JPS6171964A - Cylinder lapping device - Google Patents
Cylinder lapping deviceInfo
- Publication number
- JPS6171964A JPS6171964A JP59195482A JP19548284A JPS6171964A JP S6171964 A JPS6171964 A JP S6171964A JP 59195482 A JP59195482 A JP 59195482A JP 19548284 A JP19548284 A JP 19548284A JP S6171964 A JPS6171964 A JP S6171964A
- Authority
- JP
- Japan
- Prior art keywords
- work
- cylinder
- cylinders
- hollow
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、水晶振動子用水晶片などを製造する際、矩形
薄板状ウェハの表面に所定の曲面加工を施すために用い
られる、円筒ランプ装置の改良に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a cylindrical lamp device used for processing a predetermined curved surface on the surface of a rectangular thin plate wafer when manufacturing a crystal piece for a crystal resonator, etc. This is related to the improvement of.
従来技術について図面により説明する。 The prior art will be explained with reference to the drawings.
第1図は薄板片の斜視図、第2図は円筒研削法を説明す
るための円筒研削盤の正面図、第3図は円筒レンズ研摩
盤の概略断面図である。FIG. 1 is a perspective view of a thin plate piece, FIG. 2 is a front view of a cylindrical grinder for explaining the cylindrical grinding method, and FIG. 3 is a schematic sectional view of a cylindrical lens grinder.
従来、第1図に示すような円筒面1aを有する薄板片1
を製作するには、第2図に示すように、正多角形に成形
されたドラム2の平担部2aに、当初の厚みが一様な薄
板片1をワックス等の接着剤により貼着した後、比較的
低速度で回転する回転軸に取付けて回転させ、これに対
して高速回転する研削砥石6を接触させて研削成形する
円筒研削法が採用されていた。しかし、この方法は、加
工面に研削によるクラック層や歪層が深く入り、最終品
質を決定する電気的緒特性を著しく低下させるという欠
点を有していた。また、第3図に示すような円筒レンズ
研摩機が考案され実用に供されているが、加工精度が悪
く、加工能率も低いので量産性に乏しいという欠点を有
していた。Conventionally, a thin plate piece 1 having a cylindrical surface 1a as shown in FIG.
To manufacture the drum, as shown in Fig. 2, a thin plate piece 1 with an initial uniform thickness is attached to the flat part 2a of the drum 2, which is formed into a regular polygon, using an adhesive such as wax. Thereafter, a cylindrical grinding method was adopted in which the shaft was attached to a rotating shaft that rotated at a relatively low speed and rotated, and a grinding wheel 6 that rotated at a high speed was brought into contact with the shaft for grinding. However, this method has the disadvantage that a crack layer or a strained layer due to grinding is deep in the machined surface, and the electrical characteristics, which determine the final quality, are significantly deteriorated. Further, a cylindrical lens polishing machine as shown in FIG. 3 has been devised and put into practical use, but it has the disadvantage of poor machining accuracy and low machining efficiency, making it difficult to mass-produce.
本発明は、以上のような従来技術の欠点に鑑み、高い精
度の円筒面加工を極めて高能率に行なうことができる新
規な円筒ラップ装置を提供しようとするものである。In view of the above-mentioned drawbacks of the prior art, the present invention aims to provide a novel cylindrical lapping device that can perform highly accurate cylindrical surface machining with extremely high efficiency.
本発明の装置は、中空円筒を所定速度で回転駆動可能に
形成し、この中空円筒の内部に、回転軸を有する複数若
しくは1個のワーク円筒を配置し、このワーク円筒の外
周面に複数の板状被加工物を貼着し、かつ、前記回転軸
は、一対の水平方向位置決め手段を介して上下方向の移
動が可能に水平方向に位置決めされると共に、軸方向の
往復駆動機構に連結されたことを特徴とする。The device of the present invention is formed by forming a hollow cylinder so as to be rotatable at a predetermined speed, disposing a plurality of work cylinders or one work cylinder having a rotating shaft inside the hollow cylinder, and disposing a plurality of work cylinders on the outer peripheral surface of the work cylinder. A plate-shaped workpiece is attached, and the rotating shaft is positioned horizontally so as to be movable in the vertical direction via a pair of horizontal positioning means, and is connected to an axial reciprocating drive mechanism. It is characterized by:
以下、図示の実施例により本発明を詳述する。 Hereinafter, the present invention will be explained in detail with reference to illustrated embodiments.
第4図、第5図は本発明の一実施例を示すもので、第4
図は円筒ラップ盤の断面正面図、第5図は円筒ランプ盤
の左側面図である。図において、基台10上には、丸穴
11を有する支持部機12.16が固設され、丸穴11
には2個のころ軸受14が各1個嵌着され、小径の中空
円筒15を回転可能に支持している。中空円筒15の両
端部には、内外径がやや大きく形成され、外端面に立−
につ部16aを有する一対の大径中空円筒16.16が
固着されている。小径中空円筒15はベルト17、プー
リ18を介して、モータ19により所定の速度で回転駆
動可能に形成されている。FIGS. 4 and 5 show an embodiment of the present invention.
