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KR101094961B1 - Vacuum hot pressing diffusion bonding apparatus - Google Patents

Vacuum hot pressing diffusion bonding apparatus Download PDF

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Publication number
KR101094961B1
KR101094961B1 KR1020110057087A KR20110057087A KR101094961B1 KR 101094961 B1 KR101094961 B1 KR 101094961B1 KR 1020110057087 A KR1020110057087 A KR 1020110057087A KR 20110057087 A KR20110057087 A KR 20110057087A KR 101094961 B1 KR101094961 B1 KR 101094961B1
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KR
South Korea
Prior art keywords
support
diffusion bonding
chamber
pressing
air cylinder
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KR1020110057087A
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Korean (ko)
Inventor
윤석호
최준석
오동욱
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한국기계연구원
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Priority to KR1020110057087A priority Critical patent/KR101094961B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/044—Vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

PURPOSE: A vacuum hot pressing-diffusion bonding apparatus is provided to prevent an unbalanced compressive force by regulating the height of a piston rod to control the tilting of a support. CONSTITUTION: A vacuum hot pressing-diffusion bonding apparatus comprises a chamber(110), a support(120) which supports the underside of a work piece(A) within the chamber, a pressing member(130) which applies pressure to the top of the work piece within the chamber, and a buffer member(160) which is arranged under the support with liquid filled in a housing space(161) and supports the pressure applied by the pressing member. The buffer member comprises an air cylinder(162) which is installed on a surface(170) in parallel to the pressing direction of the pressing member and a piston rod(163), one end of which is connected to the bottom of the support and the other end of which is moved lengthwise within the air cylinder.

Description

진공확산접합장치 {VACUUM HOT PRESSING DIFFUSION BONDING APPARATUS}Vacuum Diffusion Bonding Equipment {VACUUM HOT PRESSING DIFFUSION BONDING APPARATUS}

본 발명은 진공확산접합장치에 관한 것으로서, 보다 상세하게는 접합대상물의 전면에 균등한 가압력을 제공함으로써 우수한 접합 품질을 얻을 수 있는 진공확산접합장치에 관한 것이다.The present invention relates to a vacuum diffusion bonding apparatus, and more particularly, to a vacuum diffusion bonding apparatus which can obtain excellent bonding quality by providing an equal pressing force on the entire surface of a bonding object.

일반적으로 고상접합은 기존의 용융용접과 달리 모재를 고체상태로 유지하면서 일체화하는 기술이다. 이 기술은 모재의 용융을 방지 또는 최대한 억제함으로써 모재가 가지고 있는 본래의 특성을 보존하고 접합부의 결함발생을 최소화하여 일체화된 부품의 특성을 극대화할 수 있는 기술이다. In general, solid phase bonding is a technique of integrating the base metal while maintaining a solid state, unlike conventional melt welding. This technology prevents or minimizes the melting of the base material, thus preserving the original properties of the base material and minimizing the occurrence of defects in the joints, thereby maximizing the characteristics of the integrated parts.

복합재료등 신금속소재의 개발과 첨단산업의 발달로 고상접합 기술이 크게 각광을 받고 발전하게 되었으며 이로 인해 기존의 용융용접기술로는 접합이 불가능한 소재, 복잡한 형상의 소재, 높은 품질 및 정밀성이 요구되는 소재 등의 접합이 가능하게 되었다. With the development of new metal materials such as composite materials and the development of high-tech industries, solid-state joining technology has been greatly attracted and developed. As a result, materials that cannot be joined by conventional melt welding technology, complex shaped materials, high quality and precision are required. Joining of materials, etc. to be made is possible.

이러한 고상접합 기술로는 마찰열을 이용하는 마찰접합, 삽입금속을 이용하는 브레이징(Brazing), 원자의 확산현상을 응용한 확산접합(Diffusion Bonding) 등이 있다. 이 중에서 확산접합은 모재를 용융시키지 않을 정도의 고온에서 모재가 큰 소성변형을 일으키지 않는 정도의 정수압력을 가함으로써 고상상태에서 접합하는 방법이다.Such solid state bonding techniques include friction bonding using frictional heat, brazing using insertion metals, and diffusion bonding using diffusion of atoms. Among these, diffusion bonding is a method of joining in a solid state by applying a hydrostatic pressure such that the base material does not cause large plastic deformation at a high temperature such that the base material does not melt.

