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JPS5299085A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5299085A
JPS5299085A JP1565676A JP1565676A JPS5299085A JP S5299085 A JPS5299085 A JP S5299085A JP 1565676 A JP1565676 A JP 1565676A JP 1565676 A JP1565676 A JP 1565676A JP S5299085 A JPS5299085 A JP S5299085A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
disconnection
contamination
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1565676A
Other languages
Japanese (ja)
Inventor
Yoshihiro Osada
Akihiro Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1565676A priority Critical patent/JPS5299085A/en
Publication of JPS5299085A publication Critical patent/JPS5299085A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: In forming films on the stepped surface of a semiconductor substrate, the contamination of P type active regions and the disconnection of wiring of a thin conductive film are prevented.
COPYRIGHT: (C)1977,JPO&Japio
JP1565676A 1976-02-16 1976-02-16 Production of semiconductor device Pending JPS5299085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565676A JPS5299085A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565676A JPS5299085A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5299085A true JPS5299085A (en) 1977-08-19

Family

ID=11894761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565676A Pending JPS5299085A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5299085A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492175A (en) * 1977-12-29 1979-07-21 Fujitsu Ltd Manufacture of semiconductor device
JPS5591871A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5591872A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5664461A (en) * 1979-09-05 1981-06-01 Texas Instruments Inc Semiconductor device and method of manufacturing same
JPS5834945A (en) * 1981-08-26 1983-03-01 Nippon Telegr & Teleph Corp <Ntt> Multilayer wiring constitution

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127680A (en) * 1975-04-28 1976-11-06 Toshiba Corp Manufacturing process of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127680A (en) * 1975-04-28 1976-11-06 Toshiba Corp Manufacturing process of semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492175A (en) * 1977-12-29 1979-07-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6133252B2 (en) * 1977-12-29 1986-08-01 Fujitsu Ltd
JPS5591871A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5591872A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS6255312B2 (en) * 1978-12-29 1987-11-19 Nippon Denki Kk
JPS5664461A (en) * 1979-09-05 1981-06-01 Texas Instruments Inc Semiconductor device and method of manufacturing same
JPS5834945A (en) * 1981-08-26 1983-03-01 Nippon Telegr & Teleph Corp <Ntt> Multilayer wiring constitution

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