KR100726319B1 - 전구체 용액, 전구체 용액의 제조 방법, pztn 복합 산화물, pztn 복합 산화물의 제조 방법, 압전 소자, 잉크제트 프린터, 강유전체 캐패시터, 강유전체 메모리 - Google Patents
전구체 용액, 전구체 용액의 제조 방법, pztn 복합 산화물, pztn 복합 산화물의 제조 방법, 압전 소자, 잉크제트 프린터, 강유전체 캐패시터, 강유전체 메모리 Download PDFInfo
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- KR100726319B1 KR100726319B1 KR20050086989A KR20050086989A KR100726319B1 KR 100726319 B1 KR100726319 B1 KR 100726319B1 KR 20050086989 A KR20050086989 A KR 20050086989A KR 20050086989 A KR20050086989 A KR 20050086989A KR 100726319 B1 KR100726319 B1 KR 100726319B1
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- 150000004703 alkoxides Chemical class 0.000 claims abstract description 53
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- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 9
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- 239000000463 material Substances 0.000 description 3
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 3
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- DINQVNXOZUORJS-UHFFFAOYSA-N butan-1-olate;niobium(5+) Chemical compound [Nb+5].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] DINQVNXOZUORJS-UHFFFAOYSA-N 0.000 description 2
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- YMJMHACKPJBWMC-UHFFFAOYSA-N 2-methylpropan-1-olate;zirconium(4+) Chemical compound [Zr+4].CC(C)C[O-].CC(C)C[O-].CC(C)C[O-].CC(C)C[O-] YMJMHACKPJBWMC-UHFFFAOYSA-N 0.000 description 1
- GRWPYGBKJYICOO-UHFFFAOYSA-N 2-methylpropan-2-olate;titanium(4+) Chemical compound [Ti+4].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-] GRWPYGBKJYICOO-UHFFFAOYSA-N 0.000 description 1
- BGGIUGXMWNKMCP-UHFFFAOYSA-N 2-methylpropan-2-olate;zirconium(4+) Chemical compound CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BGGIUGXMWNKMCP-UHFFFAOYSA-N 0.000 description 1
- CCJZHCZMNGUOCA-UHFFFAOYSA-L 4-cyclohexylbutanoate;lead(2+) Chemical compound [Pb+2].[O-]C(=O)CCCC1CCCCC1.[O-]C(=O)CCCC1CCCCC1 CCJZHCZMNGUOCA-UHFFFAOYSA-L 0.000 description 1
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- OAJHWYJGCSAOTQ-UHFFFAOYSA-N [Zr].CCCCCCCCO.CCCCCCCCO.CCCCCCCCO.CCCCCCCCO Chemical compound [Zr].CCCCCCCCO.CCCCCCCCO.CCCCCCCCO.CCCCCCCCO OAJHWYJGCSAOTQ-UHFFFAOYSA-N 0.000 description 1
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- HOQPTLCRWVZIQZ-UHFFFAOYSA-H bis[[2-(5-hydroxy-4,7-dioxo-1,3,2$l^{2}-dioxaplumbepan-5-yl)acetyl]oxy]lead Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HOQPTLCRWVZIQZ-UHFFFAOYSA-H 0.000 description 1
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- BSDOQSMQCZQLDV-UHFFFAOYSA-N butan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] BSDOQSMQCZQLDV-UHFFFAOYSA-N 0.000 description 1
- JZIBIUMUMQLPTN-UHFFFAOYSA-N butan-2-olate niobium(5+) Chemical compound [Nb+5].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] JZIBIUMUMQLPTN-UHFFFAOYSA-N 0.000 description 1
- HWCXFDGMZPRMRX-UHFFFAOYSA-N butan-2-olate;titanium(4+) Chemical compound CCC(C)O[Ti](OC(C)CC)(OC(C)CC)OC(C)CC HWCXFDGMZPRMRX-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- -1 carboxylate salt Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
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- UARGAUQGVANXCB-UHFFFAOYSA-N ethanol;zirconium Chemical compound [Zr].CCO.CCO.CCO.CCO UARGAUQGVANXCB-UHFFFAOYSA-N 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