한편, 이와 같은 확산접합을 통해 고품질의 제품을 제작하기 위해서는 적절한 온도하에서 적층된 접합대상물의 표면에 균일한 압력을 전달해야 한다. On the other hand, in order to manufacture a high quality product through such a diffusion bonding, it is necessary to deliver a uniform pressure to the surface of the laminated object to be laminated under the appropriate temperature.

그러나, 대면적의 접합대상물을 접합하는 경우, 접합대상물에 압력을 가하는 가압부재가 대면적의 접합대상물에 균등한 가압력을 제공하도록 제어하는 것이 어려울 뿐만 아니라, 가압과정에서 가압부재가 일측으로 기울어지는 경우 가압부재와 지대의 사이에 배치되는 접합대상물의 일부분에만 가압력이 집중되는 등 접합불량을 유발하기 쉬운 문제점이 있다.However, when joining a large area of the bonding object, it is difficult not only to control the pressurizing member that applies pressure to the bonding object to provide an equal pressing force to the large area of the bonding object, but also to incline the pressure member to one side during the pressing process. In this case, there is a problem that it is easy to cause a poor bonding, such as the pressing force is concentrated only on a portion of the bonding object disposed between the pressing member and the zone.

따라서, 본 발명의 목적은 이와 같은 종래의 문제점을 해결하기 위한 것으로서, 가압부재가 기울어지거나, 접합대상물의 두께가 불균일한 경우에도 접합대상물의 상측에 인가되는 가압력에 따라 지지대의 하부에 위치한 다수의 완충부재들의 내부 체적이 변경되면서 피스톤로드의 높이를 조절하여 지지대의 기울기를 조절함으로써, 압축력의 불균형을 방지할 수 있는 진공확산접합장치를 제공함에 있다.Therefore, an object of the present invention is to solve such a conventional problem, a plurality of located in the lower portion of the support according to the pressing force applied to the upper side of the bonding object even if the pressing member is inclined or the thickness of the bonding object is uneven. The present invention provides a vacuum diffusion welding apparatus capable of preventing an imbalance of compression force by adjusting the inclination of the support by adjusting the height of the piston rod while changing the internal volume of the shock absorbing members.

또한, 지지대를 지지하는 다수의 완충부재들의 내부 유체가 연결라인에 의해 서로 연결되어, 가압부재로부터 인가되는 가압력에 대하여 다수의 완충부재들이 균일한 반발력으로 지지대를 지지함으로써, 균일한 압축력이 인가되도록 할 수 있는 진공확산접합장치를 제공함에 있다.In addition, the internal fluids of the plurality of shock absorbing members supporting the support are connected to each other by a connection line, so that the plurality of shock absorbing members support the support with uniform repulsive force against the pressing force applied from the pressure member, so that a uniform compressive force is applied. It is to provide a vacuum diffusion bonding apparatus that can be.

또한, 단열재를 이용하여 확산접합 작업영역을 둘러싸고 에어실린더는 단열재의 외부에 배치함으로써, 에어실린더가 고온의 환경에 노출되는 것을 방지할 수 있는 진공확산접합장치를 제공함에 있다.In addition, by using a heat insulating material to surround the diffusion bonding work area and the air cylinder to the outside of the heat insulating material, to provide a vacuum diffusion bonding apparatus that can prevent the air cylinder from being exposed to a high temperature environment.

또한, 단열재에 의해 구획된 영역 내부에서 히터가 발열하여 확산접합에 적합한 분위기를 조성하므로, 히터의 발열량이나 전기소비량을 최소화할 수 있는 진공확산접합장치를 제공함에 있다.In addition, since the heater generates heat in the region partitioned by the heat insulating material to create an atmosphere suitable for diffusion bonding, it is to provide a vacuum diffusion bonding apparatus that can minimize the heat generation amount or the electricity consumption of the heater.

