JPWO2018008154A1 - Optical components and optical modules - Google Patents

Abstract

  The optical component (50) includes a first filter element (21), a second filter element (22), a reflective element (3), a first reflective structure, and a second reflective structure. The first filter element reflects the first optical signal and transmits the second optical signal. The second filter element reflects the first optical signal and the second optical signal and transmits the third optical signal. The reflective element reflects the first optical signal, the second optical signal, and the third optical signal. The first reflective structure constitutes one of the first filter element, the second filter element, and the reflective element, and is an interface directed to the medium (1) of the first substrate (210) and the first substrate. And a first optical film (211) formed on the substrate. The second reflective structure constitutes one of the first filter element, the second filter element, and the reflective element other than the first reflective structure, and the second substrate (220) and the medium of the second substrate are: And a second optical film (221) formed on the reversely directed interface.

Description

  The present invention relates to an optical component and an optical module used in an optical communication device using a wavelength division multiplexing system.

  The optical multiplexer / demultiplexer has a function of an optical multiplexer that multiplexes a plurality of optical signals having different wavelength bands, or an optical demultiplexer that divides a multiplexed wavelength signal that is a multiplexed optical signal according to a difference in wavelength band. It is an optical component. As one of the technologies of the optical multiplexer / demultiplexer, a plurality of bandpass filters that transmit light in a part of all wavelength bands of a multiwavelength signal and reflect light in other wavelength bands, and a plurality of bands There is known a method of multiplexing or dividing an optical signal by using multiple reflection between a mirror facing a pass filter. Patent Document 1 discloses an optical multiplexer / demultiplexer including a plurality of bandpass filters, a mirror that faces the plurality of bandpass filters, and a block substrate that supports the plurality of bandpass filters and mirrors.

JP 2011-128539 A

  A bandpass filter of an optical multiplexer / demultiplexer is generally configured using a dielectric multilayer film. The bandpass filter increases the thickness of the dielectric multilayer film when the number of layers of the dielectric multilayer film is increased in order to have a sharp peak in the transmission spectrum representing the relationship between wavelength and transmittance. Will do. In this case, the entire band-pass filter, including the substrate that is the base of the band-pass filter, may be deformed by a strong stress from the laminate of dielectric multilayer films. Due to the deformation, the incident surface of the band-pass filter is curved, so that the angle of the reflected light from the band-pass filter changes depending on the incident position of the light on the incident surface.

  When the incident position of light in the bandpass filter is shifted due to an error in the input port of the optical multiplexer / demultiplexer or the mounting position of the bandpass filter, a shift occurs in the traveling direction of reflected light from the bandpass filter. In the optical multiplexer / demultiplexer, it is difficult to maintain the output performance because the shift of the light traveling direction in each of the plurality of bandpass filters changes the position or angle of the light beam emitted from the optical multiplexer / demultiplexer. For this reason, the optical multiplexer / demultiplexer reduces the tolerance of manufacturing errors, which cause fluctuations in the incident position on the filter element, in order to maintain output performance regardless of deformation of the filter element that transmits and reflects light. Will be invited.

  The present invention has been made in view of the above, and an object thereof is to obtain an optical component that can maintain output performance regardless of deformation of a filter element.

  In order to solve the above-described problems and achieve the object, the present invention includes a first filter element, a second filter element, a reflective element, a first reflective structure, and a second reflective structure. The first filter element reflects the first optical signal and transmits the second optical signal. The second filter element reflects the first optical signal and the second optical signal and transmits the third optical signal. The reflective element reflects the first optical signal, the second optical signal, and the third optical signal. The first reflection structure constitutes one of the first filter element, the second filter element, and the reflection element, and the first filter element, the second filter element, and the reflection of the first substrate and the first substrate. A first optical film formed at an interface between the elements directed to the medium. The second reflective structure constitutes one of the first filter element, the second filter element, and the reflective element other than the first reflective structure, and the second substrate and the medium of the second substrate are directed in the opposite direction. And a second optical film formed on the formed interface.

  The optical component according to the present invention has an effect that the output performance can be maintained regardless of the deformation of the filter element.

Sectional schematic diagram of the optical multiplexer / demultiplexer that is the optical component according to the first embodiment of the present invention The figure which showed one part including a band pass filter among the optical multiplexer / demultiplexers shown in FIG. The figure which showed one part including a band pass filter among the optical multiplexer / demultiplexers shown in FIG. Sectional schematic diagram of the optical multiplexer / demultiplexer according to the comparative example of the first embodiment Sectional schematic diagram of an optical multiplexer / demultiplexer that is an optical component according to a modification of the first embodiment Sectional schematic diagram of the optical multiplexer / demultiplexer that is the optical component according to the second embodiment of the present invention Sectional schematic diagram of the optical multiplexer / demultiplexer that is the optical component according to the third embodiment of the present invention Schematic diagram of a transmission module that is an optical module according to a fourth embodiment of the present invention. Schematic diagram of a receiving module which is an optical module according to a fourth embodiment of the present invention.

