absorbent member 620 '. The efficiency can be improved.

The second driver 648 ′ linearly moves the porous absorbing member 620 ′ in the vertical direction. When the porous absorbent member 620 'is moved in the vertical direction, the pressing force that the protrusions 644' of the pressure plate 642 'act on the porous absorbent member 620' may be adjusted. Alternatively, the second driver 648 ′ may be provided to move the pressure plate 642 ′ in the vertical direction.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a view showing the configuration of a treatment liquid application facility according to an embodiment of the present invention.

FIG. 2 is a perspective view of the processing liquid discharge part of FIG. 1. FIG.

3 is a plan view of the processing liquid discharge part of FIG. 2.

4 is a side cross-sectional view of the second head cleaning unit of FIGS. 2 and 3.

FIG. 5 is a side sectional view of the second head cleaning unit of FIG. 4 seen from another side. FIG.

6 is a side cross-sectional view showing another embodiment of the second head cleaning unit.

7 is a plan view of the porous absorbent member and the pressure plate of FIG.

<Description of Symbols for Main Parts of Drawings>

100: substrate support unit 200: head unit

300: first moving unit 400: second moving unit

500: first head cleaning unit 600,600 ': second head cleaning unit

610,610 ': Bath 620,620': Porous absorbent member

640,640 ': pressing member

Claims (20)

In the head cleaning unit for cleaning the nozzle surface of the inkjet head, Bath; A cylindrical porous absorbing member rotatably provided in the bath and in contact with the nozzle face; And And a pressing member for urging the porous absorbing member to release the liquid absorbed by the porous absorbing member. The method of claim 1, The pressing member, And a pressure roller disposed in parallel with the porous absorbent member and formed with a plurality of protrusions for pressing the porous absorbent member. The method of claim 2, And the pressure roller is arranged to contact the lower end of the porous absorbing member. The method of claim 3, wherein And a cleaning fluid is filled in the bath such that the lower end of the porous absorbing member and the pressure roller are locked. The method of claim 4, wherein The pressure roller, A first pressure roller contacting the lower end of any one side with respect to the center of the porous absorbing member; And And a second pressing roller contacting the lower end of the other side with respect to the center of the porous absorbing member. The method of claim 1, The pressing member, Head cleaning unit comprising a pressure plate formed with a plurality of protrusions for pressing the porous absorbing member. The method of claim 6, And the plurality of protrusions are formed in the pressing plate so as to extend in parallel with the longitudinal direction of the porous absorbing member and to be spaced apart from each other. The method of claim 7, wherein The cross section of the protrusion is a head cleaning unit having a gear tooth shape. The method of claim 6, And the pressure plate is disposed in a horizontal direction under the porous absorbent member to press the lower end of the porous absorbent member. The method of claim 9, And a first driving part for linearly moving the pressing plate in a horizontal direction. The method of claim 9, And a second driving part which linearly moves the porous absorbing member in the vertical direction. The method of claim 10 or 11, And a cleaning fluid is filled in the bath such that the lower end of the porous absorbing member and the pressure plate are locked. A substrate support unit on which the substrate is placed and which is linearly movable in the first direction; A plurality of inkjet heads movably provided on a movement path of the substrate support unit and discharging a processing liquid onto the substrate; And A head cleaning unit provided on one side of the substrate support unit, the head cleaning unit cleaning the nozzle surfaces of the inkjet heads, The head cleaning unit, Bath; A cylindrical porous absorbing member rotatably provided in the bath and in contact with the nozzle face; And a pressurizing member that pressurizes the porous absorbing member so that the liquid absorbed by the porous absorbing member is discharged. The method of claim 13, The pressing member, And a pressure roller disposed in parallel to contact the porous absorbent member and having a plurality of protrusions for pressing the porous absorbent member. The method of claim 14, The pressure roller is disposed in contact with the lower end of the porous absorbing member, And a cleaning fluid is filled in the bath such that the lower end of the porous absorbing member and the pressure roller are locked. The method of claim 15, The pressure roller, A first pressure roller contacting the lower end of any one side with respect to the center of the porous absorbing member; And And a second pressing roller contacting the lower end of the other side with respect to the center of the porous absorbing member. The method of claim 13, The pressing member, And a pressure plate having a plurality of protrusions for pressing the porous absorbing member. The method of claim 17, The pressing plate is disposed in the horizontal direction to press the lower end of the porous absorbing member, And a cleaning fluid is filled in the bath such that the lower end of the porous absorbing member and the pressure plate are locked. The method of claim 18, And a first driving part for linearly moving the pressing plate in a horizontal direction. The method of claim 19, And a second driving part for linearly moving the porous absorbing member in the vertical direction.

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