JPS5391754A - Scannint type photo detector - Google Patents

Scannint type photo detector

Info

Publication number: JPS5391754A
Authority: JP; Japan
Prior art keywords: scannint; photo detector; type photo; letting; effective use
Prior art date: 1977-01-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP550377A

Other languages

English (en)

Other versions

JPS63765B2 (ja

Inventor

Akiyoshi Suzuki

Yoichi Hirabayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Canon Inc

Original Assignee

Canon Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-01-21

Filing date

1977-01-21

Publication date

1978-08-11

1977-01-21 Application filed by Canon Inc filed Critical Canon Inc

1977-01-21 Priority to JP550377A priority Critical patent/JPS5391754A/ja

1978-01-17 Priority to US05/870,081 priority patent/US4165149A/en

1978-01-19 Priority to DE19782802286 priority patent/DE2802286A1/de

1978-08-11 Publication of JPS5391754A publication Critical patent/JPS5391754A/ja

1988-01-08 Publication of JPS63765B2 publication Critical patent/JPS63765B2/ja

Status Granted legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

Engineering & Computer Science (AREA)
Multimedia (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Mechanical Optical Scanning Systems (AREA)
Image Input (AREA)
Lenses (AREA)

JP550377A 1977-01-21 1977-01-21 Scannint type photo detector Granted JPS5391754A (en)

Priority Applications (3)

Application Number	Priority Date	Filing Date	Title
JP550377A JPS5391754A (en)	1977-01-21	1977-01-21	Scannint type photo detector
US05/870,081 US4165149A (en)	1977-01-21	1978-01-17	Device for scanning an object with a light beam
DE19782802286 DE2802286A1 (de)	1977-01-21	1978-01-19	Vorrichtung zur abtastung eines objekts mit einem lichtstrahl

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP550377A JPS5391754A (en)	1977-01-21	1977-01-21	Scannint type photo detector

Publications (2)

Publication Number	Publication Date
JPS5391754A true JPS5391754A (en)	1978-08-11
JPS63765B2 JPS63765B2 (ja)	1988-01-08

Family

ID=11613003

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP550377A Granted JPS5391754A (en)	1977-01-21	1977-01-21	Scannint type photo detector

Country Status (3)

Country	Link
US (1)	US4165149A (ja)
JP (1)	JPS5391754A (ja)
DE (1)	DE2802286A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60227219A (ja) *	1985-03-25	1985-11-12	Hitachi Ltd	レーザ加工装置
EP0281750A2 (de) *	1987-03-12	1988-09-14	Erwin Sick GmbH Optik-Elektronik	Optische Abtastvorrichtung mit telezentrischer Zeilenkamera
JPH071161B2 (ja) *	1985-05-11	1995-01-11	ライカインドゥストリーフェルヴァルツングゲゼルシャフトミットベシュレンクテルハフツング	二次元的な対象物を整向、検査及び／または測定するための方法及び装置

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5447668A (en) *	1977-09-21	1979-04-14	Canon Inc	Optical scanner
US4232969A (en) *	1979-05-30	1980-11-11	International Business Machines Corporation	Projection optical system for aligning an image on a surface
DD151231A1 (de) *	1980-06-02	1981-10-08	Dietmar Klingenfeld	Optische anordnung fuer projektionslithografische einrichtungen
JPS59101828A (ja) *	1982-12-01	1984-06-12	Canon Inc	観察装置
DE3512615A1 (de) *	1985-04-06	1986-10-16	Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar	Anordnung zur ausrichtung, pruefung und/oder vermessung zweidimensionaler objekte
DE3518043A1 (de) *	1985-05-20	1986-11-20	Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar	Vorrichtung zur automatischen bestimmung der abweichung zwischen den strukturen einer vorlage und denen eines vergleichsobjektes
US5055663A (en) *	1988-06-28	1991-10-08	Asahi Kogaku Kogyo Kabushiki Kaisha	Optical scanning system and method for adjusting thereof
US5270851A (en) *	1989-01-09	1993-12-14	Canon Kabushiki Kaisha	Achromatic-type laser scanning optical system
US6753161B2 (en) *	1997-03-27	2004-06-22	Oncosis Llc	Optoinjection methods
EP2281879B1 (en) *	1999-11-30	2016-01-27	Intrexon Corporation	Apparatus for determining a morphological or physiological characteristic of individual cells in a biological specimen
WO2001089204A1 (en) *	2000-04-21	2001-11-22	Lockheed Martin Corporation	Wide-field extended-depth doubly telecentric catadioptric optical system for digital imaging
WO2002037938A2 (en)	2000-10-24	2002-05-16	Oncosis Llc	Method and device for selectively targeting cells within a three -dimensional specimen
US20050095578A1 (en) *	2003-10-31	2005-05-05	Koller Manfred R.	Method and apparatus for cell permeabilization
US7425426B2 (en) *	2004-03-15	2008-09-16	Cyntellect, Inc.	Methods for purification of cells based on product secretion
DE102005061834B4 (de)	2005-12-23	2007-11-08	Ioss Intelligente Optische Sensoren & Systeme Gmbh	Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
US20100179310A1 (en) *	2009-01-09	2010-07-15	Cyntellect, Inc.	Genetic analysis of cells
KR20110108390A (ko)	2009-01-12	2011-10-05	신텔렉트 인코포레이티드	레이저로 매개된 박막 절개 및 세포 군체의 이동
US10725287B2 (en) *	2013-06-11	2020-07-28	Nlight, Inc.	Image rotation compensation for multiple beam material processing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3016464A (en) *	1959-06-10	1962-01-09	Daystrom Inc	Apparatus for determining the location and thickness of a reflecting object
US3943359A (en) *	1973-06-15	1976-03-09	Hitachi, Ltd.	Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
US3961838A (en) *	1975-01-10	1976-06-08	Zygo Corporation	Apparatus for producing a scanning laser beam of constant linear velocity
JPS593791B2 (ja) *	1975-04-07	1984-01-26	キヤノン株式会社	物体の像認識方法

