JPS60144718A - Optical shutter element - Google Patents
Optical shutter elementInfo
- Publication number
- JPS60144718A JPS60144718A JP97784A JP97784A JPS60144718A JP S60144718 A JPS60144718 A JP S60144718A JP 97784 A JP97784 A JP 97784A JP 97784 A JP97784 A JP 97784A JP S60144718 A JPS60144718 A JP S60144718A
- Authority
- JP
- Japan
- Prior art keywords
- light
- effect
- voltage
- optical shutter
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/055—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect the active material being a ceramic
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
産業−ノ二の利用分野
本発明は、光学式プリンターの書き込み用デバイス、カ
メラにおける高速光シャッター等、光制御機器に用いる
ことができる固体の光シヤツター素子に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a solid-state optical shutter element that can be used in optical control equipment such as writing devices in optical printers and high-speed optical shutters in cameras. .
従来例の構成とその問題点
近年、光通信、光情報処理など光関連技術の開発が非常
に活発に行なわれており、それに伴なう光学部品、光制
御デバイスの開発が重要視されている。その中にあって
、電気光学効果を有する同体の透光性基板も、光制御デ
バイスとしての九シャッター等に利用でき、注目されて
いる。Conventional configurations and their problems In recent years, the development of optical-related technologies such as optical communication and optical information processing has been very active, and the development of optical components and optical control devices associated with this has become important. . Among these, a transparent substrate having an electro-optical effect is also attracting attention because it can be used as a light control device such as a shutter.
現在上記光シヤツター素子として知られているものは、
La添加のチタン酸ジルコン酸鉛(PLZT)等の透光
性磁器の平板」二に、表裏対称に、もしくは少なくとも
片面に、帯状電極を設けた基板を、上記電極に電圧を印
加した時に生じる電界ベク]・ルの方向に対して、±4
6°の偏光軸を有する偏光板で挾んだ構造を有したもの
である。Currently known optical shutter elements are:
A flat plate of translucent porcelain such as La-doped lead zirconate titanate (PLZT) is used to create an electric field when a voltage is applied to the electrodes. ±4 with respect to the direction of
It has a structure in which it is sandwiched between polarizing plates having a polarization axis of 6°.
以下、図面を参照しながら、従来の光シヤツター素子に
ついて説明する。A conventional optical shutter element will be described below with reference to the drawings.
第1図dは従来の光シャッター素Tの構成図の例を示し
たものである。1はPLZTY板、2 &;LPLZT
乎板1上に設けられた共通電極、3は、1i。FIG. 1d shows an example of the configuration of a conventional optical shutter element T. 1 is PLZTY board, 2 &;LPLZT
The common electrode 3 provided on the plate 1 is 1i.
圧印加用電極群を示している。4は偏光子、6は検光子
であり、これらは共通成極2と、電圧印加用電極群3間
に電圧を印加した時に生じる電界ベクトルの方向に対し
て±46°の方向に、偏光軸が互いに直交するように構
成される。このように構成された光シヤツター素子の動
作を以下に祝明合、PLZT平板1上に形成された電圧
印加用電極群3ど、共通電極2の電極間に電圧を印加し
ない時は電気光学効果および光弾性効果による複屈折は
牛じず、偏光子4、検光子6によりて光は連断されるが
、′電圧印加用電極群3に電圧を印加すると、電気光学
効果および光弾性効果によって複屈折を生じ、光の偏光
状態が変化し、児が透過する。したがって、電圧印加用
電極群3の任意の部分に電圧を印加すれば、任意の部分
の光を透過することができ、光学式プリンターの書き込
み用ヘッドや、品速光シャッター等に利用できる。A group of electrodes for applying pressure is shown. 4 is a polarizer, 6 is an analyzer, and these are polarized in the direction of ±46° with respect to the direction of the electric field vector that occurs when a voltage is applied between the common polarization 2 and the voltage application electrode group 3. are arranged so that they are orthogonal to each other. The operation of the optical shutter element configured in this way will be described below. When no voltage is applied between the electrodes of the voltage application electrode group 3 formed on the PLZT flat plate 1 and the common electrode 2, the electro-optic effect and the optical Birefringence due to the elastic effect causes light to be interrupted by the polarizer 4 and analyzer 6, but when a voltage is applied to the voltage application electrode group 3, birefringence occurs due to the electro-optic effect and photoelastic effect. This causes a change in the polarization state of the light, which is transmitted through the child. Therefore, by applying a voltage to any part of the voltage application electrode group 3, light from any part can be transmitted, and it can be used as a writing head of an optical printer, a high-speed optical shutter, and the like.
