JPS6448025U - - Google Patents
Info
- Publication number
- JPS6448025U JPS6448025U JP14339487U JP14339487U JPS6448025U JP S6448025 U JPS6448025 U JP S6448025U JP 14339487 U JP14339487 U JP 14339487U JP 14339487 U JP14339487 U JP 14339487U JP S6448025 U JPS6448025 U JP S6448025U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- aluminum
- etching equipment
- workpiece
- workpieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 230000001737 promoting effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は本実施の説明図、第２図は本実施の原
理の説明図、第３図は従来例の説明図、第４図は
従来工法の説明図である。 １……エツチング液、２……ワーク、４……保
持治具。
理の説明図、第３図は従来例の説明図、第４図は
従来工法の説明図である。 １……エツチング液、２……ワーク、４……保
持治具。
Claims (1)
- ワークである集積回路装置のアルミエツチング
装置に於いて、エツチング液内で前記ワークを保
持するウエハ保持治具が底面に対して一定の傾斜
を有する構造で、エツチング反応時の水素気泡の
離脱を促進させるアルミエツチング装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14339487U JPS6448025U (ja) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14339487U JPS6448025U (ja) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448025U true JPS6448025U (ja) | 1989-03-24 |
Family
ID=31410178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14339487U Pending JPS6448025U (ja) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448025U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054731A (ja) * | 2009-09-01 | 2011-03-17 | Renesas Electronics Corp | 半導体装置の製造方法 |
-
1987
- 1987-09-18 JP JP14339487U patent/JPS6448025U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054731A (ja) * | 2009-09-01 | 2011-03-17 | Renesas Electronics Corp | 半導体装置の製造方法 |
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