KR100659479B1 - A reaction force treatment system for stage apparatus - Google Patents

Abstract

Provided is a reaction force processing system for a stage device in which a high positioning performance that is stable at any position of the movable portion is obtained.

In the stage apparatus provided with the base 20 installed on the fixed floor through the damping means, and the X slider 25 configured to be moved in at least one axial direction by the linear motor 26 on the base, the X slider is driven. A reaction force processing system for suppressing vibration of a base due to the reaction force, the plurality of reaction force actuators (21-1 to 21-4) disposed on a fixed bottom side to apply a thrust in a direction of eliminating the reaction force with respect to the base. The thrust command value F is applied to the linear motor, and the thrust command value is adjusted to the thrust command value F through the gain adjustment unit 15 having a variable gain for the plurality of reaction force processing actuators. The master was provided with the control system 10.

Stage, reaction, processing, thrust, slider

Description

A reaction force treatment system for stage apparatus

1 is a block diagram showing a configuration example according to an embodiment of a reaction force processing system according to the present invention.

FIG. 2 is a diagram showing an arrangement example of a base as a structure, an X slider as a movable part, and a reaction force actuator combined with these, when employing the reaction force processing system shown in FIG. 1.

FIG. 3 is a characteristic diagram showing a relationship between a slider position and a gain in order to explain gain adjustment in the gain adjustment unit shown in FIG. 1.

4 is a view showing a configuration example of a vibration control device proposed by the present inventors and to which the present invention is employed.

FIG. 5 is a view of the reaction force actuator shown in FIG. 4 as viewed from the arrow I direction in FIG. 4.

6 is a view showing an example of a conventional vibration control device.

[Description of the code]

10: control system

15: gain adjustment unit

16: first adjusting unit

17: second adjusting unit

20: base

21-1 to 21-4: Reaction Force Actuator

25: X slider

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a stage apparatus requiring high precision positioning. In particular, the present invention relates to a method for preventing deterioration of positioning accuracy due to reaction force caused by driving of a stage using a linear motor or the like as a drive source. A reaction force processing system for a stage device.

BACKGROUND ART Linear motors are often used as a drive source of a stage device that requires high precision positioning. The structure (base) on which the stage as the movable portion is placed is provided on the floor via vibration damping means in order to damp vibrations from the floor where the stage device is installed. For this reason, when the structure is driven in a very unstable state, when the movable portion is driven by the driving force, a reaction force of the same magnitude as the driving force occurs in the direction opposite to the driving direction. In the state where this reaction force exists, since the structure vibrates and the vibration is transmitted to the stage, positioning of the stage cannot be performed with high accuracy.

For this reason, in order to perform positioning of the stage with high precision, it is necessary to perform reaction force processing for removing reaction force.

6 shows a schematic diagram of a conventional vibration control apparatus. As shown in FIG. 6, the vibration control device 50 is roughly composed of a drive device 57, a control device 60, and an integral compensator 65. The drive device 57 is comprised by the actuator 51, the target 55, the displacement sensor 56, the acceleration sensor 59, and the bottom plate 58 substantially.

The actuator 51 has a pair of linear motors 52 and 53. Each of the linear motors 52 and 53 includes linear motor movers 52a and 53a having permanent magnets and linear motor stators 52b and 53b having coils. The linear motor movers 52a and 53a are formed with the connecting plate 54 interposed therebetween. The linear motor movers 52a and 53a move to a predetermined position to position the target 55. The target 55 is formed in the linear motor mover 52a. The displacement sensor 56 measures the detection surface of the target 55 and outputs the measurement result to the position compensator 61. The acceleration sensor 59 is attached to the bottom plate 58 supporting the linear motor stators 52b and 53b. The acceleration sensor 59 measures the vibration of the structure or the floor and outputs the measurement result to the integral compensator 65.