6151図b &:J、、41図aの4Iq成1閃のP
LZT丁−板部分の正面図を示したものであり、共通電
極2と、電圧印加用電極群3間に電圧を印加した時の光
シヤツタ一部分の様子を示している。図中Δ部が光シヤ
ツタ一部であり、電界の分布によって光シヤツタ一部が
拡がっている。したがって、上記構成の光シヤツター素
子を、光学式プリンターの書込み用ヘッドとして用い、
電圧印加用電極群3の任意の部分に電圧を印加して任意
の部分の光を透過し、感光体などに記録する場合、1点
のドツトが拡が9分解能が悪くなるという問題が起こる
。ところで、上述のように、PLZT光シャ、ターは複
屈折効果により生じるのであるが、」二記複屈折が発生
する原因は、電気光学効果としてのカー効果と、電歪効
果による結晶の歪みによるものである。したがって、電
圧を印加することにより、PLZT乎板は機械的な歪を
受ける。第1図dの従来構成図において、電圧印加用電
極群3.!l:、共通電極2の間に電圧を印加すると、
電界強度はPLZT平板1表面の電極端部に集中し、そ
の部分でPLZT平板11d大きな歪・を起こす。しか
し、電極下部のPLZT平板1表面では、電界強度が小
さいために、1’ L Z T平板1は歪まず、上記電
極端部および上記電極下部のPLZT平板1の表面の間
で、非常に大きなストレスがかかり、その部分から、機
械的な破壊が起こり易くなっていた。6151 Figure b &: J,, P of 4Iq formation 1 flash in Figure 41a
This is a front view of the LZT plate portion, and shows the appearance of a portion of the optical shutter when a voltage is applied between the common electrode 2 and the voltage application electrode group 3. In the figure, the Δ section is a part of the optical shutter, and a part of the optical shutter is expanded due to the distribution of the electric field. Therefore, using the optical shutter element with the above configuration as a writing head of an optical printer,
When a voltage is applied to an arbitrary part of the voltage application electrode group 3 to transmit light from an arbitrary part and record it on a photoreceptor or the like, a problem arises in that the resolution of one dot becomes worse due to the spread of a single dot. By the way, as mentioned above, PLZT optical shading is caused by the birefringence effect, but the cause of birefringence is the Kerr effect as an electro-optic effect and the distortion of the crystal due to the electrostrictive effect. It is something. Therefore, by applying a voltage, the PLZT plate undergoes mechanical strain. In the conventional configuration diagram of FIG. 1d, the voltage application electrode group 3. ! l:, when a voltage is applied between the common electrodes 2,
The electric field intensity is concentrated at the electrode end portion of the surface of the PLZT flat plate 1, and a large strain is caused in the PLZT flat plate 11d at that portion. However, since the electric field strength is small on the surface of the PLZT flat plate 1 at the bottom of the electrode, the 1' L Z T flat plate 1 is not distorted, and there is a very large Stress was applied to the parts, making them susceptible to mechanical failure.
以北のj二うに、」二記従来構成の光シヤツター素子で
は、光シヤツタ一部が拡がり分解能が悪くなること、電
極端部と電極下部の間でPLZT平板10表面に非常に
大きなストレスが加わり、機械的な破壊が1j℃こり易
いことという大きな問題を有していた。In the optical shutter element with the conventional configuration, a part of the optical shutter spreads and the resolution deteriorates, and a very large stress is applied to the surface of the PLZT flat plate 10 between the electrode end and the electrode bottom. , had a major problem in that it was easy to mechanically break by 1J°C.
発明の目的
本発明の゛目的は、光学式プリンターの書き込み用デバ
イスなどに用いて非常に有効であり、品分lQ’r:i
lて、長期1゛駆動ににる経時的な変化の少ない、晶信
頼性の光シヤツター素子を提供することである。OBJECTS OF THE INVENTION An object of the present invention is to provide a writing device for optical printers which is very effective for use in writing devices for optical printers,
Another object of the present invention is to provide an optical shutter element with crystal reliability that exhibits little change over time during long-term 1° driving.