상기 목적은, 본 발명에 따라, 챔버;와, 상기 챔버 내에서 접합대상물의 하부를 지지하는 지지대;와, 상기 챔버 내에서 접합대상물의 상부에 압력을 인가하는 가압부재; 및, 내부 수용공간에 유체가 채워진 상태에서 상기 지지대의 하부에 배치되어 상기 가압부재에 의한 가압력을 지지하는 두 개 이상의 완충부재;를 포함하며, 상기 두 개 이상의 완충부재의 수용공간은 연결라인에 의해 연결되어 유체가 연통하는 것을 특징으로 하는 진공확산접합장치에 의해 달성된다.According to the present invention, the chamber; and a support for supporting the lower portion of the bonding object in the chamber; and a pressing member for applying pressure to the upper portion of the bonding object in the chamber; And two or more buffer members disposed under the support in a state where the fluid is filled in the inner receiving space to support the pressing force by the pressing member. The accommodation space of the two or more buffer members is connected to the connection line. It is achieved by a vacuum diffusion bonding device characterized in that the fluid is connected to each other.

여기서, 상기 완충부재는 가압부재의 가압방향과 나란하게 배치되도록 바닥면에 설치되는 에어실린더와, 일단부가 지지대의 하부에 연결되고 타단부는 상기 에어실린더의 내부에서 길이방향으로 이동하는 피스톤로드를 포함하는 것이 바람직하다.Here, the shock absorbing member is an air cylinder installed on the bottom surface so as to be parallel to the pressing direction of the pressing member, one end is connected to the lower portion of the support and the other end of the piston rod to move in the longitudinal direction inside the air cylinder It is preferable to include.

또한, 상기 챔버 내부에서 상기 지지대와 가압부재의 주변을 감싸는 단열재;와, 상기 단열재의 내부에서 발열하는 히터;를 더 포함하는 것이 바람직하다.In addition, it is preferable to further include a heat insulating material that surrounds the periphery of the support and the pressing member in the chamber; and a heater that generates heat in the heat insulating material.

또한, 상기 에어실린더는 단열재의 외부 공간에 배치되는 것이 바람직하다.In addition, the air cylinder is preferably disposed in the outer space of the heat insulating material.

본 발명에 따르면, 가압부재가 기울어지거나, 접합대상물의 두께가 불균일한 경우에도 접합대상물의 상측에 인가되는 가압력에 따라 지지대의 하부에 위치한 다수의 완충부재들의 내부 체적이 변경되면서 피스톤로드의 높이를 조절하여 지지대의 기울기를 조절하므로, 압축력의 불균형을 방지할 수 있는 진공확산접합장치가 제공된다.According to the present invention, even if the pressing member is inclined or the thickness of the joining object is uneven, the height of the piston rod is changed by changing the internal volume of the plurality of shock absorbing members located at the bottom of the support according to the pressing force applied to the upper side of the joining object. By adjusting the inclination of the support by adjusting, there is provided a vacuum diffusion bonding apparatus that can prevent the imbalance of the compression force.

또한, 지지대를 지지하는 다수의 완충부재들의 내부 유체가 연결라인에 의해 서로 연결되어, 가압부재로부터 인가되는 가압력에 대하여 다수의 완충부재들이 균일한 반발력으로 지지대를 지지함으로써, 균일한 압축력이 인가되도록 할 수 있는 진공확산접합장치가 제공된다.In addition, the internal fluids of the plurality of shock absorbing members supporting the support are connected to each other by a connection line, so that the plurality of shock absorbing members support the support with uniform repulsive force against the pressing force applied from the pressure member, so that a uniform compressive force is applied. A vacuum diffusion bonding device capable of doing this is provided.

또한, 단열재를 이용하여 확산접합 작업영역을 둘러싸고 에어실린더는 단열재의 외부에 배치함으로써, 에어실린더가 고온의 환경에 노출되는 것을 방지할 수 있는 진공확산접합장치가 제공된다.In addition, by using a heat insulating material to surround the diffusion bonding working area and the air cylinder is disposed outside the heat insulating material, there is provided a vacuum diffusion bonding apparatus that can prevent the air cylinder from being exposed to a high temperature environment.

또한, 단열재에 의해 구획된 영역 내부에서 히터가 발열하여 확산접합에 적합한 분위기를 조성하므로, 히터의 발열량이나 전기소비량을 최소화할 수 있는 진공확산접합장치가 제공된다.In addition, since the heater generates heat in the region partitioned by the heat insulating material to create an atmosphere suitable for diffusion bonding, there is provided a vacuum diffusion bonding apparatus capable of minimizing the heat generation amount or the electricity consumption of the heater.