  Hereinafter, an optical component and an optical module according to an embodiment of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a schematic cross-sectional view of an optical multiplexer / demultiplexer 50 that is an optical component according to a first embodiment of the present invention. The optical multiplexer / demultiplexer 50 is a light that can function as both an optical multiplexer that multiplexes a plurality of optical signals having different wavelength bands and an optical demultiplexer that divides the multiplexed optical signal according to the difference in wavelength bands. It is a part. In the embodiment, a case where the optical multiplexer / demultiplexer 50 is an optical multiplexer is taken as an example. The input and output of the optical signal in the optical demultiplexer is opposite to the input and output of the optical signal in the optical multiplexer.

  The optical multiplexer / demultiplexer 50 includes a block substrate 1 as a support substrate, bandpass filters 21, 22 and 23 as filter elements, and a mirror 3 as a reflection element. The block substrate 1 is a block-shaped substrate that is made of a glass material and serves as a base of the optical multiplexer / demultiplexer 50. The block substrate 1 supports the bandpass filters 21, 22, 23 and the mirror 3, and also functions as a medium that transmits light between the bandpass filters 21, 22, 23 and the mirror 3.

  The band pass filters 21, 22, and 23 are disposed on the first surface 11 that is a common surface of the block substrate 1. The mirror 3 is disposed on the second surface 12 of the block substrate 1 located on the back side of the first surface 11.

  The band-pass filter 21 that is the first filter element includes a filter substrate 210 and a filter film 211. The filter film 211 is formed on the interface of the filter substrate 210 facing the block substrate 1.

  The bandpass filter 22 as the second filter element includes a filter substrate 220 and a filter film 221. The filter film 221 is formed on the interface of the filter substrate 220 facing away from the block substrate 1.

  The band pass filter 23 includes a filter substrate 230 and a filter film 231. The filter film 231 is formed on the interface of the filter substrate 230 facing the block substrate 1.

  Each of the filter films 211, 211, and 231 is a laminate of dielectric multilayer films and has different wavelength characteristics. All of the filter substrates 210, 220, and 230 are made of a glass material that is a light transmissive material having a common refractive index with the material of the block substrate 1. FIG. 1 shows the band-pass filters 21, 22, and 23 in a state where the curvature is caused by the stress of the filter films 211, 221, and 231, respectively. The common refractive index includes the case where the refractive indexes are the same as each other and the case where the refractive indexes are different from each other even if the refractive indexes are different from each other, the influence on the light transmission characteristics can be ignored.

  The block substrate 1 and the filter substrates 210, 220, and 230 may be made of a light transmissive material other than a glass material. The light transmissive material may be quartz, silicon as a semiconductor material, gallium arsenide and indium phosphide, lithium niobate as a ferroelectric material, or polymer resin.

  The mirror 3 reflects light in a wide wavelength band including the reflection wavelength bands of the filter films 211, 211, and 231. The mirror 3 is made of a metal material or other highly reflective material.

  The band-pass filter 21 and the band-pass filter 23 are a first reflective structure including a first substrate and a first optical film formed at an interface of the first substrate that is directed toward the medium. The bandpass filter 21 includes a filter substrate 210 that is a first substrate and a filter film 211 that is a first optical film. The bandpass filter 23 includes a filter substrate 230 that is a first substrate and a filter film 231 that is a first optical film.

  The band pass filter 22 is a second reflective structure including a second substrate and a second optical film formed on an interface of the second substrate facing away from the medium. The bandpass filter 22 includes a filter substrate 220 that is a second substrate and a filter film 221 that is a second optical film.

  The optical multiplexer / demultiplexer 50 is provided with two band-pass filters 21 and 23 that are first reflection structures and one band-pass filter 22 that is a second reflection structure. The second reflection structure is disposed between the two first reflection structures.

  The optical signals 40, 41, 42 and 43 are input to the optical multiplexer / demultiplexer 50. The wavelength bands of the optical signals 40, 41, 42, and 43 are different from each other. In the present embodiment, the fact that the wavelength bands are different from each other means that the wavelengths when the intensity reaches a peak are different from each other.

