JPS62116542U - - Google Patents
Info
- Publication number
- JPS62116542U JPS62116542U JP457086U JP457086U JPS62116542U JP S62116542 U JPS62116542 U JP S62116542U JP 457086 U JP457086 U JP 457086U JP 457086 U JP457086 U JP 457086U JP S62116542 U JPS62116542 U JP S62116542U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- semiconductor devices
- model registration
- packaging work
- work room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
第１図は本考案の実施例の正面図、第２図はそ
の側面図、第３図はその平面図、第４図はパスボ
ツクスの平面図、第５図は使用状態を示す側面図
である。
符号の説明、１……カバー、２……架台、３…
…扉、５……透視窓、６，７……扉、８，９……
透視窓、１０……グローブ取付口、１１……パス
ボツクス、１２，１３……小扉、１５……チツ素
ガス供給口、１６……ガス出口。
Fig. 1 is a front view of an embodiment of the present invention, Fig. 2 is a side view thereof, Fig. 3 is a plan view thereof, Fig. 4 is a plan view of the pass box, and Fig. 5 is a side view showing the state of use. . Explanation of symbols, 1... Cover, 2... Frame, 3...
...Door, 5...See-through window, 6,7...Door, 8,9...
See-through window, 10... glove attachment port, 11... pass box, 12, 13... small door, 15... nitrogen gas supply port, 16... gas outlet.
Claims (1)
複数の扉を備えるとともに、室内に向かうグロー
ブを取り付けたグローブ取付口を多数設け、また
、内部に、内外両面に小扉を備えたパスボツクス
を１ないし複数設置するとともに、チツ素ガス供
給口とガス出口とを配備して成る半導体デバイス
等のパツケージング作業室。 (2) 扉に透視窓を設けた実用新案登録請求の範
囲第１項記載の半導体デバイス等のパツケージン
グ作業室。 (3) チツ素ガス供給口とガス出口をパスボツク
スにも設けた実用新案登録請求の範囲第１項記載
の半導体デバイス等のパツケージング作業室。[Scope of Claim for Utility Model Registration] (1) A plurality of doors are provided on the circumference of the cover that is sealed in a sealed state on the pedestal, and a number of glove attachment openings for attaching gloves facing the room are provided, and inside the cover, A packaging work room for semiconductor devices, etc., which is equipped with one or more pass boxes equipped with small doors on both the inside and outside, as well as a nitrogen gas supply inlet and a gas outlet. (2) A packaging work room for semiconductor devices, etc., as set forth in claim 1 of the utility model registration claim, which has a transparent window in the door. (3) A packaging work room for semiconductor devices, etc. as set forth in claim 1 of the utility model registration claim, in which a nitrogen gas supply port and a gas outlet are also provided in the pass box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP457086U JPS62116542U (en) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP457086U JPS62116542U (en) | 1986-01-17 | 1986-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62116542U true JPS62116542U (en) | 1987-07-24 |
Family
ID=30785348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP457086U Pending JPS62116542U (en) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62116542U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59202642A (en) * | 1983-05-02 | 1984-11-16 | Nippon Denso Co Ltd | Manufacture of hybrid integrated circuit device |
-
1986
- 1986-01-17 JP JP457086U patent/JPS62116542U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59202642A (en) * | 1983-05-02 | 1984-11-16 | Nippon Denso Co Ltd | Manufacture of hybrid integrated circuit device |
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