도 1은 본 발명 진공확산접합장치의 부분절개 사시도,
도 2는 본 발명 진공확산접합장치의 완충부재의 부분절개 사시도,
도 3은 본 발명 진공확산접합장치의 단면도,
도 4 내지 도 5는 본 발명 진공확산접합장치의 작용단면도이다.1 is a partial cutaway perspective view of a vacuum diffusion welding device of the present invention;
Figure 2 is a partial cutaway perspective view of the buffer member of the present invention vacuum diffusion bonding device,
3 is a cross-sectional view of the vacuum diffusion bonding device of the present invention;
4 to 5 is a cross-sectional view of the operation of the vacuum diffusion bonding apparatus of the present invention.

설명에 앞서, 여러 실시예에 있어서, 동일한 구성을 가지는 구성요소에 대해서는 동일한 부호를 사용하여 대표적으로 제1실시예에서 설명하고, 그 외의 실시예에서는 제1실시예와 다른 구성에 대해서 설명하기로 한다.Prior to the description, in the various embodiments, components having the same configuration will be representatively described in the first embodiment using the same reference numerals, and in other embodiments, different configurations from the first embodiment will be described. do.

이하, 첨부한 도면을 참조하여 본 발명의 제1실시예에 따른 진공확산접합장치에 대하여 상세하게 설명한다.Hereinafter, a vacuum diffusion bonding apparatus according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

첨부도면 중 도 1은 본 발명 진공확산접합장치의 단면도이고, 도 2는 본 발명 진공확산접합장치의 주요구성을 나타내는 분해사시도이다.1 is a cross-sectional view of the vacuum diffusion bonding device of the present invention, Figure 2 is an exploded perspective view showing the main configuration of the vacuum diffusion bonding device of the present invention.

상기 도면에서 도시하는 바와 같은 본 발명 진공확산접합장치는 챔버(110), 지지대(120), 가압부재(130), 단열재(140), 히터(150) 및, 완충부재(160)를 포함하여 구성된다.The vacuum diffusion bonding apparatus of the present invention as shown in the drawings comprises a chamber 110, a support 120, a pressing member 130, a heat insulating material 140, a heater 150, and a buffer member 160 do.

상기 챔버(110)는 개폐 가능하며 내부에 밀폐된 작업공간을 제공한다.The chamber 110 is openable and provides a closed working space therein.

상기 지지대(120)는 접합대상물(A)의 하부를 지지하도록 상기 챔버(110) 내에 배치되는 것으로, 본 실시예에서는 대략 사각의 판재로 이루어지는 것으로 예를 들어 설명한다.The support 120 is disposed in the chamber 110 so as to support the lower portion of the bonding object A. In the present embodiment, the support 120 is made of a substantially rectangular plate.

상기 가압부재(130)는 챔버(110)의 작업공간 내부에서 상기 지지대(120)의 상측에 배치되어 접합대상물(A)에 압축력을 제공하는 것으로서 상기 챔버(110)의 상측에 배치되는 프레스기기의 가압축(131)에 연결되어 승,하강하면서 지지대(120)와의 사이에 배치되는 접합대상물(A)에 압력을 제공한다. The pressing member 130 is disposed on the upper side of the support 120 in the working space of the chamber 110 to provide a compressive force to the bonding object (A) of the press apparatus is disposed on the upper side of the chamber (110) It is connected to the pressing shaft 131, while providing a pressure to the bonding object (A) disposed between the support and 120 while raising and lowering.

상기 단열재(140)는 상기 챔버(110) 내부에서 상기 지지대(120)와 가압부재(130)의 주변을 감싼다. The heat insulating material 140 surrounds the periphery of the support 120 and the pressing member 130 in the chamber 110.

상기 히터(150)는 상기 단열재(140)의 내부에서 발열하여 단열재(140)에 의해 둘러싸인 공간을 진공확산접합에 적당한 온도분위기가 형성되도록 한다. The heater 150 generates heat inside the heat insulator 140 so that a temperature atmosphere suitable for vacuum diffusion bonding is formed in the space surrounded by the heat insulator 140.