  The optical signal 40 input to the optical multiplexer / demultiplexer 50 enters the block substrate 1 from the first surface 11. The optical signal 40 transmitted through the block substrate 1 and reaching the second surface 12 is reflected by the mirror 3. The optical signal 40 reflected by the mirror 3 travels toward the band pass filter 21.

  The optical signal 41 input to the optical multiplexer / demultiplexer 50 enters the filter substrate 210 of the bandpass filter 21. The filter film 211 has a wavelength characteristic that includes the wavelength band of the optical signal 40 in the reflection wavelength band and includes the wavelength band of the optical signal 41 in the transmission wavelength band. The filter film 211 of the band-pass filter 21 that is the first filter element reflects the optical signal 40 that is the first optical signal and transmits the optical signal 41 that is the second optical signal. The optical signal 40 and the optical signal 41 are multiplexed by the band pass filter 21.

  The multi-wavelength signal of the optical signal 40 and the optical signal 41 travels in the block substrate 1, is reflected by the mirror 3, and travels toward the band pass filter 22. The multi-wavelength signal transmitted through the block substrate 1 is incident on the filter substrate 220 of the bandpass filter 22.

  The optical signal 42 input to the optical multiplexer / demultiplexer 50 enters the filter film 221 of the bandpass filter 22. The filter film 221 has a wavelength characteristic that includes the wavelength bands of the optical signal 40 and the optical signal 41 in the reflection wavelength band and includes the wavelength band of the optical signal 42 in the transmission wavelength band. The filter film 221 of the bandpass filter 22 that is the second filter element reflects the multi-wavelength signal of the optical signal 40 and the optical signal 41 and transmits the optical signal 42 that is the third optical signal. The optical signal 42 is multiplexed with the optical signal 40 and the optical signal 41 by the band pass filter 22. The multiple wavelength signals of the optical signals 40, 41, and 42 are reflected by the mirror 3 and travel toward the band pass filter 23.

  The optical signal 43 input to the optical multiplexer / demultiplexer 50 enters the filter substrate 230 of the bandpass filter 23. The filter film 231 has a wavelength characteristic that includes the wavelength bands of the optical signals 40, 41, and 42 in the reflection wavelength band and includes the wavelength band of the optical signal 43 in the transmission wavelength band. The optical signal 43 is multiplexed with the optical signals 40, 41, and 42 by the band pass filter 23. The multiplexed wavelength signal 44 of the optical signals 40, 41, 42 and 43 is output from the optical multiplexer / demultiplexer 50 after passing through the block substrate 1.

  FIG. 2 is a diagram illustrating a part of the optical multiplexer / demultiplexer 50 including the bandpass filter 21. The optical signal 401 indicates the optical signal 40 that is incident on a position shifted from the original incident position of the optical multiplexer / demultiplexer 50 due to mounting deviation of any element in the light source of the optical signal 40 or the optical multiplexer / demultiplexer 50. And In FIG. 2, the incident position of the optical signal 401 on the block substrate 1 is shifted upward with respect to the original incident position of the optical signal 40.

  The band pass filter 21 is deformed by the action of the stress of the filter film 211. Since the filter film 211 is curved, the incident surfaces of the optical signals 40 and 401 in the filter film 211 have a concave shape.

  When the optical signal 401 travels in parallel with the optical signal 40 and enters the optical multiplexer / demultiplexer 50, the optical signal 401 enters the optical multiplexer / demultiplexer 50 until it reaches the filter film 211. Travel along a path parallel to the travel path.

  The incident position of the optical signal 40 on the filter film 211 is the center position of the filter film 211. The optical signal 401 enters the filter film 211 at a position shifted upward from the center position. Since the incident surface has a concave shape, there is a difference between the inclination of the incident surface at the incident position of the optical signal 40 and the inclination of the incident surface at the incident position of the optical signal 401.

  The reflection angle of the optical signal 401 on the incident surface is larger than the reflection angle of the optical signal 40. The inclination of the traveling path of the optical signal 401 from the filter film 211 toward the mirror 3 is larger than the inclination of the traveling path of the optical signal 40. Here, the inclination of the traveling path is assumed to be an inclination based on the normal line of the first surface 11 and the second surface 12. The travel path of the optical signal 401 shifts downward from the travel path of the optical signal 40, and the shift width increases as the travel progresses. When the incident position of the optical signal 401 on the incident surface is shifted downward from the center position, the traveling path of the optical signal 401 is shifted above the traveling path of the optical signal 40.