発明の構成
イ(発明の光シヤツター素子は、電気光学効果と;’C
J’l’性効1(乏を41する144体の透光性磁器の
少なくとも一方の面に、光シヤツターを形成するように
帯状電極を設け、その上に樹脂を部分的に形成し、上記
透光性磁器の表裏に、偏光板を偏光軸が互いに900の
角度をなすように配置したものである。Structure of the invention (a) The optical shutter element of the invention has an electro-optic effect;
A strip-shaped electrode is provided on at least one surface of the 144 pieces of translucent porcelain to form a light shutter, and a resin is partially formed on the strip-shaped electrode. Polarizing plates are arranged on the front and back sides of translucent porcelain so that their polarization axes make an angle of 900 degrees to each other.
これにより、電界が集中し、大きな歪を生じる部分を肯
脂で固定し、歪量を押えることにより機械的な破壊をな
くし、また、不必要な光もれの部分も樹脂により固定し
、電歪効果による複屈折を起こさないようにすることに
よって、光もれをなくし、品信頼性の筒分解能光シャッ
ター素r−を実現するものである。As a result, areas where the electric field is concentrated and cause large distortions are fixed with resin, reducing the amount of distortion and eliminating mechanical damage.Additionally, areas with unnecessary light leakage are also fixed with resin and electrically By preventing birefringence due to distortion effects, light leakage is eliminated and a highly reliable cylindrical resolution optical shutter element r- is realized.
実施例の説明
以下本発明の実施例について、図面を参照しながら説明
する。DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第2図a、b、cは本発明の実施例における光シヤツタ
ー素子の構成を示したもっである。第2図aは本発明の
光シヤツター素子の構成図であり、bは第2図aのイー
ロ間の断面図、Cは上記構成図の正面図を示しているn
第2図8において、6はPLZT平板、f7は共通電極
、8は電圧印加用電極群である。9は本発明にかかわる
樹脂膜である。10.11は偏光子、検光子を示してお
シ、共通電極7と電圧印加用電極群8間に電圧を印加し
た時に生じる電界ベクトルの方向に対して、士46°の
方向に偏光軸を有するように構成されている。FIGS. 2a, 2b, and 2c show the structure of an optical shutter element in an embodiment of the present invention. FIG. 2a is a block diagram of the optical shutter element of the present invention, b is a cross-sectional view between the eros in FIG. 2a, and C is a front view of the above-mentioned block diagram.
In FIG. 2, 6 is a PLZT flat plate, f7 is a common electrode, and 8 is a group of voltage application electrodes. 9 is a resin film related to the present invention. 10.11 shows a polarizer and an analyzer, and the polarization axis is set in the direction of 46 degrees with respect to the direction of the electric field vector generated when a voltage is applied between the common electrode 7 and the voltage application electrode group 8. It is configured to have.
以」二のように構成された本実施例の光シヤツター素子
について、以下その動作を説明する。The operation of the optical shutter element of this embodiment configured as described above will be described below.