상기 완충부재(160)는 상기 지지대(120)의 각 모서리 하부에 배치되어 상기 가압부재(130)에 의한 가압력을 지지하는 것으로, 내부 수용공간에 유체가 채워진 상태에서 가압부재(130)의 가압방향과 나란하게 배치되어 바닥면(170)에 설치되는 에어실린더(161)와, 일단부는 지지대(120)의 하부에 연결되고 타단부는 상기 에어실린더(161)의 내부에 배치되는 피스톤로드(162)로 구성되며, 상기 에어실린더(161)는 단열재(140)의 외부 공간에 배치된다. The buffer member 160 is disposed under each corner of the support 120 to support the pressing force by the pressing member 130, the pressing direction of the pressing member 130 in the state that the fluid is filled in the inner receiving space The air cylinder 161 is disposed in parallel with the air to be installed on the bottom surface 170, one end is connected to the lower portion of the support 120, and the other end is a piston rod 162 disposed inside the air cylinder 161 The air cylinder 161 is disposed in the outer space of the heat insulator 140.

특히, 상기 완충부재(160)는 지지대(120)의 하부에 다수 배치되어 각각의 위치에서 지지대(120)에 가해지는 압력을 지지하는 것으로, 연결라인(163)에 의해 다수의 에어실린더(161)의 수용공간들이 연결되어 수용공간 내부의 유체가 서로 이동 가능하게 된다. In particular, the buffer member 160 is arranged under the support 120 to support the pressure applied to the support 120 at each position, a plurality of air cylinder 161 by the connection line 163 The accommodating spaces of the accommodating spaces are connected to allow fluids within the accommodating space to move with each other.

따라서, 어느 하나의 완충부재(160)에 압력이 가해지면, 피스톤로드(162)가 하강하면서 해당 에어실린더(161) 내부의 유체가 다른 완충부재(160)의 에어실린더(161)로 이동하여 압력이 가해지지 않은 완충부재(160)의 피스톤로드(162)가 상승하게 된다. Therefore, when a pressure is applied to any one of the shock absorbing members 160, the piston rod 162 is lowered and the fluid inside the air cylinder 161 moves to the air cylinder 161 of the other shock absorbing member 160 to pressure. The piston rod 162 of the buffer member 160 is not applied is raised.

상기와 같이 다수의 완충부재(160)들에 가해지는 각각의 압력에 대하여 유체가 다른 완충부재(160)측으로 이동하면서 다수의 완충부재(160)들의 내부 압력이 균일하게 조절된 상태에서 지지대(120)의 상측면으로부터 압력이 가해지면, '밀폐된 용기 속에 들어있는 유체는 그 압력 분포가 동일하며, 유체의 일부에 압력을 가하면 그 압력이 용기 내의 어느 부분에서나 동일하게 전해지는 파스칼의 원리(Pascal's principle)'에 의해 피스톤로드(162)의 인출길이와는 관계없이 지지대(120)의 하부를 지지하는 다수의 완충부재(160) 전체에 균등한 지지력이 작용하게 된다.As described above, the fluid 120 moves toward the other buffer member 160 with respect to each pressure applied to the plurality of shock absorbing members 160, while the internal pressure of the plurality of shock absorbing members 160 is uniformly adjusted. When pressure is applied from the upper side of Pascal's principle, 'the fluid in a sealed container has the same pressure distribution, and when pressure is applied to a part of the fluid, the pressure is transmitted equally in any part of the container. By the principle), regardless of the length of the withdrawal of the piston rod 162, an equal bearing force acts on the entirety of the plurality of shock absorbing members 160 supporting the lower portion of the support 120.

한편, 본 실시예에서는 상기 완충부재(160)가 사각 판형으로 이루어진 지지대(120)의 각 모서리 하부에 설치되는 것으로 예를 들어 설명하였으나, 이에 한정하는 것은 아니며 접합대상물(A)의 종류나 가압부재(130)의 가압력에 따라 완충부재(160)의 크기나 수, 그리고 위치를 변경하여 설치하는 것이 가능할 것이다.On the other hand, in the present embodiment, for example, the buffer member 160 is installed below each corner of the support plate 120 made of a square plate shape, for example, but is not limited to this kind of bonding object (A) or pressing member According to the pressing force of the 130, it will be possible to change the size, number and position of the buffer member 160 to be installed.

