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JPS6414936A - Inspecting apparatus - Google Patents

Inspecting apparatus

Info

Publication number
JPS6414936A
JPS6414936A JP17051587A JP17051587A JPS6414936A JP S6414936 A JPS6414936 A JP S6414936A JP 17051587 A JP17051587 A JP 17051587A JP 17051587 A JP17051587 A JP 17051587A JP S6414936 A JPS6414936 A JP S6414936A
Authority
JP
Japan
Prior art keywords
contact
electrode
lcd
film electrode
brought
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17051587A
Other languages
Japanese (ja)
Other versions
JPH0750731B2 (en
Inventor
Hitoshi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62170515A priority Critical patent/JPH0750731B2/en
Publication of JPS6414936A publication Critical patent/JPS6414936A/en
Publication of JPH0750731B2 publication Critical patent/JPH0750731B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To ensure the contact of an electrode to be inspected and a film electrode even if the body to be inspected is large, by making fluid ptessure to act on the film electrode directly, and bringing the electrode to be inspected into contact with the film electrode. CONSTITUTION:A film electrode 11, which is brought into contact with electrodes 10A-10C of an LCD 10, is brought into contact with the electrodes 10A-10C by the rising of a spin chuck 20. Under the state the spin chuck 20 is lowered, the LCD 10 is sucked with vacuum, and the electrode surface of the LCD 10 is brought into contact with the film electrode 11. when the atmospheric pressure in a cavity 32 in a compressing block 30 reaches a specified value by the rising of the spin chuck 20, the vacuum sucking with the compressing block 30 is performed. The film electrode 11 and the LCD 10 are sucked to the compressing block 30, and both electrodes are brought into contact securely. A signal is imparted to each electrode, and whether display can be performed with all the picture elements in the LCD 10 or not can be inspected accurately with the visual inspection of the display screen.
JP62170515A 1987-07-08 1987-07-08 Liquid crystal display board inspection device Expired - Lifetime JPH0750731B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170515A JPH0750731B2 (en) 1987-07-08 1987-07-08 Liquid crystal display board inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170515A JPH0750731B2 (en) 1987-07-08 1987-07-08 Liquid crystal display board inspection device

Publications (2)

Publication Number Publication Date
JPS6414936A true JPS6414936A (en) 1989-01-19
JPH0750731B2 JPH0750731B2 (en) 1995-05-31

Family

ID=15906373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170515A Expired - Lifetime JPH0750731B2 (en) 1987-07-08 1987-07-08 Liquid crystal display board inspection device

Country Status (1)

Country Link
JP (1) JPH0750731B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677296A (en) * 1992-05-29 1994-03-18 Eejingu Tesuta Kaihatsu Kyodo Kumiai Probing electrode for integrated circuit element wafer
US8292043B2 (en) 2006-11-20 2012-10-23 Toyota Jidosha Kabushiki Kaisha Disc brake device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376873U (en) * 1976-11-29 1978-06-27
JPS59134845A (en) * 1983-01-21 1984-08-02 Hitachi Ltd Probe card
JPS60260861A (en) * 1984-06-08 1985-12-24 Hitachi Ltd Probe
JPS61179747U (en) * 1985-04-27 1986-11-10

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376873U (en) * 1976-11-29 1978-06-27
JPS59134845A (en) * 1983-01-21 1984-08-02 Hitachi Ltd Probe card
JPS60260861A (en) * 1984-06-08 1985-12-24 Hitachi Ltd Probe
JPS61179747U (en) * 1985-04-27 1986-11-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677296A (en) * 1992-05-29 1994-03-18 Eejingu Tesuta Kaihatsu Kyodo Kumiai Probing electrode for integrated circuit element wafer
US8292043B2 (en) 2006-11-20 2012-10-23 Toyota Jidosha Kabushiki Kaisha Disc brake device

Also Published As

Publication number Publication date
JPH0750731B2 (en) 1995-05-31

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