The figure is a cross-sectional front view of the cylindrical lapping plate, and FIG. 5 is a left side view of the cylindrical lamp plate. In the figure, a support unit 12.16 having a round hole 11 is fixedly installed on the base 10.
Two roller bearings 14 are fitted in each, and rotatably support a small-diameter hollow cylinder 15. Both ends of the hollow cylinder 15 are formed with slightly larger inner and outer diameters, and the outer end faces are erected.
A pair of large diameter hollow cylinders 16.16 having joints 16a are fixed. The small-diameter hollow cylinder 15 is configured to be rotatably driven at a predetermined speed by a motor 19 via a belt 17 and a pulley 18.
中空円筒16.16の内部には、各々被加工物である複
数の矩形薄板片1を貼着するための外周部20aを有す
る一対のワーク円筒20,20が配置されている。ワー
ク円筒20には中心穴が設けられており、この穴に回転
軸21を挿通し、止ネジ、キーなどの固定手段により結
合され、回転力が伝達可能となっている。回転軸210
両端付近には一対の二叉状支持部材22.22が設けら
れ、前記回転軸21の水平方向の移動を規制して水平位
置決めすると共に、上下方向には自由に移動可能に形成
されている。回転軸21の一端は、接続金具26、フレ
キシブルワイヤ24、接続金具25を介してモータ26
に接続されている。またモータ26は、一方向スライド
台27上に載置固定されており、図示を省略した駆動手
段により、回転軸21の軸方向に往復動可能となってい
る。Inside the hollow cylinder 16.16, a pair of work cylinders 20, 20 each having an outer periphery 20a to which a plurality of rectangular thin plate pieces 1, which are workpieces, are attached are arranged. The workpiece cylinder 20 is provided with a center hole, and the rotating shaft 21 is inserted into this hole and connected by fixing means such as a set screw or key, so that rotational force can be transmitted. Rotating shaft 210
A pair of bifurcated support members 22, 22 are provided near both ends, and are formed to restrict the horizontal movement of the rotating shaft 21 and to horizontally position it, and to be freely movable in the vertical direction. One end of the rotating shaft 21 is connected to the motor 26 via a connecting fitting 26, a flexible wire 24, and a connecting fitting 25.
It is connected to the. Further, the motor 26 is placed and fixed on a one-way slide table 27, and is capable of reciprocating in the axial direction of the rotating shaft 21 by a drive means (not shown).
またスライド台27は上下微動台28上に固定されてお
り、ワーク円筒200寸法に応じてモータ26の高さを
調節し、回転軸21の高さと整合させることが出来るよ
うになっている。Further, the slide table 27 is fixed on the vertical fine movement table 28, so that the height of the motor 26 can be adjusted according to the dimensions of the workpiece cylinder 200, and can be aligned with the height of the rotating shaft 21.
上記実施例の装置において、ワーク円筒20の外周面に
被加工物薄板片1を貼着し、大径中空円筒16内に防錆
剤を含む水と砥粒とを混合した研摩液を注入し、ワーク
円筒20を図示の矢印入方向に、また中空円筒16を矢
印B方向に、更に回転軸21を矢印C方向に往復動させ
ることにより、被加工物薄板片10表面にワークホイー
ル20の半径にほぼ等しい曲率半径を有する円筒面を極
めて高能率に形成できる。In the apparatus of the above embodiment, the workpiece thin plate piece 1 is attached to the outer peripheral surface of the workpiece cylinder 20, and a polishing liquid containing a mixture of water containing a rust preventive agent and abrasive grains is injected into the large diameter hollow cylinder 16. By reciprocating the work cylinder 20 in the direction of the arrow shown in the figure, the hollow cylinder 16 in the direction of the arrow B, and the rotary shaft 21 in the direction of the arrow C, the radius of the work wheel 20 is formed on the surface of the thin plate piece 10 of the workpiece. A cylindrical surface having a radius of curvature approximately equal to can be formed with extremely high efficiency.