아울러, 상기 완충부재(160)의 에어실린더(161)의 하단부가 챔버(110) 외부에 설치된 바닥면(170)에 설치되는 것으로 설명하였으나, 챔버(110)의 바닥면(170)에 설치되는 것도 가능할 것이다.
In addition, although the lower end of the air cylinder 161 of the buffer member 160 has been described as being installed on the bottom surface 170 installed outside the chamber 110, it is also installed on the bottom surface 170 of the chamber 110. It will be possible.

지금부터는 상술한 진공확산접합장치의 제1실시예의 작동에 대하여 설명한다.The operation of the first embodiment of the vacuum diffusion bonding apparatus described above will now be described.

첨부도면 중 도 3은 본 발명 진공확산접합장치의 단면도이고, 도 4 내지 도 5는 본 발명 진공확산접합장치의 사용상태를 나타내는 작용단면도이다.3 is a cross-sectional view of the vacuum diffusion bonding device of the present invention, Figures 4 to 5 is an operation cross-sectional view showing a state of use of the vacuum diffusion bonding device of the present invention.

도 3에서 도시하는 바와 같이, 챔버(110)의 내부 작업공간의 중앙 하부에 배치된 지지대(120)는 다수의 완충부재(160)에 의해 바닥면(170)으로부터 지지된 상태에서, 지지대(120)의 상측에 배치되는 접합대상물(A)의 하부를 지지한다.As shown in FIG. 3, the support 120 disposed at the center lower portion of the inner working space of the chamber 110 is supported from the bottom surface 170 by a plurality of shock absorbing members 160. Supports the lower part of the bonding object (A) disposed above the ().

또한, 상기 접합대상물(A)의 상측에는 접합대상물(A)로부터 소정간격 이격된 위치에 가압부재(130)가 배치되고, 상기 가압부재(130)는 프레스기의 가압축(131)에 연결되어 프레스의 구동에 의해 챔버(110) 내에서 상,하 방향으로 이동하며 접합대상물(A)에 압축력을 제공한다.In addition, the pressing member 130 is disposed at a position spaced apart from the bonding object A by a predetermined distance above the bonding object A, and the pressing member 130 is connected to the pressing shaft 131 of the press machine to press It moves in the vertical direction in the chamber 110 by the driving of the provides a compression force to the bonding object (A).

한편, 상기 지지대(120)와 가압부재(130)의 주변은 단열재(140)로 둘러싸인 상태에서, 상기 단열재(140)의 내부에 설치되어 전원의 인가에 의해 발열하는 히터(150)에 의해 확산접합에 적당한 온도분위기를 조성한다. 아울러, 도면에는 도시되지 않았으나, 단열재(140) 내부의 온도분위기를 조절하기 위해 별도의 온도센서 등을 설치할 수 있으며, 이러한 온도센서의 측정값에 따라 히터(150)를 제어하여 확산접합에 적당한 온도분위기를 자동으로 제어하는 것이 가능할 것이다.On the other hand, the peripheral portion of the support 120 and the pressing member 130 is surrounded by the heat insulating material 140, the diffusion bonding by the heater 150 is installed inside the heat insulating material 140 and generates heat by the application of power. Create a suitable temperature atmosphere. In addition, although not shown in the drawing, a separate temperature sensor or the like may be installed to adjust the temperature atmosphere inside the heat insulator 140, and a temperature suitable for diffusion bonding by controlling the heater 150 according to the measured value of the temperature sensor. It will be possible to control the atmosphere automatically.

또한, 상기 지지대(120)를 바닥면(170)으로부터 지지하는 완충부재(160)는 피스톤로드(162)의 일단부가 지지대(120)의 하부에 연결된 상태에서 타단부가 단열재(140)의 외부공간으로 노출되고, 바닥면(170)과 피스톤로드(162)의 타단부 사이에 에어실린더(161)가 배치된다. 따라서 에어실린더(161)가 고온의 환경에 노출되는 것이 방지된다.In addition, the buffer member 160 for supporting the support 120 from the bottom surface 170, the other end of the piston rod 162 is connected to the lower portion of the support 120 in the outer space of the heat insulating material 140 Exposed to the air cylinder 161 is disposed between the bottom surface 170 and the other end of the piston rod 162. Therefore, the air cylinder 161 is prevented from being exposed to a high temperature environment.