  FIG. 3 is a diagram showing a part of the optical multiplexer / demultiplexer 50 including the bandpass filter 22. The optical signal 411 indicates the optical signal 41 that is incident on a position shifted from the original incident position of the optical multiplexer / demultiplexer 50 due to mounting deviation of any element in the light source of the optical signal 41 or the optical multiplexer / demultiplexer 50. And In FIG. 3, the incident position of the optical signal 411 on the block substrate 1 is shifted upward with respect to the original incident position of the optical signal 41.

  The band pass filter 22 is deformed by the action of the stress of the filter film 221. Since the filter film 221 is curved, the incident surfaces of the optical signals 41 and 411 in the filter film 221 have a convex shape.

  When the optical signal 411 travels in parallel with the optical signal 41 and enters the optical multiplexer / demultiplexer 50, the optical signal 411 enters the optical multiplexer / demultiplexer 50 until the filter film 221 reaches the filter film 221. Travel along a path parallel to the travel path.

  The incident position of the optical signal 41 on the filter film 221 is the center position of the filter film 221. The optical signal 411 is incident on the filter film 221 at a position shifted upward from the center position. Since the incident surface has a convex shape, a difference occurs between the inclination of the incident surface at the incident position of the optical signal 41 and the inclination of the incident surface at the incident position of the optical signal 411.

  The reflection angle of the optical signal 411 on the incident surface is smaller than the reflection angle of the optical signal 41. The inclination of the traveling path of the optical signal 411 from the filter film 221 toward the mirror 3 is smaller than the inclination of the traveling path of the optical signal 41. The travel path of the optical signal 411 shifts upward from the travel path of the optical signal 41, and the shift width increases as the travel progresses. If the incident position of the optical signal 411 on the incident surface is shifted downward from the center position, the traveling path of the optical signal 411 is shifted downward from the traveling path of the optical signal 41.

  The direction in which the travel path of the optical signal shifts due to reflection at the bandpass filter 21 shown in FIG. 2 is opposite to the direction in which the travel path of the optical signal shifts due to reflection at the bandpass filter 22 shown in FIG. Become. The optical multiplexer / demultiplexer 50 enables the band-pass filters 21 and 22 to cancel the deviation of the optical signal traveling path when the optical signal traveling path is deviated due to a manufacturing error.

  FIG. 4 is a schematic cross-sectional view of an optical multiplexer / demultiplexer 60 according to a comparative example of the first embodiment. In the comparative example, the band-pass filters 21, 22, and 23 have filter films 211, 221, and 231 formed at the interface on the block substrate 1 side among the filter substrates 210, 220, and 230. The incident surfaces of the filter films 211, 211, and 231 are all concave. In this case, the direction in which the traveling path of the optical signal is shifted by the reflection at each of the bandpass filters 21, 22, 23 is the same. For this reason, in the optical multiplexer / demultiplexer 60, the deviation of the traveling path of the optical signal is amplified by the reflection at each of the bandpass filters 21, 22, and 23.

  On the other hand, the optical multiplexer / demultiplexer 50 according to the first embodiment uses the band-pass filters 21 and 22 in which the filter films 211 and 221 are formed on the interfaces on the different sides of the filter substrates 210 and 220, thereby providing an optical signal. It is possible to cancel out the deviation of the traveling path. The optical multiplexer / demultiplexer 50 can reduce a shift in the traveling direction that may occur due to reflection by the deformed bandpass filters 21, 22, and 23. Therefore, the optical multiplexer / demultiplexer 50 is involved in the deformation of the bandpass filters 21, 22, and 23 without reducing the tolerance of the manufacturing error that causes the fluctuation of the incident positions on the bandpass filters 21, 22, and 23. Therefore, output performance can be maintained.

  Note that the shapes of the band-pass filters 21, 22, and 23 shown in FIGS. 1 to 3 are shown with emphasis on deformation for the sake of explanation, and do not show actual shapes. 2 and FIG. 3 show the shift of the optical signal with emphasis for explanation, and do not indicate the shift of the actual travel path.

  The block substrate 1 and the filter substrates 210, 220, and 230 are all made of a material having a common refractive index. The filter films 211 and 231 of the band-pass filters 21 and 23 that are the first reflective structure and the filter film 221 of the band-pass filter 22 that is the second reflective structure both transmit a medium having a common refractive index. Light enters. Therefore, the optical multiplexer / demultiplexer 50 can be easily designed so that the optical signals can be reflected at the same reflection angle in each of the filter films 211, 221, and 231.

  The optical multiplexer / demultiplexer 50 can reduce the deviation of the incident position from the center position on the incident surface of each filter film 211, 221, 231 by reducing the deviation of the traveling path of the optical signal. The optical multiplexer / demultiplexer 50 can reduce the loss of light in each filter film 211, 221, 231 by allowing light to enter near the center position of the incident surface of each filter film 211, 221, 231.