The control apparatus 60 is comprised by the position compensator 61, the current amplifier 62, the induction voltage calculator 63, and the gain compensator 64 substantially. The controller 60 performs an appropriate calculation process on the basis of the vibration value input to the integral compensator 65 and the displacement value from the displacement sensor 56 to excite the current amplifier 62 so as to excite the linear motor stator ( By passing a current through the coils of 52b and 53b, the linear motor movers 52a and 53a are positioned in predetermined positions (see Patent Document 1, for example).

[Patent Document 1] Japanese Patent Publication No. 2003-9494

However, since the conventional vibration control apparatus uses the linear motor movers 52a and 53a used for positioning, when the reaction force is processed, the influence of the driving of the linear motor movers 52a and 53a is affected. Cannot receive sufficient reaction force processing. Moreover, since the vibration of a structure cannot be fully controlled, there existed a problem that positioning could not be performed with high precision. In addition, the conventional vibration control device requires a displacement sensor 56, an acceleration sensor 59, an induction voltage calculator 63, and an integral compensator 65, so that the cost of the vibration control device increases and the device itself. There was a problem that grows.

Then, the subject of this invention is providing the reaction force processing system for stage apparatuses in which the stably high positioning performance which a movable part is obtained in any position in a stage apparatus provided with reaction force processing mechanism is obtained.

The present invention is directed to a stage apparatus including a structure provided on a fixed floor through a vibration damping means, and a movable portion configured to move in at least one axial direction by a drive source on the structure. A reaction force processing system for suppressing vibration of the structure due to generated reaction force, comprising: thrust generating means provided on the fixed bottom side to give a thrust in a direction to erase the reaction force against the structure; And a control means for giving a thrust command value to the drive source and giving the thrust command value to the thrust generating means the next adjusted thrust command value through a gain adjusting means having a variable gain. do.

In this reaction force processing system, the gain adjusting means selects the gain A1 as the gain when the movable portion is being accelerated or decelerated, and the gain as the gain when running at a constant speed. And a first adjustment unit for selecting A2 (where A1> A2).

The reaction force processing system further includes position detecting means for detecting the position of the movable portion, wherein the movable portion has a preset stroke range around the reference point, and the gain adjusting means is further selected by the gain A1. And a second adjusting portion that makes the gain A1 variable according to the position of the movable portion, the second adjusting portion having a first inclination on the positive side of the movable portion with the reference point as the boundary. The gain A1 is changed on the basis of the first straight line having a multiplier, and the changed gain is multiplied by the thrust command value to be output, while the negative side of the movable part on the reference point has a second slope. The gain A1 is changed based on a second straight line, and the changed gain is multiplied by the thrust command value to be output.

The drive source is a linear motor, and the thrust generating means is any one of a linear motor, a voice coil motor, and a servo motor.

In this reaction force processing system, further, a first distance in a vertical direction from a first position to which a force is applied when the movable portion is driven to a center of gravity of the movable portion, and the thrust from the first position It is characterized in that it is comprised so that the 2nd distance with respect to the perpendicular direction to the 2nd position to which a force will be applied may become equal when a generating means is driven.

In this reaction force processing system, the thrust generating unit further includes at least two thrust generating units in the structure, and when the thrust of the drive source is F, the second adjusting unit is provided with respect to the at least two thrust generating units. And distributing the thrust F according to the center position of the movable part and outputting the distributed thrust command value as the adjusted thrust command value.

Best Mode for Carrying Out the Invention

The present inventors have proposed a vibration control device that solves the problems of the conventional vibration control device described above. 4 and 5, this vibration control device will be described.

4 is a schematic view of a vibration control device, and FIG. 5 is a schematic view of a reaction force processing actuator in the I direction shown in FIG. 4. The Y1 and Y2 directions shown in FIG. 4 represent the vertical direction, and the X1 and X2 directions represent the direction orthogonal to the Y1 and Y2 directions.

In FIG. 4, the vibration control device 30 is constituted by the movable device 41, the support member 36, the reaction force actuator 42, the control means 43, and the gain compensator 44. It is.