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- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- IJCCNPITMWRYRC-UHFFFAOYSA-N methanolate;niobium(5+) Chemical compound [Nb+5].[O-]C.[O-]C.[O-]C.[O-]C.[O-]C IJCCNPITMWRYRC-UHFFFAOYSA-N 0.000 description 1
- ITNVWQNWHXEMNS-UHFFFAOYSA-N methanolate;titanium(4+) Chemical compound [Ti+4].[O-]C.[O-]C.[O-]C.[O-]C ITNVWQNWHXEMNS-UHFFFAOYSA-N 0.000 description 1
- IKGXNCHYONXJSM-UHFFFAOYSA-N methanolate;zirconium(4+) Chemical compound [Zr+4].[O-]C.[O-]C.[O-]C.[O-]C IKGXNCHYONXJSM-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- CGAFRZVAXRQUEI-UHFFFAOYSA-N niobium(5+);propan-1-olate Chemical compound [Nb+5].CCC[O-].CCC[O-].CCC[O-].CCC[O-].CCC[O-] CGAFRZVAXRQUEI-UHFFFAOYSA-N 0.000 description 1
- ZTILUDNICMILKJ-UHFFFAOYSA-N niobium(v) ethoxide Chemical compound CCO[Nb](OCC)(OCC)(OCC)OCC ZTILUDNICMILKJ-UHFFFAOYSA-N 0.000 description 1
- 229940049964 oleate Drugs 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- XPGAWFIWCWKDDL-UHFFFAOYSA-N propan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCC[O-].CCC[O-].CCC[O-].CCC[O-] XPGAWFIWCWKDDL-UHFFFAOYSA-N 0.000 description 1
- ZGSOBQAJAUGRBK-UHFFFAOYSA-N propan-2-olate;zirconium(4+) Chemical compound [Zr+4].CC(C)[O-].CC(C)[O-].CC(C)[O-].CC(C)[O-] ZGSOBQAJAUGRBK-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
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- C01G33/00—Compounds of niobium
- C01G33/006—Compounds containing niobium, with or without oxygen or hydrogen, and containing two or more other elements
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- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
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- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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Abstract
Description
Claims (19)
- Pb, Zr, Ti 및 Nb를 구성 원소로 하는 PZTN 복합 산화물을 졸겔법에 의해 형성하기 위한 전구체 용액의 제조 방법으로서,카르복실산납을, 알콕시기를 갖는 유기 용매에 용해하여, 제1 용액을 형성하는 공정과,상기 제1 용액을 가열 처리하여, 상기 카르복실산납의 결정수를 제거함과 함께, 그 카르복실산납과 상기 알콕시기를 갖는 유기 용매와의 배위자 치환 반응에 의해 납알콕시드를 형성하여, 그 납알콕시드를 포함하는 제2 용액을 형성하는 공정과,상기 제2 용액에, Zr, Ti 및 Nb로부터 선택되는 적어도 1종의 금속 알콕시드를 혼합하여, Pb, Zr, Ti 및 Nb의 각각의 금속 알콕시드를 포함하는 제3 용액을 형성하는 공정과,상기 제3 용액에 물을 가하여, 상기 금속 알콕시드의 가수 분해·축합을 행하여, PZTN 복합 산화물의 전구체를 포함하는 제4 용액을 형성하는 공정을 포함하는 전구체 용액의 제조 방법.
- 제1항에 있어서,상기 제3 용액에서, Nb의 알콕시드의 양은, Zr, Ti 및 Nb의 알콕시드의 합계 1몰에 대하여, 0.05∼0.3몰인 전구체 용액의 제조 방법.
- 제2항에 있어서,상기 제3 용액에서, Nb의 알콕시드의 양은, Zr, Ti 및 Nb의 알콕시드의 합계 1몰에 대하여, 0.1∼0.2몰인 전구체 용액의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 유기 용매는, 탄소수가 3 내지 12인 알콕시기를 갖는 유기 용매인 전구체 용액의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 유기 용매는, 아세트산의 비점보다 높은 비점을 갖는 전구체 용액의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 제3 용액에 가해지는 물의 양은, 상기 PZTN 복합 산화물 1몰에 대하여, 0.0001∼0.01몰인 전구체 용액의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 제4 용액에, 가수 분해·축합 반응을 억제하기 위한 안정화제가 더 첨가되는 전구체 용액의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항의 전구체 용액의 제조 방법에 의해 얻어지며, Pb, Zr, Ti 및 Nb의 금속 알콕시드의 축합물을 포함하는 전구체 용액.
- 제8항에 있어서,Nb는, Zr, Ti 및 Nb의 합계 1몰에 대하여, 0.05∼0.3몰의 비율로 포함되는 전구체 용액.
- 제9항에 있어서,Nb는, Zr, Ti 및 Nb의 합계 1몰에 대하여, 0.1∼0.2몰의 비율로 포함되는 전구체 용액.
- 제8항에 있어서,가수 분해·축합 반응을 억제하기 위한 안정화제를 더 포함하는 전구체 용액.
- 제8항의 전구체 용액을 이용하여 형성된 PZTN 복합 산화물로서,일반식 Pb(ZrxTiyNbz)O3으로 나타내어지며, x+y+z=1, 및 0.05≤z≤0.3인 PZTN 복합 산화물.
- 제12항에 있어서,0.1≤z≤0.2인 PZTN 복합 산화물.
- 제8항의 전구체 용액을, 도전막 상에 도포한 후, 열처리하는 것을 포함하는 PZTN 복합 산화물막의 제조 방법.
- 제14항에 있어서,상기 도전막은, 백금계 금속으로 이루어지는 PZTN 복합 산화물막의 제조 방법.
- 삭제
- 삭제
- 삭제
- 삭제
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