JPS62180939U - - Google Patents
Info
- Publication number
- JPS62180939U JPS62180939U JP6895186U JP6895186U JPS62180939U JP S62180939 U JPS62180939 U JP S62180939U JP 6895186 U JP6895186 U JP 6895186U JP 6895186 U JP6895186 U JP 6895186U JP S62180939 U JPS62180939 U JP S62180939U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- electrode
- circular hole
- ion source
- etching chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 238000010884 ion-beam technique Methods 0.000 claims description 4
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は反応性イオンビームエツチング装置の
断面図、第２図は本考案実施例の電極の要部拡大
断面図、第３図は従来の電極の要部拡大断面図で
ある。
１……エツチング室、３……イオン源、４……
イオン源側電極、５……エツチング室側電極。
FIG. 1 is a sectional view of a reactive ion beam etching apparatus, FIG. 2 is an enlarged sectional view of a main part of an electrode according to an embodiment of the present invention, and FIG. 3 is an enlarged sectional view of a main part of a conventional electrode. 1... Etching chamber, 3... Ion source, 4...
Ion source side electrode, 5...Etching chamber side electrode.
Claims (1)
出し用の円穴が複数個形成された電極が２枚備え
られる反応性イオンビームエツチング装置におい
て、エツチング室側電極の円穴がイオン源側電極
の円穴よりも大きいことを特徴とする反応性イオ
ンビームエツチング装置。 In a reactive ion beam etching device equipped with two electrodes each having a plurality of circular holes for extracting the ion beam between the etching chamber and the ion source, the circular hole in the electrode on the etching chamber side is connected to the circular hole in the electrode on the ion source side. A reactive ion beam etching device characterized by being larger than.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6895186U JPS62180939U (en) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6895186U JPS62180939U (en) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180939U true JPS62180939U (en) | 1987-11-17 |
Family
ID=30909237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6895186U Pending JPS62180939U (en) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180939U (en) |
-
1986
- 1986-05-08 JP JP6895186U patent/JPS62180939U/ja active Pending