KR100837436B1 - Board Inspection and Measurement Device - Google Patents

Abstract

The present invention relates to a substrate inspection and measurement device that can prevent the occurrence of velocity ripple due to the friction coefficient and to precisely control the position by transferring the substrate without contact or friction of the substrate in the substrate inspection region.

To this end, a loading part and an unloading part provided on an inspection table to raise the substrate to a predetermined height by using the air of the present invention, a process part provided between the loading part and the unloading part to inspect the substrate, the A substrate inspection and measurement apparatus comprising a transfer apparatus provided at the center portion of the inspection table for vacuum suction of a substrate and transfer from the loading portion to the process portion and the unloading portion, wherein the process portion has an air discharge portion at its periphery. And a plurality of preloaded pockets formed at a central portion thereof and having a atmospheric pressure portion formed between the air discharge portion and the vacuum suction portion so that the substrate floats and is preloaded.

Description

Substrate Inspection and Measurement Device {APPARATUS FOR INSPECTION AND MEASUREMENT OF SUBSTRATE}

1 is a perspective view of a substrate inspection and measurement device according to an embodiment of the present invention.

2 is a plan view of the substrate inspection and measurement apparatus of the present invention.

3 is an enlarged view of a part of a loading part and an unloading part of the substrate transfer apparatus of the present invention;

4 is a cross-sectional view taken along the line AA ′ of FIG. 2.

5 is a cross-sectional view taken along the line BB ′ of FIG. 2.

6 is an enlarged view of a portion “C” of FIG. 5.

<Description of the symbols for the main parts of the drawings>

1: inspection table

    10: loading part

    10 ': unloading part

         11: feed roller

         12: groove

         13: air discharge part

    20: process unit

         21: Preloaded pocket

             211: air discharge part

             212 vacuum suction unit

             213: atmospheric pressure

    30: transfer device

         31: guide

         32: linear motor

         33: pad support

         34: vacuum pad

         35: air bearing

         36: PZT Actuator

         37: block

    40: line scan camera

The present invention relates to a substrate inspection and measurement device, and more particularly, to prevent the occurrence of speed ripple due to the friction coefficient and to precisely control the position by transferring the substrate without contact or friction of the substrate in the substrate inspection area. It relates to a substrate inspection and measurement apparatus.

In general, Automatic Optical Inspection (AOI) is a flat panel display (FPD) substrate such as TFT LCD, PDP or silicon substrate (Silicon Substrate) pattern defect and marking or ball defect of semiconductor package. It is a device for detecting the back.

In other words, the flat panel display substrate may have scratches or various stains to detect defects such as scratches and various stains, and silicon substrates having patterns such as wiring or holes should detect pattern defects to improve reliability.

Such automatic optical inspection equipment (AOI) is an equipment that detects various defects that a user wants to find by applying a vision image processing algorithm after capturing an image of an inspection object using an optical lens and a CCD camera.

Substrate inspection and measurement apparatus using an automatic optical inspection equipment (AOI) is to investigate the defect on the surface of the substrate while transporting the large area substrate in the horizontal direction, it is provided with a substrate transfer device.

Conventional substrate inspection and measurement apparatus transfers the substrate using a plurality of rotating rollers provided to rotate while maintaining a predetermined interval on both sides of the inspection table.

By the way, the substrate transfer apparatus using a conventional rotating roller method is irrelevant when the size of the substrate is small, but the phenomenon that the substrate is sagging downward toward the center between the rotating rollers as the size of the substrate gradually increases This will occur.

Accordingly, there was a problem in that the vibration of the substrate is generated while the substrate is being transferred, and as the deflection of the substrate increases, there is a problem of scratch generation due to the connection between the substrate and the transfer table.

In addition, when the friction between the rotating roller and the substrate increases due to the greater force that the rotating roller supports the substrate, there is a problem that scratches occur in the substrate to cause damage to the substrate.

In addition, in the process area for inspecting the substrate, the substrate is transported by using the rotating roller, so that the substrate sags and a carriage coefficient is generated on the substrate by the driving of the rotating roller. Difficult to control the position has a disadvantage in that the accuracy of the position control is lowered.