First, the structure of the movable apparatus 41 is demonstrated. The movable device 41 is comprised by the damping means 32A, 32B, the base 33, and the drive stage 35. As shown in FIG. The base 33, which is a structure, has a protrusion 34 and is provided on the bottom 31 via vibration damping means 32A and 32B. The damping means 32A is for damping vibrations in the Y1 and Y2 directions from the bottom, and the damping means 32B is for damping vibrations in the X1 and X2 directions from the bottom. The vibration damping means 32A and 32B are passive vibration dampers having a passive vibration damping function by a combination of a spring and a dash pot. This passive vibration damping device has various forms, such as a combination of a spring and a dashpot by a plate- or coil-shaped spring material, a combination of an air spring and a dashpot, and a rubber material alone.

On the base 33, the drive stage 35 which is a movable part which uses a linear motor (not shown) as a drive source is formed in the state which can move to X1, X2 direction. 4A shows the position of the center of gravity (center of gravity) (henceforth center 35A) of the drive stage 35 which is a movable part, and 35B which is a 1st position is the drive stage 35 which is a movable part. ) Is a position at which a force is applied (hereinafter referred to as position 35B). In addition, H1 which is the 1st distance shown in FIG. 4 has shown the distance (henceforth distance H1) with respect to the vertical direction (Y1, Y2 direction) from the center 35A to the position 35B.

The reaction force processing means is constituted by the reaction force processing actuator 42, the control means 43, and the gain compensator 44. The reaction force actuator 42 will be described below. In addition, 38B which is the 2nd position shown in FIG. 4 is a position to which a force is applied when the linear motor mover 38 is driven by energizing the coil of the linear motor stator 37 (henceforth, it is called position 38B). ), And H2, which is the second distance, represents a distance (hereinafter referred to as distance H2) in the vertical direction from the position 38B to the position 35B.

The reaction force actuator 42 is composed of a linear motor stator 37 and a linear motor mover 38. When the driving stage 35 is driven, the reaction force processing actuator 42 directly pushes the base 33 in the driving direction to eliminate the reaction force generated in the direction opposite to the driving direction, thereby preventing vibration of the base 33. It is to suppress.

The linear motor stator 37 is formed above the support member 36 formed integrally with the bottom 31 in FIG. 4. The linear motor mover 38 is coupled to the linear motor stator 37 in a state capable of being driven relative to the linear motor stator 37. In addition, in the linear motor stator 37 and the linear motor mover 38, the distance H2 with respect to the vertical direction (Y1, Y2 direction) from the position 38B to the position 35B is equal to the distance H1. It is formed in the same position.

In order to eliminate reaction force, the moment M1 of the drive stage 35 and the moment M2 of the base 33 may cancel each other. Here, in the configuration in which the distance H2 is equal to the distance H1, the moment M1 of the drive stage 35 and the moment M2 of the base 33 when the drive stage 35 is driven. Describe the relationship. In addition, 33A shown in FIG. 4 has shown the center of the base 33 which is a structure (henceforth a center 33A), H3 is the perpendicular direction Y1 from the position 35B to the center 33A. , The distance in the Y2 direction (hereinafter referred to as distance H3).

The force moving in the left direction in FIG. 4 is made a positive value, and the force moving in the right direction in FIG. 4 is made a negative value. F1 is a driving force generated when the driving stage 35 is driven (hereinafter referred to as driving force F1), -F1 is called a reaction force generated when the driving stage 35 is driven (hereinafter referred to as reaction force (-F1) ), F2 represents a driving force (hereinafter referred to as driving force F2 for reaction force processing) for performing reaction force processing by the reaction force processing actuator 42.

The moment M1 of the drive stage 35 is shown in Equation 1 below, and the moment M2 of the base 33 is shown in Equation 2 below.