1977
- 1977-01-21 JP JP550377A patent/JPS5391754A/ja active Granted
1978
- 1978-01-17 US US05/870,081 patent/US4165149A/en not_active Expired - Lifetime
- 1978-01-19 DE DE19782802286 patent/DE2802286A1/de active Granted

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60227219A (ja) *	1985-03-25	1985-11-12	Hitachi Ltd	レーザ加工装置
JPH0333246B2 (ja) *	1985-03-25	1991-05-16	Hitachi Ltd
JPH071161B2 (ja) *	1985-05-11	1995-01-11	ライカインドゥストリーフェルヴァルツングゲゼルシャフトミットベシュレンクテルハフツング	二次元的な対象物を整向、検査及び／または測定するための方法及び装置
EP0281750A2 (de) *	1987-03-12	1988-09-14	Erwin Sick GmbH Optik-Elektronik	Optische Abtastvorrichtung mit telezentrischer Zeilenkamera

Also Published As

Publication number	Publication date
DE2802286A1 (de)	1978-07-27
US4165149A (en)	1979-08-21
JPS63765B2 (ja)	1988-01-08
DE2802286C2 (ja)	1990-06-13

Publication	Publication Date	Title
JPS5391754A (en)	1978-08-11	Scannint type photo detector
JPS5390872A (en)	1978-08-10	Optical device
JPS5385452A (en)	1978-07-27	Range finder
JPS5425736A (en)	1979-02-26	Electrophotographic apparatus
JPS52132851A (en)	1977-11-07	Optical detector of scanning type
JPS51131627A (en)	1976-11-16	Optical instrument
JPS51146850A (en)	1976-12-16	Optical detector
JPS53105223A (en)	1978-09-13	Optical system of distance detector for automatic focusing
JPS5417620A (en)	1979-02-09	Solid pickup element
JPS5425756A (en)	1979-02-26	Moving object position detector
JPS5440662A (en)	1979-03-30	Range finder
JPS5238944A (en)	1977-03-25	Optical system for scanning
JPS51144253A (en)	1976-12-11	Photo-fiber check method
JPS53125044A (en)	1978-11-01	Semiconductor laser scanner
JPS53119623A (en)	1978-10-19	Television camera
JPS5397826A (en)	1978-08-26	Focal point detecting system
JPS5296045A (en)	1977-08-12	Diameter measurement of optical fibers
JPS5397818A (en)	1978-08-26	Measuring system for projecting magnification
JPS53119679A (en)	1978-10-19	Mask alignment device
JPS53115221A (en)	1978-10-07	Copying machine
JPS5238943A (en)	1977-03-25	Multi-focus lens
JPS53140379A (en)	1978-12-07	Lens dyeing device
JPS51131648A (en)	1976-11-16	Optical height measuring apparatus
JPS5266336A (en)	1977-06-01	Ledger reader
JPS52119924A (en)	1977-10-07	Ophthalmofundus camera with focusing system