Meanwhile, as another example of the substrate transfer apparatus, an apparatus for transferring a chuck or stage together with a substrate after loading the substrate using a separate chuck or gantry stage is used.

However, according to this method, the chuck or the stage having a large load must be moved, so that the motor capacity is increased as well as the equipment is complicated, and thus the maintenance cost of the equipment is increased.

An object of the present invention for solving the problems according to the prior art, by absorbing and transporting the substrate by a vacuum pad that is moved by the air bearing and linear motor drive without the transfer roller to the substrate inspection unit, thereby preventing the occurrence of friction coefficient to speed ripple It is to provide a substrate inspection and measurement apparatus that can prevent the occurrence and to improve the substrate transfer position control accuracy.

In addition, the present invention is provided with a plurality of pre-loading pockets formed with vacuum suction and air discharge portion and atmospheric pressure portion in the inspection unit to prevent the substrate from sag by floating the substrate, it is possible to prevent the occurrence of scratches of the substrate and vibration during transportation To provide a substrate inspection and measurement apparatus.

In addition, the present invention is to provide a substrate inspection and measurement apparatus that is provided with a PZT actuator on one side of the vacuum pad for transporting the substrate to improve the straightness during substrate transfer.

The loading part and the unloading part provided on the inspection table to raise the substrate to a certain height by using the air of the present invention for solving the technical problem is provided between the loading part and the unloading part to inspect the substrate And a conveying apparatus provided at a central portion of the inspection table to vacuum-suck the substrate to transfer the substrate from the loading portion to the processing portion and the unloading portion. The air discharge portion is formed in the vacuum suction portion is formed in the central portion and the atmospheric pressure portion formed between the air discharge portion and the vacuum suction portion is provided with a plurality of pre-loaded pockets to allow the substrate to float and preload.

Here, the conveying apparatus is connected to the linear motor to move in the longitudinal direction of the guide by driving the linear motor, the guide provided on the inspection table, the linear motor provided on the guide side, the linear motor It is configured to include a pad support portion, and a vacuum pad provided on the pad support portion to suck the substrate in a vacuum.

In addition, an air bearing may be further provided between the pad support and the guide to prevent the occurrence of friction.

The transfer apparatus may further include a PZT actuator for controlling a traveling path of the pad support part moving in the longitudinal direction of the guide.

The invention will become more apparent through the preferred embodiments described below with reference to the accompanying drawings. Hereinafter will be described in detail to enable those skilled in the art to easily understand and reproduce through embodiments of the present invention.

1 is a perspective view of a substrate inspection and measurement apparatus of the present invention, and FIG. 2 is a plan view of a substrate inspection and measurement apparatus of the present invention.

Referring to this, the present invention relates to an apparatus for transporting and inspecting a silicon substrate (hereinafter, referred to as a substrate) having a pattern such as a display substrate or a wiring or a hole by using rollers provided on both sides of an inspection table. 10) and the process unit 20 and the unloading unit and the transfer device 30 is configured.

Here, the loading unit 10 is a substrate to be inspected is seated, and the unloading unit is a substrate that has been inspected by the process unit 20 is transferred.

At this time, both sides of the loading unit 10 and the unloading unit 10 is provided with a feed roller 11 to transfer the substrate in the longitudinal direction on the inspection table ().

In addition, grooves 12 are formed on the inner upper surface of the feed roller 11 in a plurality of matrix directions as shown in FIG. 3, and at least one of the intersections of the matrix directions of the grooves 12 discharges air. The air discharge part 13 is formed.

Accordingly, the air discharged to the air discharge part 13 is supplied to the plurality of grooves 12 in the matrix direction, and the substrate is floated to a certain height by the air thus supplied.

That is, a phenomenon in which the substrate sags downward between the transfer rollers 11 in accordance with the trend of increasing the size of the substrate occurs, thereby causing a problem that the substrate is shaken during transfer. When installed, there is a problem that the friction force between the substrate and the transfer roller occurs.

Therefore, the present invention can prevent the occurrence of scratches or vibration and frictional force due to sagging of the substrate by raising the substrate to a certain height using the air inside the loading roller 10 and the transfer roller 11 of the unloading portion.

Here, devices and methods for supplying air to the air discharge part 13 are already known, and it is obvious that the height of the substrate should be controlled, so a detailed description thereof will be omitted.