  The bandpass filters 21, 22, and 23 are all arranged with an interval. The band-pass filters 21 and 22 that are adjacent to each other and have different directions of bending due to deformation can avoid a situation in which stress due to deformation is exerted on each other by providing an interval. Similarly, the bandpass filters 22 and 23 can avoid a situation in which stress due to deformation is exerted on each other. The filter films 211, 221, and 231 of the bandpass filters 21, 22, and 23 may be formed on the interfaces of the filter substrates 210, 220, and 230 that have been previously recessed.

  The number of bandpass filters provided in the optical multiplexer / demultiplexer 50 is not limited to three. The number of bandpass filters can be changed according to the number of optical signals to be multiplexed. The number of optical signals input to the optical multiplexer / demultiplexer 50 is not limited to four, and may be two, three, or five or more.

  When the number of bandpass filters provided in the optical multiplexer / demultiplexer 50 is an even number, the number of bandpass filters configured by the first reflective structure and the number of bandpass filters configured by the second reflective structure are: The same. The optical multiplexer / demultiplexer 50 can effectively cancel out the deviation of the traveling path of the optical signal by providing the same number of band-pass filters having filter films formed on the interfaces on different sides of the filter substrate.

  Further, when the number of bandpass filters provided in the optical multiplexer / demultiplexer 50 is an odd number, the number of bandpass filters constituted by the first reflection structure and the number of bandpass filters constituted by the second reflection structure. The difference from is 1. Also in this case, the optical multiplexer / demultiplexer 50 can effectively cancel the deviation of the traveling path of the optical signal.

  Furthermore, the band-pass filter constituted by the first reflection structure and the band-pass filter constituted by the second reflection structure are alternately arranged in both cases where the number of band-pass filters is even and odd. . The light that passes through the optical multiplexer / demultiplexer 50 is alternately reflected by the bandpass filter that is configured by the first reflective structure and the bandpass filter that is configured by the second reflective structure, whereby the optical multiplexer / demultiplexer 50 is The deviation of the optical signal from the original traveling path can be suppressed. Moreover, the optical multiplexer / demultiplexer 50 can reduce the light loss in each filter film by reducing the deviation of the incident position from the center position on the incident surface of each filter film.

  The filter element provided in the optical multiplexer / demultiplexer 50 is not limited to a bandpass filter, and may be a polarization filter. The optical multiplexer / demultiplexer 50 can obtain the same effect as when a band-pass filter is used when multiplexing optical signals having different polarizations using a polarization filter. In addition, also when the optical multiplexer / demultiplexer 50 is an optical demultiplexer, the effect similar to the effect mentioned above about the optical multiplexer can be acquired.

  According to the first embodiment, the optical component includes the first filter element that is the first reflection structure and the second filter element that is the second reflection structure. The spread of deviation can be suppressed. Thereby, the optical component has an effect that the output performance can be maintained regardless of the deformation of the filter element.

  FIG. 5 is a schematic cross-sectional view of an optical multiplexer / demultiplexer 70 that is an optical component according to a modification of the first embodiment. In the modification, the bandpass filters 21, 22, 23 and the mirror 3 are arranged on a common surface of the block substrate 1. The block substrate 1 supports the bandpass filters 21, 22, 23 and the mirror 3. The band-pass filters 21, 22, 23 and the mirror 3 face each other through an air layer that is a medium for propagating light. The medium may be a light transmissive material filled between the bandpass filters 21, 22, 23 and the mirror 3 in addition to the air layer. Also in the modification, the optical component can maintain the output performance regardless of the deformation of the filter element.

Embodiment 2. FIG.
FIG. 6 is a schematic cross-sectional view of an optical multiplexer / demultiplexer 80 that is an optical component according to the second embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. The optical multiplexer / demultiplexer 80 according to the second embodiment is provided with a mirror 30 instead of the mirror 3 of the first embodiment.

  The mirror 30 that is a reflective element includes a mirror substrate 300 and a reflective film 301. The reflective film 301 is formed on the interface of the mirror substrate 300 that faces away from the block substrate 1. The mirror 30 reflects the light transmitted through the mirror substrate 300.

  The reflective film 301 is a laminate of dielectric multilayer films. The reflection film 301 has a reflection wavelength characteristic that reflects light in a wide wavelength band including the reflection wavelength bands of the filter films 211, 211, and 231. The mirror substrate 300 is made of a glass material that is a light-transmitting material having a common refractive index with the material of the block substrate 1 and the filter substrates 210, 220, and 230. Similar to the block substrate 1 and the filter substrates 210, 220, and 230, the mirror substrate 300 may be made of a light transmissive material other than a glass material.