M1 = F1 × H1

M2 = -F1 × H3 + F2 × (H2 + H3)

Since the driving stage 35 is influenced by the driving force F1 when the driving stage 35 is driven, the moment M1 is expressed by the above expression (1). Since the base 33 is influenced by the reaction force (-F1) generated when the drive stage 35 is driven and the reaction force driving force F2 by the reaction force processing actuator 42, the moment M2 is It is represented by Equation 2 above. Since the reaction force driving force F2 applies a force having the same magnitude as the driving force F1 to the base 33, the relationship of F1 = F2 is established.

Therefore, by substituting F1 into F2 of Equation 2, Equation 2 can be expressed as Equation 3 below.

M2 = F1 × H2

In order to react reaction force (-F1), since moment M1 and moment M2 cancel each other, the relationship shown by following formula (4) may be satisfied. That is, if the result of subtracting the equation 2 from the equation (1) is 0, the reaction force (-F1) can be subjected to the reaction force process.

M1-M2 = 0

Substituting Equation 1 and Equation 3 into Equation 4 results in Equation 5 below, and it can be seen that reaction force (-F1) can be processed in the case of H1 = H2.

F1 × (H1-H2) = 0

Therefore, as described above, the reaction force generated when the drive stage 35 is driven by forming the reaction force actuator 42 at the position in the vertical direction (Y1, Y2 direction) where the relationship H1 = H2 is established. The reaction force (-F1) can be reacted by the reaction force actuator 42.

The following formula (6) is an expression representing the force. F is force, m is mass (weight), and a is acceleration.

F = m

Also, in general, the weight of the base 33 of the vibration control device 30 is considerably heavy compared to the weight of the drive stage 35. When F is constant from the above expression (6), the larger the m, the smaller the required acceleration a may be. Therefore, the reaction force processing actuator 42 can suppress the vibration of the base 33 by applying the reaction force of reaction force (-F1) by applying a small acceleration to the base 33.

Next, with reference to FIG. 4, the control means 43 is demonstrated. The control means 43 is connected to the drive stage 35 and the gain compensator 44 in a state capable of outputting the same drive signal. The control means 43 generates a drive signal only based on the drive command value, outputs the same drive signal to the reaction force processing actuator 42 and the drive stage 35, and generates the reaction force actuator 42 and the drive stage 35. This is for controlling the driving of the.

The gain compensator 44 is for compensating the drive signal from the control means 43, and the compensated drive signal is output to the linear motor stator 37. The linear motor stator 37 drives the linear motor mover 38 based on the compensated drive signal.

In this way, by providing the control means 43 for generating a drive signal based only on the drive command value (thrust command value), the configuration of the vibration control device 30 can be simplified, so that the size of the vibration control device 30 can be reduced. There is a number.

As described above, by installing the reaction force processing actuator 42 which pushes the base 33 directly in the driving direction of the drive stage 35 to perform the reaction process, in the vertical direction (Y1, Y2 direction) position where H1 = H2. The reaction force (-F1) generated when the drive stage 35 is driven is not influenced by the drive stage 35, and the vibration of the base 33 is sufficiently suppressed by the reaction force processing actuator 42 to drive the drive force. The positioning of the stage 35 can be performed with high precision.

In principle, as described above, if the same thrust command value as when the drive stage 35 is driven by the linear motor is given to the reaction force processing mechanism, the force is canceled, and vibration of the base 33 will be suppressed. In practice, however, the performance changes due to the tension of the cable bearer. A cable bear means that it is necessary to connect between the drive stage 35 which is a movable part, and a fixed part with a signal line, and is a flexible cable which comprises this signal line. Since the tension of the cable bear changes depending on the position of the movable portion, the vibration control alone causes variations in positioning performance due to the position of the movable portion.