第6図、第7図は、本発明の他の実施例を示すもので、
第6図は円筒ラップ盤の断面正面図、第7図は円筒ラン
プ盤の側面図である。内外径が一様な中空円筒60の外
周部に一対の軸受61.61を嵌着し、これらを、一対
の■字形載置部材62.62′上に着脱自在に載置固定
した構造となっている。また、■字形載置部材62.6
2′の側面にはL字形に形成された二叉状支持部材ろ6
が固定されている。中空円筒60の外周にはタイミング
ベルトプーリ64が固設されており、タイミングベル1
−35.モータプーリ66を介してモータ67により所
定速度で中空円筒30を回動させることが出来るように
なっている。6 and 7 show other embodiments of the present invention,
FIG. 6 is a cross-sectional front view of the cylindrical lapping plate, and FIG. 7 is a side view of the cylindrical lamp plate. A pair of bearings 61 and 61 are fitted onto the outer periphery of a hollow cylinder 60 with uniform inner and outer diameters, and these are removably mounted and fixed on a pair of ■-shaped mounting members 62 and 62'. ing. In addition, ■-shaped mounting member 62.6
On the side of 2', there is a bifurcated support member filter 6 formed in an L-shape.
is fixed. A timing belt pulley 64 is fixed on the outer periphery of the hollow cylinder 60, and the timing belt 1
-35. The hollow cylinder 30 can be rotated by a motor 67 via a motor pulley 66 at a predetermined speed.
中空円筒600両端部には立上り部30aが設けられて
いる。中空円筒60の内部には複数(図では8個)のワ
ーク円筒68が回転軸69に固定されて配置されている
。中空円筒60の立上り部30aの内径はワーク円筒3
8の外径より太きく形成されており、ワーク円筒68を
容易に部外に取出せるようになっている。回転軸69の
回転駆動機構及び軸方向の往復動機構等は第4図のもの
と同様で、矢印り、E、F方向へ回転及び摺動運動を行
うようになっている。Rising portions 30a are provided at both ends of the hollow cylinder 600. Inside the hollow cylinder 60, a plurality of (eight in the figure) work cylinders 68 are fixed to a rotating shaft 69 and arranged. The inner diameter of the rising portion 30a of the hollow cylinder 60 is the same as that of the work cylinder 3.
The outer diameter of the work cylinder 68 is larger than that of the cylinder 8, so that the work cylinder 68 can be easily taken out. The rotary drive mechanism and axial reciprocating mechanism of the rotary shaft 69 are similar to those shown in FIG. 4, and are designed to rotate and slide in the arrow, E, and F directions.
上記実施例によれば、多数のワーク円筒を同時加工する
ことが可能であり、1バッチ当りの加工数量を大幅に拡
大することができる。また、中空円筒30の着脱が容易
であり、中空円筒の交換や、筒内の洗浄がし易く、作業
性を大幅に向上させることができろ。According to the embodiment described above, it is possible to simultaneously process a large number of work cylinders, and the number of workpieces to be processed per batch can be greatly increased. Further, the hollow cylinder 30 can be easily attached and detached, and the hollow cylinder can be easily replaced and the inside of the cylinder can be cleaned, thereby greatly improving work efficiency.
第8図、第9図は本発明の更に他の実施例を示すもので
、第8図は円筒ランプ盤の概略斜視図、第9図は断面正
面図である。中空円筒40の内部には被加工部薄板片1
を外周面に貼着したワーク円筒41が配置されている。8 and 9 show still another embodiment of the present invention, FIG. 8 being a schematic perspective view of a cylindrical lamp board, and FIG. 9 being a sectional front view. Inside the hollow cylinder 40 is a thin plate piece 1 for the workpiece.
A work cylinder 41 having a cylindrical material affixed to its outer circumferential surface is arranged.
このワーク円筒41は第9図に示すように、軸方向に長
い中空の円筒の両端部に、蓋42.42固着し、この蓋
42の中心には軸46を植設し、更にこの軸46には複
数のころがり軸受44が設けられており、この部分が二
叉状支持部材45の二叉部に嵌合され、上下方向に移動
可能に水平方向の位置決めがなされている。軸46は接
続金具46、フレキシブルワイヤ47、接続金具48を
介してモータ49に連結され、ワークホイール41を矢
印G方向に回転させ、同時に中空円筒40を矢印40方
向へ回転させ、軸46を矢印■方向へ摺動させる構成と
なっている。As shown in FIG. 9, this work cylinder 41 has lids 42 and 42 fixed to both ends of an axially long hollow cylinder, and a shaft 46 is implanted in the center of this lid 42. is provided with a plurality of rolling bearings 44, which are fitted into the two prongs of the bifurcated support member 45, and are horizontally positioned so as to be movable in the vertical direction. The shaft 46 is connected to a motor 49 via a connecting fitting 46, a flexible wire 47, and a connecting fitting 48, and rotates the work wheel 41 in the direction of arrow G, simultaneously rotates the hollow cylinder 40 in the direction of arrow 40, and rotates the shaft 46 in the direction of arrow G. ■It is configured to slide in the direction.