  In each of the bandpass filters 21, 22, and 23, filter films 211, 221, and 231 are formed at the interface on the block substrate 1 side of the filter substrates 210, 220, and 230. The bandpass filters 21, 22, and 23 are first reflective structures including a first substrate and a first optical film formed at an interface of the first substrate that is directed toward the medium. The bandpass filters 21, 22, and 23 include filter substrates 210, 220, and 230 that are first substrates, and filter films 211, 221, and 231 that are first optical films.

  The mirror 30 is a second reflective structure including a second substrate and a second optical film formed on the interface of the second substrate facing away from the medium. The mirror 30 includes a mirror substrate 300 that is a second substrate and a reflective film 301 that is a second optical film.

  The mirror 30 is deformed by the action of stress on the reflective film 301. Since the reflection film 301 is curved, the light signal incident surface of the reflection film 301 has a convex shape. On the other hand, the incident surfaces of the filter films 211, 221, and 231 of the bandpass filters 21, 22, and 23 are all concave.

  The direction in which the traveling path of the optical signal shifts due to reflection at the mirror 30 is opposite to the direction in which the signal path of the optical signal shifts due to reflection at the bandpass filters 21, 22, and 23. The optical multiplexer / demultiplexer 80 can cancel the deviation of the traveling path of the optical signal by the mirror 30 and the band pass filters 21, 22, and 23 when the traveling path of the optical signal is shifted due to the manufacturing error. .

  In the second embodiment, similarly, when the number of bandpass filters provided in the optical multiplexer / demultiplexer 80 is an odd number or an even number, it is possible to effectively cancel the shift of the traveling path of the optical signal.

  According to the second embodiment, the optical component includes the filter element that is the first reflection structure and the reflection element that is the second reflection structure, so that the shift in the traveling direction that may occur due to the deformation of the filter element is increased. Can be suppressed. Thereby, the optical component has an effect that the output performance can be maintained regardless of the deformation of the filter element.

  In the optical component of the second embodiment, the bandpass filters 21, 22, 23 and the mirror 30 are arranged on the common surface of the block substrate 1, as in the modification of the first embodiment shown in FIG. Also good.

Embodiment 3 FIG.
FIG. 7 is a schematic cross-sectional view of an optical multiplexer / demultiplexer 90 that is an optical component according to the third embodiment of the present invention. The optical multiplexer / demultiplexer 90 according to the third embodiment is provided with a mirror 31 that is a first reflecting element and a mirror 32 that is a second reflecting element, instead of the mirror 3 according to the first embodiment.

  The mirror 31 includes a mirror substrate 310 and a reflective film 311. The reflective film 311 is formed on the interface of the mirror substrate 310 facing away from the block substrate 1. The reflective film 311 reflects the light transmitted through the mirror substrate 310.

  The mirror 32 includes a mirror substrate 320 and a reflective film 321. The reflection film 321 is formed on the interface of the mirror substrate 320 facing the block substrate 1. The reflective film 321 reflects light incident from the block substrate 1.

  The reflection films 311 and 321 are laminated bodies of dielectric multilayer films. The reflection films 311 and 321 have reflection wavelength characteristics that reflect light in a wide wavelength band including the reflection wavelength bands of the filter films 211, 221, and 231. The mirror substrates 310 and 320 are made of a glass material that is a light transmissive material having a common refractive index with the material of the block substrate 1 and the filter substrates 210, 220, and 230. Similar to the block substrate 1 and the filter substrates 210, 220, and 230, the mirror substrates 310 and 320 may be made of a light transmissive material other than a glass material.

  The mirror 32 is a first reflective structure including a first substrate and a first optical film formed at an interface of the first substrate that is directed toward the medium. The mirror 32 includes a mirror substrate 320 that is a first substrate and a reflective film 321 that is a first optical film. The mirror 32 is deformed by the action of the stress of the reflective film 321. Since the reflection film 321 is curved, the light signal incident surface of the reflection film 321 has a concave shape.

  Similar to the mirror 30 of the second embodiment, the mirror 31 includes a second reflection structure including a second substrate and a second optical film formed on the interface of the second substrate facing away from the medium. It is. The mirror 31 includes a mirror substrate 310 that is a second substrate and a reflective film 311 that is a second optical film. The mirror 31 is deformed by the action of stress on the reflective film 311. Since the reflection film 311 is curved, the light signal incident surface of the reflection film 311 has a convex shape.