With reference to FIGS. 1-3, embodiment of the reaction force processing system for stage apparatuses which concerns on the said point is demonstrated. The reaction force processing system according to the present embodiment adopts the principle of the vibration control device described in Figs. 4 and 5, and the reaction force processing actuator (thrust generating portion) described in Fig. 4 is a linear motor, a voice coil motor, and a servo motor. One is used (n is an integer of 2 or more, where n = 4). That is, as shown in FIG. 2, in the case of the stage apparatus provided with the base (structure) 20 and the X slider (driving stage) 25 driven on the base 20 in the X-axis direction, four Reaction force actuators 21-1 to 21-4 are provided at positions adjacent to the four corner portions of the base 20. And when there are two reaction force processing actuators, what is necessary is just to be provided between reaction force processing actuators 21-1 and 21-2 and between reaction force processing actuators 21-3 and 21-4.

As described with reference to FIG. 4, the reaction force processing actuators 21-1 to 21-4 are for imparting a thrust to the base 20 in a direction to eliminate the reaction force generated when the X slider 25 is driven. It is installed through the support member on the floor. On the other hand, the base 20 is installed in the fixed bottom through vibration damping means acting in the X-axis direction and the Y-axis direction. As a drive source of the X slider 25, a linear motor is used, for example. In the case of a linear motor, needless to say, for example, a position sensor by a combination of a linear scale and a sensor head is combined, but the position sensor is not limited to this. The X slider 25 has a preset stroke range around the reference point.

A control system as shown in FIG. 1 is provided in order to give a thrust command value to the drivers for the four reaction force processing actuators 21-1 to 21-4 and the linear motor driver which drive the X slider 25 as mentioned above.

In Fig. 1, a drive signal is given from the driver 27 to the linear motor 26 for the X slider, and from the drivers 22-1 to 22-4 to the reaction force actuators 21-1 to 21-4. Each drive signal is given.

The four reaction force actuators 21-1 to 21-4 and the control system 10 of the linear motor 26 as described above provide the thrust command value F with respect to the driver 27. 22-1 to 22-4), the thrust command value F is given to the thrust command value adjusted after the gain adjusting unit 15. In the following, the thrust command value given to the thrust command value F and the drivers 22-1 to 22-4 will be distinguished from the output given to the driver 27 by being called the adjusted thrust command value.

In detail, the vibration control apparatus in this embodiment is provided with the control system 10 instead of the control means 43 and the gain compensator 44 demonstrated in FIG. The control system 10 amplifies the position detection signal from the position sensor described above by the amplifier 28 and calculates and calculates the difference between the position detection value and the position detection value of the waveform shaping and the amplifier. 12, the gain adjusting unit 15 is included. The amplifier 12 outputs the thrust command value F for the linear motor 26 to the driver 27 based on the difference signal from the calculator 11.

The gain adjusting unit 15 has a first adjusting unit 16 and a second adjusting unit 17. When the X slider 25 is accelerating or decelerating, the first adjustment unit 16 gives gain A1 to the second adjustment unit 17 as gain, and gain A2 as gain when driving at a constant speed. A1> A2 is given to the second adjusting unit 17. The first adjusting unit 16 receives an output unit (not shown) that outputs signals representing gains A1 and A2, and an acceleration detector 16-1 that detects acceleration by receiving a thrust command value from the amplifier 12. And a switching device 16-2 that switches the gains A1 and A2 to the second adjustment unit 17 according to the result of the calculation, that is, during acceleration or deceleration and during constant speed travel.

The second adjustment unit 17 receives the position detection signal from the thrust command value F and the position sensor, and varies the gain A1 according to the position of the X slider 25 when the X slider 25 is being accelerated or decelerated. It is done. In particular, as shown in FIG. 3, the second adjustment unit 17 is configured based on the first straight line GL1 having the first slope on the plus side of the X slider 25 with the reference point as the boundary of the X slider 25. The gain A1 changed in accordance with the position is multiplied by the thrust command value F, and output, while on the negative side of the X slider 25 at the reference point, the X slider is based on the second straight line GL2 having the second slope. The gain A1 changed in accordance with the position of (25) is multiplied by the thrust command value F and output. The reference point is, for example, the middle point of the stroke range in the X slider 25, and this is the zero point.

