JPS6474777A - Manufacture of micro-bridge type josephson device - Google Patents

Abstract

PURPOSE:To manufacture a micro-bridge type Josephson device easily only through an evaporation technique without requiring hyperfine working by forming superconductive films having film thickness of coherence length or less only on the sidewalls of first and second regions. CONSTITUTION:First and second rectangular regions 12, 13 composed of an insulating material such as Ta, Si or the like are shaped onto a substrate 11 through sputtering, etc. A first superconductive film 15 in layer thickness T2 of approximately 100Angstrom is evaporated obliquely onto the sidewall of the second rectangular region 13 through sputtering, etc., from the left direction. The angle of evaporation gamma1 at that time extends over 80 deg.-85 deg.. A second superconductive film 18 in layer thickness T3 of approximately 100Angstrom is evaporated obliquely onto the sidewall of the first rectangular region 12 through sputtering, etc., from the right direction. The angle of evaporation gamma2 at that time extends over 80 deg.-85 deg.. Consequently, thickness in the direction vertical to the sidewall is brought to 100Angstrom while length in the direction vertical to the surface of the substrate 11 is brought to approximately 150Angstrom in the superconductive films (shown in oblique lines), thus working such sections as micro-bridge type Josephson devices.