이어서, 도 4와 같이 프레스(미도시)의 구동에 의해 작용축과 함께 가압부재(130)가 하강하면서 접합대상물(A)의 상측면에 접촉하게 된다.Subsequently, as shown in FIG. 4, the pressing member 130 is lowered together with the working shaft by the driving of a press (not shown) to be in contact with the upper side surface of the bonding object A. FIG.

이때 가압부재(130)가 일측으로 기울어지는 경우, 기울어진 부분의 가압부재(130)가 접합대상물(A)에 먼저 접촉하면서, 해당 부분의 지지대(120)를 지지하는 완충부재(160)에 압축력이 전달되므로 해당 완충부재(160)의 피스톤로드(162)가 하강하게 된다. At this time, when the pressing member 130 is inclined to one side, the pressing member 130 of the inclined portion is in contact with the bonding object (A) first, the compressive force to the buffer member 160 for supporting the support 120 of the corresponding portion As it is transmitted, the piston rod 162 of the buffer member 160 is lowered.

즉, 다수의 완충부재(160) 중 어느 하나의 완충부재(160)의 피스톤로드(162)가 하강하면, 해당 피스톤로드(162)의 하부에 위치한 에어실린더(161)의 내부 유체가 연결라인(163)을 통해 연결된 인접한 다른 완충부재(160)의 에어실린더(161)의 내부로 이동하게 되면서, 인접한 다른 완충부재(160)들의 피스톤로드(162)가 상승하면서 가압부재(130)에 의해 가압력이 전달되지 않은 부분의 지지대(120)를 들어올리게 되며, 이러한 작용을 통해 가압부재(130)가 기울기에 따라 지지대(120)의 기울기가 조절된다. That is, when the piston rod 162 of one of the buffer members 160 of the plurality of shock absorbing members 160 is lowered, the fluid inside the air cylinder 161 located under the piston rod 162 is connected to the connection line ( While moving to the interior of the air cylinder 161 of the other adjacent shock absorbing member 160 connected through the 163, the pressing force is increased by the pressure member 130 while the piston rod 162 of the other adjacent shock absorbing members 160 is raised. Lift the support 120 of the untransmitted portion, the inclination of the support 120 is adjusted according to the inclination of the pressing member 130 through this action.

특히, 도 5와 같이 각각의 피스톤로드(162)의 위치가 조절된 완충부재(160)들은 에어실린더(161)의 내부 유체가 연결라인(163)을 통해 연결되어 있으므로, 파스칼의 원리에 따라 가압부재(130)로부터 전달되는 가압력에 대하여 에어실린더(161)의 내부 유체에 균등한 압력이 작용하면서 균일한 반발력으로 지지대(120)를 지지하므로 상부 가압부재(130)의 가압력의 불균일을 해소할 수 있게 된다. In particular, as shown in FIG. 5, the buffer members 160 whose positions of the piston rods 162 are adjusted are pressurized according to the principle of Pascal because the inner fluid of the air cylinder 161 is connected through the connection line 163. Even pressure is applied to the internal fluid of the air cylinder 161 with respect to the pressing force transmitted from the member 130, and thus the support 120 is supported by the uniform repulsive force, thereby eliminating the unevenness of the pressing force of the upper pressing member 130. Will be.

아울러, 상기와 같은 원리에 의해 접합대상물(A)의 두께가 불균일한 경우에도 접합대상물(A) 전체에 균등한 압축력이 작용하도록 접합대상물(A)을 지지하는 것이 가능하게 된다. In addition, according to the principle described above, it is possible to support the bonding object A so that an even compressive force acts on the entire bonding object A even when the thickness of the bonding object A is uneven.

즉, 본 발명은 가압부재(130)의 가압력에 따라 완충부재(160)의 수용공간의 체적이 변경되면서 피스톤로드(162)의 높이를 조절하여 지지대(120)의 기울기를 조절하고, 가압부재(130)의 가압력에 따라 피스톤로드(162)의 높이가 조절된 상태에서 각각의 완충부재(160)들이 균일한 반발력으로 지지대(120)를 지지하므로 접합대상물(A)에 균일한 압축력이 인가되면서 우수한 확산접합 품질을 제공할 수 있게 된다.
That is, the present invention adjusts the inclination of the support 120 by adjusting the height of the piston rod 162 while changing the volume of the receiving space of the buffer member 160 in accordance with the pressing force of the pressing member 130, the pressing member ( In accordance with the pressing force of 130, the height of the piston rod 162 is adjusted, so that each of the buffer members 160 supports the support 120 with uniform repulsive force, so that a uniform compressive force is applied to the bonding object A. It is possible to provide diffusion bonding quality.