According to such a structure, the 2nd adjustment part 17 outputs the thrust command value adjusted based on the gain A1 which is a variable value when the X slider 25 is accelerating or decelerating, and to the gain A2 which is a fixed value when it is driving at a constant speed. Outputs thrust command value adjusted accordingly.

As is evident from the above description, the reaction force processing system is a reaction force processing actuator (adjusted thrust command value that is obtained by multiplying a certain gain A by the thrust command value F to the linear motor 26 for the X slider 25). 21-1 to 21-4), the following corrections are made to the thrust command value F so as to have stable performance at any place within the movable range of the X slider 25.

1. The X slider 25 switches the gain during acceleration or deceleration and during constant speed travel. This is because when the thrust command value is placed in the reaction force processing system at all times, the oscillator may oscillate when the X slider 25 is stopped at a certain position. Therefore, it is necessary to lower the gain or interrupt the thrust command during acceleration or deceleration. Because there is. In addition, after the acceleration / deceleration command of the X slider 25 becomes zero, the thrust command value to the X slider 25 is still slightly output due to the shaking of the base 20 or the like. The thrust setpoint is put into the actuator.

2. The gain A is changed by the position which bordered on the zero point of the X slider 25. As shown in FIG.

For example, in the stroke range of -70 mm to +70 mm of the X slider 25, the two straight lines which define a gain with 0 as a reference point have different inclinations, respectively. This is because, as described above, the X slider 25 is affected by disturbance due to tension of the cable bear, etc., during the traveling. Therefore, the first and second inclinations in the first and second straight lines GL1 and GL2 in FIG. 3, for example, actually run the X slider 25 to perform a repeating motion test, and set an optimum value in advance. It is desirable to put it.

In this embodiment, further, the thrust distribution in the four reaction force processing actuators 21-1 to 21-4 is performed in accordance with the center position of the X slider 25, which will be described below. .

Each specification shown in FIG. 2 is defined as follows.

L1: Distance in the Y direction from the center position of the X slider 25 to the reaction force actuators 21-1 and 21-2.

L2: Distance in the Y direction from the center position of the X slider 25 to the reaction force actuators 21-3 and 21-4.

LL1: Y-direction distance from the home position set to the base 20 to the reaction force actuators 21-1 and 21-2.

LL2: Y-direction distance from the home position set to the base 20 to the reaction force actuators 21-3 and 21-4.

Ypos: Y-direction position of the X slider 25 from the origin position set on the base 20

F: Thrust command value given to X slider 25

F1: Thrust command value given to reaction force processing actuators 21-1 and 21-2.

F2: Thrust command value given to reaction force processing actuators 21-3 and 21-4

From Fig. 2, the following equations (7) and 8 are established.

L1 = LL1 + Ypos

L2 = LL2-Ypos

The balance of the moments of the reaction force actuators viewed from the center position of the X slider 25 is expressed by the following expression (9).

F1 × L1 = F2 × L2

Since the thrust of the X slider 25 is equal to the total thrust of the reaction force processing actuator, the following equation (10) holds.

F1 + F2 = F

From the above, the thrust command value to the reaction force processing actuator based on the thrust command value F of the X slider 25 is calculated as follows.

Where L12 = L2 / L1

The respective thrust command values F11, F12, F21, and F22 to the four reaction force processing actuators 21-1 to 21-4 are as follows.

F11 = 0.5 × F1, F12 = 0.5 × F1, F21 = 0.5 × F2, F22 = 0.5 × F2

In the above aspect, the stage apparatus in which only the X slider on which the work is mounted travels on the base has been described. In the present invention, the table on which the work is mounted moves on the base in the X and Y axis directions. Needless to say, it is also applicable to the so-called XY stage apparatus. In this case, in the example of FIG. 2, at least two reaction force inference actuators for reacting the reaction force in the Y-axis direction may be provided on both surfaces parallel to the Y-axis direction of the base 20, respectively. It may be as shown in 1.