本発明にかかわる構成を有する光シヤツター素子におい
ても、従来の構成を有する光シヤツター素子の原理と同
様であり、第2図a10の偏光子の後部から光を照射し
た場合、PLZT平板6上に形成された電圧印加1fl
電極群8と、共通電極7の電極間に電圧を印加しない時
は電気光学効果および光弾性効果による複屈折は生じず
、′偏光子10、検光子11によって光は遮断されるが
、電圧印加用電極群8に電圧を印加すると、電気光学効
果と光弾性効果によって複屈折を生じ、光の偏光状態が
変化し光が透過する。前述のように、PLZT平板6が
起こす複屈折の起因は、電気光学効果としてのカー効果
と、光弾性効果つまり、電界により結晶が歪みを受ける
(電歪効果)ことによるものであって、従来、PLZT
平板6の電極端部の電界集中の起こる部分で歪みが大き
く、長期駆動による劣化が問題であった。9は本発明に
かかわる樹脂膜であって、上記PLZT平板6表面の電
極端部などの歪み量の大きな部分に樹脂膜を形成し、歪
量を緩和することによって、劣化を防いでいる。また、
樹脂膜を形成した部分は、歪みがほとんど生じないので
、光弾性効果による複屈折が起こらない。したがって、
樹脂膜を形成していない光シヤツタ一部に比較して透過
率が低ぐなシ、従来のように光シャ、タ一部が拡がる現
象が押えられ、光シヤツタ一部1点の分解能が向上する
。第2図Cに示すB部が光シヤツタ一部を示しており、
周′りへの拡がりが非常に小さくなった。本実施例では
、厚み400μmのPLZTY板上に、cr−Au電極
をフォトリソグラフィー法により形成し、その上に樹脂
として、ポリイミド系のパターン形成可能なものを使用
して、フォトリングラフイー法により、必要な光シヤツ
タ一部以外の部分に樹脂をコーティングした。cr−A
u電極の厚みは約5000人、樹脂膜の厚みは約2μm
であった。このようにして作製した光シヤツター素子に
ついて、第2図CのBに示す光シャック一部と、その周
りの透過率比を測定した結果、印加電圧60vで160
以上、印加電圧100Vで100以上であった。ただし
、上記構成の光シャ、ター素子の電極幅は50μm、光
シヤツタ一部の電極間距離は60μmである。−!だ、
」二記素子を用いて、70V、IKHzの矩形波パルス
の長期連続印加実験を行なった結果、従来素子では、1
000時間で劣化現象が見られたのに対し、6000時
間の1駆動後も劣化していなかった。The principle of the optical shutter element having the configuration according to the present invention is the same as that of the optical shutter element having the conventional configuration, and when light is irradiated from the rear of the polarizer in a10 of FIG. applied voltage 1fl
When no voltage is applied between the electrode group 8 and the common electrode 7, birefringence due to the electro-optic effect and photoelastic effect does not occur, and the light is blocked by the polarizer 10 and analyzer 11, but when voltage is applied When a voltage is applied to the electrode group 8, birefringence occurs due to the electro-optic effect and the photoelastic effect, the polarization state of the light changes, and the light is transmitted. As mentioned above, the birefringence caused by the PLZT flat plate 6 is caused by the Kerr effect as an electro-optic effect and the photoelastic effect, that is, the distortion of the crystal by an electric field (electrostrictive effect). , PLZT
Distortion was large at the end of the electrode of the flat plate 6 where the electric field was concentrated, and deterioration caused by long-term driving was a problem. Reference numeral 9 denotes a resin film according to the present invention, in which a resin film is formed on a portion of the surface of the PLZT flat plate 6 where the amount of strain is large, such as the electrode end portion, to alleviate the amount of strain and thereby prevent deterioration. Also,
Since almost no distortion occurs in the portion where the resin film is formed, birefringence due to the photoelastic effect does not occur. therefore,
The transmittance is lower than that of the part of the optical shutter that does not have a resin film, and the phenomenon in which the part of the optical shutter spreads as in the past is suppressed, and the resolution of one point in the part of the optical shutter is improved. do. Part B shown in Figure 2C shows a part of the optical shutter,
The spread to the periphery has become very small. In this example, a cr-Au electrode is formed on a PLZTY plate with a thickness of 400 μm by photolithography, and a polyimide-based pattern-formable resin is used as the resin on the cr-Au electrode by photolithography. , parts other than the necessary light shutter were coated with resin. cr-A
The thickness of the u-electrode is approximately 5000, and the thickness of the resin film is approximately 2μm.
Met. As a result of measuring the transmittance ratio of a part of the optical shack shown in B in FIG.
The value was 100 or more at an applied voltage of 100V. However, the electrode width of the optical shutter element having the above structure is 50 μm, and the distance between the electrodes of a part of the optical shutter is 60 μm. -! is,
As a result of conducting a long-term continuous application experiment of 70 V, IKHz square wave pulse using the above-mentioned element, it was found that the conventional element
Although a deterioration phenomenon was observed after 1,000 hours, no deterioration occurred even after one drive of 6,000 hours.
なお、本実施例においては、電極材料として、Cr−A
u電極を用いたが、これ以外の材料であってもよく、ま
た、樹脂膜としてポリイミド系のものを使用したが、エ
ポキシ系の樹脂やその他の樹脂でも使用可能であること
は安易に推測できる。Note that in this example, Cr-A was used as the electrode material.
