[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS63501384A - 放射偏向器アセンブリ - Google Patents

放射偏向器アセンブリ

Info

Publication number
JPS63501384A
JPS63501384A JP61505472A JP50547286A JPS63501384A JP S63501384 A JPS63501384 A JP S63501384A JP 61505472 A JP61505472 A JP 61505472A JP 50547286 A JP50547286 A JP 50547286A JP S63501384 A JPS63501384 A JP S63501384A
Authority
JP
Japan
Prior art keywords
radiation
deflector
deflector assembly
waveguide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61505472A
Other languages
English (en)
Other versions
JPH077149B2 (ja
Inventor
スタンレイ　イアン・ウィリアム
Original Assignee
ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858525462A external-priority patent/GB8525462D0/en
Priority claimed from GB858525460A external-priority patent/GB8525460D0/en
Priority claimed from GB858525458A external-priority patent/GB8525458D0/en
Priority claimed from GB858525461A external-priority patent/GB8525461D0/en
Priority claimed from GB858525459A external-priority patent/GB8525459D0/en
Priority claimed from GB858526189A external-priority patent/GB8526189D0/en
Application filed by ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ filed Critical ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ
Publication of JPS63501384A publication Critical patent/JPS63501384A/ja
Publication of JPH077149B2 publication Critical patent/JPH077149B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Integrated Circuits (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Glass Compositions (AREA)
  • Led Device Packages (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Micromachines (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Lasers (AREA)
  • Radiation-Therapy Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Switches With Compound Operations (AREA)
  • Signal Processing For Digital Recording And Reproducing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Headphones And Earphones (AREA)
  • Fluid-Damping Devices (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるため要約のデータは記録されません。

Description

【発明の詳細な説明】 放射偏向器アセンブリ 〔技術分野〕 本発明は、少なくとも三つの放射導波路と、第一の位置では第一の組合せで二つ の導波路間に放射を通過させ、第二の位置では第二の組合せで二つの導波路間に 放射を通過させる制御可能な放射偏向器と、制御信号に応答して上記放射偏向器 の位置を制御する制御手段とを備えた構成の放射偏向器アセンブリに関する。こ のようなアセンブリを以下では「上述した構成の」という言葉で参照する。
〔背景技術〕
上述した構成の放射偏向器アセンブリは、特に光伝送装置のスイッチとして利用 できる。１８Ｍテクニカル・デスクロージャ・バレッティン第２７巻第二号、１ ９８４年７月（第１１頁ないし第１２頁）では、三組の光ファイバの下に配置さ れた固体状態の鏡の配列について説明している。緩和位置では、放射光はひとつ の組の光ファイバから鏡に入射し、他の組の方向に反射される。鏡の向きが偏向 すると、放射光は別な方向に反射して第三の組のファイバの方向に向かう。
この構成の大きな問題は、鏡に対して光ファイバの位置を正確に合わせるのが困 難なことである。単位面積あたりの鏡の数を最大にするために鏡を大規模に配列 した場合には、位置合わせの問題が重要となる。
〔発明の開示〕
本発明の放射偏向器アセンブリは、上述した構成の放射偏向器アセンブリにおい て、導波路および偏向器が共通の基板に取り付けられたことを特徴とする。
本発明は、導波路および偏向器の双方を同一の基板に取り付けることにより、位 置合わせの問題を解決する。
導波路は実質的に同一の面内に配置されることが望ましく、偏向器の移動方向は 実質的に導波路の面と同一の面であることが便利である。別の構成として、別々 の面に導波路を設けることもできる。
本発明は、基板が単結晶、例えばシリコン単結晶で構成されている場合に特に適 し、その場合には、異方性エツチング技術を用いて、導波路を取り付けるための 同じ深さまたは異なる深さの溝を形成できる。
本発明は、光波長帯の放射を偏向させる場合に特に適し、典型的には、本発明に よる放射偏向アセンブリを多数組み合わせて光スイツチ配列を構成する場合に特 に適する。
場合によっては、偏向器が第一の位置と第二の位置との間を並進移動するピスト ン部材を含むこともできる。しかし、偏向器は、第一の位置と第二の位置との間 で回動するカンチレバー状のアームを含むことが望ましい。
偏向器が基板に一体に形成されることが特に望ましい。これは、一般的なエツチ ング技術またはレーザエツチング技術を用いて製造できる。
偏向器は、第一の位置と第二の位置との双方に放射を偏向させる構造であること が望ましいが、場合によっては、偏向器が第一の位置に配置されたときには放射 がひとつの導波路から他の導波路に直接に伝搬し、偏向器が第二の位置に配置さ れたときに他の導波路に折り曲げる構造でもよい。
偏向器としては、典型的には放射を反射する反射鏡を用いるが、屈折型または回 折型のような偏向器も可能である。
場合によっては、基板に適当な材料を溶解させることにより導波路を形成するこ ともできるが、基板の表面に形成された溝、典型的にはＶ字溝に各導波路を取り 付けることが便利である。
上述したように基板はシリコンで構成されるが、他の基板材料、例えばシリカ、 リチウム・ニオベート、ガリウム・ヒ素のような■−ｖ化合物を用いることも可 能である。
偏向器の位置は、通常の静電技術、または本出願人による同日出願「可動部材の 取り付は構造Ｊ　（ＰＣＴ／ＧＢ８６１００６２８）に説明されたと同様の熱的 な方法により制御できる。
光スイツチ配列と使用するための本発明実施例光反射アセンブリについて添付図 面を参照して説明する。
〔図面の簡単な説明〕
図は本発明実施例アセンブリの概略的な斜視図。
〔発明を実施するための最良の形態〕
図に示した光素子、すなわちアセンブリは、単結晶シリコン薄板１により構成さ れた基板を含み、その上側表面には、異方性マスクキング・エツチング技術を用 いて、三つのＶ字型溝２〜４が刻まれている。溝２〜４の深さは実質的に等しく 、実質的に同一平面上に配置されている。それぞれの溝２〜４は、基板１に形成 された空洞５内で終端されている。単一モード光ファイバ（図示せず）がそれぞ れの溝２〜４に配置され、その終端が空洞５内を向いている。
空洞５内には、カンチレバー状で鉛直方向に軸着されたシリコン粱６が配置され 、基板１の残りの部分と一体に形成されている。
粱６は光反射器として動作する。
粱６は、その終端７を回転の軸とし、一対の電極により生成された静電群に応答 して、第一の位置と第二の位置との間を回動し、一方の電極８は基板に取り付け られ、他方の電極は粱６の上記電極８と向き合う面に取り付けられる。梁６が接 地電位の場合には、第二の電極は必要ではない。これらの電極は、電源を含む電 気的制御装置（図示せず）に接続される。
粱６は、その第一の位置において、溝２内の光ファイバに沿って伝搬した放射光 を溝３内の光ファイバに反射する。第二の位置では、溝２内のファイバから反射 器６に入射した放射光を溝４内のファイバに反射する。したがって、図面に示し た素子を光スィッチとして使用することができ、溝２内の光ファイバから到来し た放射光を溝３内の光ファイバまたは溝４内の光ファイバの一方に切り換えるこ とができる。
国際調査報告 ＡＮＮＥＸ　Ｔｏ　ＴＨＥ　ＩＮＴ三ＲＮＡＴｌ０ＮＡＬ　５ＥＡＲＣＥ４　Ｆ ＩＥｐＯＲＴ　０ＮＰａｔａｎｔ　ｄｏｃｕｍｅｎｔ　Ｐｕｂｌｉｃａｔｉｏｎ 　Ｐａｔｅｎｔ　ｆａｍｉｌｙ　Ｐｕｂｌｉｃａｔｉｏｎｃｉｔｅｄ　ｉｎ　５ ｅａｒｃｈ　ｄａｔｅ　ｍｅ凸ｅｒ（ｓ）　ｄａｔａ

Claims (10)

    【特許請求の範囲】
  1. １．少なくとも三つの放射導波路と、 第一の位置では第一の組合せで二つの放射導波路間に放射を通過させ、第二の位 置では第二の組合せで二つの放射導波路間に放射を通過させる制御可能な放射偏 向器と、 制御信号に応答して上記放射偏向器の位置を制御する制御手段とを備えた放射偏 向器アセンブリにおいて、上記放射導波路および上記放射偏向器が共通の基板に 取り付けられたこと を特徴とする放射偏向器アセンブリ。
  2. ２．放射導波路は実質的に同一面内に配置された請求の範囲第１項に記載の放射 偏向器アセンブリ。
  3. ３．各々の放射導波路は、基板内に形成された対応する溝に取り付けられた導波 部材を含む請求の範囲第１項または第２項に記載の放射偏向器アセンブリ。
  4. ４．放射偏向器は、基板に一体に形成された構造である請求の範囲第１項ないし 第３項のいずれかに記載の放射偏向器アセンブリ。
  5. ５．放射偏向器はカンチレバー状のアームを含む請求の範囲第１項ないし第４項 のいずれかに記載の放射偏向器アセンブリ。
  6. ６．放射偏向器は、第一の位置と第二の位置との双方に放射を偏向させる構造で ある請求の範囲第１項ないし第５項のいずれかに記載の放射偏向器アセンブリ。
  7. ７．放射偏向器は放射を反射する反射鏡を含む請求の範囲第１項ないし第６項の いずれかに記載の放射偏向器アセンブリ。
  8. ８．放射導波路および放射偏向器は、それぞれ放射光を誘導および偏向させる構 造である請求の範囲第１項ないし第７項のいずれかに記載の放射偏向器アセンブ リ。
  9. ９．基板は単結晶である請求の範囲第１項ないし第８項のいずれかに記載の放射 偏向器アセンブリ。
  10. １０．添付図面を参照して実質的に説明した放射偏向器アセンブリ。
JP61505472A 1985-10-16 1986-10-16 放射偏向器アセンブリ Expired - Lifetime JPH077149B2 (ja)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
GB858525462A GB8525462D0 (en) 1985-10-16 1985-10-16 Radiation deflector assembly
GB8525462 1985-10-16
GB858525460A GB8525460D0 (en) 1985-10-16 1985-10-16 Movable member mounting
GB8525460 1985-10-16
GB8525461 1985-10-16
GB858525458A GB8525458D0 (en) 1985-10-16 1985-10-16 Positioning optical components & waveguides
GB858525461A GB8525461D0 (en) 1985-10-16 1985-10-16 Wavelength selection device
GB858525459A GB8525459D0 (en) 1985-10-16 1985-10-16 Mounting component to substrate
GB8525459 1985-10-16
GB8525458 1985-10-16
GB8526189 1985-10-23
GB858526189A GB8526189D0 (en) 1985-10-23 1985-10-23 Fabry-perot interferometer
PCT/GB1986/000630 WO1987002475A1 (en) 1985-10-16 1986-10-16 Radiation deflector assembly

Publications (2)

Publication Number Publication Date
JPS63501384A true JPS63501384A (ja) 1988-05-26
JPH077149B2 JPH077149B2 (ja) 1995-01-30

Family

ID=27546918

Family Applications (5)

Application Number Title Priority Date Filing Date
JP61505472A Expired - Lifetime JPH077149B2 (ja) 1985-10-16 1986-10-16 放射偏向器アセンブリ
JP61505411A Expired - Fee Related JPH0690329B2 (ja) 1985-10-16 1986-10-16 ファブリペロ−干渉計
JP61505413A Expired - Lifetime JPH0769520B2 (ja) 1985-10-16 1986-10-16 可動部材の取付構造
JP61505474A Expired - Lifetime JP2514343B2 (ja) 1985-10-16 1986-10-16 光素子と光導波路の結合装置
JP61505412A Expired - Lifetime JPH0827432B2 (ja) 1985-10-16 1986-10-16 波長選択素子

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP61505411A Expired - Fee Related JPH0690329B2 (ja) 1985-10-16 1986-10-16 ファブリペロ−干渉計
JP61505413A Expired - Lifetime JPH0769520B2 (ja) 1985-10-16 1986-10-16 可動部材の取付構造
JP61505474A Expired - Lifetime JP2514343B2 (ja) 1985-10-16 1986-10-16 光素子と光導波路の結合装置
JP61505412A Expired - Lifetime JPH0827432B2 (ja) 1985-10-16 1986-10-16 波長選択素子

Country Status (9)

Country Link
US (7) US4825262A (ja)
EP (6) EP0219356B1 (ja)
JP (5) JPH077149B2 (ja)
AT (6) ATE49064T1 (ja)
DE (6) DE3667335D1 (ja)
ES (3) ES2012346B3 (ja)
GR (3) GR3000242T3 (ja)
SG (1) SG892G (ja)
WO (6) WO1987002474A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6711321B2 (en) 2000-01-20 2004-03-23 Japan Science And Technology Corporation Mechanical optical switch and method for manufacturing the same

Families Citing this family (196)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3667335D1 (de) * 1985-10-16 1990-01-11 British Telecomm Bewegliches gehaeuse fuer ein element.
US4859060A (en) * 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US4744627A (en) * 1986-11-03 1988-05-17 General Electric Company Optical fiber holder
GB8707854D0 (en) * 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly
US4900118A (en) * 1987-05-22 1990-02-13 Furukawa Electric Co., Ltd. Multiple-fiber optical component and method for manufacturing of the same
US4787696A (en) * 1987-12-18 1988-11-29 Gte Laboratories Incorporated Mounting apparatus for optical fibers and lasers
DE3801764A1 (de) * 1988-01-22 1989-08-03 Ant Nachrichtentech Wellenlaengenmultiplexer oder -demultiplexer, sowie verfahren zur herstellung des wellenlaengenmultiplexers oder -demultiplexers
GB8805015D0 (en) * 1988-03-02 1988-03-30 British Telecomm Optical fibre locating apparatus
US4897711A (en) * 1988-03-03 1990-01-30 American Telephone And Telegraph Company Subassembly for optoelectronic devices
EP0331332A3 (en) * 1988-03-03 1991-01-16 AT&T Corp. Device including a component in alignment with a substrate-supported waveguide
US4945400A (en) * 1988-03-03 1990-07-31 At&T Bell Laboratories Subassembly for optoelectronic devices
US4966433A (en) * 1988-03-03 1990-10-30 At&T Bell Laboratories Device including a component in alignment with a substrate-supported waveguide
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
US4867524A (en) * 1988-09-08 1989-09-19 United Technologies Corporation Metallic bond for mounting of optical fibers to integrated optical chips
EP0361153A3 (de) * 1988-09-29 1991-07-24 Siemens Aktiengesellschaft Anordnung zum Koppeln einer optischen Faser an ein Koppelfenster eines planar integriert optischen Bauteils und Verfahren zur Herstellung einer solchen Anordnung
JPH02124504A (ja) * 1988-11-02 1990-05-11 Toshiba Corp 受光モジュール
US5000534A (en) * 1988-12-05 1991-03-19 Nippon Sheet Glass Co., Ltd. Optical switch
US5017263A (en) * 1988-12-23 1991-05-21 At&T Bell Laboratories Optoelectronic device package method
DE59010539D1 (de) * 1989-01-09 1996-11-21 Siemens Ag Anordnung zum optischen Koppeln eines optischen Wellenleiters um eine Photodiode auf einem Substrat aus Silizium
US4976506A (en) * 1989-02-13 1990-12-11 Pavlath George A Methods for rugged attachment of fibers to integrated optics chips and product thereof
US4997253A (en) * 1989-04-03 1991-03-05 Tektronix, Inc. Electro-optical transducer module and a method of fabricating such a module
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5243673A (en) * 1989-08-02 1993-09-07 E. I. Du Pont De Nemours And Company Opto-electronic component having positioned optical fiber associated therewith
GB8919220D0 (en) * 1989-08-24 1989-10-04 British Telecomm Diffraction grating assembly
US5026138A (en) * 1989-08-29 1991-06-25 Gte Laboratories Incorporated Multi-fiber alignment package for tilted facet optoelectronic components
DE4002490A1 (de) * 1989-08-31 1991-08-01 Bodenseewerk Geraetetech Verfahren zum anbringen von elektrooptischen bauteilen an integriert-optischen wellenleitern
CA2025167A1 (en) * 1989-09-25 1991-03-26 Frederick W. Freyre Method and apparatus for signal multiplexing/demultiplexing
US5011249A (en) * 1989-12-20 1991-04-30 Raychem Corp. Circuit for the transmission of optical signals
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5168385A (en) * 1990-01-24 1992-12-01 Canon Kabushiki Kaisha Optical device and producing method therefor
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5042889A (en) * 1990-04-09 1991-08-27 At&T Bell Laboratories Magnetic activation mechanism for an optical switch
US5195154A (en) * 1990-04-27 1993-03-16 Ngk Insulators, Ltd. Optical surface mount technology (o-smt), optical surface mount circuit (o-smc), opto-electronic printed wiring board (oe-pwb), opto-electronic surface mount device (oe-smd), and methods of fabricating opto-electronic printed wiring board
US5023881A (en) * 1990-06-19 1991-06-11 At&T Bell Laboratories Photonics module and alignment method
GB9014639D0 (en) * 1990-07-02 1990-08-22 British Telecomm Optical component packaging
DE4022026C2 (de) * 1990-07-11 1998-11-12 Siemens Ag Anordnung zum optischen Koppeln eines Laserverstärker-Chips an eine Lichtleitfaser mittels einer Linse
US5109455A (en) * 1990-08-03 1992-04-28 Cts Corporation Optic interface hybrid
US5124281A (en) * 1990-08-27 1992-06-23 At&T Bell Laboratories Method of fabricating a photonics module comprising a spherical lens
US5218420A (en) * 1991-04-11 1993-06-08 The Boeing Company Optical resonance accelerometer
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5155778A (en) * 1991-06-28 1992-10-13 Texas Instruments Incorporated Optical switch using spatial light modulators
US5162872A (en) * 1991-07-02 1992-11-10 The United States Of America As Represented The Secretary Of The Air Force Tilt/shear immune tunable fabry-perot interferometer
EP0522417A1 (en) * 1991-07-09 1993-01-13 Sumitomo Electric Industries, Limited Light-receiving apparatus with optical fiber connection
US5586013A (en) * 1991-07-19 1996-12-17 Minnesota Mining And Manufacturing Company Nonimaging optical illumination system
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5173959A (en) * 1991-09-13 1992-12-22 Gte Laboratories Incorporated Method and apparatus for assembling a fiber array
FR2681440B1 (fr) * 1991-09-17 1994-11-04 Commissariat Energie Atomique Commutateur optique et procede de fabrication de ce commutateur.
US5276756A (en) * 1991-12-06 1994-01-04 Amoco Corporation High speed electro-optical signal translator
US6147756A (en) * 1992-01-22 2000-11-14 Northeastern University Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate
US5909280A (en) * 1992-01-22 1999-06-01 Maxam, Inc. Method of monolithically fabricating a microspectrometer with integrated detector
EP0624257B1 (en) * 1992-01-28 2002-05-02 BRITISH TELECOMMUNICATIONS public limited company Alignment of integrated optical components
US5280173A (en) * 1992-01-31 1994-01-18 Brown University Research Foundation Electric and electromagnetic field sensing system including an optical transducer
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
SE515191C2 (sv) * 1992-05-05 2001-06-25 Volvo Ab Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck
FI98095C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori
NL9200884A (nl) * 1992-05-20 1993-12-16 Framatome Connectors Belgium Connectorsamenstel.
US5271597A (en) * 1992-05-29 1993-12-21 Ic Sensors, Inc. Bimetallic diaphragm with split hinge for microactuator
US5253311A (en) * 1992-11-02 1993-10-12 The United States Of America As Represented By The Secretary Of The Army Device and method for performing optical coupling without pigtails
US5343548A (en) * 1992-12-15 1994-08-30 International Business Machines Corporation Method and apparatus for batch, active alignment of laser arrays to fiber arrays
DE4301236C1 (de) * 1993-01-19 1994-03-17 Ant Nachrichtentech Vorrichtung zur optischen Kopplung eines Lichtwellenleiters mit einem optoelektrischen Wandler
GB2275787A (en) * 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
JP2842132B2 (ja) * 1993-03-05 1998-12-24 松下電器産業株式会社 光学デバイス
US5457573A (en) * 1993-03-10 1995-10-10 Matsushita Electric Industrial Co., Ltd. Diffraction element and an optical multiplexing/demultiplexing device incorporating the same
JPH06334262A (ja) * 1993-03-23 1994-12-02 Mitsubishi Electric Corp 半導体レーザアレイ装置，半導体レーザ装置，及びそれらの製造方法
US5343542A (en) * 1993-04-22 1994-08-30 International Business Machines Corporation Tapered fabry-perot waveguide optical demultiplexer
DE4320194A1 (de) * 1993-06-18 1994-12-22 Sel Alcatel Ag Vorrichtung zur justagefreien Ankopplung einer Mehrzahl von Lichtwellenleitern an ein Laserarray
US5345521A (en) * 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
GB2280544B (en) * 1993-07-30 1997-01-08 Northern Telecom Ltd Providing optical coupling with single crystal substrate mounted electro-optic transducers
JP3302458B2 (ja) * 1993-08-31 2002-07-15 富士通株式会社 集積化光装置及び製造方法
DE4334578C2 (de) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spektral abstimmbarer Infrarot-Sensor
US6012855A (en) * 1993-11-09 2000-01-11 Hewlett-Packard Co. Method and apparatus for parallel optical data link
US5500761A (en) * 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
SE503905C2 (sv) * 1994-03-16 1996-09-30 Ericsson Telefon Ab L M Förfarande för framställning av en optokomponent samt optokomponent
FR2717581A1 (fr) * 1994-03-18 1995-09-22 Sea N Optic Sa Dispositif de détection de déplacement par déviation de faisceau lumineux provenant de fibre optique.
SE513183C2 (sv) * 1994-03-18 2000-07-24 Ericsson Telefon Ab L M Förfarande för framställning av en optokomponent samt kapslad optokomponent
US7826120B2 (en) * 1994-05-05 2010-11-02 Qualcomm Mems Technologies, Inc. Method and device for multi-color interferometric modulation
US7839556B2 (en) * 1994-05-05 2010-11-23 Qualcomm Mems Technologies, Inc. Method and device for modulating light
DE4431285C1 (de) * 1994-09-02 1995-12-07 Ant Nachrichtentech Lasermodul
US5553182A (en) * 1995-02-14 1996-09-03 Mcdonnell Douglas Corporation Alignment fixture and associated method for controllably positioning on optical fiber
US7898722B2 (en) * 1995-05-01 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical device with restoring electrode
US5602955A (en) * 1995-06-07 1997-02-11 Mcdonnell Douglas Corporation Microactuator for precisely aligning an optical fiber and an associated fabrication method
US5606635A (en) * 1995-06-07 1997-02-25 Mcdonnell Douglas Corporation Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method
DE69619408T2 (de) * 1995-06-07 2002-11-21 Mcdonnell Douglas Corp., Saint Louis Eine justiervorrichtung zum genauen ausrichten einer optischen faser und ein hiermit zusammenhängendes herstellungsverfahren
DE69618035T2 (de) * 1995-06-30 2002-07-11 The Whitaker Corp., Wilmington Vorrichtung zur ausrichtung eines optoelektronischen bauteils
US6324192B1 (en) 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
GB9521100D0 (en) * 1995-10-16 1995-12-20 Hewlett Packard Ltd Optical connector
FR2740550B1 (fr) * 1995-10-27 1997-12-12 Schlumberger Ind Sa Filtre pour rayonnement electromagnetique et dispositif de determination d'une concentration de gaz comprenant un tel filtre
US5659647A (en) * 1995-10-30 1997-08-19 Sandia Corporation Fiber alignment apparatus and method
US7907319B2 (en) * 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
SE512121C2 (sv) * 1995-12-19 2000-01-31 Ericsson Telefon Ab L M Förfarande för att passivt upplinjera ett vågledardon på ett substrat
US5659641A (en) 1995-12-22 1997-08-19 Corning, Inc. Optical circuit on printed circuit board
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
US5862283A (en) * 1996-08-28 1999-01-19 Hewlett-Packard Company Mounting a planar optical component on a mounting member
EP0837356B1 (en) * 1996-10-17 2003-12-03 BRITISH TELECOMMUNICATIONS public limited company Tunable optical filter
US7830588B2 (en) * 1996-12-19 2010-11-09 Qualcomm Mems Technologies, Inc. Method of making a light modulating display device and associated transistor circuitry and structures thereof
US5940558A (en) * 1997-01-02 1999-08-17 Lucent Technologies, Inc. Optical packaging assembly for transmissive devices
IT1288435B1 (it) * 1997-01-28 1998-09-22 Pirelli Pneumatico e fascia battistrada per pneumatici particolarmente per autocarri e simili
FR2760101B1 (fr) * 1997-02-24 1999-04-16 Alsthom Cge Alcatel Procede d'assemblage d'un dispositif opto-hybride
US5970200A (en) * 1997-03-21 1999-10-19 Kabushiki Kaisha Toshiba Apparatus having optical components and a manufacturing method thereof
US5896481A (en) * 1997-05-30 1999-04-20 The Boeing Company Optical subassembly with a groove for aligning an optical device with an optical fiber
US5994700A (en) * 1997-09-04 1999-11-30 Lockheed Martin Energy Research Corporation FTIR spectrometer with solid-state drive system
US6014477A (en) * 1997-09-09 2000-01-11 At&T Corp. Article comprising a photostrictive switching element
FR2768812B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Interferometre fabry-perot accordable integre
AU764799B2 (en) 1997-12-29 2003-08-28 Coretek, Inc. Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
US6438149B1 (en) 1998-06-26 2002-08-20 Coretek, Inc. Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
WO1999042876A1 (de) 1998-02-23 1999-08-26 Huber & Suhner Ag Positioniervorrichtung zum positionieren und fixieren von optischen fasern sowie steckverbinder mit einer solchen positioniervorrichtung
US6085007A (en) * 1998-02-27 2000-07-04 Jiang; Ching-Long Passive alignment member for vertical surface emitting/detecting device
US5981975A (en) * 1998-02-27 1999-11-09 The Whitaker Corporation On-chip alignment fiducials for surface emitting devices
SE513858C2 (sv) 1998-03-06 2000-11-13 Ericsson Telefon Ab L M Flerskiktsstruktur samt förfarande för att tillverka flerskiktsmoduler
US6095697A (en) * 1998-03-31 2000-08-01 Honeywell International Inc. Chip-to-interface alignment
US8928967B2 (en) * 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
FI116753B (fi) * 1998-04-17 2006-02-15 Valtion Teknillinen Aallonpituudeltaan säädettävä laserjärjestely
US6584126B2 (en) 1998-06-26 2003-06-24 Coretek, Inc. Tunable Fabry-Perot filter and tunable vertical cavity surface emitting laser
US6813291B2 (en) 1998-06-26 2004-11-02 Coretek Inc Tunable fabry-perot filter and tunable vertical cavity surface emitting laser
US6463190B1 (en) 1998-10-16 2002-10-08 Japan Aviation Electronics Industry Limited Optical switch and method of making the same
US6585427B2 (en) 1999-01-11 2003-07-01 Intel Corporation Flexure coupled to a substrate for maintaining the optical fibers in alignment
US6227724B1 (en) * 1999-01-11 2001-05-08 Lightlogic, Inc. Method for constructing an optoelectronic assembly
US6207950B1 (en) 1999-01-11 2001-03-27 Lightlogic, Inc. Optical electronic assembly having a flexure for maintaining alignment between optical elements
DE19902184C1 (de) * 1999-01-21 2000-09-21 Winter & Ibe Olympus Medizinisches Endoskop zur Betrachtung fluoreszierend markierter Gebiete
DE60021638T2 (de) * 1999-03-04 2006-05-24 Japan Aviation Electronics Industry, Ltd. Optischer Schalter und Verfahren zur Herstellung eines solchen Schalters
US6471392B1 (en) 2001-03-07 2002-10-29 Holl Technologies Company Methods and apparatus for materials processing
US7538237B2 (en) 1999-07-02 2009-05-26 Kreido Laboratories Process for high shear gas-liquid reactions
US6742774B2 (en) 1999-07-02 2004-06-01 Holl Technologies Company Process for high shear gas-liquid reactions
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
DE19955759A1 (de) * 1999-11-20 2001-05-23 Colour Control Farbmestechnik Spektrometer mit mikromechanischem Spiegel
US6295130B1 (en) * 1999-12-22 2001-09-25 Xerox Corporation Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6597461B1 (en) 2000-03-20 2003-07-22 Parvenu, Inc. Tunable fabry-perot interferometer using entropic materials
WO2001071277A1 (en) 2000-03-20 2001-09-27 Solus Micro Technologies, Inc. Electrostatically-actuated tunable optical components using entropic materials
US6665109B2 (en) 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
US6678084B2 (en) 2000-03-20 2004-01-13 Np Photonics, Inc. Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
US6747775B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US6738145B2 (en) 2000-04-14 2004-05-18 Shipley Company, L.L.C. Micromachined, etalon-based optical fiber pressure sensor
NL1015131C1 (nl) 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
US6496616B2 (en) 2000-04-28 2002-12-17 Confluent Photonics, Inc. Miniature monolithic optical demultiplexer
US6453087B2 (en) 2000-04-28 2002-09-17 Confluent Photonics Co. Miniature monolithic optical add-drop multiplexer
US6768590B2 (en) * 2000-05-19 2004-07-27 Shipley Company, L.L.C. Method of fabricating optical filters
WO2002010836A2 (en) * 2000-07-27 2002-02-07 Holl Technologies, Inc. Flexureless magnetic micromirror assembly
CA2314783A1 (en) * 2000-08-01 2002-02-01 Kenneth Lloyd Westra A method of making a high reflectivity micro mirror and a micro mirror
US6810176B2 (en) 2000-08-07 2004-10-26 Rosemount Inc. Integrated transparent substrate and diffractive optical element
US7003187B2 (en) 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
JP2002082292A (ja) 2000-09-06 2002-03-22 Japan Aviation Electronics Industry Ltd 光スイッチ
KR100361593B1 (ko) * 2000-11-23 2002-11-22 주식회사일진 볼록 요철을 갖는 광학집적회로 소자, 그 제조방법, 그광학집적 회로 소자를 이용하여 제조한 광통신용 송수신장치의 모듈
DE10061765A1 (de) * 2000-12-12 2003-03-06 Colour Control Farbmestechnik Mikromechanischer Monochromator mit integrierten Spaltblenden
US6516131B1 (en) 2001-04-04 2003-02-04 Barclay J. Tullis Structures and methods for aligning fibers
US6830806B2 (en) 2001-04-12 2004-12-14 Kreido Laboratories Methods of manufacture of electric circuit substrates and components having multiple electric characteristics and substrates and components so manufactured
US6965721B1 (en) * 2001-04-18 2005-11-15 Tullis Barclay J Integrated manufacture of side-polished fiber optics
JP4720022B2 (ja) * 2001-05-30 2011-07-13 ソニー株式会社 光学多層構造体およびその製造方法、光スイッチング素子、並びに画像表示装置
US6618519B2 (en) * 2001-07-16 2003-09-09 Chromux Technologies, Inc. Switch and variable optical attenuator for single or arrayed optical channels
US6658032B2 (en) 2001-10-05 2003-12-02 Pranalytica, Inc. Automated laser wavelength selection system and method
US6787246B2 (en) 2001-10-05 2004-09-07 Kreido Laboratories Manufacture of flat surfaced composites comprising powdered fillers in a polymer matrix
NO315177B1 (no) 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
US6775436B1 (en) 2002-02-26 2004-08-10 General Dynamics Advanced Technology Systems, Inc. Optical fiber U-turn apparatus and method
US6987901B2 (en) * 2002-03-01 2006-01-17 Rosemount, Inc. Optical switch with 3D waveguides
AU2003258781A1 (en) * 2002-03-29 2003-10-13 Massachusetts Institute Of Technology Low voltage tunable filtre with photonic crystal
US6869231B2 (en) * 2002-05-01 2005-03-22 Jds Uniphase Corporation Transmitters, receivers, and transceivers including an optical bench
WO2003098302A2 (en) * 2002-05-15 2003-11-27 Hymite A/S Optical device receiving substrate and optical device holding carrier
JP2003344709A (ja) * 2002-05-23 2003-12-03 Okano Electric Wire Co Ltd ファイバ型光モジュール
JP3801099B2 (ja) * 2002-06-04 2006-07-26 株式会社デンソー チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置
US7098360B2 (en) 2002-07-16 2006-08-29 Kreido Laboratories Processes employing multiple successive chemical reaction process steps and apparatus therefore
AU2003266154B2 (en) 2002-09-11 2009-01-22 Kreido Laboratories Methods and apparatus for high-shear mixing and reacting of materials
WO2004030802A2 (en) 2002-10-03 2004-04-15 Kreido Laboratories Apparatus for transfer of heat energy between a body surface and heat transfer fluid
DE10248924A1 (de) * 2002-10-17 2004-04-29 C. & E. Fein Gmbh & Co Kg Elektrowerkzeug
US6996312B2 (en) * 2003-04-29 2006-02-07 Rosemount, Inc. Tunable fabry-perot filter
EP1480302B1 (en) * 2003-05-23 2007-07-11 Rohm and Haas Electronic Materials, L.L.C. External cavity semiconductor laser comprising an etalon and method for fabrication thereof
US20050201668A1 (en) * 2004-03-11 2005-09-15 Avi Neta Method of connecting an optical element at a slope
US7187453B2 (en) * 2004-04-23 2007-03-06 Opsens Inc. Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
JP3985269B2 (ja) * 2004-09-29 2007-10-03 松下電工株式会社 光スイッチ
NO20051850A (no) 2005-04-15 2006-09-25 Sinvent As Infrarød deteksjon av gass - diffraktiv.
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7480432B2 (en) 2006-02-28 2009-01-20 Corning Incorporated Glass-based micropositioning systems and methods
WO2007126475A2 (en) * 2006-04-26 2007-11-08 Davidson Instruments, Inc. Fiber optic mems seismic sensor with mass supported by hinged beams
US20080049228A1 (en) * 2006-08-28 2008-02-28 Novaspectra, Inc. Fabry-perot interferometer array
GB2446887A (en) * 2007-05-04 2008-08-27 Zhou Rong A 1
JP2009003096A (ja) * 2007-06-20 2009-01-08 Sumitomo Bakelite Co Ltd 光導波路モジュール、光導波路モジュールの製造方法
DE102008051625B4 (de) 2008-10-02 2015-08-13 Erich Kasper Verfahren zum Herstellen eines Bauelements mit einem optischen Koppelfenster
US8036508B2 (en) 2009-09-21 2011-10-11 Corning Incorporated Methods for passively aligning opto-electronic component assemblies on substrates
CN102384809B (zh) * 2011-08-09 2013-05-08 天津大学 无胶封装的高稳定性光纤法-珀压力传感器及制作方法
JP5987573B2 (ja) 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
CN103984062B (zh) * 2013-02-08 2015-10-14 源杰科技股份有限公司 光电模块及光电模块的封装工艺
CN103457144A (zh) * 2013-09-10 2013-12-18 中国科学院国家授时中心 一种可调的高稳定f-p整体腔装置
JP6052269B2 (ja) * 2014-12-08 2016-12-27 セイコーエプソン株式会社 波長可変フィルタ
JP6685701B2 (ja) * 2014-12-26 2020-04-22 キヤノン株式会社 面発光レーザ、情報取得装置、撮像装置、レーザアレイ及び面発光レーザの製造方法
US9810594B2 (en) 2015-01-08 2017-11-07 Kulite Semiconductor Products, Inc. Thermally stable high temperature pressure and acceleration optical interferometric sensors
US9952067B2 (en) 2015-05-06 2018-04-24 Kulite Semiconductor Products, Inc. Systems and methods for optical measurements using multiple beam interferometric sensors
JP6576092B2 (ja) 2015-04-30 2019-09-18 キヤノン株式会社 面発光レーザ、情報取得装置及び撮像装置
JP6510990B2 (ja) * 2016-01-29 2019-05-08 浜松ホトニクス株式会社 波長可変光源及びその駆動方法
IL253799B (en) 2017-08-02 2018-06-28 Igal Igor Zlochin Retroreflective interferometer
US10310197B1 (en) * 2018-09-17 2019-06-04 Waymo Llc Transmitter devices having bridge structures
US10534143B1 (en) 2018-09-20 2020-01-14 Waymo Llc Methods for optical system manufacturing
US11226457B2 (en) * 2020-05-28 2022-01-18 Cisco Technology, Inc. Laser and photonic chip integration
US11957804B2 (en) * 2020-09-28 2024-04-16 The Boeing Company Optical disinfection systems having side-emitting optical fiber coupled to high-energy UV-C laser diode
GB202017243D0 (en) 2020-10-30 2020-12-16 Npl Management Ltd Chip assembly and method of making a chip assembly

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1438974A (en) * 1920-11-13 1922-12-19 Western Electric Co Piezo-electrical voltage indicator
US2586531A (en) * 1950-04-20 1952-02-19 Donald L Gordon Wheeled support having ladder assembly
US2920529A (en) * 1952-05-23 1960-01-12 Blythe Richard Electronic control of optical and near-optical radiation
US3040583A (en) * 1959-12-10 1962-06-26 United Aircraft Corp Optical pressure transducer
US3387531A (en) * 1964-11-05 1968-06-11 Zeiss Jena Veb Carl Devices for supporting, adjusting and displacing at least one of two optical plates located according to the fabry-perot principle
US3443243A (en) * 1965-06-23 1969-05-06 Bell Telephone Labor Inc Frequency selective laser
US3635562A (en) * 1968-11-12 1972-01-18 Comp Generale Electricite Optical interferometer for detection of small displacements
US3704996A (en) * 1969-10-23 1972-12-05 Licentia Gmbh Optical coupling arrangement
DE2242438A1 (de) * 1972-08-29 1974-03-07 Battelle Institut E V Infrarot-modulator
FR2359433A1 (fr) * 1976-07-23 1978-02-17 Thomson Csf Repartiteur reglable de rayonnement guide par faisceaux de fibres optiques
US4169001A (en) * 1976-10-18 1979-09-25 International Business Machines Corporation Method of making multilayer module having optical channels therein
US4070516A (en) * 1976-10-18 1978-01-24 International Business Machines Corporation Multilayer module having optical channels therein
US4115747A (en) * 1976-12-27 1978-09-19 Heihachi Sato Optical modulator using a controllable diffraction grating
FR2426347A1 (fr) * 1978-05-18 1979-12-14 Thomson Csf Source laser a semi-conducteur et son procede de fabrication
US4182544A (en) * 1978-08-03 1980-01-08 Sperry Rand Corporation Resonant multiplexer-demultiplexer for optical data communication systems
US4210923A (en) * 1979-01-02 1980-07-01 Bell Telephone Laboratories, Incorporated Edge illuminated photodetector with optical fiber alignment
JPS5596903A (en) * 1979-01-17 1980-07-23 Mitsubishi Electric Corp Photo switch
US4268113A (en) * 1979-04-16 1981-05-19 International Business Machines Corporation Signal coupling element for substrate-mounted optical transducers
JPS56126818A (en) * 1980-03-12 1981-10-05 Nippon Telegr & Teleph Corp <Ntt> Fine adjustment method of optical fiber axis aligning position
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
JPS575005A (en) * 1980-06-12 1982-01-11 Matsushita Electric Ind Co Ltd Optical branching filter
JPS577989A (en) * 1980-06-17 1982-01-16 Matsushita Electric Ind Co Ltd Mount for semiconductor laser
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
JPS57119314A (en) * 1981-01-16 1982-07-24 Omron Tateisi Electronics Co Connecting method between optical fiber and optical waveguide
JPS57172309A (en) * 1981-04-16 1982-10-23 Omron Tateisi Electronics Co Coupling method of optical fiber and optical waveguide
JPS5821832A (ja) * 1981-07-31 1983-02-08 Toshiba Corp 半導体部品供給装置
DE3138296A1 (de) * 1981-09-25 1983-04-28 Siemens AG, 1000 Berlin und 8000 München Verfahren zum positionieren und fixieren von optischen bauelementen relativ zueinander
DE3142918A1 (de) * 1981-10-29 1983-05-11 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Opto-elektrische koppelanordnung
DE3206919A1 (de) * 1982-02-26 1983-09-15 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zum optischen trennen und verbinden von lichtleitern
US4466696A (en) * 1982-03-29 1984-08-21 Honeywell Inc. Self-aligned coupling of optical fiber to semiconductor laser or LED
SE435760B (sv) * 1982-04-21 1984-10-15 Asea Ab Fiberoptisk legesgivare
US4450563A (en) * 1982-04-23 1984-05-22 Westinghouse Electric Corp. Rapidly turnable laser system
GB2127987B (en) * 1982-09-29 1986-09-03 Standard Telephones Cables Ltd Integrated optic devices
US4468084A (en) * 1982-11-22 1984-08-28 Honeywell Inc. Integrated optical time integrating correlator
US4611884A (en) * 1982-11-24 1986-09-16 Magnetic Controls Company Bi-directional optical fiber coupler
FR2536867B1 (fr) * 1982-11-30 1986-02-07 Thomson Csf Procede d'alignement d'un dispositif optoelectronique
EP0115843B1 (en) * 1983-02-04 1989-06-28 Kei Mori Apparatus for time-sharing light distribution
DE3307669A1 (de) * 1983-03-04 1984-09-06 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Koppelanordnung zwischen einem elektro-optischen und/oder opto-elektrischen halbleiterbauelement und einem lichtwellenleiter
JPS59172787A (ja) * 1983-03-22 1984-09-29 Sharp Corp 半導体レ−ザのサブマウント装置
US4668093A (en) * 1983-06-13 1987-05-26 Mcdonnell Douglas Corporation Optical grating demodulator and sensor system
DE3321988A1 (de) * 1983-06-18 1984-12-20 Standard Elektrik Lorenz Ag, 7000 Stuttgart Vorrichtung zur spielfreien verschiebung von objekten in einem koordinatensystem
FR2549243B1 (fr) * 1983-06-24 1986-01-10 Lyonnaise Transmiss Optiques Coupleur directif a composants associes pour ondes lumineuses
JPS60107532A (ja) * 1983-11-17 1985-06-13 Toshiba Corp 多波長分光光度計
CA1267468A (en) * 1983-11-21 1990-04-03 Hideaki Nishizawa Optical device package
DE3404613A1 (de) * 1984-02-09 1985-08-14 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum loesbaren ankoppeln eines lichtwellenleiters an ein optoelektronisches bauelement
JPS60182403A (ja) * 1984-02-29 1985-09-18 Sumitomo Metal Mining Co Ltd 光分岐素子
JPS60257413A (ja) * 1984-06-04 1985-12-19 Matsushita Electric Ind Co Ltd 光電気複合装置
CA1255382A (en) * 1984-08-10 1989-06-06 Masao Kawachi Hybrid optical integrated circuit with alignment guides
JPS6183515A (ja) * 1984-09-18 1986-04-28 Honda Motor Co Ltd 導光回路ユニツト
EP0175936B1 (de) * 1984-09-24 1988-11-09 Siemens Aktiengesellschaft Optoelektronische Anordnung
JPS6187438A (ja) * 1984-10-04 1986-05-02 Mitsubishi Electric Corp 光信号トロリ−装置
JPS6170828U (ja) * 1984-10-16 1986-05-14
US4705349A (en) * 1985-01-18 1987-11-10 The United States Of America As Represented By The United States Department Of Energy Optical switch
US4699449A (en) * 1985-03-05 1987-10-13 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Optoelectronic assembly and method of making the same
GB8522316D0 (en) * 1985-09-09 1985-10-16 British Telecomm Optical fibre termination
DE3667335D1 (de) * 1985-10-16 1990-01-11 British Telecomm Bewegliches gehaeuse fuer ein element.
US4779946A (en) * 1986-02-14 1988-10-25 American Telephone And Telegraph Company, At&T Bell Laboratories Microminiature optical assembly
US4820013A (en) * 1987-01-06 1989-04-11 Alps Electric Co., Ltd. LED array head
US4826272A (en) * 1987-08-27 1989-05-02 American Telephone And Telegraph Company At&T Bell Laboratories Means for coupling an optical fiber to an opto-electronic device
JPH06180207A (ja) * 1992-12-11 1994-06-28 Sankyo Seiki Mfg Co Ltd 回転角度検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6711321B2 (en) 2000-01-20 2004-03-23 Japan Science And Technology Corporation Mechanical optical switch and method for manufacturing the same