  The bandpass filters 21, 22, and 23 are configured in the same manner as in the first embodiment. The optical multiplexer / demultiplexer 90 is provided with band-pass filters 21 and 23 and a mirror 32 which are first reflection structures, and a band-pass filter 22 and a mirror 31 which are second reflection structures.

  The direction in which the travel path of the optical signal shifts due to reflection at the mirror 31 is opposite to the direction in which the travel path of the optical signal shifts due to reflection at the mirror 32. The optical multiplexer / demultiplexer 90 cancels the deviation of the optical signal traveling path by the mirrors 31 and 32 when the optical signal traveling path is deviated due to a manufacturing error, and the bandpass filters 21 and 22. , 23 cancel each other. As a result, the optical multiplexer / demultiplexer 90 has different shapes between the bandpass filters 21, 22, and 23 and the mirrors 31 and 32. It is possible to effectively cancel the deviation.

  Similarly to the first embodiment, the optical multiplexer / demultiplexer 90 according to the third embodiment has a bandpass formed of the first reflection structure when the number of bandpass filters provided in the optical multiplexer / demultiplexer 90 is an even number. It is assumed that the number of filters and the number of band pass filters configured by the second reflection structure are the same. Further, when the number of bandpass filters provided in the optical multiplexer / demultiplexer 90 is an odd number, the number of bandpass filters constituted by the first reflection structure and the number of bandpass filters constituted by the second reflection structure. The difference from is 1. Thereby, the optical multiplexer / demultiplexer 90 can effectively cancel the deviation of the traveling path of the optical signal.

  Furthermore, the band-pass filter constituted by the first reflection structure and the band-pass filter constituted by the second reflection structure are alternately arranged in both cases where the number of band-pass filters is even and odd. . Thereby, the optical multiplexer / demultiplexer 90 can suppress the deviation of the optical signal from the original traveling path, and can reduce the loss of light in each filter film.

  According to the third embodiment, the optical component includes the first filter element and the first reflection element that are the first reflection structure, and the second filter element and the second reflection element that are the second reflection structure. Further, it is possible to suppress an increase in the shift in the traveling direction that may occur due to the deformation of the filter element and the reflective element. Thereby, the optical component has an effect that the output performance can be maintained regardless of the deformation of the filter element and the reflection element.

  In the optical component of the third embodiment, bandpass filters 21, 22, 23 and mirrors 31, 32 are arranged on a common surface of the block substrate 1, as in the modification of the first embodiment shown in FIG. May be.

Embodiment 4 FIG.
FIG. 8 is a schematic diagram of a transmission module 100 that is an optical module according to a fourth embodiment of the present invention. The transmission module 100 multiplexes a plurality of optical signals and transmits a multiplexed wavelength signal. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

  The transmission module 100 includes a plurality of laser diodes (LDs) 51 that are light emitting elements, a plurality of lenses 52, an optical multiplexer / demultiplexer 50, a lens 53, and an optical fiber 54. The optical multiplexer / demultiplexer 50 is an optical multiplexer.

  Each of the plurality of LDs 51 outputs optical signals 40, 41, 42, and 43 having different wavelength bands. The optical signals 40, 41, 42, and 43 from the plurality of LDs 51 propagate through different optical signal paths. The light emitted from the LD 51 is input to the optical multiplexer / demultiplexer 50 through the lens 52.

  The optical multiplexer / demultiplexer 50 multiplexes the optical signals 40, 41, 42, 43 input from the plurality of LDs 51. The optical multiplexer / demultiplexer 50 outputs a multiple wavelength signal. The multiple wavelength signal is output from the transmission module 100 via the lens 53 and the optical fiber 54.

  FIG. 9 is a schematic diagram of a receiving module 110 that is an optical module according to a fourth embodiment of the present invention. The receiving module 110 receives the multiple wavelength signal 44 and divides the multiple wavelength signal 44 according to the difference in wavelength band.

  The reception module 110 includes a photodiode (Photodiode, PD) 55 that is a light receiving element, instead of the LD 51 of the transmission module 100. The optical multiplexer / demultiplexer 50 in the receiving module 110 is an optical demultiplexer. The optical multiplexer / demultiplexer 50 receives the multiplexed wavelength signal 44 that has passed through the optical fiber 54 and the lens 53. The optical multiplexer / demultiplexer 50 divides the multiplexed wavelength signal 44 into optical signals 40, 41, 42, and 43 for each wavelength band. The optical signals 40, 41, 42, and 43 output from the optical multiplexer / demultiplexer 50 enter the PD 55 through the lens 52, respectively. The plurality of PDs 55 detect the optical signals 40, 41, 42, and 43, respectively.

  The optical module according to the fourth embodiment is not limited to the one including the optical multiplexer / demultiplexer 50 according to the first embodiment, and the optical multiplexer / demultiplexer 70 according to the modification of the first embodiment and the optical multiplexer / demultiplexers according to the second and third embodiments. One of the wave devices 80 and 90 may be included. The optical module includes any one of the optical multiplexers / demultiplexers 50, 70, 80, and 90 according to the first to third embodiments, so that the output performance can be maintained regardless of the deformation of the filter element and the reflective element.

  The configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

  1 block substrate, 3, 30, 31, 32 mirror, 11 first surface, 12 second surface, 21, 22, 23 band pass filter, 50, 70, 80, 90 optical multiplexer / demultiplexer, 51 LD, 55 PD, 100 transmitting module, 110 receiving module, 210, 220, 230 filter substrate, 211, 221, 231 filter film, 300, 310, 320 mirror substrate, 301, 311, 321 reflective film.

Claims (12)

A first filter element that reflects the first optical signal and transmits the second optical signal;
A second filter element that reflects the first optical signal and the second optical signal and transmits a third optical signal;
A reflective element that reflects the first optical signal, the second optical signal, and the third optical signal;
One of the first filter element, the second filter element, and the reflection element is formed, and the first filter element, the second filter element, and the reflection of the first substrate and the first substrate are included. A first optical structure formed at the interface between the elements directed to the medium; a first reflective structure comprising:
One of the first filter element, the second filter element, and the reflective element other than the first reflective structure is configured, and the second substrate and the medium of the second substrate are directed in reverse. A second reflective structure including a second optical film formed on the interface;
An optical component comprising: The first filter element is the first reflective structure,
The second filter element is the second reflective structure,
The first optical film is a filter film that reflects the first optical signal and transmits the second optical signal,
The optical component according to claim 1, wherein the second optical film is a filter film that reflects the first optical signal and the second optical signal and transmits the third optical signal. The first filter element and the second filter element are the first reflective structure,
The reflective element is the second reflective structure,
The first optical film of the first filter element is a filter film that reflects the first optical signal and transmits the second optical signal,
The first optical film of the second filter element is a filter film that reflects the first optical signal and the second optical signal and transmits the third optical signal,
The optical component according to claim 1, wherein the second optical film is a reflective film that reflects the first optical signal, the second optical signal, and the third optical signal. The reflective element includes a first reflective element and a second reflective element,
The first filter element and the first reflective element are the first reflective structure,
The second filter element and the second reflective element are the second reflective structure,
The first optical film of the first filter element is a filter film that reflects the first optical signal and transmits the second optical signal,
2. The second optical film of the second filter element is a filter film that reflects the first optical signal and the second optical signal and transmits the third optical signal. Optical components described in 1. A plurality of filter elements including the first filter element and the second filter element for reflecting and transmitting an optical signal;
When the number of filter elements included in the plurality of filter elements is an even number, the number of filter elements that are the first reflection structure and the filter element that is the second reflection structure among the plurality of filter elements. The number is the same,
When the number of filter elements included in the plurality of filter elements is an odd number, the number of filter elements that are the first reflection structure and the filter element that is the second reflection structure among the plurality of filter elements. The optical component according to claim 2, wherein a difference from the number is 1.   The optical component according to claim 5, wherein the filter elements that are the first reflection structures and the filter elements that are the second reflection structures are alternately arranged. A support substrate that supports the first filter element, the second filter element, and the reflective element and transmits light;
The first filter element and the second filter element are disposed on a first surface of the support substrate,
The optical component according to claim 1, wherein the reflective element is disposed on a second surface of the support substrate. A support substrate that supports the first filter element, the second filter element, and the reflective element;
The optical component according to claim 1, wherein the first filter element, the second filter element, and the reflective element are arranged on a common surface of the support substrate.   The optical component according to claim 7, wherein the support substrate, the first substrate, and the second substrate are made of a material having a common refractive index.   The optical component according to any one of claims 1 to 9, wherein the first filter element and the second filter element are arranged with a space therebetween. A plurality of light emitting elements that output optical signals;
The optical component according to any one of claims 1 to 10, wherein the optical signals from the plurality of light emitting elements are input.
An optical module comprising: The optical component according to any one of claims 1 to 10, wherein a multiplexed wavelength signal that is a plurality of multiplexed optical signals is input;
A light receiving element for detecting an optical signal divided from the multiple wavelength signal;
An optical module comprising:

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