Meanwhile, the process unit 20 inspects a substrate transferred from the loading unit 10, and the process unit 20 includes a plurality of line scan cameras and a plurality of preloaded pockets for photographing the substrate and inspecting for defects. 21 is provided.

4 is a cross-sectional view taken along the line AA ′ of FIG. 2, and is a cross-sectional view showing an example of the preload pocket 21 in detail.

Here, the preload pocket 21 has an air discharge part 211 formed around the vacuum suction part 212 and the air discharge part 211 and the vacuum suction part 212 formed in the inner central portion of the air discharge part 211. Including an atmospheric pressure portion 213 formed between, so that the floating and preload of the substrate is made.

That is, the air discharged from the air discharge unit 211 provided with only the air discharge unit 211 and the vacuum suction unit 212 is rapidly sucked into the vacuum suction unit 212, the pressure in the vacuum suction unit 212 Since a change occurs and the vacuum state is released, it is preferable to form an atmospheric pressure part 213 which maintains an atmospheric pressure state between the air discharge part 211 and the vacuum suction part 212 to prevent this.

In the conventional method, the process unit 20 also includes feed rollers on both sides, so that the substrate is drooped by the load between the rollers, and it is difficult to precisely control the speed ripple and position due to the friction coefficient.

On the other hand, the present invention is provided with a pre-loading pocket without applying a feed roller to the process unit 20 to float the substrate using air and vacuum and transfer the substrate using a vacuum pad to prevent vibration caused by the sag of the substrate In addition, the constant speed control of the substrate can be performed, thereby improving the reliability of the inspection.

On the other hand, the transfer device 30 is provided in the longitudinal direction in the central portion of the inspection table (1) to vacuum-adsorb the substrate to transfer from the loading portion 10 to the process portion 20 and the unloading portion.

FIG. 5 is a cross-sectional view taken along line BB ′ of FIG. 2, and FIG. 6 is an enlarged view of region “C” of FIG. 5, showing the transfer apparatus in detail.

5 and 6, the transfer device 30 includes a guide 31, a linear motor 32, a pad support 33, and a vacuum pad 34.

The guide 31 is provided in the longitudinal direction at the center of the inspection table across the loading portion 10, the processing portion 20 and the unloading portion, the inspection table 1 of the present invention is a precision stone according to a known technique Half is used.

In addition, as the linear motor 32 is provided on the side of the guide 31, a coreless linear motor or a coreless linear motor may be used, but the linear motor is limited thereto. But may be modified through various embodiments.

Moreover, the pad support part 33 is provided in the upper part of the guide 31, and moves to the front-back direction of the examination table 1 by the drive of the linear motor 32, The pad support part 33 and the linear motor 32 are shown. Is connected by block 37.

In addition, an air bearing 35 is provided between the pad support 33 and the guide 31.

That is, the pad support part 33 of the present invention is not directly in contact with the guide 31, and the friction force coefficient does not occur as the guide is spaced apart from the guide by the air bearing 35.

In addition, the vacuum pad 34 is provided on the pad support part 33 to suck the substrate in a vacuum.

In addition, the transfer device 30 preferably further includes a PZT actuator 36 for controlling the traveling path of the vacuum pad 34 of the pad support 33 moving in the longitudinal direction of the guide 31.

That is, since the straightness of the vacuum pad 34 on the pad support 33 moving in the longitudinal direction is not correct when the straightness of the guide 31 is not correct, there is a problem that the position of the substrate is not aligned correctly. Initially setting the drive range of the PZT actuator 36 improves substrate transfer straightness.

In addition, when the straightness of the substrate is not accurate as a result of the image analysis photographed by the process unit 20, it is preferable to control the driving of the PZT actuator 36 to immediately compensate for the straightness.

As the substrate inspection and measurement apparatus of the present invention transfers the substrate using only a single stage, the motor can be made lighter as compared to the apparatus for transferring the substrate using a gantry method or a large-capacity vacuum chuck. Can increase the efficiency.

In addition, since there is no integrated contact between the guide and the pad support or direct contact between the substrate and the roller in the process part, it is not influenced by the coefficient of friction, thereby increasing the life of the equipment and providing speed ripple control and position control by the coefficient of friction. Can improve the accuracy.

