JPS6415366A - Preparation of composition modified nitrided alloy film - Google Patents
Preparation of composition modified nitrided alloy filmInfo
- Publication number
- JPS6415366A JPS6415366A JP17139787A JP17139787A JPS6415366A JP S6415366 A JPS6415366 A JP S6415366A JP 17139787 A JP17139787 A JP 17139787A JP 17139787 A JP17139787 A JP 17139787A JP S6415366 A JPS6415366 A JP S6415366A
- Authority
- JP
- Japan
- Prior art keywords
- compsn
- formula
- alloy film
- nitrided alloy
- atom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To efficiently obtain nitrided alloy film having a distinct compsn. modification adequate for a magnetic head, etc., by impressing a negative bias voltage periodically at specified intervals to a substrate at the time of forming the nitrided alloy film by a reactive sputtering method. CONSTITUTION:An alloy target having the atom compsn. ratio expressed by the formula MaTbXc is used and gaseous N2 is mixed with gaseous Ar, then the nitrided alloy film is formed by the reactive sputtering method on the substrate to which the negative bias voltage is periodically impressed at the specified intervals. The compsn. modified nitrided alloy film which is modulated in the compsn. in the film thickness direction and has the average atom compsn. expressed by the formula I is thereby formed. (In the formula, M is Fe, Co, Ni; T is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn; X is B, Al, C, Si, Ge, Sn; a, b, c are atom compsn. % and satisfy the conditions expressed by the formula; a', b', c' are average atom compsn. % and the numerical values satisfying the conditions expressed by the formula IV - the formula X).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171397A JPH089769B2 (en) | 1987-07-09 | 1987-07-09 | Preparation method of composition-modulated nitrided alloy film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171397A JPH089769B2 (en) | 1987-07-09 | 1987-07-09 | Preparation method of composition-modulated nitrided alloy film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6415366A true JPS6415366A (en) | 1989-01-19 |
JPH089769B2 JPH089769B2 (en) | 1996-01-31 |
Family
ID=15922398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62171397A Expired - Fee Related JPH089769B2 (en) | 1987-07-09 | 1987-07-09 | Preparation method of composition-modulated nitrided alloy film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH089769B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0588350A2 (en) * | 1992-09-16 | 1994-03-23 | Ykk Corporation | Hard film of Ti-Si-N composite material and method for production thereof |
US5429731A (en) * | 1990-09-28 | 1995-07-04 | Matsushita Electric Industrial Co., Ltd. | Method for forming a soft magnetic nitride layer on a magnetic head |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5827941A (en) * | 1981-08-11 | 1983-02-18 | Hitachi Ltd | Manufacture of amorphous thin film |
JPS5873030A (en) * | 1981-10-27 | 1983-05-02 | Kokusai Denshin Denwa Co Ltd <Kdd> | Optical magnetic recording medium |
JPS5913608A (en) * | 1982-07-12 | 1984-01-24 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of thin metallic nitride film |
JPS6257144A (en) * | 1985-09-06 | 1987-03-12 | Hitachi Ltd | Photomagnetic recording medium and its production |
-
1987
- 1987-07-09 JP JP62171397A patent/JPH089769B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5827941A (en) * | 1981-08-11 | 1983-02-18 | Hitachi Ltd | Manufacture of amorphous thin film |
JPS5873030A (en) * | 1981-10-27 | 1983-05-02 | Kokusai Denshin Denwa Co Ltd <Kdd> | Optical magnetic recording medium |
JPS5913608A (en) * | 1982-07-12 | 1984-01-24 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of thin metallic nitride film |
JPS6257144A (en) * | 1985-09-06 | 1987-03-12 | Hitachi Ltd | Photomagnetic recording medium and its production |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5429731A (en) * | 1990-09-28 | 1995-07-04 | Matsushita Electric Industrial Co., Ltd. | Method for forming a soft magnetic nitride layer on a magnetic head |
EP0588350A2 (en) * | 1992-09-16 | 1994-03-23 | Ykk Corporation | Hard film of Ti-Si-N composite material and method for production thereof |
Also Published As
Publication number | Publication date |
---|---|
JPH089769B2 (en) | 1996-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |