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JPS6262869U - - Google Patents

Info

Publication number
JPS6262869U
JPS6262869U JP15330985U JP15330985U JPS6262869U JP S6262869 U JPS6262869 U JP S6262869U JP 15330985 U JP15330985 U JP 15330985U JP 15330985 U JP15330985 U JP 15330985U JP S6262869 U JPS6262869 U JP S6262869U
Authority
JP
Japan
Prior art keywords
spinner
workpiece
flow path
coating device
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15330985U
Other languages
Japanese (ja)
Other versions
JPH0444217Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja
Publication of JPS6262869U publication Critical patent/JPS6262869U/ja
Application granted granted Critical
Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る塗布装置の縦断面図、第
２図は同塗布装置の平面図、第３図はスピンナー
の斜視図、第４図は被処理物の外周部を示す拡大
断面図である。 尚、図面中１はケース、８はスピンナーガイド
、９はスピンナー、２６は滴下ノズル、２８は噴
出流路、２９は戻り流路、Ｗは被処理物、Ａは廻
り込んだ塗布液である。 Fig. 1 is a longitudinal sectional view of the coating device according to the present invention, Fig. 2 is a plan view of the coating device, Fig. 3 is a perspective view of the spinner, and Fig. 4 is an enlarged sectional view showing the outer periphery of the object to be treated. It is. In the drawings, 1 is a case, 8 is a spinner guide, 9 is a spinner, 26 is a dripping nozzle, 28 is an ejection flow path, 29 is a return flow path, W is a workpiece, and A is a coating liquid that has gone around.

Claims (1)

【実用新案登録請求の範囲】 (1) ケース内に設けたスピンナーガイド内に下
方からスピンナーを臨ませ、このスピンナー上に
被処理物を載置し、スピンナーにて被処理物を回
転せしめることで被処理物表面に滴下ノズルから
滴下した塗布液を遠心力で被処理物表面に均一に
広げるようにした塗布装置において、前記スピン
ナーガイドに被処理物の外周部下面に向けて溶剤
を噴出する噴出流路を形成したことを特徴とする
塗布装置。 (2) 前記スピンナーガイドには前記噴出流路か
ら噴出した溶剤を下方に導く戻り流路を形成した
ことを特徴とする実用新案登録請求の範囲第１項
記載の塗布装置。[Scope of Claim for Utility Model Registration] (1) A spinner is placed in a spinner guide provided in a case from below, a workpiece is placed on the spinner, and the workpiece is rotated by the spinner. In a coating device that uses centrifugal force to uniformly spread a coating liquid dropped from a dripping nozzle onto the surface of a workpiece, the solvent is spouted toward the lower surface of the outer periphery of the workpiece through the spinner guide. A coating device characterized by forming a flow path. (2) The coating device according to claim 1, wherein the spinner guide is provided with a return flow path that guides the solvent ejected from the ejection flow path downward.
JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (en) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (en) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262869U true JPS6262869U (en) 1987-04-18
JPH0444217Y2 JPH0444217Y2 (en) 1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153309U Expired JPH0444217Y2 (en) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0444217Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (en) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd Substrate surface treatment
JPH03219445A (en) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd Production of optical information recording medium
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (en) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 Rotary surface treatment equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (en) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 Rotary surface treatment equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (en) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd Substrate surface treatment
JPH03219445A (en) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd Production of optical information recording medium
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Also Published As

Publication number Publication date
JPH0444217Y2 (en) 1992-10-19

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