In addition, the substrate inspection and measurement apparatus of the present invention can be installed in a multi-layer structure according to the miniaturization.

That is, since the clean room needs to use the smallest space efficiently because the cost of the area is high, the space utilization can be increased by integrally forming the inspection apparatus for transferring the substrate in a multi-layered structure.

Hereinafter, the operation of the substrate inspection and measurement device of the present invention will be described with reference to FIGS. 1 to 6.

First, the substrate is loaded into the loading unit 10, and the substrate is sucked from the bottom using the vacuum pad 34.

At this time, the air is output to the air discharge unit 13 formed in the loading unit 10 to allow the substrate to rise to a certain height. Accordingly, vibration is prevented from occurring while the substrate is sag or transported downward.

Subsequently, the linear support 32 is driven to move the pad support part 33 in the longitudinal direction of the guide 31 so that the substrate loaded on the vacuum pad 34 is in a state of being raised to a certain height and the process part 20 To be transported).

On the other hand, the substrate on the vacuum pad 34 is transferred to the process unit 20 is inspected by the line scan camera 30.

At this time, the process unit 20 in which the inspection is in progress is provided with a pre-loading pocket 21, the substrate is floating while maintaining a constant gap, and the injured substrate is driven to drive the air bearing 35 and the linear motor 32 By the transfer using the pad support 33 moving along the guide 31, it is possible to precisely position control without generating a friction coefficient.

Subsequently, the inspection-processed substrate is transferred to the unloading unit 20 in the process unit 20.

As described above, the present invention absorbs and transfers the substrate to the substrate inspection unit using a vacuum pad that is moved by air bearing and linear motor driving without a transfer roller, thereby preventing the occurrence of friction coefficient and preventing the occurrence of speed ripple and controlling the substrate transfer position. There is an advantage to improve the precision.

In addition, the present invention is provided with a plurality of pre-loading pockets formed with vacuum suction and air discharge portion and atmospheric pressure portion in the inspection unit to prevent the substrate from sag by floating the substrate, it is possible to prevent the occurrence of scratches of the substrate and vibration during transportation There is an advantage to that.

In addition, the present invention is provided with a PZT actuator for correcting when the straightness of the guide is not accurate or the straightness of the vacuum pad for transporting the substrate due to the process error is reduced, improve the substrate transfer straightness to improve the inspection accuracy There is an advantage that can be improved.

Although the present invention has been described with reference to the accompanying drawings, it will be apparent to those skilled in the art that many different and obvious modifications are possible without departing from the scope of the invention from this description. Therefore, the scope of the invention should be construed by the claims described to include many such variations.

Claims (4)

A loading portion 10 and an unloading portion 10 ′ provided on the inspection table to raise the substrate to a predetermined height using air, A process unit 20 provided between the loading unit 10 and the unloading unit 10 'to inspect the substrate; Including a transfer device 30 is provided in the central portion of the inspection table 1 to transfer the vacuum suction to the substrate from the loading unit 10 to the process unit 20 and the unloading unit 10 ' In the board | substrate inspection and measurement apparatus comprised, The process unit 20; A plurality of preloaded pockets 21 are formed around the air discharge unit 211, the vacuum suction unit 212 is formed in the center and the atmospheric pressure unit 213 is formed between the air discharge unit 211 and the vacuum suction unit 212 A substrate inspection and measurement apparatus comprising a) to allow the substrate to float and preload. The method of claim 1, The transfer device 30; A guide 31 provided on the examination table 1, A linear motor 32 provided at the side of the guide 31; A pad support part 33 connected to the linear motor 32 through a block 37 to move in the longitudinal direction of the guide 31 by driving the linear motor 32, and And a vacuum pad (34) provided above the pad support (33) to vacuum suction the substrate. The method of claim 2, Substrate inspection and measurement apparatus, characterized in that the air support (35) is further provided between the pad support (33) and the guide (31) to prevent the occurrence of friction. The method of claim 2 or 3, The transfer device 30; And a PZT actuator (36) for controlling the traveling path of the pad support (33) moving in the longitudinal direction of the guide (31).

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