[Industry availability]

INDUSTRIAL APPLICABILITY The present invention can be applied to an entire stage apparatus requiring high-precision positioning such as a mask inspection apparatus or a semiconductor inspection apparatus.

According to the present invention, it is possible to provide a reaction force processing system for a stage device in which a high positioning performance that is stable at any position of the movable portion can be provided. For example, within the X axis stroke of ± 70 mm, when there is no reaction force processing system when moving 1 mm, a settling time of 1 second or more is required. Within msec can be realized.

Claims (10)

In a stage apparatus having a structure provided on a fixed floor through vibration damping means, and a movable portion configured to move in at least one axial direction by a driving source on the structure, the reaction force generated when the movable portion is driven. In a reaction force processing system for suppressing vibration of the structure caused, Thrust generating means installed on the fixed bottom side to give a thrust in the direction to erase the reaction force against the structure; And a control means for giving a thrust command value to said drive source and giving said thrust command value to said thrust generating means the next adjusted thrust command value through a gain adjusting means having a variable gain. Reaction Handling System for Devices. The method of claim 1, The gain adjusting means selects gain A1 as the gain when the movable portion is accelerating or decelerating, and gain A2 as the gain when driving at constant speed (where A1> A2). And a first adjustment unit for selecting the step of step. The method of claim 2, And a position detecting means for detecting the position of the movable portion, wherein the movable portion has a preset stroke range around the reference point, and the gain adjusting means further positions the movable portion when the gain A1 is selected. And a second adjusting portion that makes the gain A1 variable, wherein the second adjusting portion is based on a first straight line having a first inclination on the positive side of the movable portion bounded by the reference point. The gain A1 is changed and the changed gain is multiplied by the thrust command value to be outputted, while the gain A1 is based on a second straight line having a second slope on the negative side of the movable part on the basis of the reference point. And multiplying the changed gain by the thrust command value and outputting the multiplied gain. The method according to any one of claims 1 to 3, The drive source is a linear motor, and the thrust generating means is any one of a linear motor, a voice coil motor, and a servo motor. The method according to any one of claims 1 to 3 , A first distance in a vertical direction from a first position at which a force is applied when the movable portion is driven to a center of the movable portion, and a force at which the force is applied when the thrust generating means is driven from the first position; A reaction force processing system for a stage device, characterized in that the second distance with respect to the vertical direction to two positions is made equal. The method according to any one of claims 1 to 3 , The thrust generating unit includes at least two thrust generating units in the structure, and when the thrust of the driving source is F, the second adjusting unit is centered on the movable part with respect to the at least two thrust generating units. And a thrust command value distributed by distributing the thrust (F) according to the position and output as the adjusted thrust command value. The method of claim 4, wherein A first distance in a vertical direction from a first position at which a force is applied when the movable portion is driven to a center of the movable portion, and a force at which the force is applied when the thrust generating means is driven from the first position; A reaction force processing system for a stage device, characterized in that the second distance with respect to the vertical direction to two positions is made equal. The method of claim 4, wherein The thrust generating unit includes at least two thrust generating units in the structure, and when the thrust of the driving source is F, the second adjusting unit is centered on the movable part with respect to the at least two thrust generating units. And a thrust command value distributed by distributing the thrust (F) according to the position and output as the adjusted thrust command value. The method of claim 5, The thrust generating unit includes at least two thrust generating units in the structure, and when the thrust of the driving source is F, the second adjusting unit is centered on the movable part with respect to the at least two thrust generating units. And a thrust command value distributed by distributing the thrust (F) according to the position and output as the adjusted thrust command value. The method of claim 7, wherein The thrust generating unit includes at least two thrust generating units in the structure, and when the thrust of the driving source is F, the second adjusting unit is centered on the movable part with respect to the at least two thrust generating units. And a thrust command value distributed by distributing the thrust (F) according to the position and output as the adjusted thrust command value.

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