本実施例によれば、ワーク円筒41が一体構造であり、
かつ、軸43と強固に結合した構成なので、厚みの薄い
多数のワーク円筒を軸に串差し状に重ねた構造に比較し
て、ワーク円筒が作り易く、また、軸とのクリアランス
が一切無いので加工精度が向上するなどの効果が得られ
る。According to this embodiment, the work cylinder 41 has an integral structure,
In addition, since the structure is firmly connected to the shaft 43, it is easier to make the work cylinder compared to a structure in which many thin work cylinders are stacked on the shaft in a skewer shape, and there is no clearance with the shaft. Effects such as improved processing accuracy can be obtained.
以」二詳述したように、本発明による円筒ラップ装置は
、比較的低速度で回転する中空円筒と、その内部に配置
され回転及び往復動するワーク円筒との組合せにより、
極めて高精度、高能率、かつ高い表面品質を有する円筒
面加工を行うことができる。As described in detail below, the cylindrical wrapping device according to the present invention uses a combination of a hollow cylinder that rotates at a relatively low speed and a work cylinder that is arranged inside the hollow cylinder and rotates and reciprocates.
Cylindrical surface processing with extremely high precision, high efficiency, and high surface quality can be performed.
第1図は、本発明の加工対象である水晶薄板片の一例の
斜視図、第2図、第3図はそれぞれ、従来の加工法の一
例を示す説明図で第2図は円筒研削盤の正面図、第3図
は円筒レンズ研摩盤の概略断面図、第4図は本発明の一
実施例の一部断面正面図、第5図はその左側面図、第6
図は本発明の他の実施例の一部断面正面図、第7図はそ
の側面図、第8図は本発明の更に他の実施例の要部斜視
図、第9図は同じくワーク円筒の縦断面図である。
16.30,40・・・・・中空円筒、20.68.4
1・・・・・・ワーク円筒、21.69.46・・・・
・回転軸。Fig. 1 is a perspective view of an example of a crystal thin plate piece to be processed by the present invention, Figs. 3 is a schematic sectional view of a cylindrical lens polishing machine, FIG. 4 is a partially sectional front view of an embodiment of the present invention, FIG. 5 is a left side view thereof, and FIG.
The figure is a partially sectional front view of another embodiment of the present invention, FIG. 7 is a side view thereof, FIG. 8 is a perspective view of a main part of still another embodiment of the present invention, and FIG. FIG. 16.30,40...Hollow cylinder, 20.68.4
1... Work cylinder, 21.69.46...
·Axis of rotation.
Claims (1)
、1個の回転軸を有する複数若しくは1個のワーク円筒
を配置し、このワーク円筒の外周面に複数の板状被加工
物を貼着し、かつ、前記回転軸は、一対の水平方向位置
決め手段を介して上下方向に移動可能に水平方向に位置
決めされると共に、軸方向の往復駆動機構に連結された
ことを特徴とする円筒ラップ装置。A plurality of work cylinders or one work cylinder having one rotating shaft are arranged inside a hollow cylinder formed to be rotatably driven at a predetermined speed, and a plurality of plate-shaped workpieces are pasted on the outer peripheral surface of this work cylinder. cylindrical wrap, wherein the rotating shaft is horizontally positioned so as to be vertically movable via a pair of horizontal positioning means, and is connected to an axial reciprocating drive mechanism. Device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59195482A JPS6171964A (en) | 1984-09-18 | 1984-09-18 | Cylinder lapping device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59195482A JPS6171964A (en) | 1984-09-18 | 1984-09-18 | Cylinder lapping device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6171964A true JPS6171964A (en) | 1986-04-12 |
Family
ID=16341817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59195482A Pending JPS6171964A (en) | 1984-09-18 | 1984-09-18 | Cylinder lapping device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6171964A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102398207A (en) * | 2011-12-16 | 2012-04-04 | 特新电路板器材(东莞)有限公司 | Grinder |
CN102765045A (en) * | 2012-08-07 | 2012-11-07 | 天津万达新茂机械有限公司 | Ceramic-casing grinding and reaming machine |
JP2016033912A (en) * | 2014-07-30 | 2016-03-10 | 三星エスディアイ株式会社Samsung SDI Co.,Ltd. | Secondary battery, and method of manufacturing the same |
-
1984
- 1984-09-18 JP JP59195482A patent/JPS6171964A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102398207A (en) * | 2011-12-16 | 2012-04-04 | 特新电路板器材(东莞)有限公司 | Grinder |
CN102765045A (en) * | 2012-08-07 | 2012-11-07 | 天津万达新茂机械有限公司 | Ceramic-casing grinding and reaming machine |
CN102765045B (en) * | 2012-08-07 | 2016-02-10 | 天津万达新茂机械有限公司 | A kind of porcelain bushing abrasive expanding holes machine |
JP2016033912A (en) * | 2014-07-30 | 2016-03-10 | 三星エスディアイ株式会社Samsung SDI Co.,Ltd. | Secondary battery, and method of manufacturing the same |
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