본 발명의 권리범위는 상술한 실시예에 한정되는 것이 아니라 첨부된 특허청구범위 내에서 다양한 형태의 실시예로 구현될 수 있다. 특허청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 누구든지 변형 가능한 다양한 범위까지 본 발명의 청구범위 기재의 범위 내에 있는 것으로 본다.The scope of the present invention is not limited to the above-described embodiment, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.

110:챔버, 120:지지대, 130:가압부재, 131:가압축, 140:단열재,
150:히터, 160:완충부재, 161:수용공간, 162:에어실린더, 163:피스톤로드,
164:연결라인, 170:바닥면, A:접합대상물110: chamber, 120: support, 130: pressure member, 131: compression, 140: heat insulating material,
150: heater, 160: buffer member, 161: accommodation space, 162: air cylinder, 163: piston rod,
164: connecting line, 170: bottom, A: joining object

Claims (4)

삭제delete 챔버;
상기 챔버 내에서 접합대상물의 하부를 지지하는 지지대;
상기 챔버 내에서 접합대상물의 상부에 압력을 인가하는 가압부재; 및,
내부 수용공간에 유체가 채워진 상태에서 상기 지지대의 하부에 배치되어 상기 가압부재에 의한 가압력을 지지하는 두 개 이상의 완충부재;를 포함하며,
상기 완충부재는 가압부재의 가압방향과 나란하게 배치되도록 바닥면에 설치되는 에어실린더와, 일단부가 지지대의 하부에 연결되고 타단부는 상기 에어실린더의 내부에서 길이방향으로 이동하는 피스톤로드를 포함하고,
상기 두 개 이상의 완충부재의 수용공간은 연결라인에 의해 연결되어 유체가 연통하는 것을 특징으로 하는 진공확산접합장치.chamber;
Support for supporting the lower portion of the bonding object in the chamber;
A pressing member for applying pressure to an upper portion of a bonding object in the chamber; And,
And at least two buffer members disposed under the support in a state where the fluid is filled in the inner receiving space to support the pressing force by the pressing member.
The shock absorbing member includes an air cylinder installed on the bottom surface so as to be disposed in parallel with the pressing direction of the pressing member, and a piston rod having one end connected to the lower part of the support and the other end moving longitudinally in the air cylinder. ,
Receiving space of the two or more buffer members are connected by a connection line vacuum diffusion bonding device, characterized in that the fluid communication. 제 2항에 있어서,
상기 챔버 내부에서 상기 지지대와 가압부재의 주변을 감싸는 단열재;와, 상기 단열재의 내부에서 발열하는 히터;를 더 포함하는 것을 특징으로 하는 진공확산접합장치.The method of claim 2,
Insulating material surrounding the surroundings of the support and the pressing member in the chamber; and a heater for generating heat in the heat insulating material; vacuum diffusion bonding device further comprising. 제 3항에 있어서,
상기 에어실린더는 단열재의 외부 공간에 배치되는 것을 특징으로 하는 진공확산접합장치. The method of claim 3, wherein
The air cylinder is a vacuum diffusion bonding device, characterized in that arranged in the outer space of the heat insulating material.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079604A (en) * 2002-04-04 2003-10-10 서왕식 The composition of improved materials in treating alcohol hangover and boosting an energy.
CN110993853A (en) * 2019-12-30 2020-04-10 郑州工程技术学院 Electric automobile battery protector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101034858B1 (en) * 2010-10-15 2011-05-17 한국기계연구원 Vacuum hot pressing diffusion bonding apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101034858B1 (en) * 2010-10-15 2011-05-17 한국기계연구원 Vacuum hot pressing diffusion bonding apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079604A (en) * 2002-04-04 2003-10-10 서왕식 The composition of improved materials in treating alcohol hangover and boosting an energy.
CN110993853A (en) * 2019-12-30 2020-04-10 郑州工程技术学院 Electric automobile battery protector
CN110993853B (en) * 2019-12-30 2022-11-25 深圳市元创新能源汽车技术服务有限公司 Electric automobile battery protector

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