Also Published As

Publication number Publication date
DE3667864D1 (de) 1990-02-01
ATE49064T1 (de) 1990-01-15
JPS63501382A (ja) 1988-05-26
US4896936A (en) 1990-01-30
JPH0827432B2 (ja) 1996-03-21
WO1987002518A1 (en) 1987-04-23
US4854658A (en) 1989-08-08
DE3667335D1 (de) 1990-01-11
DE3687063D1 (de) 1992-12-10
EP0223414B1 (en) 1994-01-12
US4802727A (en) 1989-02-07
US4846930A (en) 1989-07-11
US4871244A (en) 1989-10-03
ATE50864T1 (de) 1990-03-15
EP0219356B1 (en) 1989-12-06
JPH0690329B2 (ja) 1994-11-14
GR3000376T3 (en) 1991-06-07
DE3687063T2 (de) 1993-03-18
EP0223414A1 (en) 1987-05-27
ES2012346B3 (es) 1990-03-16
GR3000264T3 (en) 1991-03-15
SG892G (en) 1992-03-20
EP0219359A1 (en) 1987-04-22
JP2514343B2 (ja) 1996-07-10
EP0219358B1 (en) 1991-03-06
ATE82076T1 (de) 1992-11-15
DE3669401D1 (en) 1990-04-12
EP0219359B1 (en) 1990-03-07
US4825262A (en) 1989-04-25
GR3000242T3 (en) 1991-03-15
DE3677881D1 (de) 1991-04-11
EP0219357A1 (en) 1987-04-22
ES2013599B3 (es) 1990-05-16
WO1987002476A1 (en) 1987-04-23
US4867532A (en) 1989-09-19
ATE61487T1 (de) 1991-03-15
EP0226296A1 (en) 1987-06-24
JPS63501600A (ja) 1988-06-16
JPH0769520B2 (ja) 1995-07-31
JPS63501385A (ja) 1988-05-26
WO1987002475A1 (en) 1987-04-23
JPS63501383A (ja) 1988-05-26
WO1987002470A1 (en) 1987-04-23
EP0226296B1 (en) 1992-11-04
WO1987002474A1 (en) 1987-04-23
ES2011773B3 (es) 1990-02-16
JPH077149B2 (ja) 1995-01-30
ATE100245T1 (de) 1994-01-15
WO1987002472A1 (en) 1987-04-23
EP0219358A1 (en) 1987-04-22
EP0219357B1 (en) 1989-12-27
EP0219356A1 (en) 1987-04-22
DE3689537D1 (de) 1994-02-24
DE3689537T2 (de) 1994-04-28
ATE48480T1 (de) 1989-12-15

Similar Documents

Publication Publication Date Title
JPS63501384A (ja) 放射偏向器アセンブリ
US6386716B2 (en) Optical mirror system with multi-axis rotational control
US6795602B2 (en) Flexible, modular, compact fiber optic switch
CN100357772C (zh) 具有光角度放大的微镜面器件
US6598985B2 (en) Optical mirror system with multi-axis rotational control
US6108466A (en) Micro-machined optical switch with tapered ends
US6212309B1 (en) Optical cross point switch using deformable micromirror
KR20010085809A (ko) 유연한 모듈러형 콤팩트 광섬유 스위치
JP2003014997A (ja) 超小型光電子機械システム（ｍｏｅｍｓ）
US6815865B2 (en) Switching arrangement for a radiation guide
US6415068B1 (en) Microlens switching assembly and method
Fan et al. Digital MEMS switch for planar photonic crossconnects
KR20010098712A (ko) 광 스위칭 소자와 이를 사용하는 광 스위칭 장치 및이미지 디스플레이 장치
JP4180824B2 (ja) コンパクトなファイバ・ピグテール結合テラヘルツ・モジュール
JP2992887B2 (ja) 変形可能なマイクロミラ―を用いた光交点スイッチ
US6694072B1 (en) Flexible, modular, compact fiber switch improvements
KR100370079B1 (ko) 마이크로미러 어레이와 그 제조방법
JPH03119306A (ja) 光ケーブル用コネクタ
JP2005519323A5 (ja)
CA1284372C (en) Radiation deflector assembly
US6907155B2 (en) Three-dimensional optical switch with annular input-output ports
CA2147491A1 (en) Electrostatic path length control transducer
KR20040066563A (ko) Ｍｅｍｓ를 이용한 광 스위치
KR100450756B1 (ko) 광통신용 광신호 스위치 어레이
JPS61241721A (ja) 光路変換方法