Although a u-electrode was used, other materials may be used, and although a polyimide resin film was used as the resin film, it is easy to assume that epoxy resin or other resins can also be used. .
発明の効果
以上の説明から明らかなように、本発明は、電気光学効
果と光弾性効果を有する固体の透光性磁器の少なくとも
一方の面に、光シャ、ターを形成するように帯状電極を
設け、その」二に樹脂を部分的に形成し、上記透光性磁
器の表裏に、偏光板を偏光軸が互いに90°の角度をな
すように配置した光シヤツター素子に関するものであシ
、機械的な歪みによる劣化をなくし、不必要な光シャ、
タ一部の光もれもなくした高信頼性、高分解能光シヤツ
ター素子を実現したものである。Effects of the Invention As is clear from the above description, the present invention provides a strip-shaped electrode on at least one surface of solid translucent porcelain having an electro-optic effect and a photoelastic effect so as to form a light shutter. This invention relates to an optical shutter element in which a resin is partially formed on the second part, and polarizing plates are arranged on the front and back sides of the translucent porcelain so that the polarizing axes make an angle of 90 degrees to each other. Eliminates deterioration caused by optical distortion, eliminates unnecessary light,
This realizes a highly reliable, high-resolution optical shutter element that eliminates any light leakage.
第1図aは従来の光シヤツター素子の構成を示す斜視図
、第1図すは同正面図、第2図a、b。
Cはそれぞれ本発明の実施例における光シヘ1.ター素
子の斜視歯、部分断面図および正面図である。
1・・・・・・PLZT平板、2・・・・・共通電極、
3・・・・・・電圧印加用電極群、4・・・・・偏光子
、6・・・検光−r、6・・・・・・PLZT平板、γ
・・・・・・共通電極、8・・・・・電圧印加用電極群
、9 ・・・・樹脂膜、10,11・・・・・偏光子お
よび検光子。
第 1 (2) (す
5
Cb)
3
(すFIG. 1a is a perspective view showing the structure of a conventional optical shutter element, FIG. 1 is a front view of the same, and FIGS. 2a and 2b. C represents the light beams 1 and 1 in the embodiments of the present invention, respectively. FIG. 6 is a perspective tooth, a partial sectional view, and a front view of the tar element. 1...PLZT flat plate, 2...Common electrode,
3... Electrode group for voltage application, 4... Polarizer, 6... Analysis-r, 6... PLZT flat plate, γ
. . . Common electrode, 8 . . . Voltage application electrode group, 9 . . . Resin film, 10, 11 . . . Polarizer and analyzer. 1st (2) (S5 Cb) 3 (S5 Cb)
Claims (2)
磁器の少なくとも一方の面に、光ンヤツタ−を形成する
ように帯状電極を設け、その上に樹脂を部分的に形成し
、上記透光性磁器の表裏に偏光板を偏光軸が互いに90
0の角度をなすように配置したことを!庁徴とする光シ
ヤツター素子。(1) A strip-shaped electrode is provided on at least one surface of solid translucent porcelain having an electro-optic effect and a photoelastic effect so as to form a light beam, and a resin is partially formed on the strip-shaped electrode, Polarizing plates are placed on the front and back of the translucent porcelain so that the polarizing axes are 90 degrees from each other.
They were arranged so that they formed an angle of 0! The optical shutter element that is the hallmark of the government.
タ一部の一部にわたって形成して成ることを1”に徴と
する特許請求の範囲第1項記載の光シヤツター素子。(2) The optical shutter element according to claim 1, characterized in that the length 1" is formed by forming one layer over a part of the strip-shaped electrode portion and a portion of the optical shutter connected thereto.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP97784A JPS60144718A (en) | 1984-01-06 | 1984-01-06 | Optical shutter element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP97784A JPS60144718A (en) | 1984-01-06 | 1984-01-06 | Optical shutter element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60144718A true JPS60144718A (en) | 1985-07-31 |
Family
ID=11488671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP97784A Pending JPS60144718A (en) | 1984-01-06 | 1984-01-06 | Optical shutter element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60144718A (en) |
-
1984
- 1984-01-06 JP JP97784A patent/JPS60144718A/en active Pending
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